JPH0320439U - - Google Patents
Info
- Publication number
- JPH0320439U JPH0320439U JP7902989U JP7902989U JPH0320439U JP H0320439 U JPH0320439 U JP H0320439U JP 7902989 U JP7902989 U JP 7902989U JP 7902989 U JP7902989 U JP 7902989U JP H0320439 U JPH0320439 U JP H0320439U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holding device
- gas
- gas introduction
- sample holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案に係る試料保持装置の平面図、
第２図は第１図の−線による切欠き縦断面図
、第３図〜第５図は本考案に係る試料保持装置の
他の実施例を示す縦断面図、第６図は従来の試料
保持装置の縦断面図である。
１……フード、１２……保持容器、１３……ク
ツシヨン室、１０……ガス導入部、１０ａ……中
心孔、１０ｂ……延出部、Ｗ……ウエハ。
FIG. 1 is a plan view of the sample holding device according to the present invention;
FIG. 2 is a longitudinal sectional view taken along the line - in FIG. 1, FIGS. 3 to 5 are longitudinal sectional views showing other embodiments of the sample holding device according to the present invention, and FIG. FIG. 3 is a longitudinal cross-sectional view of the holding device. DESCRIPTION OF SYMBOLS 1...Hood, 12...Holding container, 13...Cushion chamber, 10...Gas introduction part, 10a...Center hole, 10b...Extension part, W...Wafer.
Claims (1)
体との隙間にガスを導入するガス導入部を有する
試料保持装置において、 前記ガス導入部を、前記試料と対向すべき前記
保持体の対向面と略平行に形成してあることを特
徴とする試料保持装置。 ２ 請求項１の試料保持装置において、 前記ガス導入部と連なり、前記対向面に沿う一
方向へのガス吹き出し量を多量とすべくなしてあ
るガス吹出口を備えてあることを特徴とする試料
保持装置。[Claims for Utility Model Registration] 1. A sample holding device having a gas introduction part for introducing gas into a gap between a sample to be held and a holder facing the sample, the gas introduction part facing the sample. A sample holding device characterized in that the sample holding device is formed substantially parallel to the opposing surface of the holding body. 2. The sample holding device according to claim 1, further comprising a gas outlet that is connected to the gas introduction section and is configured to blow out a large amount of gas in one direction along the opposing surface. holding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902989U JPH0320439U (en) | 1989-07-04 | 1989-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902989U JPH0320439U (en) | 1989-07-04 | 1989-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320439U true JPH0320439U (en) | 1991-02-28 |
Family
ID=31622827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7902989U Pending JPH0320439U (en) | 1989-07-04 | 1989-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320439U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06280385A (en) * | 1991-12-13 | 1994-10-04 | Awaa Bureen Kankyo Sekkei Kk | Continuous hanging scaffold |
| JPH074022A (en) * | 1993-06-22 | 1995-01-10 | Nippon Kogyo Kensa Kk | Sucking and retaining device on plane |
| WO2011027547A1 (en) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | Substrate transfer apparatus |
| KR101422536B1 (en) * | 2013-12-30 | 2014-07-24 | 김규만 | Ladder for manhole |
| JP2017209752A (en) * | 2016-05-25 | 2017-11-30 | 株式会社ハーモテック | Fluid flow forming body and non-contact conveyance device |
-
1989
- 1989-07-04 JP JP7902989U patent/JPH0320439U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06280385A (en) * | 1991-12-13 | 1994-10-04 | Awaa Bureen Kankyo Sekkei Kk | Continuous hanging scaffold |
| JPH074022A (en) * | 1993-06-22 | 1995-01-10 | Nippon Kogyo Kensa Kk | Sucking and retaining device on plane |
| WO2011027547A1 (en) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | Substrate transfer apparatus |
| KR101422536B1 (en) * | 2013-12-30 | 2014-07-24 | 김규만 | Ladder for manhole |
| JP2017209752A (en) * | 2016-05-25 | 2017-11-30 | 株式会社ハーモテック | Fluid flow forming body and non-contact conveyance device |