JPH0320860U - - Google Patents

Info

Publication number
JPH0320860U
JPH0320860U JP8014989U JP8014989U JPH0320860U JP H0320860 U JPH0320860 U JP H0320860U JP 8014989 U JP8014989 U JP 8014989U JP 8014989 U JP8014989 U JP 8014989U JP H0320860 U JPH0320860 U JP H0320860U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
holding plate
semiconductor
duct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8014989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0740297Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8014989U priority Critical patent/JPH0740297Y2/ja
Publication of JPH0320860U publication Critical patent/JPH0320860U/ja
Application granted granted Critical
Publication of JPH0740297Y2 publication Critical patent/JPH0740297Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Beam Exposure (AREA)
JP8014989U 1989-07-10 1989-07-10 半導体製造処理装置 Expired - Lifetime JPH0740297Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8014989U JPH0740297Y2 (ja) 1989-07-10 1989-07-10 半導体製造処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8014989U JPH0740297Y2 (ja) 1989-07-10 1989-07-10 半導体製造処理装置

Publications (2)

Publication Number Publication Date
JPH0320860U true JPH0320860U (cs) 1991-02-28
JPH0740297Y2 JPH0740297Y2 (ja) 1995-09-13

Family

ID=31624947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8014989U Expired - Lifetime JPH0740297Y2 (ja) 1989-07-10 1989-07-10 半導体製造処理装置

Country Status (1)

Country Link
JP (1) JPH0740297Y2 (cs)

Also Published As

Publication number Publication date
JPH0740297Y2 (ja) 1995-09-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term