JPH03209070A - Valve for high pressure vessel - Google Patents

Abstract

PURPOSE:To prevent gas leakage from a high pressure vessel even in the event of insufficient tightening, slackening, or mis-operation of a main valve by furnishing a downstream flow-path with a check valve to admit gas flowing into a valve chest from outside of the vessel and check the gas flowing from the valve chest to outside of the vessel. CONSTITUTION:A valve seat 12 is formed at the end of an outer opening of a downstream side flow-path 5, and a valve element 13 consisting of a ball accommodated in the flow-path 5 receives the force of a spring 14 and is put in contact with this valve seat 12. The valve seat 12, ball 13, and spring 14 constitutes a check valve, which checks fluid stream from the valve chest 3 to the outside and admits streaming in the opposite direction. Filling with high pressure gas requires only coupling of a piping for filling with a screw part 7 and opening of the main valve 8 with a handle 11, and the ball 13 is moved by the high pressure gas against the force of the spring 14, and thus the vessel is filled with the gas. After completion of filling, the main valve 8 is shut. When gas filling is completed, the ball 13 is seated on the valve seat 12 by the force of the spring 14.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to valves for high-pressure vessels, and more particularly to a valve for high-pressure vessels with a double sealing function.

Problems to be Solved by Conventional Technologies and Inventions In recent years, the amount of semiconductor manufacturing gas (hereinafter referred to as special material gas) consumed in, for example, semiconductor manufacturing processes has been increasing steadily. There are many types of gas, some of which are extremely dangerous. Usually, this special material gas is transported in a high-pressure gas container, and the valve is opened at the site where the gas is used. Safely transporting and using expensive gas is the most important issue for gas manufacturers and users.

High-pressure gas containers are usually equipped with valves, and these valves include a valve chamber, an upstream passage that communicates the valve chamber with the inside of the container, and a downstream passage that communicates the valve chamber with the outside of the container. The main valve is disposed within the valve chamber and opens and closes the gas flow path by seating on and off a valve seat provided at the opening of the upstream passageway to the valve chamber. When filling with gas, open the container valve and let high-pressure gas flow from the downstream side to the upstream side. After filling, the container valve is closed. In this state, it is transported to the site of use, and after connecting the piping to the equipment, etc., it is refilled. Open the container valve to release the gas.

However, in conventional high-pressure gas containers equipped with such container valves, gas leaks can occur due to incorrect operation or insufficient tightening of the container valve, or loosening of the main valve due to vibration during transportation. No measures have been taken to prevent accidents. Means for Solving the Problems The present invention has been made in view of the above problems, and is designed to prevent gas from leaking even if the main valve becomes loose due to incorrect operation, insufficient tightening of the main valve, or vibration during transportation. It is an object of the present invention to provide a container valve that can prevent this.

In order to achieve the above object, the valve for a high-pressure vessel according to the present invention has a valve chamber that communicates with the inside of the high-pressure vessel, and a flow measurement channel that communicates the valve chamber with the outside of the high-pressure vessel. It includes a downstream flow path and a main valve that is disposed within the valve chamber and opens and closes communication between the upstream flow path and the downstream flow path. It is characterized by a check valve that allows gas to flow into the valve chamber and prevents gas from flowing from the valve chamber to the outside of the high-pressure container.

Furthermore, the present invention is also applied to a high-pressure vessel valve with a built-in purge valve, and in addition to the above configuration, the high-pressure vessel valve has the following features:
A third flow path that allows communication between the valve chamber and the outside of the high-pressure container, and a reverse valve that allows a third flow in the third flow path that does not block the flow of gas from the valve chamber to the outside of the high-pressure container. Install a stop valve.

Example Hereinafter, specific embodiments of the present invention will be described based on the drawings.

FIG. 1 is a partial vertical sectional view showing a first embodiment of the present invention.

High-pressure vessel valve (hereinafter simply referred to as valve) 10 Inside the main body 2, there is a valve chamber 3, an upstream flow 1i'L4 that communicates the valve chamber 3 with the inside of the high-pressure vessel (not shown), and a valve chamber 3. A downstream flow path 5 is formed that communicates with the outside of the container.

The valve 1 is attached to a high-pressure container using a screw 6, and a predetermined pipe is attached to the threaded portion 7 during gas filling or use.

A main valve 8 having a sealing member 10 on the lower surface is disposed within the valve chamber 3, and is constantly biased upward by a spring 9. By operating the handle 11 in one direction, the main valve 8 is As shown in FIG.
Communication through the valve chamber 3 of 31! cut off Handle 11
When the main valve 8 is operated in the opposite direction, the main valve 8 is moved upward by the force of the spring 9, and the upstream and downstream channels 4 and 5 are brought into communication.

A valve seat 12 is formed at the outer opening end of the downstream flow path 5, and a valve body 13 consisting of a ball housed in the flow path 5 is supported by a spring 14.
It is brought into contact with this valve seat 12 under the force of. valve,
I1ifl2, ball 13, and spring 14 form a check valve 15 that prevents the flow of fluid from the valve chamber 3 to the outside, but allows flow in the opposite direction. Code 16 is a fusible alloy 17
It is a safety plug equipped with When filling high-pressure gas into a pressurized container equipped with a valve configured as described above,
Connect the filling pipe to the threaded part 7, and connect the main valve 8 to the handle 11.
All you have to do is open the ball 13 with high pressure gas.
is moved against the force of spring 14, filling the container with gas. When filling is completed, the main valve 8 is closed. Furthermore, when the gas filling is completed, the ball
It is seated on the valve seat 2 by the force of.

Therefore, the main valve 8 may not be tightened enough after filling with gas, or even if it is initially tightened sufficiently, it may come loose due to vibration during transportation, or even the handle may be operated by mistake. Even if the main valve 8 opens, the check valve 15 prevents gas from leaking inside the pressurized container. By the way, in order to use the gas in the high-pressure container equipped with the above-mentioned valve 1, when connecting the gas delivery piping, a valve opening fitting 21 as shown in FIG. 2 is used. This is desirable.

The metal fitting 21 is attached to the tip of the pipe 22 as shown in the figure.
The fitting 21 has a mounting part 23 attached to the pipe 22 and a valve 1.
A hole 26 that extends in the axial direction as a whole includes an insertion portion 24 inserted into the valve seat 12 and a flange portion 25 between them.
is formed. Although the end portion of the attachment portion 23 is open, the insertion portion end 27 is not open, and an opening 28 is formed on the side near the end 27 and communicates with the hole 26. The metal fitting 21 is attached to the valve 1 with a cap nut that is screwed onto the threaded portion 7 of the valve 1, and at this time, the insertion end 27 comes into contact with the ball l3 of the check valve 15 and prevents the check from occurring against the force of the spring 14. Open valve 15. This allows gas to flow from inside the container to the pipe 22. Of course, it is necessary to open the main valve 8 during use.

3 to 5 show a second embodiment of the invention.

The valve 40 in this embodiment differs from the valve 1 in the first embodiment in that it is equipped with a purge mechanism, but other ellipses are the same as the valve 1 in the first embodiment, so corresponding members will be The same numbers will be given to them and their explanation will be omitted.

Another valve chamber 42 is formed in the main body 41 of the valve 40 on the opposite side of the mounting position of the safety plug 16, and a purge valve 43 is received therein. The purge valve 43 is biased by a spring 45, but by operating the gland nut 46, the seal member 44 provided at the tip of the purge valve 43 is moved around the opening of the flow path 47 communicating from the valve chamber 42 to the valve chamber 3. The flow path 47 can be closed by pressing against the formed valve seat. aisle 47
is a downstream passage 48 used for filling gas into a container (not shown) or delivering gas from the container via the valve chamber 3.
It will be communicated to.

The main body 41 is provided with a purge gas inlet 49,
It communicates with the valve chamber 42 through a flow path 51, and this flow path 51 is provided with a check valve 55 similar to the check valve 15. That is, the ball 53 is urged by the spring 54 and is in contact with the valve seat 52. Therefore, while the check valve 55 allows gas to flow from the purge gas inlet 49 to the valve chamber 42, it blocks the flow in the opposite direction.

In the purge mechanism having the above-described oval configuration, before filling the high-pressure container with gas, purge gas is introduced from the inlet 49, and the flow path 51. The impurity gas present in the valve chamber 3 and the like is purged by flowing and discharging the gas into the valve chamber 42, the flow path 45, the valve chamber 3, and the downstream flow path 48.

At this time, the check valve 15 can be opened using the metal fitting 23 shown in FIG. The metal fitting 23 can also be used to easily close the check valve 45. When the purge is completed, the purge valve 43 is closed and the check valve 55 is also closed by the force of the spring 54. After this, the container is filled with gas. In the valve 40 with the purge mechanism installed in the tank as described above, even if the main valve 8 and the barge valve 43 are insufficiently tightened after gas filling is completed, or become loose due to vibration after tightening, or even if there is an incorrect operation. , check valves 15 and 55 prevent gas leakage.

Effects of the Invention As is clear from the above explanation, in the high-pressure vessel valve according to the present invention, even if the main valve is insufficiently tightened, eroded, or erroneously operated, leakage of gas within the vessel is prevented.
It will be extremely safe.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing a first embodiment of the present invention, Fig. 2 is a partial sectional view showing the connection of piping to a valve, and Fig. 3 is a cross-sectional view showing a second embodiment of the invention. , 4 and 5 are longitudinal sectional views taken along the TV-IV line and the 1-2 line in FIG. 3, respectively. 1, 40... Valve for high pressure vessel 3... Valve chamber 4...
Upstream flow path 5, 48...Downstream flow path 15...
・Check valve 43...Purge valve 55...Check valve (external 4 people) Fig. 1 Fig. 2 Fig. 3

Claims (1)

[Scope of Claims] 1. A high-pressure vessel valve attached to a high-pressure vessel, comprising: a valve chamber; an upstream passage communicating the valve chamber with the inside of the high-pressure vessel; A valve for a high-pressure vessel, comprising a downstream flow path that communicates with the outside of the valve chamber, and a main valve that is disposed within the valve chamber and opens and closes communication between the upstream flow path and the downstream flow path, A check valve is disposed in the downstream flow path to allow gas to flow from the outside of the high-pressure container to the valve chamber and to prevent gas from flowing from the valve chamber to the outside of the high-pressure container. A valve for high pressure vessels featuring: 2. The valve for a high-pressure vessel according to claim 1, further comprising a third flow path that allows communication between the valve chamber and the outside of the high-pressure container, and the third flow path from the valve chamber to the A valve for a high-pressure vessel, characterized in that it is equipped with a check valve that blocks the flow of gas to the outside of the high-pressure vessel and allows gas to flow in the opposite direction.