JPH0320435U - - Google Patents
Info
- Publication number
- JPH0320435U JPH0320435U JP8030789U JP8030789U JPH0320435U JP H0320435 U JPH0320435 U JP H0320435U JP 8030789 U JP8030789 U JP 8030789U JP 8030789 U JP8030789 U JP 8030789U JP H0320435 U JPH0320435 U JP H0320435U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heating furnace
- core tube
- transport mechanism
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000007723 transport mechanism Effects 0.000 claims 2
- 238000009529 body temperature measurement Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8030789U JPH0320435U (es) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8030789U JPH0320435U (es) | 1989-07-07 | 1989-07-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0320435U true JPH0320435U (es) | 1991-02-28 |
Family
ID=31625248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8030789U Pending JPH0320435U (es) | 1989-07-07 | 1989-07-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0320435U (es) |
-
1989
- 1989-07-07 JP JP8030789U patent/JPH0320435U/ja active Pending