JPH0320185A - Solenoid valve - Google Patents
Solenoid valveInfo
- Publication number
- JPH0320185A JPH0320185A JP15554989A JP15554989A JPH0320185A JP H0320185 A JPH0320185 A JP H0320185A JP 15554989 A JP15554989 A JP 15554989A JP 15554989 A JP15554989 A JP 15554989A JP H0320185 A JPH0320185 A JP H0320185A
- Authority
- JP
- Japan
- Prior art keywords
- solenoid valve
- solenoid
- malfunction
- signal
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 47
- 230000007257 malfunction Effects 0.000 claims abstract description 47
- 239000012530 fluid Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 6
- 230000002950 deficient Effects 0.000 abstract description 6
- 230000002265 prevention Effects 0.000 abstract 2
- 238000003708 edge detection Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Indication Of The Valve Opening Or Closing Status (AREA)
- Magnetically Actuated Valves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、流体の流路の開閉又は切り替えなどの制御を
行うための電磁弁に関する.
〔従来の技術及びその課題〕
従来より、電磁弁は、制御回路からの電気信号により直
接に制御可能であり、遠隔制御も容易に行うことができ
るので、油圧や空気圧などの流体圧を利用する流体圧回
路(以下「設備」という)において、方向制御弁などと
して広く用いられている.
電磁弁は、ソレノイドに交流又は直流の電源電圧を印加
して通電したときに、可動部材が一方向へ移動し、これ
によって、可動部材に連動する弁体の位置が変わり、流
路が切り替わるように構成されており、弁体をソレノイ
ドにより直接移動させる直接駆動型電磁弁と、弁体の移
動に補助的に流体圧を利用するパイロット型電磁弁とが
ある.このような電磁弁には、通電時に点灯する表示灯
が一般に設けられている.これにより、作業者は、電磁
弁の取り付け時、又は設備の稼働中において、電磁弁へ
の通電の有無を確認することができる。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a solenoid valve for controlling opening/closing or switching of a fluid flow path. [Conventional technology and its problems] Conventionally, solenoid valves can be controlled directly by electrical signals from a control circuit, and can also be easily controlled remotely, so it has been difficult to use fluid pressure such as hydraulic pressure or pneumatic pressure. It is widely used as a directional control valve in fluid pressure circuits (hereinafter referred to as "equipment"). When a solenoid valve is energized by applying AC or DC power supply voltage to the solenoid, the movable member moves in one direction, thereby changing the position of the valve body that is linked to the movable member and switching the flow path. There are two types of solenoid valves: direct-drive solenoid valves, in which the valve body is directly moved by a solenoid, and pilot-type solenoid valves, which use fluid pressure to assist in moving the valve body. Such solenoid valves are generally equipped with an indicator light that lights up when energized. This allows the operator to check whether or not the solenoid valve is energized when installing the solenoid valve or while the equipment is in operation.
ところで、一般に、電磁弁に限らず設備に組み入れる各
種の装置では、完全にその機能を失う故障状態に陥る場
合の他に、シール部材の摩耗や塵埃による目詰りなどに
よって、機能が低下した動作不良状態となる場合がある
.動作不良状態では、設備全体の動作に対する支障が軽
微であり、設備の稼働状態を維持可能な場合が多いが、
動作不良状態のまま装置の使用を続けると、機能の悪化
が進行して故障状態になり、そのために設備の動作が突
発的に停止する可能性がある.
したがって、設備の突発的な停止を防止する目的で、装
置の動作不良状態を早期に発見するための点検を適時実
施し、動作不良状態であれば、部品交換や清掃などを行
い、装置の動作状態を良好なものとする必要がある.
しかしながら、従来の電磁弁では、作業者が、電磁弁の
作動状態が良好であるか否かを容易に知ることができな
いという間゜題があった.すなわち、点検時において、
電磁弁を設備から取り外して分解する必要があり、メン
テナンス作業が甚だ面倒なものであった.特に設備に多
数の電磁弁が組み入れられている場合には、点検のため
に多くの時間と労力を要していた.
また、電磁弁の動作不良に起因して設備に誤動作が生じ
た場合であっても、誤動作の原因が電磁弁にあることを
速やかに確認することができなかった.
本発明は、上述の問題に鑑み、動作状態の良否を容易に
知ることができ、故障発生の防止の容易化を図ることの
できる電磁弁を提供することを目的としている.
〔課題を解決するための手段〕
上述の課題を解決するため、請求項1の発明は、通電に
よって作動するソレノイドを用いて流体の波路を制御す
るように構成された電磁弁であって、当該電磁弁の動作
の良否を検知し、動作が不良のときに動作不良検知信号
を発生する動作不良検知手段を内蔵してなることを特徴
として構成される.請求項2の発明は、請求項lの発明
の動作不良検知手段が、圧力センサーと、当該圧力セン
サーの出力信号に基づいて流路の制御の応答時間が所定
時間以上となったときに応答不良信号を発生する応答不
良検知手段とを備えてなることを特徴として構成される
.
請求項3の発明は、請求項lの発明の動作不良検知手段
が、ソレノイドの通電電流の大きさが一定範囲外の値と
なったときに通電不良信号を発生する通電不良検知手段
を備えてなることを特徴として構成される.
〔作 用〕
ソレノイドは、通電によって作動し、流体の流路を制御
する.
動作不良検知手段は、当該電磁弁の動作の良否を検知し
、動作が不良のときに動作不良検知信号を発生する.
圧力センサーは、圧力に応じた出力信号を出力する.
応答不良検知手段は、圧力センサーの出力信号に基づい
て、流路の制御の応答時間が所定時間以上となったとき
に応答不良信号を発生する.通電不良検知手段は、ソレ
ノイドの通電電流の大きさが一定範囲外の値となったと
きに通電不良信号を発生する.
〔実施例〕
以下、本発明の実施例を図面を参照しつつ説明する.
第1図は本発明に係る電磁弁lの断面正面図である.
電磁弁lは、バルブ本体lOと、ソレノイドユニット2
0とから構成されている.
バルブ本体lOは、中央部を軸方向に貫通するバルブ室
11aを設けたバルブボディl1、バルブボディl1の
一端を塞ぐエンドカバー12、及びバルプボディ11の
他端に連結したパイロットベースl3からなる.
バルプボディl1には、バルブ室11aにそれぞれ達通
するボート(通気口) P, A, B, R..R8
が適当位置に設けられている.ボートPは、図外の空気
圧源に配管接続され、ボートA,Bは、外部装置である
空気圧シリンダ90に接続される.ポートR., R
mは排気口である.バルブ室11aには、両端にそれぞ
れ径小のピストンl7及び径大のピストン18を配した
スプール14が挿入されており、スプールl4の軸方向
に所定間隔をもって設けた径大部及び環状シール部材と
、バルブ室11aの内壁の適所に形威した突起部とが密
接することによって、バルブ室11aが仕切られ、各ポ
ートP,A,B,R.,Rl間の連通状態が切り替わる
ようになっている.
また、バルプボディ11には、ポートA内に電磁弁lの
動作不良を検知するための圧力センサー30が組み込ま
れている.圧力センサー30には、圧力の高低に応じた
信号をオンオフ信号に変換する波形整形回路が内蔵され
ている.
エンドカバー12には、ピストンl7が摺動するピスト
ン室17aが設けられ、ピストン室l7aは、エンドカ
バー12内部の通気路15aとバルブボディ11に穿孔
された通気路15とを介して常にポートPと連通してい
る.
パイロットベースl3には、ピストン18が摺動するピ
ストン室118aと、後述するブランジャー24の移動
によって開閉するパイロット弁l9とが設けられている
.ポートPRは、ピストン室18aからパイロット空気
を排気するための排気口である.
一方、ソレノイドユニット20には、モールドコイル2
2、鉄心23、及びプランジャー24からなる交流駆動
型のソレノイド25とともに、電磁弁lの動作不良を検
知する動作不良検知部40が備えられている.圧力セン
サー30の出力信号は、図外のリード線を介して動作不
良検知部40に入力される.
また、ソレノイドユニット20の上面には、外部からの
目視が容易な位置に、電磁弁1の動作状態を表示するた
めの表示LED31,32が設けられている.表示LE
D3 1は点灯時に緑色に発光し、表示LED32は赤
色に発光する.電磁弁lと図外の制御装置との電気的な
接続は、ソレノイドユニット20の固定ソケット26a
に着脱自在のプラグ26bによってワンタッチ配線され
たリード線群27を介して行われる.なお、図において
、15bはパイロット圧をパイロット弁l9へ導くため
の通気路、19aはプランジャー24と連動して移動す
るポベット、29はパイロット弁l9を手動で開閉する
ための手動操作部材である.
以上のように構成された電磁弁1は、周知の5ポート2
位直のパイロット型方向制御弁として動作する.
次に、電磁弁lの基本的な動作を簡単に説明する.
ソレノイド25に交流電圧を印加しないとき、つまり、
非通電時には、圧縮バネ28によってプランジャー24
がパイロットベースl3に押し付けられ、パイロット弁
19は閉じた状態(第1図の状態)となる.この状熊で
は、ボートPから供給される空気圧によってピストンl
7が押され、スプール14は第1図のように右端側へ移
動し、ポートAとボートPとが連通し、ボートBとポー
}Rgとが連通した波路が形成されている.ソレノイド
25に通電すると、磁力作用により、圧縮バネ28の付
勢力に抗してプランジャー24が鉄心23に引き寄せら
れ、パイロット弁l9が開く.これにより、通気路15
.15bなどを介して、ピストンl8にもポートPから
のパイロット圧が加わる.ピストン18はピストンl7
よりも径大であるので、スプールl4は左端側へ移動し
、ポートAがボートR.と連通し、ボートBがポートP
に連通するようにバルブ室11aが仕切られ流路が切り
替わる.
このように、電磁弁1の動作状態が良好の場合には、ソ
レノイド25に対する通電のオンオフによって圧縮空気
の流路の切り替え制御が行われ、ポートA及びボートB
における圧力が所定の応答時間をもって速やかに変化す
る.
しかしながら、例えば、適所に設けられたシール部材の
摩耗による気密漏れや塵埃の噛み込みなどにより、スプ
ールl4の移動が遅くなることがある.スブール14の
移動が遅くなると、通電のオンオフに対するポートA及
びポートBにおける圧力変化の応答時間が長くなる.つ
まり、電磁弁lの動作状態が応答不良状態になる。By the way, in general, not only solenoid valves but also various devices incorporated into equipment, in addition to failures where the functions are completely lost, malfunctions in which the functions deteriorate due to wear of seal members or clogging with dust, etc. It may become a state. In malfunctioning conditions, the problem with the overall operation of the equipment is minor, and in many cases it is possible to maintain the equipment's operational status.
If you continue to use the equipment in a malfunctioning state, the functionality may deteriorate and reach a failure state, which may cause the equipment to suddenly stop operating. Therefore, in order to prevent equipment from suddenly stopping, we conduct timely inspections to detect equipment malfunctions at an early stage, and if malfunctions are detected, parts are replaced or cleaned, and equipment is operated properly. It is necessary to keep it in good condition. However, the problem with conventional solenoid valves is that workers cannot easily know whether the solenoid valve is in good working condition. In other words, at the time of inspection,
Maintenance work was extremely troublesome, as the solenoid valve had to be removed from the equipment and disassembled. Inspections require a lot of time and effort, especially when a large number of solenoid valves are incorporated into the equipment. Furthermore, even if a malfunction occurred in equipment due to malfunction of a solenoid valve, it was not possible to quickly confirm that the cause of the malfunction was the solenoid valve. SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a solenoid valve that can easily determine whether the operating state is good or bad and can easily prevent failures. [Means for Solving the Problem] In order to solve the above-mentioned problem, the invention of claim 1 is a solenoid valve configured to control a wave path of a fluid using a solenoid activated by energization, It is characterized by having a built-in malfunction detection means that detects whether the solenoid valve is operating properly and generates a malfunction detection signal when the solenoid valve is malfunctioning. The invention of claim 2 is characterized in that the malfunction detecting means of the invention of claim 1 detects a malfunction when the response time of the pressure sensor and the flow path control based on the output signal of the pressure sensor exceeds a predetermined time. and a response failure detection means that generates a signal. The invention according to claim 3 is characterized in that the malfunction detection means according to the invention according to claim 1 includes energization failure detection means that generates a energization failure signal when the magnitude of the energizing current of the solenoid becomes a value outside a certain range. It is composed of the following characteristics: [Function] A solenoid is activated by electricity and controls the flow path of fluid. The malfunction detection means detects whether the solenoid valve is operating properly, and generates a malfunction detection signal when the solenoid valve is malfunctioning. A pressure sensor outputs an output signal according to pressure. The poor response detection means generates a poor response signal when the response time for controlling the flow path exceeds a predetermined time based on the output signal of the pressure sensor. The energization failure detection means generates an energization failure signal when the magnitude of the energizing current of the solenoid falls outside a certain range. [Examples] Examples of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional front view of a solenoid valve l according to the present invention. The solenoid valve l includes a valve body lO and a solenoid unit 2.
It consists of 0. The valve body 1O is composed of a valve body 11 having a valve chamber 11a passing through the center in the axial direction, an end cover 12 that closes one end of the valve body 11, and a pilot base 13 connected to the other end of the valve body 11. The valve body l1 has boats (vents) P, A, B, R, which respectively communicate with the valve chamber 11a. .. R8
is placed at an appropriate location. Boat P is connected to a pneumatic source (not shown) via piping, and boats A and B are connected to a pneumatic cylinder 90, which is an external device. Port R. , R
m is the exhaust port. A spool 14 is inserted into the valve chamber 11a, and has a small-diameter piston l7 and a large-diameter piston 18 arranged at both ends, respectively. The valve chamber 11a is partitioned by the close contact between the protrusions formed at appropriate places on the inner wall of the valve chamber 11a, and the ports P, A, B, R. , Rl can be switched. Further, the valve body 11 has a pressure sensor 30 built into the port A for detecting malfunction of the solenoid valve l. The pressure sensor 30 has a built-in waveform shaping circuit that converts a signal depending on the level of pressure into an on/off signal. The end cover 12 is provided with a piston chamber 17a in which the piston l7 slides, and the piston chamber l7a is always connected to the port P via a ventilation passage 15a inside the end cover 12 and a ventilation passage 15 bored in the valve body 11. It communicates with The pilot base l3 is provided with a piston chamber 118a in which the piston 18 slides, and a pilot valve l9 that opens and closes by movement of a plunger 24, which will be described later. Port PR is an exhaust port for exhausting pilot air from the piston chamber 18a. On the other hand, the solenoid unit 20 includes a molded coil 2.
2, an iron core 23, and an AC-driven solenoid 25 consisting of a plunger 24, as well as a malfunction detection section 40 for detecting malfunction of the solenoid valve l. The output signal of the pressure sensor 30 is input to the malfunction detection section 40 via a lead wire (not shown). Furthermore, display LEDs 31 and 32 for displaying the operating status of the solenoid valve 1 are provided on the top surface of the solenoid unit 20 at positions that are easily visible from the outside. Display LE
D31 emits green light when turned on, and the display LED 32 emits red light. Electrical connection between the solenoid valve l and a control device (not shown) is made through the fixed socket 26a of the solenoid unit 20.
This is done via a group of lead wires 27 that are wired in one-touch using a detachable plug 26b. In the figure, 15b is an air passage for guiding pilot pressure to pilot valve l9, 19a is a pot that moves in conjunction with plunger 24, and 29 is a manual operation member for manually opening and closing pilot valve l9. .. The solenoid valve 1 configured as described above is a well-known 5-port 2
Operates as a direct pilot type directional control valve. Next, the basic operation of the solenoid valve l will be briefly explained. When no AC voltage is applied to the solenoid 25, that is,
When de-energized, the plunger 24 is compressed by the compression spring 28.
is pressed against the pilot base l3, and the pilot valve 19 is in the closed state (the state shown in Fig. 1). In this case, the piston l is caused by the air pressure supplied from the boat P.
7 is pressed, the spool 14 moves to the right end side as shown in Fig. 1, and a wave path is formed in which port A and boat P communicate with each other, and boat B and port Rg communicate with each other. When the solenoid 25 is energized, the plunger 24 is drawn toward the iron core 23 by magnetic force against the biasing force of the compression spring 28, and the pilot valve l9 opens. As a result, the ventilation path 15
.. Pilot pressure from port P is also applied to piston 18 via port 15b. Piston 18 is piston l7
Since the diameter is larger than that of boat R., spool l4 moves to the left end side, and port A is connected to boat R. and boat B communicates with port P.
The valve chamber 11a is partitioned and the flow path is switched so as to communicate with the valve chamber 11a. In this way, when the operating state of the solenoid valve 1 is good, switching control of the compressed air flow path is performed by turning on and off the energization to the solenoid 25, and the flow path of the compressed air is controlled to be switched between the port A and the boat B.
The pressure at changes quickly with a predetermined response time. However, for example, the movement of the spool l4 may be slowed down due to leakage of airtightness due to wear of the sealing member provided at a proper location, or due to the entrapment of dust. If the movement of the subur 14 is slow, the response time of pressure changes at ports A and B to on/off of energization becomes longer. In other words, the operating state of the solenoid valve 1 becomes a poor response state.
また、プランジャー24と鉄心23との間に微小な塵埃
が混入するなどして、通電時において、プランジャー2
4と鉄心23との吸着が不完全になった場合には、プラ
ンジャー24が軸方向に振動し、電磁弁1の動作状態が
通電不良状態になる.第5図はソレノイド25の通電電
流の変化を示す図である.
電磁弁lの動作状態が良好の場合には、図中の曲線jの
ように、電流の大きさは、起動からプランジャー24の
移動に伴って徐々に小さくなり、ブランジャー24と鉄
心23とが吸着した後には、一定の保持電流値hになる
.これに対し、通電不良状態では、曲線kのように、保
持電流値hまで小さくならず且つプランジャー24の振
動にともなって変動する.通電不良状態のまま放置する
と、モールドコイル22が断線するなどして電磁弁lが
故障する可能性がある.
本実施例の電磁弁lに内蔵された動作不良検知部40は
、電磁弁lの動作状態が、上述の応答不良状態又は通電
不良状態のような不良状態となったときに動作不良検知
信号SOを出力する.第2図は動作不良検知部40の構
戒を示すブロック図、第3図及び第4図は動作不良検知
部40の動作を示すタイ1ングチャートである.動作不
良検知部40は、通電不良検知部4l、応答不良検知部
42、及び信号出力部43から構成されている.
通電不良検知部41は、ソレノイド25の通電電流の値
を電圧僅に変換する電流電圧変換部5l、通電電流の所
定の値Xa (第5図参照)に対応した基準電圧を発
生する基準電圧発生部52、電流電圧変換部51の出力
が基準電圧発生部52の出力より大きいときにrl{J
となる信号S53を出力する比較部53、及び信号S5
3がrH,となったときに通電不良信号Sl(アクティ
ブハイ)を出力する信号保持部54からなる.電流電圧
変換部51には、起動時のピーク電流に対する追従を避
けるための時定数回路を有している.応答不良検知部4
2は、ソレノイド25に対する通電のオンオフのタイミ
ングを検出するエッジ検出部6L圧カセンサー30の出
力信号S30の立上がり及び立下がりのタイミングを検
出するエッジ検出部62、エッジ検出部61の出力信号
S61によって計時を開始し、時間tlを計時したとき
にタイムアップ信号としての応答不良信号32(アクテ
ィブハイ)を出力するタイマ一部63、及び応答不良信
号S2を保持する信号保持部64からなる.タイマ一部
63はエッジ検出部62の出力信号S62によってリセ
ットされる.また、信号出力部43は、通電不良信号S
1及び応答不良信号S2の少なくとも一方が「H」のと
きに動作不良検知信号SOを出力する論理和回路71、
及び通電不良信号S1及び応答不良信号S2の双方がと
もに「L』のときのみ動作良好信号S72を出力する論
理積回路72を有している.動作不良検知信号SOは、
図外の制御装置へ送られるとともに表示LED32に加
えられ、動作良好信号372は、表示LED3 1に加
えられる.第3図において、電磁弁1の動作が良好の場
合には、通電不良信号S1はrl,Jであるが、通電電
流が値■.を越え、通電不良状態になると、比較部53
の出力信号S53が最初にrHJとなった時点で通電不
良信号Slが「H」となる.したがって、動作不良検知
信号SOも「H」となり、表示LED32が点灯する.
通電不良信号S1のrl{J状態は、電磁弁1の動作状
態が不良となったことを作業者が確認し、図外のリセッ
トスイッチを操作することによって信号保持部54をリ
セットするまで持続される.なお、制御装置は、動作不
良検知信号SOに基づいて、集中管理パネルなどにおい
て不良状態の発生の表示を行う.
第4図において、電磁弁1の動作が良好の場合であって
も、通電のオンオフのタイξングから所定の応答時間t
oをもって、圧力センサー30の出力信号S30が立下
がり又は立上がる.このとき、タイマ一部63は、オン
オフのタイミングで計時動作を開始するが、圧力センサ
ー30の出力信号S30の立下がり又は立上がりのタイ
ミングで、タイムアップ以前にリセットされるので、応
答不良信号S2はrl,Jである.
電磁弁lの応答時間、つまり、通電のタイくングと出力
信号S30の変化のタイミングとの時間差が、所定の時
間tl (tl>to)より長い応答不良状態では、タ
イマ一部63がタイムアップし、応答不良信号S2がr
H,になる.したがって、動作不良検知信号SOはrl
{Jになり、表示LED32が点灯する.
応答不良信号S2の「H』状態は、信号保持部64をリ
セットするまで持続される.
つまり、電磁弁1では、動作状態が良好のときにば、緑
色に発光する表示LED3 1が点灯し、一旦動作状態
が不良になると、リセット操作を行うまで赤色に発光す
る表示LED32が点灯する.但し、電磁弁lは、不良
状態が検知され表示LED32が点灯した状態であって
も、空気圧シリンダ90の動作における支障は軽微であ
り、電磁弁lの動作を継続させることができる.
上述の実施例によると、表示LED32を設け動作状態
が不良状態になったことを表示するようにしたので、点
検時において、電磁弁lの動作の良否を外部からの目視
によりl認することができる.また、動作不良検知信号
SOを中央の制御装置に出力することによって、電磁弁
Iの動作状態を集中的の管理し、故障発生を予知して未
然に防止することができる.
上述の実施例において、動作不良検知部40に、電磁弁
lの使用延べ時間又は使用回数が設定値になったときに
不良検知信号を出力する寿命検知手段を設けることがで
きる.
上述の実施例において、圧力センサー30をボ−}Bに
設けてもよい.また、ポートA及びBに圧力センサー3
0を設け、少なくとも一方のポートにおける圧力変化の
応答時間が設定した時間よりも長くなったときに応答不
良信号S2を発生させるようにしてもよい.
上述の実施例において、通電不良検知部4l及び応答不
良検知部42の構成、バルブ本体lO及びソレノイドユ
ニット20の形状、材質などは、種々変更可能である.
例えば、タイマ一部63としては、エッジ検出部61の
出力信号561により充電が開始され、エッジ検出部6
2の出力により急速放電されるコンデンサと、コンデン
サの充電電圧が所定電圧より大きくなったときに応答不
良信号S2を出力する比較回路、又は基準クロックパル
スの数を計数するカウンタなと、公知の計時手段を用い
ることができる.
〔発明の効果〕
本発明によると、動作状態の良否を容易に知ることがで
き、故障発生の防止の容易化を図ることができる.Also, if minute dust gets mixed in between the plunger 24 and the iron core 23, the plunger 2
4 and the iron core 23 become incomplete, the plunger 24 vibrates in the axial direction, and the operating state of the solenoid valve 1 becomes a energization failure state. FIG. 5 is a diagram showing changes in the current applied to the solenoid 25. When the operating state of the solenoid valve l is good, the magnitude of the current gradually decreases as the plunger 24 moves from startup, as shown by the curve j in the figure, and the magnitude of the current decreases between the plunger 24 and the iron core 23. After adsorption, the holding current value h becomes constant. On the other hand, in an energization failure state, as shown by curve k, the current does not decrease to the holding current value h and fluctuates as the plunger 24 vibrates. If left in a state of poor energization, the molded coil 22 may break or the solenoid valve l may malfunction. The malfunction detection unit 40 built into the solenoid valve l of this embodiment sends a malfunction detection signal SO when the operating state of the solenoid valve l becomes a malfunction state such as the above-mentioned poor response state or poor energization state. Outputs . FIG. 2 is a block diagram showing the structure of the malfunction detection section 40, and FIGS. 3 and 4 are timing charts showing the operation of the malfunction detection section 40. The malfunction detection section 40 includes a conduction failure detection section 4l, a response failure detection section 42, and a signal output section 43. The energization failure detection unit 41 includes a current-voltage conversion unit 5l that converts the value of the energized current of the solenoid 25 into a voltage, and a reference voltage generator that generates a reference voltage corresponding to a predetermined value Xa (see FIG. 5) of the energized current. section 52, when the output of the current-voltage conversion section 51 is larger than the output of the reference voltage generation section 52, rl{J
A comparator 53 outputting a signal S53 and a signal S5
3 is rH, the signal holding section 54 outputs a conduction failure signal Sl (active high). The current-voltage converter 51 has a time constant circuit to avoid following the peak current at startup. Poor response detection unit 4
2 is an edge detection unit 6L that detects the on/off timing of energization to the solenoid 25; an edge detection unit 62 that detects the rising and falling timings of the output signal S30 of the pressure sensor 30; and an edge detection unit 61 that detects the timing of the output signal S61 of the edge detection unit 61. It consists of a timer part 63 that outputs a poor response signal 32 (active high) as a time-up signal when the time t1 is started and a time tl is counted, and a signal holding part 64 that holds the poor response signal S2. The timer section 63 is reset by the output signal S62 of the edge detection section 62. The signal output unit 43 also outputs a energization failure signal S.
an OR circuit 71 that outputs a malfunction detection signal SO when at least one of the response failure signal S2 and the response failure signal S2 is "H";
and an AND circuit 72 that outputs a good operation signal S72 only when both the energization failure signal S1 and the response failure signal S2 are "L".The operation failure detection signal SO is
A good operation signal 372 is sent to a control device (not shown) and applied to the display LED 32, and is applied to the display LED 31. In FIG. 3, when the solenoid valve 1 is operating well, the energization failure signal S1 is rl,J, but the energization current is at the value . When the voltage exceeds the voltage and becomes a poor energization state, the comparator 53
When the output signal S53 first becomes rHJ, the energization failure signal Sl becomes "H". Therefore, the malfunction detection signal SO also becomes "H" and the display LED 32 lights up. The rl{J state of the energization failure signal S1 continues until the operator confirms that the operating state of the solenoid valve 1 has become defective and resets the signal holding unit 54 by operating a reset switch (not shown). Ru. Note that the control device displays the occurrence of a malfunction on a central control panel or the like based on the malfunction detection signal SO. In FIG. 4, even if the solenoid valve 1 is operating well, a predetermined response time t from the energization on/off timing is shown.
o, the output signal S30 of the pressure sensor 30 falls or rises. At this time, the timer part 63 starts timing operation at the on/off timing, but is reset before the time is up at the falling or rising timing of the output signal S30 of the pressure sensor 30, so the response failure signal S2 is rl, J. When the response time of the solenoid valve l, that is, the time difference between the timing of energization and the timing of change of the output signal S30 is in a poor response state that is longer than the predetermined time tl (tl>to), the timer part 63 times out. Then, the response failure signal S2 is r
It becomes H. Therefore, the malfunction detection signal SO is rl
{J, and the display LED 32 lights up. The "H" state of the poor response signal S2 is maintained until the signal holding unit 64 is reset.In other words, in the solenoid valve 1, when the operating state is good, the display LED 31, which emits green light, lights up. Once the operating state becomes defective, the red indicator LED 32 lights up until a reset operation is performed. The hindrance in operation is slight, and the operation of the solenoid valve l can be continued.According to the above-mentioned embodiment, the display LED 32 is provided to indicate that the operating state has become defective, so that it can be checked at the time of inspection. , the operation status of the solenoid valve I can be checked visually from the outside.In addition, by outputting the malfunction detection signal SO to the central control device, the operation status of the solenoid valve I can be checked centrally. In the above-described embodiment, the malfunction detection unit 40 detects a malfunction when the total usage time or number of times of use of the solenoid valve l reaches a set value. Life detection means for outputting a signal may be provided. In the above embodiment, pressure sensor 30 may be provided at port A and port B.
0 may be provided, and the poor response signal S2 may be generated when the response time of pressure change in at least one port becomes longer than the set time. In the embodiments described above, the configurations of the energization failure detection section 4l and the response failure detection section 42, the shape and material of the valve body IO and the solenoid unit 20, etc. can be changed in various ways.
For example, as the timer part 63, charging is started by the output signal 561 of the edge detection part 61, and the edge detection part 6
2, a comparator circuit that outputs a response failure signal S2 when the charging voltage of the capacitor becomes higher than a predetermined voltage, or a counter that counts the number of reference clock pulses, as well as a known timer. means can be used. [Effects of the Invention] According to the present invention, it is possible to easily know whether the operating state is good or bad, and it is possible to easily prevent the occurrence of failures.
第1図は本発明に係る電磁弁lの断面正面図、第2図は
動作不良検知部の構成を示すブロック図、第3図及び第
4図は動作不良検知部の動作を示すタイミングチャート
、第5図はソレノイドの通電電流の変化を示す図である
l・・・電磁弁、25・・・ソレノイド、30・・・圧
力センサー、40・・・動作不良検知部(動作不良検知
手段)、4l・・・通電不良検知部(通電不良検知手段
)、42・・・応答不良検知部(応答不良検知手段)、
SO・・・動作不良検知信号、S1・・・通電不良信号
、S2・・・応答不良信号.FIG. 1 is a cross-sectional front view of a solenoid valve l according to the present invention, FIG. 2 is a block diagram showing the configuration of the malfunction detection section, FIGS. 3 and 4 are timing charts showing the operation of the malfunction detection section, FIG. 5 is a diagram showing changes in the energizing current of the solenoid. l... Solenoid valve, 25... Solenoid, 30... Pressure sensor, 40... Malfunction detection section (malfunction detection means), 4l...Positive energization detection section (poor energization detection means), 42...Poor response detection section (poor response detection means),
SO...Poor operation detection signal, S1...Poor energization signal, S2...Poor response signal.
Claims (3)
流路を制御するように構成された電磁弁であって、 当該電磁弁の動作の良否を検知し、動作が不良のときに
動作不良検知信号を発生する動作不良検知手段を内蔵し
てなる ことを特徴とする電磁弁。(1) A solenoid valve configured to control a fluid flow path using a solenoid activated by energization, which detects whether the solenoid valve is operating properly and generates a malfunction detection signal when the solenoid valve is malfunctioning. 1. A solenoid valve characterized by having a built-in means for detecting malfunction that occurs.
答時間が所定時間以上となったときに応答不良信号を発
生する応答不良検知手段と を備えてなる ことを特徴とする請求項1に記載の電磁弁。(2) The malfunction detection means includes a pressure sensor, and a response failure detection means that generates a response failure signal when the response time of control of the flow path exceeds a predetermined time based on the output signal of the pressure sensor. 2. The solenoid valve according to claim 1, comprising:
なったときに通電不良信号を発生する通電不良検知手段
を備えてなる ことを特徴とする請求項1に記載の電磁弁。(3) The malfunction detection means is characterized in that the malfunction detection means includes a conduction failure detection means that generates a conduction failure signal when the magnitude of the energization current of the solenoid falls outside a certain range. 1. The solenoid valve according to 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1155549A JP2892374B2 (en) | 1989-06-16 | 1989-06-16 | solenoid valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1155549A JP2892374B2 (en) | 1989-06-16 | 1989-06-16 | solenoid valve |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0320185A true JPH0320185A (en) | 1991-01-29 |
JP2892374B2 JP2892374B2 (en) | 1999-05-17 |
Family
ID=15608493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1155549A Expired - Fee Related JP2892374B2 (en) | 1989-06-16 | 1989-06-16 | solenoid valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2892374B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5437306A (en) * | 1993-11-30 | 1995-08-01 | Smc Corporation | Double-solenoid type electromagnetic valve |
US5443093A (en) * | 1993-03-25 | 1995-08-22 | Festo Kg | Control device for a multiway valve |
US5597015A (en) * | 1993-11-30 | 1997-01-28 | Smc Corporation | Electromagnetic pilot type selector valve |
JP2011141019A (en) * | 2010-01-11 | 2011-07-21 | Ckd Corp | Solenoid valve driving device, solenoid valve, solenoid valve driving method, and drive control program of solenoid valve driving device |
JP2011523005A (en) * | 2008-06-09 | 2011-08-04 | ロス オペレーティング バルブ カンパニー | Control valve system for cycle monitoring, diagnosis and prediction of performance degradation |
JP2020060202A (en) * | 2018-10-05 | 2020-04-16 | Ckd株式会社 | solenoid valve |
CN114738545A (en) * | 2022-05-07 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Valve control device and method, and semiconductor processing equipment |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6240377U (en) * | 1985-08-30 | 1987-03-10 | ||
JPS6343081A (en) * | 1986-08-06 | 1988-02-24 | Hitachi Constr Mach Co Ltd | Monitoring device for operating state of solenoid operated valve |
JPH0180887U (en) * | 1987-11-18 | 1989-05-30 |
-
1989
- 1989-06-16 JP JP1155549A patent/JP2892374B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6240377U (en) * | 1985-08-30 | 1987-03-10 | ||
JPS6343081A (en) * | 1986-08-06 | 1988-02-24 | Hitachi Constr Mach Co Ltd | Monitoring device for operating state of solenoid operated valve |
JPH0180887U (en) * | 1987-11-18 | 1989-05-30 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5443093A (en) * | 1993-03-25 | 1995-08-22 | Festo Kg | Control device for a multiway valve |
US5437306A (en) * | 1993-11-30 | 1995-08-01 | Smc Corporation | Double-solenoid type electromagnetic valve |
US5597015A (en) * | 1993-11-30 | 1997-01-28 | Smc Corporation | Electromagnetic pilot type selector valve |
JP2011523005A (en) * | 2008-06-09 | 2011-08-04 | ロス オペレーティング バルブ カンパニー | Control valve system for cycle monitoring, diagnosis and prediction of performance degradation |
JP2011141019A (en) * | 2010-01-11 | 2011-07-21 | Ckd Corp | Solenoid valve driving device, solenoid valve, solenoid valve driving method, and drive control program of solenoid valve driving device |
JP2020060202A (en) * | 2018-10-05 | 2020-04-16 | Ckd株式会社 | solenoid valve |
CN114738545A (en) * | 2022-05-07 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Valve control device and method, and semiconductor processing equipment |
Also Published As
Publication number | Publication date |
---|---|
JP2892374B2 (en) | 1999-05-17 |
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