JPH0320700A - Electromagnet for charged particle apparatus - Google Patents

Abstract

PURPOSE:To achieve a smaller size of the apparatus with easier adjustment of a magnetic field by providing an core of a deflection electromagnet with a hole part to let a vacuum chamber pass through while a coil is provided in the hole part to adjust the orbit of charged particles with the core as magnetic path. CONSTITUTION:Charged particles 17 move on a race-track shaped balanced orbit 4 passing through a hole part 23 formed in a clamp plate 21 composing a core together with a return yoke 22 and upper and lower coils 31a and 31b generate to a magnetic field to curve the orbit 4 by deflecting the particles 17. The particles 17 are deflected delicately under a horizontal Lorentz force to adjust the orbit 4 finely by a magnetic field from a pair of steering coils 24 provided in a hole section 23. Then, sectional areas of the yoke 22 and an end reinforced part are so larger than that of the clamp plate 21 to facilitate the passage of a line of magnetic force and hence, most of the line of magnetic force concentrates on areas other than the clamp plate 21. In other words, as the clamp plate 21 has a weak magnetic field and a sufficient shielding effect is obtained even when it is thin and therefore, a slight space is enough in a direction of the orbit 4, thereby enabling the setting of a smaller charged particle apparatus.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an electromagnet for a charged particle device, and in particular to an elliptical bending electromagnet.

[Prior art 1 Figure 20 shows, for example, the Japanese Chemical Technology Information Center 1984
Yoshirikizu Myahara (Yoshika), published in September.
zu Miyahara). Koji Takata
Takata) and Tetsuya Nakanishi (Tetsuy
rssp technical report (
Technical Report of ISSP)
N021, “Superconducting Restrac Electron Storage, Product Ring and Coexisting Injector Microtron for Synchrotron Radiation”
rack Electron Storage Ring
and Coexistent Inject. or
Microtron for Synchrotron
FIG. 1 is a plan view showing a conventional charged particle device described in Radiation), 1.

In the figure, reference numeral (1) is a storage ring as a charged particle device that accumulates charged particles, and (2) is an entrance beam line for guiding charged particles (for example, electrons) into the storage ring (1). (3) Deflects the charged particle to create an equilibrium trajectory (4
) is a superconducting bending electromagnet for formal precepts, and is used for elliptical precepts by a combination of deflection coils, which will be described later.

(5) is a synchrotron radiation beam line for extracting the synchrotron radiation generated when charged particles are deflected by the deflection electromagnet (3).8 This synchrotron radiation is synchrotron radiation or SOR
(Synchrotron Orbital Radio
It is taken out and used for lithography, etc. Generally, the synchrotron radiation beam line (5) is equipped with a bending electromagnet (
3), but here only one is shown for each bending electromagnet (3) and the others are omitted. (6) is a quadrupole electromagnet for focusing charged particles in the storage ring (1), (7) is a sextupole electromagnet for correcting the nonlinear magnetic field or evening chromaticity of the bending electromagnet (3),
(8) is a high-frequency cavity for compensating for the energy loss of charged particles due to the emission of synchrotron radiation and accelerating them to a predetermined energy;
) is a hole that shifts the equilibrium trajectory (4) to assist the injection of charged particles from the entrance beam line (2), (10) is a vacuum chamber that serves as a passage for charged particles, and (■1) is a The inflector is for injecting charged particles from the entrance beam line (2) into the storage ring (1), and the vacuum pump (2) is for maintaining a high vacuum inside the vacuum chamber (10). The vacuum chamber (10) is arranged along the equilibrium track (4). The vacuum chamber (10) is made of stainless steel material that has high mechanical strength and is easy to bake.

Additionally, the inside of this vacuum chamber (IO) is maintained at an ultra-high vacuum by a vacuum pump (12) to prevent charged particles from colliding with gas molecules and losing energy and shortening their lifespan. ．． Next, FIGS. 21 to 23 are a perspective view, a plan view, and a side view, respectively, showing the bending electromagnet (3) in FIG. 11. In the figure, symbols (31) and (32) are bending electromagnets (
It is a pair of superconducting deflection coils that elliptically control (3).
1) is the upper coil, and (32> is the lower coil.The upper and lower coils (31) and (32) have a high supermagnetic force, so they have an air-core structure without using an iron core.Arrow m1
m2 is the upper and lower coil (31). <32), and the arrow n indicates the traveling direction of the electron beam on the equilibrium orbit (4).

Furthermore, as is clear from FIGS. 22 and 23, the equilibrium orbit (4) lies on the plane of polar coordinates Rθ (2=0) with a radius ρ
. It is shown by a semicircle and a straight line connecting the front and back of this semicircle. ρ． ρ2 is a banana-shaped upper and lower coil (31),
These are the inner radius and outer radius of (32). Next, the operation of the conventional charged particle device shown in FIGS. 20 to 23 will be explained.

Charged particles injected into the storage ring (1) from the input beam line (2) are deflected in a pulsed manner by the inflector (11) and their trajectory is shifted by the kicker (9).Therefore, the charged particles are initially orbits on an orbit slightly deviated from the equilibrium orbit (4), and after several rotations, the equilibrium orbit (4)
It will continue to circle above in the direction of arrow n. This equilibrium trajectory (4) is determined by the arrangement of the bending electromagnet (3) and the quadrupole electromagnet (6).The main magnetic field generated in the upper and lower coils (31) and (32) by the current in the ml and m2 directions is -z (-y) direction, and the current flowing in the equilibrium orbit (4) is in the opposite direction to the electron beam direction n.Therefore, the charged particles, that is, the electron beam passing between the upper and lower coils (31), <32) receives an electromagnetic force in the direction of -R according to Fleming's left-hand rule, and is thereby bent with a curvature of radius ρ. The radius ρ of this equilibrium orbit (4〉) is given by the following equation (2).

ρ. -P/ (e-By)... ■However, P: momentum of electron, e: charge of t-son, By two upper and lower coils (31). (32) Generated magnetic field in the y-axis direction Note that the y-axis is an axis parallel to the Z-axis regarding the equilibrium orbit (4), and the X-axis described later is an axis in the same direction as the radius R of the polar coordinates regarding the equilibrium orbit (4). It is.

On the other hand, the high frequency cavity (8) accelerates charged particles, and the sextupole electromagnet (7) corrects the non-uniformity of the magnetic field in the radial direction of the bending electromagnet (3) and corrects chromaticity. In this way, the charged particles orbiting along the equilibrium orbit (4) are
When deflected by the magnetic field of the bending electromagnet (3), the electromagnetic waves due to bremsstrahlung radiation are converted into synchrotron radiation beam line
5) in the tangential direction of the equilibrium orbit (4). By the way, since the electron beam is undergoing betatron oscillation around the equilibrium orbit (4〉), it generally oscillates in a direction perpendicular to the traveling direction n of the electron beam (mainly the R direction, that is, the X-axis direction).
Regarding this, it is necessary to have a uniform magnetic field distribution (good magnetic field region) of about 10-4 to 10-c over a range of several cll+ around the central orbit. Superconducting deflection coil (31). (3
If the magnetic field distribution in 2) is non-uniform, the equilibrium trajectory (4) of the electron beam will be the upper and lower coils (31). (32), but if this amount of deviation becomes larger than a predetermined value, the electron beam will hit the vacuum chamber (10) and be lost.

Figure 24 shows the R (x-axis) of the magnetic field ny in the bending electromagnet (3).
This is a characteristic diagram obtained by calculating the directional distribution, and the upper and lower coils (3
1), <32), the inner paulownia radius ρ1 and outer radius ρ2 are respectively ρ. = 31.5.8 mm ρ , = 675.8 mm and the distance between the upper and lower coils (31.) and (32) is 252
1, the ratio (%) of (By-Byo)/Byo is shown.

However, Byo is the center of the equilibrium orbit (4), that is, ω=
50alI, and the radial position of the equilibrium orbit (4〉) of R=ρo(x=o) found from equation (2) is ρo=495.8mm.

As is clear from Fig. 24, the position where the magnetic field B peaks is a position with a slightly larger radius than R = ρ0 for the θ = 90° fit, and the closer it gets to θ = O°, the more the peak The position becomes closer to the inner diameter ρ1 side. That is, even if the equilibrium trajectory (4) of the electron beam is determined, the absolute value of the magnetic field felt by the beam on the equilibrium trajectory (4) will change considerably. The cause of this is the upper and lower coils (31>, (3
2) is banana-shaped. In addition, Figure 25 shows, for example, rLIVsO of the Institute of Molecular Science.
R storage design J No. UVSOR-9,1
It is a sectional view of the steering magnet of the charged particle device shown in the December 19982 publication. In the figure, the reference numeral (13) is an iron core, which is made up of a return yoke (14) and a magnetic pole (15). (1
6) is a coil wound around the return yoke (14), which connects the magnetic pole (l) with the vacuum chamber (10) in between.
5) is provided. In addition, this vacuum chamber (1
0), a charged particle (17) passes on an equilibrium orbit (14).

FIG. 26 is a side view of FIG. 25, and for example, the width W of the return yoke (14) is 100n+a, and the width W2 of the coil (4) is 300+nm.

Next, the operation of the steering magnet of the charged particle device having the above structure will be explained.

When the coil (16) is energized, a horizontal or vertical magnetic field is generated in the gap between the magnetic poles (15) depending on the direction in which the magnetic poles (15) are installed. The steering magnet applies electromagnetic force in the direction of the vector product of the magnetic field generated between the magnetic poles (15) and the current based on the motion of the charged particles (17) passing between the magnetic poles (15), thereby slightly changing the particle trajectory. Deflect. Usually, the steering magnet↓, charged particle acceleration ring, charged particle accumulation ring, etc. are used in other ll! It is used in conjunction with various electromagnets with various functions, such as bending electromagnets (3) and quadrupole electromagnets (8).

At this time, each electromagnet has an independent magnetic field output component, and the function of each electromagnet for charged particles (I7) is determined independently. [Problem to be solved by the invention] Since the electromagnets of conventional charged particle devices are constructed as described above, the absolute value of the magnetic field on the balanced orbit changes greatly, and as a result, the balanced orbit of the electron beam For example, in a charged particle accelerator ring or a charged particle storage ring that is a charged particle device, the width dimension W2 of the coil (16) may shift in the orbital direction of the charged particle (17).
Therefore, the steering magnet must be provided separately, which increases the circumference of the ring, resulting in a large ring. Ta. The conventional device is
There was a problem to be solved in order to solve such problems.

This invention was made to solve the above-mentioned problems, and its purpose is to obtain an electromagnet for a charged particle device that can flatten the magnetic field distribution on a balanced orbit and can be made smaller. [Means for Solving the Problems] In the electromagnet of the charged particle device according to the present invention, in the first invention, the iron core of the bending electromagnet is formed with a hole portion through which a vacuum chamber passes, and the hole portion through which the vacuum chamber passes is formed. In the second invention, the bending electromagnet adjusts the curvature of the main part of the banana-shaped coil by adjusting the curvature of the coil in the main part of the banana-shaped coil. Both end portions are configured to be larger than the center portion of the coil, and in the third invention, the iron core surrounding the banana-shaped coil extends through the banana-shaped coil in its thickness direction. The core has one or more core grooves, and the thickness of the core can be adjusted according to the position of the equilibrium trajectory of charged particles by adjusting the presence or absence and insertion depth of an insertion plate inserted into the core groove. This is what is being set.

[Function] In this invention, the iron core of the bending electromagnet becomes a magnetic circuit generated by the current flowing through the coil, and since the bending electromagnet is constructed as described above, the peak of the magnetic field is always at the peak of the bending electromagnet. It is on the center line, so the magnetic field distribution is even.

[Example] Hereinafter, the present invention will be described based on figures showing examples thereof. In addition, in the figure, symbols (3) (4) (10) (17
) are the same or equivalent to those shown with the same reference numerals in the conventional device.

FIG. 1 is a perspective view of a bending electromagnet showing a first embodiment of the first invention of the present invention. In the figure, the symbol (21
) is a clamp plate that is attached closely to the return yoke (22) and forms the iron core together with the return yoke (22), and (23) is a hole formed in the clamp plate (21); Charged particles (1
7) exists, and the charged particle (17) moves on the racetrack-shaped equilibrium trajectory (4). (2
4) is a steering coil of a steering magnet installed above and below the cavity (23).

Figure 2 is a cross-sectional view of the ■ single shore line along the plane forming the equilibrium orbit (4〉) in Figure 1, and in the figure (31a) (
32a) are the upper and lower coils which are the main coils of the bending electromagnet (3), which generate a magnetic field perpendicular to the plane of the figure in order to deflect the charged particles (l7) and bend the equilibrium trajectory (4). let (25) is an end reinforcement part made by partially inflating the return yoke (22).The end reinforcement part {25} is added to the return yoke {22}, and the clamp plate (2
1) The cross-sectional area of the core near the point where it contacts is increasing. The clamp plate (21) is provided so that the magnetic field generated by the bending electromagnet (3) does not affect other equipment in contact with the bending electromagnet (3) as a leakage magnetic field. Since it is magnetically shielded by the clamp plate (21), the leakage magnetic field due to the bending electromagnet (3) is almost equal to zero on the balanced orbit (4) outside of this.

A pair of steering coils (24) attached to the cavity (23) of the clamp plate (21) are arranged on a balanced trajectory <4>
The plane formed by this generates a magnetic field with the main component being perpendicular to the plane. Due to this magnetic field, the charged particles (17) are subtly deflected by the horizontal Lorentz force, and their equilibrium trajectory (4) is finely adjusted. This function is exactly the same as the conventional steering magnet 1. However, the return and yoke required for the magnetic circuit are also served by the clamp plate (21) to which the deflecting electromagnet (3) is attached, and the clamp plate (21) functions as a magnetic shield plate and at the same time serves as a steering magnet. It also functions as a return yoke, which is a magnetic circuit. FIG. 3 is a cross-sectional perspective view of the vicinity of the end of the bending electromagnet (3). In the figure, 26) is the main coil (31a),
32a) is a line of magnetic force that represents the magnetic field generated by energizing the magnetic field line (26).
The sparse part in 6) represents a region where the magnetic field is weak. The density of the magnetic field lines (26) shown in the same figure is the same as the return yoke (22)
This is a graphical representation of the quantitative results obtained by nonlinear three-dimensional magnetic field analysis, including The cross-sectional area of the return yoke (22) and the end reinforcement part (25) is larger than the cross-sectional area of the clamp plate (21).
2) and the end reinforcement part (25>) have extremely low magnetic resistance, allowing the magnetic force m (28) to easily pass through, and most of the lines of magnetic force (26) concentrate in areas other than the clamp plate (21). That is, since the magnetic field is weak in the clamp plate (21), a sufficient magnetic shielding effect can be obtained even with a thin clamp plate (21).
Therefore, the clamp plate (2l) can be made thinner, and the equilibrium orbit (
The space required in the direction of 4) is small. As a result, the installation space for many devices installed in the direction of the balanced track (4) can be expanded. Conversely, small charged particle devices such as small charged particle acceleration rings and small charged particle storage rings can be realized. In the model used for three-dimensional magnetic field analysis, the return yoke (
22) Width dimension W. -450 Theory 1 Dimension L + of end reinforcement part (25). For L2=300 questions, the width W4 of the clamp plate (21) was set to 150 mm, which is 173 of the width W of the return yoke (22). As a result of magnetic field analysis, when the central magnetic field of the main coil (31m>, (32a) is 435 terraces, the leakage magnetic field to the outside of the clamp plate (21>) is almost zero, and a sufficient magnetic shielding effect is obtained. , in the above embodiment, the steering coil (24
) were installed above and below the cavity (23), but they may be installed on the left and right sides. In this case, a horizontal magnetic field is generated in the same plane as the clamp plate (21). Due to the interaction between this magnetic field and the charged particle (17), the equilibrium orbit (4) is slightly moved up and down by mJI. Further, in the above embodiment, the magnetic field output of the steering magnet generates an output of one component, either horizontal or vertical, but FIGS. As shown in Fig. 5, steering coils (24) may be attached to all the upper, lower, left, and right surfaces of the cavity (23). The left and right steering coils (24) can generate a deflection force against the charged particles (17) in the vertical direction. Fig. 6 is a partial side view showing the third embodiment of the first invention, and Fig. 7 is a cross-sectional view along line ■1■ in Figure 6, and (
27) is a quadrupole coil, (27a) is a quadrupole coil (27)
Surrounded by and the protruding part is a hyperbolic quadrupole magnetic pole,
There are four identical quadrupole coils (27) and four quadrupole magnetic poles (27m). These quadrupole coil (27) and quadrupole magnetic pole (27a), and the quadrupole magnetic pole (
27m), the charged particles (l
7) A quadrupole electromagnet that focuses is elliptical. Typically, quadrupole electromagnets are elliptical independently of other electromagnets needed in the charged particle device, such as bending electromagnets.

According to the above embodiment, the quadrupole electromagnet is elliptical using a part of the iron core that constitutes the bending electromagnet. The steering coil (24) and quadrupole coil (27) were attached directly to the side of the hole (23) of the pull plate (21), but due to the design of the steering magnet, quadrupole electromagnet and vacuum chamber (10),
In some cases, the cavity (23) may be narrow. In this case, the steering coil (24), the quadrupole coil (27)
Installation work becomes extremely difficult or impossible.

A structure for solving these problems is shown in Figure 8. In the figure, (Z8> is an iron pedestal, and (28a) is a key formed at both ends of this iron pedestal (28), with the angle between the side surface and the bottom of the iron pedestal (28) being less than 90". ( 29
) is a fastening part that fixes the steering coil (24〉) on the iron pedestal (28).The iron pedestal (28) is attached to the key arm (21).
．． a), and the fixing part (
30), the iron pedestal 28> is fixed to the clamp plate (21). Next, the assembly order of the above embodiment will be explained. The work of fixing the steering coil (24) to the iron pedestal (28) is carried out in a wide space. Iron pedestal (
28) is independent of the clamp plate (2l), so it is possible to install the steering coil with the iron pedestal (28) removed. After installing the steering coil (24), insert the keys <28a) at both ends of the iron pedestal (28) into the keys i'l (21a), and then attach the clamp plate <2l).
The iron pedestal (28) is fixed by the fixing part (30) provided on the side surface of the iron base (28). Bottom of iron pedestal (28) and clamp plate (21)
The gap between the two is small and there are no problems with the magnetic circuit. Next, the second invention will be explained with reference to FIGS. 10 and 11 showing its embodiment. In the figure, reference numeral (31a). (32a) are the upper and lower coils of the bending electromagnet which are ovalized in a banana shape as in the conventional device, and the inner radius ρ1 and the outer radius ρ2 are defined as functions of the angle θ, ρ, (θ), ρ2(θ ), the curvature of both ends is larger than that of the center; it is an I-directed coil.

That is, ρ1 and ρ2 are ρ1 (θ-=0° or 180")> ρ1 (θ=90")
) ρ, (θ=O° or 180°)> ρ2 (θ=90°).

Moreover, the radius ρ0 of the equilibrium orbit is t, and the position of the magnetic field distribution in the X direction and ρ. The position of

Since the electromagnet of the charged particle device of the present invention is elliptical as described above, the upper and lower coils (31a) (32a) were energized in the m1 direction and the magnetic field distribution in the θ direction was determined by numerical calculation. The results of this numerical calculation are shown in Figure 12. As is clear from the figure, the upper and lower coils (31a) (32
a) inner and outer radius ρ. Since ρ2 is a function of θ, the peak value of the X-direction distribution of the magnetic field generated by the upper and lower coils (31.i) (32a) coincides with the equilibrium trajectory (4) of the electron beam.

Next, the third invention of this invention will be described based on its embodiment.

As mentioned above, one or more pairs of banana-shaped coils are used to form a bending electromagnet, and the curvature of the upper and lower coils is made different at both ends and the center. As described above, an iron core is often attached to surround these upper and lower coils (31a) (32a). This iron core has upper and lower coils (31a) (
32a) is used as a magnetic shielding material to prevent the magnetic field generated by the bending electromagnet from leaking to the outside of the bending electromagnet.

Further, since this iron core material generally has a high magnetic permeability, the central magnetic field increases due to the magnetization of the iron core.

Therefore, one of the reasons why an iron core is used is that the magnetomotive force of the upper and lower coils can be reduced compared to a case without an iron core.

However, even if an iron core is simply used, the magnetic field distribution within the bending electromagnet will not be improved. Therefore, similar to the above embodiment, the magnetic field distribution is likely to be disturbed at the ends of the coil.

Next, FIG. 13 shows an embodiment of the third invention, in which the return yoke (22) is made of a material with high magnetic permeability, and is usually made of iron.

Further, the clamp plate (21) is made of iron material in order to prevent the magnetic field from leaking in the direction of the balanced orbit (4). Next, reference numeral (44) is an iron core groove provided on the return yoke (22>), and an iron insertion plate (45) is inserted into this iron core groove (44).This insertion plate (45) is After being inserted into the core groove (44) at an arbitrary insertion position, it is fixed to the return yoke (22) by the fixing plate (46).

Next, Figures 14 to 16 are each of Figure 13, XF
FIG. 3 is a cross-sectional view taken along the -XW line, the X'/-XV line, and the Xi-Xw line.

This is because the magnetic resistance of the return yoke (22) is changed by removing and inserting the insertion plate (45). That is, for a portion where the magnetic field strength should be lowered, such as at the end, the insertion plate (45) can be pulled out and the magnetic resistance of the return yoke (2z) can be increased. As shown in Fig.
47> may be incorporated and the return yoke (22>) may be used.

Furthermore, as shown in Fig. 18, an insertion plate (45
) may be formed at an angle to reduce the error magnetic field. Furthermore, in each of the above embodiments, the insertion plate is of an insert type, but as shown in FIG. 19, an iron core is not provided at the end from the beginning, and an end space (48) which is a core groove is used. In this case, it is effective for correcting the magnetic field distribution, especially the distribution in the ρ direction. [Effects of the Invention] As described above, according to the present invention, in the first invention, a hole is formed in the iron core of the bending electromagnet through which a vacuum chamber is passed, and a magnetic path is formed in the iron core in the hole. Since a coil for adjusting the trajectory of charged particles is provided as a coil, there is no need for a separate steering coil, and it can be installed in the iron core of the bending electromagnet. Therefore, magnetic field adjustment is easy and the entire device In addition, in the second invention, the radius of curvature at both ends of one or more pairs of banana-shaped coils is made larger than the radius of curvature at the center of the coil, so that the equilibrium trajectory of the electron beam is relatively small. Further, in the third aspect of the invention, the banana-shaped coil is surrounded by a single iron core that is provided so as to penetrate through the banana-shaped coil in its thickness direction. The thickness of the core can be adjusted by adjusting the presence or absence of an insertion plate inserted into the core groove and the insertion depth! Since it is set according to the position of the particle's equilibrium trajectory, it has the effect of providing an electromagnet for a charged particle device in which the magnetic field distribution on the equilibrium trajectory is flat.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a bending electromagnet of a charged particle device according to a first embodiment of the first invention of the present invention, FIG. 2 is a plan sectional view taken along the line ■-■ in FIG. 1, and FIG. FIG. 2 is an enlarged perspective view of the essential parts, FIG. 4 is a front view of the deflection electromagnet of the charged particle device according to the second embodiment of the first invention, and FIG. 5 is a cross section taken along line V-V in FIG. 4. Figure 6 shows the third aspect of the first invention.
7 is a sectional view taken along line 1-2 in FIG. 6, and FIG. 8 is an exploded perspective view of the fourth embodiment of the first invention. Figure 9 is the 8th
The front view after assembly of the one in the figure, FIG. 10, is the second embodiment of this invention.
Plan view of a bending electromagnet according to an embodiment of the invention, No. 11
The figure is a side view of Fig. 10, Fig. 12 is a magnetic field distribution diagram based on the calculated values of the coil shown in Fig. 10, and Fig. 13 is a diagram of this second
Perspective views of other embodiments of the invention, FIGS. 14, 15, and 16 are taken along lines XI-Xi,
! -Respective cross-sectional views taken along the XW line, Figures 17 and 18
19 are cross-sectional views of three embodiments of the third invention of the present invention, FIG. 20 is a plan view of a conventional charged particle device, FIG. 21 is a perspective view of the coil of the bending electromagnet shown in FIG. 20, and FIG. Figure 22 is a plan view of the coil in Figure 21, Figure 23 is a side view of Figure 22, Figure 24 is a magnetic field distribution diagram based on numerical calculations based on the coil arrangement in Figure 23, and Figure 25 is a conventional charged particle diagram. FIG. 26 is a front view showing an example of the steering magnet of the device, and FIG. 26 is a side view of FIG. 25. In the figure, (3>...bending electromagnet, (4>
・Equilibrium orbit, (10)・・Vacuum chamber, (17)・
・Charged particles, (2l)...clamp plate, (22>...iron core (return yoke) .<23)...hole, (2
4) Steering coil, (27) Quadrupole coil, (31aH32a) banana-shaped coil (upper and lower coils)
．． (44)・ Tetsushinko, (45)・Insert plate, (4
7)...insertion plate adjustment plate), (48>...iron core groove (end space), ρ...radius of equilibrium track, ρ1...inner radius,
ρ2...outer radius. In each figure, the same reference numerals indicate the same or equivalent parts. 24 - Steering wheel coil 1 Figure 3 4 Figure 23 5 Figure 21 24 24 24 % 6 Figure % 7 Figure 31a, 32a: K Puff-ta coil (top. Bottom] Inole) P2: Sauce shellfish 1 mouth potato % 1 Fig. 12 Fig. 45 I3 Fig. 45 Funeral 17 Fig. 47 - Insertion plate (adjustment plate) 48-C groove of one scissor (S Yuko B!”E- interval) Mo2 Figure By-By○ -893-

Claims (3)

[Claims] (1) In an electromagnet for a charged particle device, which is equipped with a bending electromagnet having one or more pairs of banana-shaped coils sandwiching a vacuum chamber that serves as a passage for charged particles, the iron core of the bending electromagnet is connected to the vacuum chamber. What is claimed is: 1. An electromagnet for a charged particle device, characterized in that a hole is formed through which the charged particle passes, and a coil is provided in the hole for adjusting the trajectory of the charged particles using the iron core as a magnetic path. (2) In an electromagnet for a charged particle device equipped with a bending electromagnet having one or more pairs of banana-shaped coils provided to sandwich a vacuum chamber that serves as a passage for charged particles, the one or more pairs of banana-shaped coils are An electromagnet for a charged particle device, characterized in that the curvature of the inner coil and outer coil of the main coil part is larger at both ends of the banana-shaped coil than at the center of the coil. (3) In an electromagnet of a charged particle device including a bending electromagnet having one or more pairs of banana-shaped coils provided to sandwich a vacuum chamber that serves as a passage for charged particles, the coils surrounding the banana-shaped coils are The iron core is provided through the core in the thickness direction.
The thickness of the core is set according to the position of the equilibrium trajectory of charged particles by adjusting the presence or absence and insertion depth of an insertion plate inserted into the core groove. An electromagnet for charged particle devices featuring: