JPH03196599A - Heat conductor for cooling - Google Patents

Abstract

PURPOSE:To improve cooling efficiency by a construction wherein regions being in contact with two copper plates expand dispersely in a uniform manner and make the flow of heat uniform. CONSTITUTION:A heat conductive member 22 is so formed as to have a central part 22A shaped in a circle and radial extension parts 22B extending radially from the central part, and a part thereof is fixed by soldering or the like on a first copper plate 11 provided at the fore end of a cooler. Moreover, the radial extension parts 228 formed by extending the central part 22A are so bent as to be shaped in S and brought into contact with a second copper plate 12 and they are fixed on the second copper plate 12 by soldering or the like. Accordingly, heat flows uniformly from the second copper plate 12 through the first copper plate 11. Thereby heat is not concentrated on the two copper plates 11 and 12, but dispersed uniformly, and therefore a cooling efficiency is improved.

Description

[Detailed Description of the Invention] [Overview] [Industrial Application Field] The present invention relates to a thermal conductor for cooling, and in particular to cooling efficiency of a cooler for an infrared sensing element and a cold stage on which the sensing element is mounted. This invention relates to a cooling thermal conductor with increased

When using an infrared sensing element, it is necessary to cool the element to remove thermal noise, and for this purpose, a small and lightweight helium circulating cooler as shown in the cross-sectional view of Figure 3 is used. It is used.

In FIG. 3, reference numeral 1 denotes a cooler, in which a piston is arranged, and is connected to a compressor 3 using a flexible tube 2. First copper plate 1 at the tip of cooler 1
1 is in thermal contact with a second copper plate 12 installed on a cold stage 5 via a cooling heat conductor 4, and an infrared sensing element (semiconductor element) 6 to be cooled is on the cold stage 5. Fixed.

Further, 7 is a vacuum container that maintains the area around the infrared detecting element 6 in a vacuum state. A glass tube 8 is further provided in the vacuum container 7 to surround the main parts of the cooler I and the cooling heat conductor 4. The space is also maintained in a vacuum. Further, 9 is a window covering an opening provided in a position facing the infrared detecting element 6 of the vacuum container 7, and is made of a material that allows infrared rays from the outside to pass through, and 10 is a window for evacuating the inside of the vacuum container 7. This is the exhaust valve.

When the piston inside the cooler 1 moves downward from the position of its tip, helium (He) for cooling is sent at high pressure from the compressor 3 into the space created accordingly.
When the gas is sucked in and the heat of the infrared detection element 6 is absorbed, and the piston rises from the lowest position toward the tip, the space is narrowed accordingly and the He gas inside is returned to the compressor 3. Thereafter, the above operation is repeated in response to the reciprocating movement of the piston in the vertical direction.

Therefore, in order to obtain a cooling effect, the piston needs to reciprocate in the vertical direction, and in addition to absorbing the mechanical vibrations generated by this movement, heat conduction for cooling is also required to transmit the cooling effect of the cooler l. Body 4 is used.

Therefore, in order to fully exhibit the cooling effect of the cooler 1, a cooling thermal conductor with low thermal resistance between the cooler 1 and the cold stage 5 is required.

[Conventional technology]

FIG. 4 shows a structural diagram of an example of a conventional cooling heat conductor.

Components in FIG. 4 that are the same as those in FIG. 3 are given the same reference numerals.

In FIG. 4, the cooling thermal conductor 4 includes a first copper plate 11 fixed to the tip of the cooler 1, a second copper plate 12 attached to the cold stage 5, and these copper plates IL.
A cylindrical compressed coil spring 13 is provided between the coil springs 12 and 12, and a coil spring 13 is located in a space within the coil spring 13, and one end is fixed in contact with the first copper plate 11, and the other end is fixed in contact with the second copper plate 12. It consists of a multilayer thin FyA copper plate 14.

The cooling heat conductor 4 having such a structure is installed inside the cooler 1.
During the period in which He gas is supplied, the heat of the infrared sensing element 6 is transferred from the second copper plate I2 to the multilayer thin film copper plate 14, then from the multilayer thin film copper plate 14 to the first copper plate 11, and then from the first copper plate to the cooler 1. It is made to flow through a route that leads to He gas so that it is absorbed by He gas.

Furthermore, mechanical vibrations of the cooler 1 caused by the reciprocating movement of the piston within the cooler 1 are absorbed by the compressed coil spring 13 and are not transmitted to the infrared sensing element 6.

[Problem to be solved by the invention]

However, in the conventional cooling heat conductor, there is only one region in contact with the second copper plate of the multilayer thin film copper plate 14 that is fixed in contact with the lower surface of the flat second copper plate 12; 1
2 is not evenly contacted over the entire area.

Therefore, since the contact area is considerably smaller than the area of the top and bottom surfaces of the second copper plate 12, the flow of heat is concentrated locally, and as a result, the entire surface of the second copper plate is not cooled evenly. Therefore, there is a problem that the cooling efficiency of the cold stage 5 is poor.

Therefore, in Japanese Patent Application No. 1-58656, the present applicant previously formed the first and second copper plates 11 and 12 into polygonal pyramid shapes, and formed the multilayer thin film copper plate 1 on the polygonal pyramidal surface.
A cooling thermal conductor has been proposed in which the cooling effect is enhanced by making the heat flow evenly over the entire area of the copper plates 11.12 so that the copper plates 11.
12 needs to be processed into a polygonal pyramid shape, which poses a problem in that the number of man-hours required for processing is large.

The present invention solves the above-mentioned conventional problems, and provides a cooling heat source that is easy to install, maintains low thermal resistance between the cooler and the cold stage, and increases the cooling efficiency of the cooler. Intended as a conductor.

[Means to solve the problem]

As shown in FIGS. 1 and 2, the cooling thermal conductor 21 of the present invention that achieves the above object has a first
a metal flat plate 11 and a second metal flat plate 1 that contacts the high temperature part.
2, a thermally conductive member 22 formed by laminating thin plates in multiple layers is connected between the cooling thermal conductor 21, and a coil spring 23 is provided between the first and second metal flat plates ICl3, the cooling thermal conductor 21 comprising: The thermally conductive member 22 is composed of a central portion 22A formed in a circular or polygonal shape, and radial extension portions 22B extending radially from the central portion, and the bottom surface of the central portion is connected to the first
The second flat metal plate 11 is connected to the second flat metal plate 11, and the tip of the radial extension is connected to the second flat metal plate 12.

[For production]

According to the cooling thermal conductor of the present invention, as shown in FIGS. 1 and 2, the thermally conductive member 22, the first copper plate 11 attached to the tip of the cooler, and the cold Since the areas in contact with the second copper plate 12 attached to the stage are formed to be evenly distributed, heat flows more evenly through the first copper plate than through the second copper plate,
Since heat is no longer concentrated on the two copper plates and is evenly distributed, cooling efficiency is increased.

A cylindrical elastic coil spring 2 is arranged between the first and second copper plates 11 and 12 so as to surround the thermally conductive member 22.
By providing the second copper plate 12, the mechanical vibration of the cooler is
Therefore, the sensing element is efficiently cooled without any accident such as disconnection of the connecting lead wire of the infrared sensing element.

〔Example〕

FIG. 1 is a plan view showing the structure of the cooling thermal conductor of the present invention;
FIG. 2 is a sectional view taken along line II' in FIG. 1.

As shown in FIGS. 1 and 2, the cooling thermal conductor 21 of the present invention is formed of a thermally conductive member 22 made of thin plate-shaped copper laminated in multiple layers. The member 22 is
A first copper plate 11 provided at the tip of the cooler and a second copper plate 12 attached to a cold stage on which an infrared detection element is mounted are fixed using soldering or the like.

This thermally conductive member 22 has a central portion 22 formed in a circular shape.
A, and a radial extension portion 22B extending radially from the central portion.
The central portion 22 of the thermally conductive member is shaped like this.
A and a part of the radial extension 22B are fixed by soldering or the like to the first copper plate 11 provided at the tip of the cooler.

Note that the central portion 22A may have a polygonal shape.

Furthermore, the radial extension part 22B which is an extension of the central part 22A is S.
It is bent into a letter shape, brought into contact with the second copper plate 12, and fixed to the second copper plate by soldering or the like.

By forming the thermally conductive member into an S-shape as described above, vibrations of the cooler are less likely to be transmitted to the cold shield side.

Further, a cylindrical coil spring 23 made of an elastic metal material is provided between the first copper plate 11 and the second copper plate 12 so as to surround the thermally conductive member 22 having the above-described shape.

In this way, the areas where the thermally conductive member 22 contacts the first copper plate 11 attached to the tip of the cooler and the second copper plate 12 attached to the cold stage are evenly distributed. Because of the expansion, the heat flow is evenly distributed from the cold stage through the first copper plate at the tip of the cooler, and there is no concentration of heat between these two copper plates and the heat is evenly distributed, resulting in cooling. Greater efficiency.

By providing a coil spring between the first and second copper plates 11 and 12, the mechanical vibration of the cooler is transmitted to the cold stage due to the S-shaped bending of the thermally conductive member. This allows the infrared sensing element on the cold stage to be cooled with high cooling efficiency without accidents such as connection lead wires coming off due to mechanical vibration of the cooler and poor contact.

In addition to this embodiment, as a second embodiment, the thermally conductive member 22 is formed by laminating copper plates and caulking them in advance to form a structure having a central portion 22A and radial extension portions 22B.
After fixing the central part 22A to the first copper plate 11 at the tip of the cooler using screws 24, the radial extension part 22B extending from the central part is further bent into an S-shape to form the second copper plate 11. If it is fixed to the copper VI12 by soldering or the like, the thermally conductive member can be easily attached.

Furthermore, although this embodiment adopts a structure in which four radial extensions are extended from the center of the thermally conductive member, these radial extensions may be provided as appropriate.

〔Effect of the invention〕

As is clear from the above description, according to the cooling thermal conductor of the present invention, heat can be efficiently transferred between the cooler and the cold stage, so that the infrared sensing element in operation is sufficiently cooled. Therefore, a highly reliable infrared detection device that generates little thermal noise can be obtained.

[Brief explanation of drawings]

Fig. 1 is a plan view of the cooling heat conductor of the present invention, Fig. 2 is a sectional view taken along the line I-I' in Fig. 1, Fig. 3 is a structural explanatory diagram of a helium circulation type cooler, and Fig. 4 is FIG. 2 is a structural diagram of an example of a conventional cooling thermal conductor. In the figure, 1 is a cooler, 2 is a flexible tube, 3 is a compressor, 4 and 21 are thermal conductors for cooling, 5 is a cold stage, 6 is an infrared detection element (semiconductor element), 7 is a vacuum container, and 8 is glass 9 is a window, 10 is an exhaust valve, 11 is a first metal flat plate (first copper plate), 12 is a second metal flat plate (second copper plate), 22 is a thermally conductive member, 22A is the center 22B is a radial extension, 23 is a coil spring, and 24 is a screw. 1≦, title dorosu 5q da\ff kutsubetsu 5i no 4t uze yim Figure 1 Figure 1 mn I-1'ヰ Village view Figure 2

Claims (1)

[Claims] A thermally conductive member (22) made of multiple layers of thin plates is connected between a first flat metal plate (11) that contacts the low temperature part and a second flat metal plate (12) that contacts the high temperature part. and a cooling thermal conductor (21) in which a coil spring is provided between the first and second metal flat plates (11, 12), the thermally conductive member (22) having a circular or polygonal shape. It consists of a central portion (22A) formed in A cooling thermal conductor, characterized in that the tip of the extension is connected to the second flat metal plate (12).