JPH0321349A - Heating thermostatic tank - Google Patents

Abstract

PURPOSE:To uniformize the temp. of a chemical solution by supplying nitrogen in the chemical solution from the gas feed pipe inserted in a heating thermostatic tank from the upper surface thereof to stirr the chemical solution in the tank. CONSTITUTION:A chemical solution is supplied in a heating thermostatic tank 1 and heated by the heater 3 inserted in the tank 1 from the upper surface thereof to be controlled to constant temp. and subsequently sent out through a liquid feed port 6. At this time, a gas feed pipe 5 is inserted in the tank 1 and nitrogen is supplied by the gas feed pipe 5 to perform the stirring of the chemical solution. As a result, the temp. of the chemical solution can be made uniform.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a heating constant temperature bath that supplies high temperature chemical solution or pure water for liquid processing of semiconductor substrates. [Prior art] Conventionally, this type of thermostatic chamber has a structure in which thermal convection of the internal chemical solution or pure water is difficult to occur because the heating means is simply a heater inserted into the liquid from the top of the bath. Ta. [Problems to be Solved by the Invention] In the conventional heating constant temperature bath described above, the heated chemical solution or pure water rises along the surface of the heater inserted from the top of the bath and stays on the liquid surface, so that the heated chemical solution or pure water rises at the bottom of the bath. The disadvantage is that the temperature of the chemical solution or pure water cannot be controlled uniformly because the heat is transferred to the liquid. [Means for Solving the Problems] The present invention provides a method for stirring the chemical solution by supplying nitrogen in a constant temperature heating tank that supplies a chemical solution into the tank and sends out the chemical solution that is heated by a heater and controlled to a constant temperature. This is a heating constant temperature bath in which an air pipe for carrying out the test is inserted inside the bath.

〔Example〕

Next, the present invention will be explained with reference to the drawings. Figure 1 is a system diagram of the first embodiment of the present invention. A chemical solution is introduced into a heating constant temperature bath 1 through a liquid supply port 2, and after a certain amount has been stored, a heater 3 is controlled to a set temperature using a temperature detector 4. At this time, nitrogen is supplied from the air supply pipe 5, the chemical solution inside is stirred to make the temperature of the chemical solution uniform, and then nitrogen is supplied from the liquid supply port 6. The air supply pipe 5 is piped from the top surface of the heating constant temperature bath 1 to near the bottom of the bath, and constantly supplies a constant amount of inert gas such as nitrogen, and the rising and falling flow of chemical liquid or pure water is generated by the rise of air bubbles sent out from the tip of the pipe. Stir by stirring. FIG. 2 is a system diagram of the second embodiment of the present invention. A chemical solution is introduced into a heating constant temperature bath 1 through a liquid supply port 2, and after a fixed amount is stored, a heater 3 is controlled to a set temperature using a temperature detector 4. At this time, nitrogen is supplied from the air supply pipe 5 and converted into the rotational force of the rotary blade 7, thereby stirring the internal chemical solution to make the temperature of the solution uniform, and then supplying it from the liquid supply port 6. In this embodiment, in addition to the stirring mechanism using nitrogen bubbles, a stirring mechanism using rotary blades 7 is provided, so the synergistic effect allows
Another advantage is that a uniform temperature distribution can be obtained. [Effects of the Invention] As explained above, the present invention supplies nitrogen from the air pipe inserted from the top surface of the heating constant temperature chamber and stirs the chemical solution or pure water inside, thereby making the temperature of the chemical solution or pure water uniform. There is an effect that can be achieved.

[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a system diagram of a heating constant temperature oven according to the first embodiment of the present invention;
FIG. 2 is a system diagram of the second embodiment of the present invention. 1...Heating constant temperature bath, 2...Liquid supply port, 3...Heater 4...Temperature detector, 5...Air supply pipe, 6...Liquid supply port, 7...Rotary blade ．．

Claims (1)

[Claims] In a heating constant temperature tank that supplies a chemical solution into the tank and sends out the chemical solution that is heated by a heater and controlled to a constant temperature,
1. A heating constant temperature bath, characterized in that an air supply pipe for supplying nitrogen and stirring a chemical solution is inserted inside the bath.