JPH0320062A - Storage case of semiconductor wafer - Google Patents

Abstract

PURPOSE:To adjust the width of an opening, corresponding to the diameter of a wafer, by arranging the constitution such that both side plates of a storage case can be coupled freely in expansion and contraction by an upper plate and a lower plate. CONSTITUTION:This is equipped with opposed side plates 5 and 6, shelves 7 and 8, which mount wafers arranged inside the side plates, and an upper plate 1 and a lower plate 2, which couples fellow upper ends and fellow lower ends on both side plates with each other freely in expansion and contraction. And the side plates 5 and 6 are expanded or contracted according to the diameter of a wafer, and the upper plate 1 and the lower plate 2 are set to the side plates 5 and 6. Hereby, the width of a front opening can be adjusted, and there is no necessity to select and replace a storage case according to the diameter of a wafer.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a case for storing semiconductor wafers.

2. Description of the Related Art In general, semiconductor wafer storage cases (hereinafter simply referred to as storage cases) are used to store semiconductor wafers and transport them to semiconductor manufacturing equipment.

The conventional example shown in FIG. 4 is made entirely of Teflon, metal, etc. in a box shape, and 31 is the top plate, 32 is the bottom plate, and 33
34.35 is a rear plate, 34.35 is a storage plate, and 38.37 is a plurality of pairs of wafer mounting shelves formed to face each other among the two side plates 34.35. By placing the wafers 38 on the upper surfaces of the paired shelves 36 and 370 of the case, as shown in FIG. 5, a plurality of wafers can be stored in one storage case, and semiconductors can be stably Wafers can be transported to manufacturing equipment.

Problem to be Solved by the Invention However, in the conventional storage cane shown in Fig. 4, both side plates and top and bottom plates are fixed, and the width of the opening is constant, so the diameter corresponding to the width of the opening is fixed. There was a problem that only 100 wafers could be stored.

The present invention solves the above-mentioned conventional problems, and aims to provide a storage case in which the width of the opening can be adjusted in accordance with the diameter of the wafer.

Means for Solving the Problems In order to achieve this object, the storage case of the present invention has a structure in which the upper and lower ends of both side plates of the storage case are elastically connected by an upper plate and a lower plate. This is what I did. First, there were cutouts in the shelves on both side panels, into which rods could be attached.

Depending on the structure, the top plate button and the bottom plate can be telescopically connected, and the rod can be attached to any position, so the width of the opening of the storage case can be adjusted according to the wafer diameter. Depth can be adjusted.

EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. Figure 1 shows an embodiment of the present invention, which is made of Teflon, metal, etc. and is shaped like a box. 1 is the top plate, 2 is the bottom plate, and 3 and 4 are the back plates. , 5 and 6 are side plates; 7 and 8 are a plurality of pairs of wafer mounting shelves formed so as to face each other inside the two side plates 6.6; 9.1
Reference numerals 0, 11, and 12 are upper and lower plate holders provided at the upper and lower ends of the two side plates 6.6, respectively.

After expanding and contracting the side plates 5 and 6 of this storage case in directions A and B to make the width of the opening correspond to the wafer diameter, the wafers are placed on the upper surface of the paired shelves 9 and 10. Especially,
Multiple wafers can be stored in one storage case.

FIG. 2 shows another embodiment of the present invention: parts with the same names as in FIG.
14, 15, and 16 are the top plate 1 and bottom plate 2 of the storage case.
and a bottle, 17., which is detachably attached to the holding parts 9, 10, 11.12. 1 8. 1 9, 20 are holding parts 9, 10, 11 . A pin insertion hole provided in 12, 2
Numerals 1, 22, 23, and 24 are pin insertion holes provided in the upper plate and the lower plate 2. The side plates 3 and 4 are expanded and contracted according to the wafer diameter, and the pins 11 and 1 are inserted at arbitrary positions.
By attaching 2, 13 and 14, the width of the front opening can be fixed.

FIG. 3 shows a third embodiment of the present invention.
Parts with the same names as those in Figures and Figure 2 are given the same symbols. 25. 26 is a rod that is detachably attached to the back opening, 27.28 is a number of rod insertion holes provided in the holding parts 9 and 1o, and 29 and 30 are shelves 7.
The notch provided at 8 forms a holding part for the rod 25, 26 together with the rod insertion hole 27, 28. The rods 25 and 26 can be inserted at arbitrary positions depending on the wafer diameter.
It is possible to create a storage depth commensurate with the wafer diameter.

Effects of the Invention As explained above, according to the present invention, the side plate can be expanded and contracted according to the wafer diameter, the top plate and the bottom plate can be temporarily joined on the sides, and a rod can be inserted into the back of the storage case. Since the width and depth of the front opening can be adjusted, there is no need to replace or select storage cases depending on the wafer diameter, leading to improved efficiency.

FIG. 2 is a perspective view of a second embodiment of the present invention provided with fixing means for fixing the top plate and the bottom plate to the side plates, and FIG. 3 is a side view of the second embodiment of the present invention. A perspective view of a third embodiment of the present invention in which a notch is provided in the wafer mounting shelf inside the face plate and this is used as a bar holding part, FIG. 4 is a perspective view of a conventional storage case, and FIG. 6 is a perspective view of a conventional storage case. FIG. 3 is a front view showing a state in which wafers are stored in the same storage case.

1...Top plate, 2...Lower plate, 3.4
...Back board, 6,6...Side board, 7,
8...Wafer mounting shelf, 9, 10, 11. 1
2...Top plate, bottom plate holding part, 13, 14, 1
5.16...Pin, 17,18,19.20・
...Holding pin insertion hole, 21, 22, 23.24
...Top plate, bottom plate pin insertion hole, 25.26.
...rod, 27.28...rod insertion hole, 29
,30...notch.

Claims (3)

[Claims] (1) Side plates facing each other, multiple pairs of shelves for placing wafers arranged to face each other on the inside of each side plate, and upper and lower ends on both sides are telescopically connected. A storage case for semiconductor wafers, comprising a top plate and a bottom plate. (2) A storage case for semiconductor wafers as set forth in claim 1, further comprising fixing means for fixing the top plate and the bottom plate to both side plates at arbitrary expansion/contraction positions. (3) For example, a notch is formed at an arbitrary position on multiple pairs of left and right shelves, and a bar is detachably attached to the notch to prevent wafers stored inside from escaping from the back of the storage case. A storage case for semiconductor wafers according to claim 1 or 2, characterized by comprising: