JPH0320718U - - Google Patents
Info
- Publication number
- JPH0320718U JPH0320718U JP8116689U JP8116689U JPH0320718U JP H0320718 U JPH0320718 U JP H0320718U JP 8116689 U JP8116689 U JP 8116689U JP 8116689 U JP8116689 U JP 8116689U JP H0320718 U JPH0320718 U JP H0320718U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- hole
- outside
- rod portion
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8116689U JPH0320718U (en17) | 1989-07-12 | 1989-07-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8116689U JPH0320718U (en17) | 1989-07-12 | 1989-07-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0320718U true JPH0320718U (en17) | 1991-02-28 |
Family
ID=31626862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8116689U Pending JPH0320718U (en17) | 1989-07-12 | 1989-07-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0320718U (en17) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS444020Y1 (en17) * | 1966-09-30 | 1969-02-14 | ||
JPS6016390A (ja) * | 1983-06-15 | 1985-01-28 | エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド | ウエハ搬送用のチヤツクユニツト |
-
1989
- 1989-07-12 JP JP8116689U patent/JPH0320718U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS444020Y1 (en17) * | 1966-09-30 | 1969-02-14 | ||
JPS6016390A (ja) * | 1983-06-15 | 1985-01-28 | エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド | ウエハ搬送用のチヤツクユニツト |