JPH03214480A - Floating head slider sensor - Google Patents

Floating head slider sensor

Info

Publication number
JPH03214480A
JPH03214480A JP818690A JP818690A JPH03214480A JP H03214480 A JPH03214480 A JP H03214480A JP 818690 A JP818690 A JP 818690A JP 818690 A JP818690 A JP 818690A JP H03214480 A JPH03214480 A JP H03214480A
Authority
JP
Japan
Prior art keywords
slider
head slider
floating head
floating
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP818690A
Other languages
Japanese (ja)
Inventor
Kyosuke Yasuda
安田 享祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP818690A priority Critical patent/JPH03214480A/en
Publication of JPH03214480A publication Critical patent/JPH03214480A/en
Pending legal-status Critical Current

Links

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To improve sensitivity by coupling a piezoelectric element to the coupling part of a floating head slider body and a slider supporting cymbal spring part and embedding a spherical body into the front end of a slider pressurizing and supporting spring part so that the spherical body pressurizes the slider body. CONSTITUTION:The spherical body 5 consisting of a metal or ceramics is embedded into the slider pressurizing and supporting spring part 3. The surface 4a of the piezoelectric element 4 coupled and disposed to the rear surface position of the floating slider body 1 is pressurized by this spherical body 5 as the pressurizing front end of the spring part 3. The floating head slider detects the microscillation of the floating head slider 1 generated by the collision against the projection on a magnetic disk and since the spherical body 5 acts as a weight in the oscillation detection of the body 1, the remarkable improvement in the sensitivity is possible. This sensor is particularly effective in the case of detection of the oscillation component of several kHz by the air resonance of the magnetic head slider.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気ディスク表面の平滑性検定に用いる高感
度な浮動ヘッドスライダセンサに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a highly sensitive floating head slider sensor used for verifying the smoothness of a magnetic disk surface.

〔従来の技術〕[Conventional technology]

第3図(al、fblは従来の浮動ヘッドスライダセン
サSの一例を示す図である。1は浮動ヘッドスライダ本
体、2は浮動ヘッドスライダ本体1の背面と結合したス
ライダ支持ジンバルばね部、3は該スライダ支持ジンバ
ルばね部2の端部と*印部分で溶接結合したスライダ加
圧支持ばね部、4は圧電素子である。スライダ加圧支持
ばね部3の先端部は突出加工され浮動ヘッドスライダl
に荷重を与えるようになっている。ここでは、圧電素子
4を浮動ヘッドスライダ本体1とスライダ支持ジンパル
ばね部2の結合位置上部に配置した例を示したが、浮動
ヘッドスライダ本体lとスライダ支持ジンバルばね部2
の結合部に挟み込み結合する場合もある。
FIG. 3 (al and fbl are diagrams showing an example of a conventional floating head slider sensor S. 1 is a floating head slider body, 2 is a slider support gimbal spring portion coupled to the back surface of the floating head slider body 1, and 3 is a diagram showing an example of a conventional floating head slider sensor S. A slider pressure support spring section 4 is a piezoelectric element, which is welded to the end of the slider support gimbal spring section 2 at the part marked *.The tip of the slider pressure support spring section 3 is processed to protrude, and the floating head slider l
It is designed to apply a load to the Here, an example is shown in which the piezoelectric element 4 is arranged above the joining position of the floating head slider body 1 and the slider support gimbal spring part 2.
In some cases, it is inserted and connected to the joint part of the .

ここで、4aは圧電素子4のスライダ加圧支持ばね部3
の側の面、4bは浮動へッドスライダ本体l側の面であ
る。そして、この面4a、4bにそれぞれ電極が取り付
けられ、スライダ加圧支持ばね部3の振動あるいは浮動
ヘノドスライダ本体lの振動が、センサ出力として取り
出される。
Here, 4a is the slider pressurizing support spring portion 3 of the piezoelectric element 4.
4b is the surface on the side of the floating head slider main body l. Electrodes are attached to these surfaces 4a and 4b, respectively, and the vibrations of the slider pressurizing support spring portion 3 or the vibrations of the floating henode slider body 1 are extracted as a sensor output.

第4図は浮動ヘノトスライダセンサSの使用方法の説明
図である。l1は磁気ディスク、ttaはるn気ディス
ク11上に存在する突起である。浮動ヘノドスライダセ
ンサSは、磁気ディスク11上の突起11aを検出ずる
ために使用されるものである。以下、図面に従って説明
する。
FIG. 4 is an explanatory diagram of how to use the floating henoto slider sensor S. 11 is a protrusion present on the magnetic disk 11; The floating slider sensor S is used to detect the protrusion 11a on the magnetic disk 11. The explanation will be given below according to the drawings.

磁気ディスク1lの上には希に浮動へソトスライダ本体
lが追従走行不可能な突起11aが存在ずるので、この
ような磁気ディスク11は磁気ディスク装置の組立に際
して予め除外する必要がある。そのためこのような突起
11aの有無を浮動へソトスライダセンサSによって調
べることが−般的に行われている。
On rare occasions, there is a protrusion 11a on the magnetic disk 1l that floats and cannot be followed by the slider main body l, so such a magnetic disk 11 must be removed beforehand when assembling the magnetic disk device. Therefore, it is common practice to check the presence or absence of such a protrusion 11a using a floating slider sensor S.

浮動ヘノドスライダセンサSは通常の浮動へ,トスライ
ダと同様に磁気ディスク上に一定間隔を保って浮−トす
る。突起11aと衝突すると浮動ヘノドスライダ本体l
がそれによって僅かに振動する。この振動は圧電素子4
に厚み方向の歪を生しさせ、その結果圧電素子4の両面
4a、4b間に誘起電圧が生しる。このようにして、磁
気ディスク11の表面に存在する突起11aの検出が行
われるのである。
The floating slider sensor S floats on the magnetic disk at a constant interval in the same way as the toss slider. When it collides with the protrusion 11a, the floating henode slider body l
vibrates slightly due to this. This vibration is caused by the piezoelectric element 4
As a result, an induced voltage is generated between both surfaces 4a and 4b of the piezoelectric element 4. In this way, the protrusion 11a present on the surface of the magnetic disk 11 is detected.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、圧電素子4に加わるこの振動は非常に小さい
ので、最終的に圧電素子4から得られる誘起電圧も小さ
いものとなる。このようなごとから、より検出感度の高
い浮動ヘッドスライダセンサが要求されている。
However, since this vibration applied to the piezoelectric element 4 is very small, the induced voltage finally obtained from the piezoelectric element 4 is also small. For these reasons, a floating head slider sensor with higher detection sensitivity is required.

本発明はこのような点に鑑みてなされたものであり、そ
の目的は、従来のものに比べて検出感度が高くなった浮
動ヘッドスライダセンサを提供することである。
The present invention has been made in view of these points, and an object thereof is to provide a floating head slider sensor that has higher detection sensitivity than conventional sensors.

〔課題を解決するための手段〕[Means to solve the problem]

このため本発明は、浮動ヘッドスライダ本体と、これと
結合したスライダ支持ジンバルばね部と、該スライダ支
持ジンバルばね部の端部と結合したスライダ加圧支持ば
ね部とを具備し、該スライダ加圧支持ばね部先端が上記
スライダ支持ジンバルばね部を介して上記浮動ヘッドス
ライダ本体に荷重を与えるように構成した浮動ヘッドス
ライダ系において、上記浮動ヘッドスライダ本体と上記
スライダ支持ジンバルばね部の結合部分あるいは結合部
の上記スライダ支持ジンバルばね部面側のいずれかに圧
電素子を結合し、上記スライダ加圧支持ばね部先端に金
属またはセラミソクスからなる球状体を埋め込み、該球
状体が上記圧電素子背面を介して上記浮動ヘッドスライ
ダ本体を加圧するようにしたことを特徴とする。
Therefore, the present invention includes a floating head slider main body, a slider support gimbal spring part coupled to the main body, and a slider pressurization support spring part coupled to an end of the slider support gimbal spring part, and the slider pressurization support spring part is coupled to an end of the slider support gimbal spring part. In a floating head slider system configured such that the tip of the support spring section applies a load to the floating head slider body via the slider support gimbal spring section, a connecting portion or connection between the floating head slider body and the slider support gimbal spring section; A piezoelectric element is coupled to either side of the slider support gimbal spring part side of the slider pressurizing support spring part, and a spherical body made of metal or ceramics is embedded in the tip of the slider pressurizing support spring part, and the spherical body passes through the back surface of the piezoelectric element. The present invention is characterized in that the floating head slider body is pressurized.

〔実施例〕〔Example〕

以下、本発明の実施例について説明する。第1図f8+
、fblはその一実施例の浮動ヘノトスライダセンサA
を示す図である。第3図(al、(blに示したものと
同一のものには同一の符号を付した。本実施例では、ス
ライダ加圧支持ばね部3に金属あるいはセラミソクスか
らなる球状体5を埋め込み、これをスライダ加圧支持ば
ね部3の押圧先端として、ごの球状体5により、浮動ヘ
ッドスライダ本体lの背面位置に結合配置された圧電素
子4の面4aを加圧ずる点に特徴を有する。
Examples of the present invention will be described below. Figure 1 f8+
, fbl is an embodiment of the floating henoto slider sensor A
FIG. Components that are the same as those shown in FIGS. It is characterized in that the surface 4a of the piezoelectric element 4 connected and arranged at the back side of the floating head slider main body 1 is pressed by the spherical body 5, using the spherical body 5 as the pressing tip of the slider pressurizing support spring portion 3.

前述したように、浮動ヘッドスライダセンサは磁気ディ
スク11上の突起11aとの衝突によって生じる浮動ヘ
ッドスライダ本体1の微小な振動を検出するものである
。本実施例では、浮動へソトスライダ本体lの振動検出
において、球状体5が錘(おもり)として働くため、従
来の錘効果のない加圧方式に比べて、格段の感度向上が
可能となる。
As described above, the floating head slider sensor detects minute vibrations of the floating head slider body 1 caused by collision with the protrusion 11a on the magnetic disk 11. In this embodiment, since the spherical body 5 acts as a weight in detecting vibrations of the floating slider body l, it is possible to significantly improve sensitivity compared to the conventional pressurization method without a weight effect.

これを確認するために、第2図(al、fblに示すよ
うに、厚さ0 . 3 mm、幅l謙履、長さ’l +
nの圧電素子21を加振器22によって一定振幅で加振
し、直径3■■の鋼球23を埋め込んだ加圧ばね24 
(第2図(a))および突出加工面25aをもった加圧
ばね25(第2図(b))について、一定荷重で加圧し
た場合の圧電素子21の誘起電圧の周波数特性を測定し
た。
To confirm this, as shown in Figure 2 (al, fbl), the thickness is 0.3 mm, the width is l, and the length is 'l +
n piezoelectric elements 21 are vibrated with a constant amplitude by a vibrator 22, and a pressure spring 24 in which a steel ball 23 with a diameter of 3■■ is embedded is created.
(Fig. 2 (a)) and the pressure spring 25 (Fig. 2 (b)) having a protruding processed surface 25a, the frequency characteristics of the induced voltage of the piezoelectric element 21 were measured when pressurized with a constant load. .

その結果、l KIIz〜2 0 Kllzにおいて鋼
球23を埋め込んだ加圧ばね24の方で大きな出力電圧
を得た。すなわち、lKIlzでOdB、2KIIzで
約20dB、5KIIzで約4 0dB,  l O 
KHzで約50dFl,20KHzで約35dBの感度
向上があった。
As a result, a larger output voltage was obtained from the pressure spring 24 in which the steel ball 23 was embedded between 1 KIIz and 20 Kllz. That is, OdB at lKIIz, about 20dB at 2KIIz, about 40dB at 5KIIz, lO
There was an improvement in sensitivity of about 50 dFl at KHz and about 35 dB at 20 KHz.

このように、本実施例では浮動ヘンドスライツダの空気
膜共振による数KHz以上の振動成分を検出する場合に
特に有効である。
As described above, this embodiment is particularly effective in detecting vibration components of several KHz or more due to air film resonance of the floating hend slider.

なお、−[−記実施例では、圧電素子をスライダ支持ジ
ンバルばね部2の面に結合した例を示したが、これをス
ライダ支持ジンバルばね部2と浮動ヘソ1スライダ本体
lの結合面に挿入配置しても加圧ばね部3の先端部の球
状体5の錘効果は失わないので、同様の作用効果を得る
ことができる。
In addition, in the embodiment shown in -[-, the piezoelectric element was coupled to the surface of the slider support gimbal spring section 2, but it is also possible to insert the piezoelectric element into the coupling surface between the slider support gimbal spring section 2 and the floating navel 1 slider body l. Even if the spherical body 5 is disposed, the weight effect of the spherical body 5 at the tip of the pressure spring portion 3 is not lost, so that similar effects can be obtained.

〔発明の効果〕〔Effect of the invention〕

以」二説明したように、本発明は磁気ディスク表面に存
在する微小突起の検出に有効な高感度の/!P動ヘノト
′スライダセンサを実現できるという利点がある。
As explained above, the present invention provides a highly sensitive /! There is an advantage that a P-dynamic slider sensor can be realized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(alは本発明の一実施例の浮動ヘッドスライダ
センサの平面図、(blは正面図、第2図ta+は同浮
動ヘッドスライダセンサの作用説明図、fb)は従来方
弐の浮動ヘッドスライダセンサの作用説明図、第3図(
alは従来の浮動ヘッドスライダセンサの平面図、(b
lは正面図、第4図は浮動ヘッドスライダセンサの使用
説明図である。 S・・・従来の浮動ヘッドスライダセンサ、A・・・本
実施例の浮動ヘッドスライダセンサ、 l・・・浮動ヘッドスライダ本体、2・・・スライダ支
持シンバルばね部、3・・・スライダ加圧支持ばね部、
4・・・圧電素子、5・・・球状体、11・・・磁気デ
ィスク、11a・・・突起、2l・・・圧電素子、22
・・・加振器、23・・・鋼球、24、25・・・加圧
ばね。
Fig. 1 (al is a plan view of a floating head slider sensor according to an embodiment of the present invention, (bl is a front view, Fig. 2 ta+ is an explanatory diagram of the operation of the same floating head slider sensor, fb) is a plan view of a floating head slider sensor according to an embodiment of the present invention. An explanatory diagram of the operation of the head slider sensor, Fig. 3 (
al is a plan view of a conventional floating head slider sensor, (b
1 is a front view, and FIG. 4 is a diagram illustrating the use of the floating head slider sensor. S... Conventional floating head slider sensor, A... Floating head slider sensor of this embodiment, l... Floating head slider body, 2... Slider support cymbal spring portion, 3... Slider pressure support spring part,
4... Piezoelectric element, 5... Spherical body, 11... Magnetic disk, 11a... Protrusion, 2l... Piezoelectric element, 22
... Vibrator, 23... Steel ball, 24, 25... Pressure spring.

Claims (1)

【特許請求の範囲】[Claims] (1)、浮動ヘッドスライダ本体と、これと結合したス
ライダ支持ジンバルばね部と、該スライダ支持ジンバル
ばね部の端部と結合したスライダ加圧支持ばね部とを具
備し、該スライダ加圧支持ばね部先端が上記スライダ支
持ジンバルばね部を介して上記浮動ヘッドスライダ本体
に荷重を与えるように構成した浮動ヘッドスライダ系に
おいて、上記浮動ヘッドスライダ本体と上記スライダ支
持ジンバルばね部の結合部分あるいは結合部の上記スラ
イダ支持ジンバルばね部面側のいずれかに圧電素子を結
合し、上記スライダ加圧支持ばね部先端に金属またはセ
ラミックスからなる球状体を埋め込み、該球状体が上記
圧電素子背面を介して上記浮動ヘッドスライダ本体を加
圧するようにしたことを特徴とする浮動ヘッドスライダ
センサ。
(1) A floating head slider body, a slider support gimbal spring section coupled to the slider support gimbal spring section, and a slider pressurization support spring section coupled to an end of the slider support gimbal spring section; In a floating head slider system configured such that the tip of the floating head slider body applies a load to the floating head slider body via the slider support gimbal spring portion, the connecting portion or the connecting portion between the floating head slider body and the slider support gimbal spring portion is provided. A piezoelectric element is coupled to either side of the slider support gimbal spring part, a spherical body made of metal or ceramic is embedded in the tip of the slider pressurizing support spring part, and the spherical body floats through the back surface of the piezoelectric element. A floating head slider sensor characterized in that the head slider body is pressurized.
JP818690A 1990-01-19 1990-01-19 Floating head slider sensor Pending JPH03214480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP818690A JPH03214480A (en) 1990-01-19 1990-01-19 Floating head slider sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP818690A JPH03214480A (en) 1990-01-19 1990-01-19 Floating head slider sensor

Publications (1)

Publication Number Publication Date
JPH03214480A true JPH03214480A (en) 1991-09-19

Family

ID=11686273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP818690A Pending JPH03214480A (en) 1990-01-19 1990-01-19 Floating head slider sensor

Country Status (1)

Country Link
JP (1) JPH03214480A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6178157B1 (en) * 1996-04-15 2001-01-23 Digital Papyrus Corporation Flying head with adjustable actuator load
US7564649B2 (en) * 2005-04-27 2009-07-21 Seagate Technology Llc Head assembly having a sensing element to provide feedback for head-media instability
US8310779B2 (en) 2005-04-27 2012-11-13 Seagate Technology Llc Head assembly having a sensing element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6178157B1 (en) * 1996-04-15 2001-01-23 Digital Papyrus Corporation Flying head with adjustable actuator load
US7564649B2 (en) * 2005-04-27 2009-07-21 Seagate Technology Llc Head assembly having a sensing element to provide feedback for head-media instability
US8310779B2 (en) 2005-04-27 2012-11-13 Seagate Technology Llc Head assembly having a sensing element
US8837075B2 (en) 2005-04-27 2014-09-16 Seagate Technology Llc Head assembly with head-media spacing control

Similar Documents

Publication Publication Date Title
JP3141645B2 (en) Pressure sensor
EP0874351A3 (en) Ultrasonic transmitter-receiver
JPH08327363A (en) Angular velocity sensor
JPH03214480A (en) Floating head slider sensor
GB2263779A (en) Strain sensor
JPH09229960A (en) Vibrator
JPH04265585A (en) Floating head slider sensor
JPH03214479A (en) Floating head slider sensor
JPH0585291B2 (en)
EP0764850B1 (en) Acceleration sensor
JPH0340277A (en) Floating head slider sensor
JP3221348B2 (en) Magnetostrictive sensor
JP2646628B2 (en) Vibration sense vibrator
JP3318085B2 (en) Cantilever tip holder
JPS612013A (en) Angular velocity sensor
JPH0136157Y2 (en)
SU1597687A1 (en) Device for measuring hardness
JPH064317Y2 (en) Exciter for modal analysis
JPH0516523B2 (en)
JPH04152242A (en) Hardness sensor
JPH0783887A (en) Acoustic emission sensor with horn
JPS6346831Y2 (en)
JPS62245135A (en) Method and apparatus for measuring hardness
JPH04160341A (en) Hardness sensor
JPH04238269A (en) Semiconductor acceleration sensor