JPH03190077A - Corona discharger - Google Patents

Abstract

PURPOSE:To simplify constitution and improve durability by providing a pair of electrodes connecting to high-frequency high-voltage power supply opposed to a discharge electrode through a dielectric board. CONSTITUTION:A corona discharger H has a ceramic-made dielectric board H1, a flat metallic electrode H2 provided on the board H1 and a pair of electrodes H4 and H5 buried inside the board H1 and connected to high-frequency high-voltage power supply H3. In this way, the discharger H has not requirement for impressing high frequency high voltage on the electrode H2 nor requirement for grounding the voltage so that constitution is made easy. Because of its electrically symmetric construction, no problem of electrolysis may take place so that durability can be heightened.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a corona discharger used in ozone generators, ion generators, etc.

[Prior Art] Corona dischargers that apply high frequency and high voltage between a pair of electrodes via a W4 electric substrate made of ceramic or the like have been known (for example, JP-A-6L-231573R corona discharger). ).

As shown in the schematic sectional view of FIG. 5, this corona discharger P includes a dielectric substrate P1 made of ceramic or the like, an electrode P2 provided on the surface of the dielectric substrate 21, and an electrode P2.
An electrode P embedded in the dielectric substrate PI so as to face the
It consists of 3.

And electrode P2. During period P3, a high frequency high voltage is applied using a high frequency high voltage source P4 to obtain a corona discharge C near the electrode P2.

[Problems to be Solved by the Invention] However, this conventional corona discharger P had the following problems.

(1) Ozone is generated near the electrode P2 due to the corona discharge C, but this ozone causes the electrode P2 and the power source P4 to
There is a risk that the connection part with the lead wire from the inside will corrode, resulting in a poor connection.

(2) In addition, the electrode P3 buried in the dielectric substrate Pl needs to be connected to the lead wire from the power supply P4 using a through hole (not shown), but it deteriorates due to discharge occurring in this through hole. do.

[Means for Solving Problem 11] The gist of the present invention is, as shown, for example, in the cross-sectional view showing the schematic configuration of FIG. A corona discharger H comprising: a discharge electrode H2; and at least a pair of electrodes H4, H5 facing the discharge electrode H2 via the dielectric substrate H1 and connected to a high frequency high voltage power source H3. It is in.

[Operation] Although the operating principle of the corona discharger H of the present invention has not yet been fully elucidated, it is presumed to be as follows.

When a high frequency high voltage is applied to a pair of electrodes H4 and H5 in the dielectric substrate H1, an electric field is generated between these electrodes (4 and H5).

When a discharge electrode H2 made of a conductor or a semiconductor is placed in this electric field, the electric field is concentrated on the discharge electrode H2, and a large potential difference is generated between the discharge electrode H2 and the dielectric substrate H1.

This potential difference causes corona discharge C to occur at the discharge electrode H2.

[Example code] The present invention will be described in detail.

FIG. 2 is a partially cutaway view showing the structure of the corona discharger 1 of this embodiment. Note that in the figures, an arbitrary scale is used for ease of explanation.

This corona discharger 1 includes a dielectric substrate 2 made of ceramic,
a planar metal electrode 3 provided on the dielectric substrate 2;
A pair of plate-shaped electrodes 4 and 5 embedded in the dielectric substrate 2
and has. The plate-like electrodes 4.5 are connected to a high-frequency, high-voltage power source (not shown) through through holes (not shown).

This corona discharger 1 is manufactured, for example, by the following method.

(1) A pattern that will become the plate electrodes 4 and 5 is formed on a green sheet that will be the lower part of the dielectric substrate 2 by screen printing or the like.

(2) A green sheet that will become the upper part of the dielectric substrate 2 is placed on this pattern.

(3) A pattern that will become the discharge electrode 3 is formed on this green sheet by screen printing or the like.

(4) Fire this molded body.

When a high frequency high voltage of 5 KV was applied between the plate bridges 4 and 5 of the corona discharger 1 manufactured in this manner, ozone of %5 pl)l was stably obtained. It was done.

This corona discharger 1 does not need to apply a high frequency high voltage to the discharge electrode 3, nor does it need to be grounded, so it is easy to configure.

In addition, since there is no need to connect a lead wire to the discharge electrode 3,
There are no problems such as corrosion of terminals.

Since the structure is electrically symmetrical, there is no problem of electrolysis and durability can be easily increased.

Note that the pattern of the pair of plate-like electrodes 4.5 embedded in the dielectric substrate 2 of the corona discharger 1 can be made into various shapes, for example, as shown in FIGS. 3(A) to 3(D). I can give you a pattern. Further, it is only necessary to apply a voltage between the plate-shaped electrodes to form an electric field, and for example, as shown in FIG. 3(D), it may be constructed from four electrode patterns.

Furthermore, the pattern of the discharge electrode 3 provided on the dielectric substrate 2 of the corona discharger 1 can also have various shapes, for example, the patterns shown in FIGS. 4(A) to 4(D). can be given.

FIGS. 4(A) to 4(C) show a discharge electrode 3 composed of one or more electrode patterns formed by screen printing.

Further, FIG. 4(D) shows a discharge electrode 3 made of a wire mesh.

Although not shown, a porous discharge electrode 3 can also be used. If a replaceable shape such as a wire mesh is used as the discharge electrode 3, it is easy to replace only the discharge electrode 3 that has deteriorated due to use.

Further, in this embodiment, metal is used as the discharge electrode 3, but it is also possible to use materials other than metal, for example, semiconductors can be used. When a corona discharger similar to the example was prepared and tested, it was confirmed that sufficient corona discharge occurs when the volume resistance is approximately 1QIiΩ·C■ or less.

The material of the dielectric substrate 2 used in this corona discharger I is not particularly limited as long as it is other than ceramic and is normally used as a dielectric in corona dischargers. for example,
In addition to ceramic, synthetic resin, glass, etc. can be used.

Furthermore, when the corona discharger is used as an ozone generator or the like, a heater is provided in the corona discharger, and the corona discharger 1 of this embodiment can also be provided with a heater as appropriate. The heater can be formed as a heating element pattern in the dielectric substrate 2 together with the plate electrodes 4 and 5, or the discharge electrode 3 can be used as a heater by being able to conduct electricity to the discharge electrode 3.

[Effects] As described above, the corona discharger H of the present invention has a discharge electrode H2
Since there is no need to apply a high frequency and high voltage to the device, and there is no need to ground it, the configuration becomes easy.

Further, since there is no need to connect a lead wire to the discharge electrode H2, there is no problem such as corrosion of the terminal.

Furthermore, it is also easy to replace only the discharge electrode H2.

Since the structure is electrically symmetrical, there is no problem of electrolysis and durability can be easily increased.

[Brief explanation of drawings]

FIG. 1 is a schematic cross-sectional view illustrating the configuration of the present invention, FIG. 2 is a partially cutaway perspective view illustrating an embodiment of the present invention, and FIG.
A) to (D) are explanatory diagrams of the electrode pattern of the present invention, the fourth
Figures (A) to (D) are explanatory diagrams of the pattern of the discharge electrode of the present invention, and Fig. 6 is a schematic cross-sectional diagram illustrating a conventional corona discharger. 1. H, P... corona discharger 2, Hl, Pi... dielectric substrate 8, H2, P2... discharge electrode 4, 5. H4, H5, P3... Electrode H3, P4
...High frequency high voltage power supply C...Corona discharge Figure 1

Claims (1)

[Scope of Claims] A dielectric substrate, a discharge electrode provided on the surface of the dielectric substrate, and at least one pair of discharge electrodes facing the discharge electrode via the dielectric substrate and connected to a high frequency high voltage power source. A corona discharger characterized by comprising an electrode.