JPH03196964A - Workpiece polishing method and device - Google Patents

Workpiece polishing method and device

Info

Publication number
JPH03196964A
JPH03196964A JP1334281A JP33428189A JPH03196964A JP H03196964 A JPH03196964 A JP H03196964A JP 1334281 A JP1334281 A JP 1334281A JP 33428189 A JP33428189 A JP 33428189A JP H03196964 A JPH03196964 A JP H03196964A
Authority
JP
Japan
Prior art keywords
workpiece
polishing
abradant
polished
fluidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1334281A
Other languages
Japanese (ja)
Inventor
Yasuo Usui
臼井 保夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1334281A priority Critical patent/JPH03196964A/en
Publication of JPH03196964A publication Critical patent/JPH03196964A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the extent of polishing speed and accuracy by reciprocating a fluidic abradant on a polished surface as rotating relatively with this surface. CONSTITUTION:A fluidic abradant 5 filled up in a pressure body 6 on one side passes through a polished surface of a workpiece 1 held in space between holders 4 by a pressurizing means 10, and then it flows into the pressure body 6 on the other. When preset pressurization is carried out by a control means 11, the fluidic abradant 5 shifted to the pressure body 6 on the other flows into the first pressure body by the pressurizing means 10. With a series of operations repeated, the fluidic abradant 5 reciprocates whereby abrasive operation on the polished surface is thus performed in succession. In addition, since the fluidic abradant 5 relatively rotates with the polished surface, at time of the abradant 5 flowing, a flowing direction of the abradant 5 will not come to a direction going along a vertical grinding line turned up on the polished surface 1 but come to a crossing direction. Consequently, the extent of polishing speed and accuracy is improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は粘弾性体に砥粒を混合した流動性研磨材を被加
工物の被研磨面に高圧力で接せしめた状態で、加圧流動
せしめることにより上記被研磨面の研磨を行なう研磨方
法および装置に関するものであり、特に、ワイヤ放電加
工等により軸方向に研削筋を有する金型ダイの孔を研磨
する加工物の研磨方法および研磨装置に関するものであ
る。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention involves applying a fluid abrasive material, which is a mixture of a viscoelastic material and abrasive grains, in contact with the polished surface of a workpiece under high pressure. The present invention relates to a polishing method and apparatus for polishing the surface to be polished by flowing fluid, and in particular to a method and apparatus for polishing a workpiece for polishing a hole in a mold die having grinding lines in the axial direction by wire electrical discharge machining or the like. It is related to the device.

〔従来の技術〕[Conventional technology]

従来、この種の研磨方法および装置としては、特開昭5
9−156661号、特開昭59−156662号公報
に記載されているように流動性研磨材を被加工物の被研
磨面に圧接しつつ略直線的に往復運動させ、上記被加工
物の研磨面を摩擦流動通過させて行なう方法および装置
が知られており、その概略を第7図に示す。
Conventionally, this type of polishing method and device was disclosed in Japanese Patent Application Laid-open No. 5
As described in No. 9-156661 and Japanese Unexamined Patent Publication No. 59-156662, a fluid abrasive is brought into pressure contact with the polished surface of the workpiece and reciprocated approximately linearly, thereby polishing the workpiece. A method and apparatus for applying frictional flow through a surface are known, and are schematically shown in FIG.

同図において、α榎は被加工物であり、その内部面であ
る被研磨面Q8a)を挾むように被加工物上方開口部及
び下方開口部に夫々加圧シリンダα呻が対向し配置され
ている。(イ)、(2)は加圧ピストン、(2)、@は
ボールスクリュ、(2)、@は駆動モータ、(2)は駆
動モータ(2)を制御する制御装置、(2)は上下加圧
シリンダ、α埠、α呻間に充填した流動性研磨材である
In the figure, the α cylinder is a workpiece, and pressurizing cylinders α are disposed facing each other at the upper and lower openings of the workpiece so as to sandwich the surface to be polished Q8a), which is the inner surface of the workpiece. . (a), (2) are pressurized pistons, (2), @ are ball screws, (2), @ are drive motors, (2) are control devices that control the drive motor (2), (2) are upper and lower This is a fluid abrasive material filled between the pressurized cylinder, α hole, and α hole.

上記構成の研磨装置における研磨加工によると、まず制
御装置(ハ)により駆動モータ(2)、(支)を駆動し
てピストン(2)、勾により流動性研磨材(2)を加圧
する。加圧により流動性研磨材(2)は研磨面Q8a)
に充分に加圧密着した状態となる。このようにしてピス
トン翰、@間に研磨材(2)を加圧挟持した状態で駆動
モータ(イ)、(イ)を同時駆動し、上下相対往復運動
を行ない、被研磨面Q8a)を研磨するというものであ
った。
According to the polishing process in the polishing apparatus having the above configuration, first, the drive motor (2) and (support) are driven by the control device (c) to pressurize the fluid abrasive material (2) by the piston (2) and the gradient. By applying pressure, the fluid abrasive material (2) has a polished surface Q8a)
It will be in a state where it is fully pressurized and in close contact with. In this way, with the abrasive material (2) held under pressure between the piston rods, the drive motors (a) and (a) are simultaneously driven to perform vertical and relative reciprocating motion to polish the surface to be polished Q8a). The plan was to do so.

C発明が解決しようとする課題〕 ところで、被加工物(至)である金型ダイの形成はワイ
ヤ放電加工でなされるのが一般的であり、この場合、穿
設された孔には軸方向の研削筋が多数現われる。
Problem to be solved by invention C] By the way, the mold die, which is the workpiece, is generally formed by wire electric discharge machining, and in this case, the drilled hole has an axial direction. Many grinding lines appear.

前記従来技術により上記被加工物の被研磨面Q8a)を
研磨した場合、流動性研磨材(2)は加圧方向、つまり
、ピストンの移動方向に流動するのみであり、被研磨面
Q8a)の研削筋を十分に研削するのにかなりの時間を
要し、また、十分に研磨しても表面のうねりとなり、良
好な研磨精度が得られなかった。
When the surface to be polished Q8a) of the workpiece is polished by the conventional technique, the fluid abrasive material (2) flows only in the direction of pressure, that is, in the direction of movement of the piston, and the surface to be polished Q8a) is polished. It took a considerable amount of time to sufficiently grind the grinding streaks, and even after sufficient polishing, the surface became undulated, making it impossible to obtain good polishing accuracy.

本発明は上記課題に鑑みてなしたものであり、目的とす
るところは、この種の研磨加工(一般的に砥粒流動研磨
加工と称される)における研磨時間の短縮および研磨精
度の向上を図った研磨方法および装置を提供することに
ある。
The present invention has been made in view of the above problems, and its purpose is to shorten the polishing time and improve polishing accuracy in this type of polishing process (generally referred to as abrasive flow polishing process). It is an object of the present invention to provide a polishing method and apparatus.

〔課題を解決する/:めの手段〕[Means for solving/: solving problems]

上記目的を達成するために、本発明は流動性研磨材の流
動方向を単に被研磨面の研削筋に添う方向とするのでは
なく、被研磨面の研削筋に対し交差する方向とし、被研
磨面を研磨する構成とした。
In order to achieve the above object, the present invention makes the flowing direction of the fluid abrasive not just along the grinding streaks on the surface to be polished, but in a direction that intersects with the grinding streaks on the surface to be polished. The structure is such that the surface is polished.

即ち、本発明は、粘弾性物質に砥粒を混合した流動性研
磨材を、被加工物の被研磨面に圧接し流動させて行なう
研磨方法において、上記流動性研磨材が被研磨面上を、
該被研磨面と相対的に回転しつつ往復運動することを特
徴とする研磨方法であり、さらに、上記方法を実施する
装置として、流動性研磨材を充填加圧する加圧体を、被
加工物を把持する保持具を挾んで配置すると共に、上記
流動性研磨材を被加工物の被研磨面を通過させる加圧手
段と、上記流動性研磨材と被加工物の被研磨面2を相対
的に回転せしめる回転手段とを具備してなる研磨装置で
ある。
That is, the present invention provides a polishing method in which a fluid abrasive material, which is a mixture of a viscoelastic substance and abrasive grains, is brought into pressure contact with the surface to be polished of a workpiece and is made to flow. ,
This polishing method is characterized by reciprocating while rotating relative to the surface to be polished, and furthermore, as an apparatus for carrying out the above method, a pressurizing body filled with a fluid abrasive and pressurized is attached to the workpiece. A pressurizing means for passing the fluid abrasive material through the surface to be polished of the workpiece, and a pressurizing means for moving the fluid abrasive material and the surface to be polished 2 of the workpiece relative to each other. This polishing device is equipped with a rotating means for rotating the polishing device.

〔作用〕[Effect]

一方の加圧体内に充填させた流動性研磨材は、加圧手段
により保持具間に把持された被加工物の被研磨面を通過
し、他方の加圧体へ流動する。
The fluid abrasive filled in one pressurizing body passes through the polished surface of the workpiece held between the holders by the pressurizing means, and flows to the other pressurizing body.

そして、制御手段によりあらかじめ規定した加圧が行な
われると他方の加圧体内に移行した流動性研磨材が加圧
手段により最初の加圧体内に流動する。
Then, when a predetermined pressure is applied by the control means, the fluid abrasive material that has moved into the other pressurizing body is caused to flow into the first pressurizing body by the pressurizing means.

上記一連の動作が繰返されることにより、流動性研磨材
は往復運動し、連続的に被研磨面の研磨が行なわれる。
By repeating the above series of operations, the fluid abrasive moves back and forth, and the surface to be polished is continuously polished.

さらに、流動性研磨材が被研磨面に対して相対的に回転
しているため、上記流動性研磨材の流動時には、その流
動性研磨材の流動方向が被加工物の被研磨面に現われた
縦方向の研削筋に添う方向となるのではなく、交差する
方向となるので、研磨速度および研磨精度は向上する。
Furthermore, since the fluid abrasive rotates relative to the polished surface, when the fluid abrasive flows, the flow direction of the fluid abrasive appears on the polished surface of the workpiece. Since the direction is not along the vertical grinding lines but intersects them, the polishing speed and polishing accuracy are improved.

以下、本発明の一実施例を図面に基づき説明する。Hereinafter, one embodiment of the present invention will be described based on the drawings.

〔実施例1〕 第1図に示すように、(1)は被加工物であり、その被
研磨面(2)を挾むように被加工物上下開口部(3)に
夫々保持具(4)を介して流動性研磨材(5)を充填し
た加圧シリンダ(6)を対向して配置し研磨装置Aを構
成する。
[Example 1] As shown in Fig. 1, (1) is a workpiece, and holders (4) are installed in the upper and lower openings (3) of the workpiece so as to sandwich the surface (2) to be polished. Pressure cylinders (6) filled with a fluid abrasive material (5) are disposed facing each other to constitute a polishing apparatus A.

上記保持具(4)、(4)の中央部には第2図に示すよ
うに孔(7)が穿設されており、上記孔(7)の周面に
はスパイラル状溝(8)が施されている。
As shown in Figure 2, a hole (7) is bored in the center of the holders (4), (4), and a spiral groove (8) is formed on the circumferential surface of the hole (7). It has been subjected.

第3図は本発明の研磨装置Aを用いて被加工物を加工す
る研磨加工機の一実施例を示し、(9)。
FIG. 3 shows an embodiment of a polishing machine for processing a workpiece using the polishing apparatus A of the present invention (9).

(9)は加圧ピスト701.0時を作動する油圧シリン
ダであり、加圧ポンプ(図示せず)に接続されている。
(9) is a hydraulic cylinder that operates the pressurizing piston 701.0, and is connected to a pressurizing pump (not shown).

αυは加圧ボンダの加圧力、加圧速度等を制御する制御
装置である。
αυ is a control device that controls the pressurizing force, pressurizing speed, etc. of the pressurizing bonder.

また、上部加圧シリンダはハウジング(2)に固設され
、両ハウジング間はその空間調節が可能となるように、
ハウジングυが油圧シリンダα■に連結されている。
In addition, the upper pressurizing cylinder is fixed to the housing (2), and the space between both housings can be adjusted.
The housing υ is connected to a hydraulic cylinder α■.

さらに、流動性研磨材(5)の往復運動が連続して行な
われるよう加圧手段である加圧ボンダと制御装置αυを
連結する。
Further, a pressure bonder serving as a pressure means is connected to a control device αυ so that the fluid abrasive material (5) can continuously reciprocate.

上記構成の研磨加工機においては、上下ハウジング間を
油圧シリンダ(至)により拡げ、被加工物を下部保持具
に載置した後、上記油圧シリンダ(2)により上部ハウ
ジング(ロ)をS;712zL被加工物(1)を上下保
持AC4)、(4)により把持する。
In the polishing machine with the above configuration, after the space between the upper and lower housings is expanded by the hydraulic cylinder (2) and the workpiece is placed on the lower holder, the upper housing (2) is moved by the hydraulic cylinder (2). The workpiece (1) is held by the upper and lower holding AC4), (4).

そして、制御装置α0により加圧ボンダを駆動して加圧
ピストンを移動させ、流動性研磨材(5)を加圧する。
Then, the pressure bonder is driven by the control device α0 to move the pressure piston and pressurize the fluid abrasive material (5).

加圧により上記流動性研磨材(5)は被研磨面(2)に
充分に加圧密着した状態となる。
By applying pressure, the fluid abrasive material (5) comes into close contact with the surface to be polished (2) under sufficient pressure.

このようにして、加圧ピストンαI、αΦ間に流動性研
磨材(5)を加圧挾持した状態で一方の油圧シリンダ(
9)内の加圧力を増し、上記流動性研磨材(5)の流動
を開始する。
In this way, one hydraulic cylinder (
9) to start flowing the fluid abrasive material (5).

一方向の流動を終了すると、制御装置により他方の油圧
シリンダ(9)内の加圧力を増し、流動性研磨材(5)
を逆方向に流動させる。
When the flow in one direction is finished, the pressure in the other hydraulic cylinder (9) is increased by the control device, and the flowable abrasive material (5) is
flow in the opposite direction.

以上のようにして流動性研磨材(5)は、保持具(4)
に施したスパイラル状溝(8)によって回転しつつ上下
に相対往復運動を行なう。
As described above, the fluid abrasive material (5) is attached to the holder (4).
The spiral groove (8) provided in the shaft allows the shaft to perform relative reciprocating motion up and down while rotating.

なお、上記加圧手段としては油圧ポンプを用いたが、エ
アポンプ、駆動モータ等によっても何ら差支えないもの
である。
Although a hydraulic pump is used as the pressurizing means, an air pump, a drive motor, etc. may also be used.

また、上記実施例においては、流動性研磨材(5)の回
転手段として、保持具(4)、(4)にスパイラル状溝
(8)を施したが、第4図に示すように、加圧シリンダ
(6)、(6)の一部にスパイラル状溝(8)を施して
も同等の効果が期待できる。なお、この場合は、保持具
(4)を用いずに、被加工物(1)を直接加圧シリンダ
(6) 、 (6)間に挾持することもできる。
In addition, in the above embodiment, the spiral grooves (8) were formed in the holders (4), (4) as means for rotating the fluid abrasive material (5), but as shown in FIG. The same effect can be expected even if a spiral groove (8) is formed in a part of the pressure cylinders (6), (6). In this case, the workpiece (1) can also be directly held between the pressure cylinders (6) and (6) without using the holder (4).

〔実施例2〕 第5図において、04)は加圧ピストンα啼、α啼のピ
ストンヘッドに設けられた突状体である。
[Embodiment 2] In FIG. 5, 04) is a protrusion provided on the piston head of the pressure pistons α and α.

加圧手段として、加圧ピストンα啼、α啼と油圧ポンプ
とを連接するスプラインシャフトを設けると共に、回転
手段として上記スプラインシャフトに噛み合うプーリー
を設け、駆動モータと連結して、加圧ピストンαS、(
USを回転しつつ相対的に往復運動させる機構とする。
As the pressurizing means, a spline shaft connecting the pressurizing pistons αS, αS and the hydraulic pump is provided, and as a rotating means, a pulley that meshes with the spline shaft is provided, which is connected to a drive motor, and the pressurizing pistons αS, αS, (
The mechanism is such that the US is rotated and relatively reciprocated.

上記構成により、流動性研磨材(5)は回転しつつ往復
運動し、被加工物(1)の被研磨面(2)を研磨する。
With the above configuration, the fluid abrasive material (5) rotates and reciprocates to polish the polished surface (2) of the workpiece (1).

〔実施例3〕 本実施例は前述の実施例と異なり、流動性研磨材(5)
暑−転を付与するのではなく、被加工物(1)を回転す
ることで上記流動性研磨材(5)の流動方向と被研磨面
(2)に現われた研削筋とが交差するようになしたもの
で、第6図に概要を示す。
[Example 3] This example differs from the previous example in that the fluid abrasive (5)
Rather than applying heat rotation, the workpiece (1) is rotated so that the flow direction of the fluid abrasive (5) intersects with the grinding streaks appearing on the surface to be polished (2). The outline is shown in Figure 6.

同図において、被加工物(1)を保持する保持具α呻、
α呻はベアリングQηを介して回転可能に支持されてい
る。
In the figure, a holder α for holding the workpiece (1),
The α shaft is rotatably supported via a bearing Qη.

上記保持具αφと駆動モータとをベルト、歯車等の回転
伝達手段によって継承し、把持した被加工物(1)と共
に回転させる。
The holder αφ and the drive motor are inherited by a rotation transmission means such as a belt or a gear, and are rotated together with the gripped workpiece (1).

流動性研磨材(5)が外部に流出することを防止するた
めにベアリングα力に弾性膜を設けることもできる。
An elastic membrane can also be provided on the bearing α force to prevent the fluid abrasive material (5) from flowing out.

なお、本発明による加圧ピストンQO,α呻による流動
性研磨材(5)の加圧力は、通常30〜50kg/c−
で行なわれる。
In addition, the pressing force of the fluid abrasive material (5) by the pressurizing piston QO, α according to the present invention is usually 30 to 50 kg/c-
It will be held in

上記各実施例における流動性研磨材(5)には、ゴム、
合成樹脂等の粘弾性体に砥粒を混合したものを用いる。
The fluid abrasive material (5) in each of the above examples includes rubber,
A viscoelastic material such as synthetic resin mixed with abrasive grains is used.

砥粒としては、TiC,TiN、 SiC。The abrasive grains are TiC, TiN, and SiC.

SiN、ダイヤモンド粉、 CBN ffが、粘弾性体
としては半固体状のポリエチレン樹脂、シリコン樹脂、
天然ゴム等が用いられる。
SiN, diamond powder, and CBN ff are used as viscoelastic materials such as semisolid polyethylene resin, silicone resin,
Natural rubber etc. are used.

また、保持具に設けられたスパイラル状溝(8)は、巾
、深さとも2 mm 、 ピッチ4m+nとしたが、こ
れに限られるものではない。
Further, although the spiral groove (8) provided in the holder has a width and a depth of 2 mm and a pitch of 4 m+n, the present invention is not limited to this.

本発明と従来の研磨装置の機能を比較するため、実施例
1の装置を用い、被加工物としてワイヤ放電加工により
孔加工が施された粉末焼結金型ダイを同条件下で研磨し
た。
In order to compare the functions of the present invention and the conventional polishing apparatus, the apparatus of Example 1 was used to polish a powder sintered mold die, which had been machined with holes by wire electric discharge machining, under the same conditions.

上記比較のための被加工物は、加工孔径2nwn−1軸
長51TII11の略円筒状の加工孔を有するWCl2
0%Co合金の半焼結金型ダイであり、上記加工孔はワ
イヤ放電加工により施され、加工孔の周面粗度は17s
程度である。
The workpiece for the above comparison has a substantially cylindrical machined hole with a machined hole diameter of 2nwn-1 and an axial length of 51TII11.
It is a semi-sintered die made of 0% Co alloy, and the machined holes are made by wire electrical discharge machining, and the circumferential surface roughness of the machined holes is 17s.
That's about it.

上記比較の結果、本発明の実施例1の装置では0.3I
@、従来の装置では0.6I@であり、研磨精度が著し
く向上した。
As a result of the above comparison, the device of Example 1 of the present invention has 0.3I
The polishing accuracy was 0.6I@ with the conventional device, and the polishing accuracy was significantly improved.

また、研磨量として研磨後に被加工物の重量を測定し、
加工孔の径の変動を算出したところ、本発明の実施例1
の装置では5I@、従来の装置では3.5序であり、研
磨速度についても好結果が得られた。
In addition, the weight of the workpiece is measured after polishing to determine the amount of polishing.
When the variation in the diameter of the machined hole was calculated, it was found that Example 1 of the present invention
Good results were also obtained in terms of polishing speed, with the polishing rate being 5I@ for the conventional device and 3.5 for the conventional device.

〔発明の効果〕〔Effect of the invention〕

本発明は以上の如く、流動性研磨材の流動方向と被研磨
面に現われた研削筋とが交差する構成であるため、研磨
速度および研磨精度が著しく向上するといった優れた効
果を奏するものである。
As described above, the present invention has a configuration in which the flowing direction of the fluid abrasive material intersects with the grinding streaks appearing on the surface to be polished, so that it has excellent effects such as significantly improving polishing speed and polishing accuracy. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の加工物の研磨装置の一実施例を示す要
部断面図、第2図は本発明の研磨装置に用いられる保持
具の一実施例を示す斜視図、第3図は本発明の研磨装置
を取り付ける研磨加工機の一実施例を示す一部破断斜視
図、第4図は本発明の研磨装置の異なる実施例を示し、
(イ)は要部断面図、(ロ)は(イ)の要部説明図、第
5図。 第6図は本発明の他の実施例を示す要部断面図、第7図
は従来の研磨装置を示す説明図である。 (1)、α[有]・・・・・・被加工物    (2)
、 (18a)聞・・被研磨面(3)・・・・・−・・
・・・・開口部     (4)、αQ・・・・・1保
持具(5)、 (241−・・−・−流動性研磨材  
(6)、α帽(財)・・−加圧シリンダ(7)・・・・
・・・・・・・・孔(s)・・而・・曲・・・スパイラ
ル状溝(9)、α■・・・・・・油圧シリンダ  α屯
α瞳、(2)・・・加圧ピストンαυ、 (fl−=−
・制御装置    @・・川・・・・・・−・・ハウジ
ングQ41・・・・・・・・・・・・突状体     
αη・山・川…・・・・ベアリングCυ・・・・・・・
・・・・・ボールスクリュ (イ)四重・・・・・・・
−駆動モータ第 図 0 ○ 第 図 第 3 図 第 図 (イ) c口) 第 図 第 図 第 図 3
FIG. 1 is a cross-sectional view of a main part showing an embodiment of the polishing device for a workpiece according to the present invention, FIG. 2 is a perspective view showing an embodiment of a holder used in the polishing device of the present invention, and FIG. FIG. 4 is a partially cutaway perspective view showing an embodiment of the polishing machine to which the polishing device of the present invention is attached, and FIG. 4 shows a different embodiment of the polishing device of the present invention.
(A) is a sectional view of the main part, (B) is an explanatory view of the main part of (A), and FIG. FIG. 6 is a sectional view of a main part showing another embodiment of the present invention, and FIG. 7 is an explanatory view showing a conventional polishing apparatus. (1), α[Yes]...Workpiece (2)
, (18a) Surface to be polished (3)...
...Opening (4), αQ...1 holder (5), (241-...-Fluid abrasive material
(6), α cap (goods)...-pressure cylinder (7)...
......Hole (s)...Curve...Spiral groove (9), α■...Hydraulic cylinder αtun αpupil, (2)...Making Pressure piston αυ, (fl−=−
・Control device @・・River・・・Housing Q41・・・・・・・・・Protrusion
αη・Mountain/River...Bearing Cυ...
... Ball screw (a) Quadruple ...
- Drive motor Fig. 0 ○ Fig. 3 Fig. Fig. 3 (A) c mouth) Fig. Fig. 3

Claims (2)

【特許請求の範囲】[Claims] (1)粘弾性物質に砥粒を混合した流動性研磨材を、被
加工物の被研磨面に圧接して流動させて行なう研磨方法
において、上記流動性研磨材が被研磨面上を、該被研磨
面と相対的に回転しつつ往復運動することを特徴とする
加工物の研磨方法。
(1) A polishing method in which a fluid abrasive material made of a viscoelastic material mixed with abrasive grains is brought into pressure contact with the polished surface of the workpiece and made to flow. A method for polishing a workpiece characterized by reciprocating while rotating relative to the surface to be polished.
(2)流動性研磨材を充填加圧する加圧体を、被加工物
を把持する保持具を挾んで配置すると共に、上記流動性
研磨材を被加工物の被研磨面を通過させる加圧手段と、
上記流動性研磨材と被加工物の被研磨面とを相対的に回
転せしめる回転手段とを具備してなる加工物の研磨装置
(2) A pressurizing body that is filled with a fluid abrasive and pressurized is placed between the holders that grip the workpiece, and a pressurizing means that allows the fluid abrasive to pass through the polished surface of the workpiece. and,
An apparatus for polishing a workpiece, comprising a rotating means for relatively rotating the fluid abrasive material and the surface to be polished of the workpiece.
JP1334281A 1989-12-22 1989-12-22 Workpiece polishing method and device Pending JPH03196964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1334281A JPH03196964A (en) 1989-12-22 1989-12-22 Workpiece polishing method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1334281A JPH03196964A (en) 1989-12-22 1989-12-22 Workpiece polishing method and device

Publications (1)

Publication Number Publication Date
JPH03196964A true JPH03196964A (en) 1991-08-28

Family

ID=18275587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1334281A Pending JPH03196964A (en) 1989-12-22 1989-12-22 Workpiece polishing method and device

Country Status (1)

Country Link
JP (1) JPH03196964A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035325A1 (en) * 2001-09-21 2003-05-01 Extrude Hone Corporation Abrasive flow machining apparatus and method
US6905395B2 (en) * 2001-09-21 2005-06-14 Extrude Hone Corporation Abrasive flow machining apparatus and method
CN101913109A (en) * 2010-08-19 2010-12-15 中国航空工业第六一八研究所 Device and method for processing elongated holes with high cleanliness and low roughness
JP2011067902A (en) * 2009-09-25 2011-04-07 Kanazawa Univ Polishing device using abrasive mixed fluid, and polishing method
WO2014184067A1 (en) * 2013-05-14 2014-11-20 University Of Ljubljana Arrangements and methods for abrasive flow machining
WO2015053868A1 (en) * 2013-10-09 2015-04-16 The Boeing Company Additive manufacturing for radio frequency hardware
CN105014550A (en) * 2015-07-23 2015-11-04 长春理工大学 Abrasive flow deburring precision machining device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035325A1 (en) * 2001-09-21 2003-05-01 Extrude Hone Corporation Abrasive flow machining apparatus and method
US6905395B2 (en) * 2001-09-21 2005-06-14 Extrude Hone Corporation Abrasive flow machining apparatus and method
JP2011067902A (en) * 2009-09-25 2011-04-07 Kanazawa Univ Polishing device using abrasive mixed fluid, and polishing method
CN101913109A (en) * 2010-08-19 2010-12-15 中国航空工业第六一八研究所 Device and method for processing elongated holes with high cleanliness and low roughness
WO2014184067A1 (en) * 2013-05-14 2014-11-20 University Of Ljubljana Arrangements and methods for abrasive flow machining
US20160082565A1 (en) * 2013-05-14 2016-03-24 University Of Ljubljana Arrangements and methods for abrasive flow machining
WO2015053868A1 (en) * 2013-10-09 2015-04-16 The Boeing Company Additive manufacturing for radio frequency hardware
CN105014550A (en) * 2015-07-23 2015-11-04 长春理工大学 Abrasive flow deburring precision machining device
CN105014550B (en) * 2015-07-23 2017-05-31 长春理工大学 A kind of abrasive Flow deburring precise processing device

Similar Documents

Publication Publication Date Title
US5125191A (en) Abrasive flow machining with an in situ viscous plastic medium
US5447463A (en) Apparatus for microfinishing
US7189143B2 (en) Machine for superfinishing by honing
EP0960691A2 (en) Glass product machining apparatus
KR20000063450A (en) a micro burnishing apparatus using ultrasonic vibration
CA2389085C (en) Method of and apparatus for high tolerance brush honing
JPH03196964A (en) Workpiece polishing method and device
JP2000158324A (en) Device and method for chemically and mechanically flattening semi-conductor wafer
CA1250146A (en) Means and methods for abrading a work surface
US3745715A (en) Honing apparatus
US3462887A (en) Precision surface abrading
JPH0632885B2 (en) Ceramic grinding method and device
JP2001088039A (en) Polishing tool
CA2001970C (en) Orbital and/or reciprocal machining with a viscous plastic medium
US4528074A (en) Method for producing a grinding wheel by electroplating
US3427751A (en) Die finishing machine
US2565020A (en) Reciprocating carriage drive
US4517768A (en) Orbital polisher
JPH0386493A (en) Cutting device for sheet material
JPH07136932A (en) Truing method for super abrasive grain grinding wheel
JPS6331885Y2 (en)
KR200424064Y1 (en) Abrasive blasting machine for cutting tool
JPH09239656A (en) Surface polishing method
JPH0966469A (en) Freely curved face polishing stone
JPH068124A (en) Self-copying profile polishing device