JPH0321736U - - Google Patents
Info
- Publication number
- JPH0321736U JPH0321736U JP5500989U JP5500989U JPH0321736U JP H0321736 U JPH0321736 U JP H0321736U JP 5500989 U JP5500989 U JP 5500989U JP 5500989 U JP5500989 U JP 5500989U JP H0321736 U JPH0321736 U JP H0321736U
- Authority
- JP
- Japan
- Prior art keywords
- passage
- main
- main passage
- diversion
- effective area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Description
第１図は実施例の質量流量制御装置の概略断面
説明図、第２図はその質量流量制御装置に使用さ
れる板ばねの平面図、第３図は従来の質量流量制
御装置の基本構成説明図、第４図Ａ，Ｂは従来の
質量流量制御装置に使用される２つのタイプの絞
り部材の構成説明図、を示している。
１０……質量流量制御装置、１２……主通路、
１４……分流通路、１６……絞り部材、１８……
流量検出部材、１８ａ……細管、１８ｂ……感熱
抵抗体、２０……電流制御回路、２２……円筒状
コイル、２４……駆動制御回路、２６……板ばね
、２８……プランジヤ。
Fig. 1 is a schematic cross-sectional explanatory diagram of a mass flow controller according to an embodiment, Fig. 2 is a plan view of a leaf spring used in the mass flow controller, and Fig. 3 is an explanation of the basic configuration of a conventional mass flow controller. 4A and 4B show configuration explanatory diagrams of two types of throttle members used in conventional mass flow rate control devices. 10... Mass flow controller, 12... Main passage,
14... Diversion passage, 16... Throttle member, 18...
Flow rate detection member, 18a... Thin tube, 18b... Heat sensitive resistor, 20... Current control circuit, 22... Cylindrical coil, 24... Drive control circuit, 26... Leaf spring, 28... Plunger.
補正 平２．６．２１
実用新案登録請求の範囲を次のように補正する
。Amendment June 21, 2002 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
１ 流体の主たる通路となる主通路と、
該主通路中に配置され、当該主通路の有効面積
を減少させる絞り部材と、
該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体が分流
する分流通路と、
該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、
該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、
前記主通路が直線状に形成され、当該主通路中
に前記絞り部材、分流通路、計測器及び補正機構
部が収容されたことを特徴とする質量流量制御装
置。 ２
流体の主たる通路となる主通路と、
該主通路中に配置され、当該主通路の有効面積
を減少させる絞り部材と、
該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体が分流
する分流通路と、
該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、
該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、
前記絞り部材が、前記主通路の内壁と所定間隙
を介して遊嵌される柱状の柱部材であることを特
徴とする質量流量制御装置。３
流体の主たる通路となる主通路と、
該主通路中に配置され、当該主通路の有効面積
を減少させる絞り部材と、
該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体を分流
させる分流通路と、
該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、
該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、
前記補正機構部が、
前記主通路の壁面に板ばねを介して移動自在に
支持され、その移動量に応じて当該主通路の有効
面積を変更する磁性体からなる可動弁体と、
前記主通路の壁に設けられる励磁コイルと、
前記計測器の計測結果と前記目標値との比較結
果に応じて前記励磁コイルに通じる励磁電流値を
制御する励磁制御回路と、
を備えることを特徴とする質量流量制御装置。４ 流体の主たる通路となる主通路と、
該主通路中に配置され、当該主通路の有効面積
を減少させる絞り部材と、
該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体を分流
させる分流通路と、
該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、
該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、
前記分流通路の壁面の一部が切り欠いて形成さ
れ、
前記計測器が前記分流通路の切り欠き部分に嵌
合し、かつ、該計測器を貫通して形成された貫通
路によつて前記分流通路が形成されることを特徴
とする質量流量制御装置。 [Claims for Utility Model Registration] 1. A main passageway serving as a main passageway for fluid, a throttle member disposed in the main passageway to reduce the effective area of the main passageway, and the main passageway in which the throttle member is disposed. A diversion passage that communicates the upstream side and the downstream side of the main passage and divides the fluid flowing through the main passage, and a measuring device provided in the diversion passage and measuring the flow rate of the fluid passing through the diversion passage; In the mass flow control device, the main passage is formed in a straight line, and includes a correction mechanism unit that compares the measurement result of the measuring device with a target value to correct an increase or decrease in the effective area of the main passage. A mass flow rate control device characterized in that the throttle member, the branch passage, the measuring device, and the correction mechanism are housed in the passage. A main passageway serving as a main passageway for two fluids; A throttle member disposed in the main passageway to reduce the effective area of the main passageway; Upstream and downstream sides of the main passageway where the throttle member is disposed. A diversion passage that communicates with the main passage and divides the fluid flowing through the main passage, a measuring device provided in the diversion passage and measuring the flow rate of the fluid passing through the diversion passage, and measurement results and targets of the measuring device. a correction mechanism unit that increases or decreases the effective area of the main passage by comparing the values with the values, wherein the throttle member is loosely fitted to an inner wall of the main passage through a predetermined gap. A mass flow control device characterized in that it is a columnar column member. 3. A main passage that serves as the main passage for three fluids; A throttle member disposed in the main passage to reduce the effective area of the main passage; and an upstream side and a downstream side of the main passage where the throttle member is disposed. A diversion passage that communicates with the main passage and divides the fluid flowing through the main passage, a measuring device provided in the diversion passage and measuring the flow rate of the fluid passing through the diversion passage, and measurement results and goals of the measuring device. a correction mechanism unit that increases or decreases the effective area of the main passage by comparing a value with a value, the correction mechanism unit being movably attached to a wall surface of the main passage via a leaf spring a movable valve body made of a magnetic material that is supported and changes the effective area of the main passage according to the amount of movement thereof; an excitation coil provided on the wall of the main passage; and a measurement result of the measuring device and the target value. A mass flow rate control device comprising: an excitation control circuit that controls an excitation current value passed to the excitation coil according to a comparison result of the excitation coil. 4. A main passageway that is a main passageway for fluid, a throttle member arranged in the main passageway to reduce the effective area of the main passageway, and an upstream side and a downstream side of the main passageway where the throttle member is arranged. A diversion passage that communicates with the main passage and divides the fluid flowing through the main passage, a measuring device that is provided in the diversion passage and measures the flow rate of the fluid that passes through the diversion passage, and the measurement results and goals of the measuring device. a correction mechanism unit that increases or decreases the effective area of the main passage by comparing a value with A mass flow control device characterized in that the diversion passage is formed by a through passage that fits into a cutout portion of the diversion passage and is formed through the measuring device.
Claims (1)
を減少させる絞り部材と、 該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体が分流
する分流通路と、 該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、 該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、 前記絞り部材が、前記主通路の内壁と所定間隙
を介して遊嵌される柱状の柱部材であることを特
徴とする質量流量制御装置。 ２ 流体の主たる通路となる主通路と、 該主通路中に配置され、当該主通路の有効面積
を減少させる絞り部材と、 該絞り部材の配置される前記主通路の上流側と
下流側とを連通し、該主通路を流れる流体を分流
させる分流通路と、 該分流通路に設けられ、当該分流通路を通過す
る流体の流量を計測する計測器と、 該計測器の計測結果と目標値とを比較して、前
記主通路の有効面積を増減補正する補正機構部と
、を有する質量流量制御装置において、 前記補正機構部が、 前記主通路の壁面に板ばねを介して移動自在に
支持され、その移動量に応じて当該主通路の有効
面積を変更する磁性体からなる可動弁体と、 前記主通路の壁に設けられる励磁コイルと、 前記計測器の計測結果と前記目標値との比較結
果に応じて前記励磁コイルに通じる励磁電流値を
制御する励磁制御回路と、 を備えることを特徴とする質量流量制御装置。[Claims for Utility Model Registration] 1. A main passageway serving as a main passageway for fluid; a throttle member disposed in the main passageway to reduce the effective area of the main passageway; and the main passageway in which the throttle member is disposed. a diversion passage that communicates the upstream side and the downstream side of the main passage and divides the fluid flowing through the main passage; a measuring device provided in the diversion passage and measuring the flow rate of the fluid passing through the diversion passage; A mass flow control device comprising: a correction mechanism unit that compares the measurement result of the measuring device with a target value and corrects increase/decrease in the effective area of the main passage, wherein the throttle member is in a predetermined position with an inner wall of the main passage. A mass flow control device characterized in that it is a columnar member that is loosely fitted through a gap. 2. A main passage that serves as a main passage for fluid; a throttle member disposed in the main passage to reduce the effective area of the main passage; and an upstream side and a downstream side of the main passage where the throttle member is disposed. A diversion passage that communicates with the main passage and divides the fluid flowing through the main passage, a measuring device provided in the diversion passage and measuring the flow rate of the fluid passing through the diversion passage, and measurement results and goals of the measuring device. a correction mechanism unit that increases or decreases the effective area of the main passage by comparing a value with a value, the correction mechanism unit being movably attached to a wall surface of the main passage via a leaf spring a movable valve body made of a magnetic material that is supported and changes the effective area of the main passage according to the amount of movement thereof; an excitation coil provided on the wall of the main passage; and a measurement result of the measuring device and the target value. A mass flow rate control device comprising: an excitation control circuit that controls an excitation current value passed to the excitation coil according to a comparison result of the excitation coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500989U JPH0623945Y2 (en) | 1989-05-13 | 1989-05-13 | Mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500989U JPH0623945Y2 (en) | 1989-05-13 | 1989-05-13 | Mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0321736U true JPH0321736U (en) | 1991-03-05 |
| JPH0623945Y2 JPH0623945Y2 (en) | 1994-06-22 |
Family
ID=31577580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5500989U Expired - Lifetime JPH0623945Y2 (en) | 1989-05-13 | 1989-05-13 | Mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623945Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101485753B1 (en) * | 2014-08-26 | 2015-01-22 | 김태영 | Safety braking apparatus for bicycle |
-
1989
- 1989-05-13 JP JP5500989U patent/JPH0623945Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101485753B1 (en) * | 2014-08-26 | 2015-01-22 | 김태영 | Safety braking apparatus for bicycle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623945Y2 (en) | 1994-06-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |