JPH03187933A - Production of silica glass - Google Patents

Production of silica glass

Info

Publication number
JPH03187933A
JPH03187933A JP32390689A JP32390689A JPH03187933A JP H03187933 A JPH03187933 A JP H03187933A JP 32390689 A JP32390689 A JP 32390689A JP 32390689 A JP32390689 A JP 32390689A JP H03187933 A JPH03187933 A JP H03187933A
Authority
JP
Japan
Prior art keywords
slurry
silica
heating
reaction solution
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32390689A
Other languages
Japanese (ja)
Inventor
Koichi Shiraishi
耕一 白石
Kuniko Andou
安藤 久爾子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP32390689A priority Critical patent/JPH03187933A/en
Publication of JPH03187933A publication Critical patent/JPH03187933A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/12Other methods of shaping glass by liquid-phase reaction processes

Abstract

PURPOSE:To obtain a silica glass having improved bonding strength and plasticity by adding an organic binder to a slurry of spherical silica produced by the reaction of a silicic acid ester in a specific reaction solution, forming the mixture and subjecting the formed product to drying, degreasing and heating. CONSTITUTION:A slurry of spherical silica having particle diameter of 0.03-5mum is produced by mixing and reacting (A) a silicic acid ester (e.g. tetramethroxysilane) with (B) a reaction solution having a concentration of 0.001-5mol/l and containing 1.0-7.5mol/l of a base (e.g. ammonia), 1.0-30mol/l of water and an organic solvent (e.g. methanol). The slurry is concentrated to 1-95wt.% concentration and the viscosity of the slurry is adjusted to 15-500 poise by the addition of a organic binder (e.g. methylcellulose). The slurry is formed, dried by heating at 50-200 deg.C, degreased by heating at 400-800 deg.C and finally heated at 1150-1600 deg.C to obtain a transparent glass.

Description

【発明の詳細な説明】 「産業上の利用分野」 本発明は、板状、棒状あるいは管状のシリカガラスの製
造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method for manufacturing plate-shaped, rod-shaped or tubular silica glass.

[従来の技術] 従来、シリカガラスの製造方法として、次の方法が知ら
れている。
[Prior Art] Conventionally, the following method is known as a method for producing silica glass.

インゴット切断法;この方法は、酸水素溶融法や気相法
などで製造されたインゴットを切断して得る方法である
Ingot cutting method: This method is obtained by cutting an ingot produced by an oxyhydrogen melting method, a gas phase method, or the like.

ゾル・ゲル法;この方法は、シリコンアルコキシドを加
水分解するかシリカ微粉末を液体中に懸濁させてゾルを
得、これをゲル化させる工程と、乾燥」−程と、不純物
を除去する固定と、加熱してガラスにする無孔化工程と
からなる。
Sol-gel method: This method consists of the steps of hydrolyzing silicon alkoxide or suspending fine silica powder in a liquid to obtain a sol, turning this into a gel, drying, and fixation to remove impurities. and a non-porous process of heating to make glass.

[発明が解決しようとする課題] しかしながら、従来技術によれば、次の問題点を有する
[Problems to be Solved by the Invention] However, the prior art has the following problems.

インゴット法では、極薄板を製造することが難しいと共
に、切りしろが大きいため歩留りが悪かった。
In the ingot method, it was difficult to manufacture ultra-thin plates, and the yield was poor due to the large cutting margin.

ゾル・ゲル法では、乾燥工程でゲルに割れが生じやすく
、大型化が難しい。また、無孔化工程でも割れ1反り、
泡の発生が起こりやすかった。更に、製造に長時間を要
した。
In the sol-gel method, the gel tends to crack during the drying process, making it difficult to scale up. In addition, even in the non-porous process, cracks, warpage,
Bubbles were likely to occur. Furthermore, it took a long time to manufacture.

本発明は上記事情に鑑みてなされたもので、結合強度及
びn1塑性を増して乾燥時の割れ1反り。
The present invention was made in view of the above circumstances, and it increases bonding strength and n1 plasticity, and reduces cracking and warping during drying.

曲がりを回避し得る泡のない平板状、棒状あるいは管状
のシリカガラスの製造方法を提供することを目的とする
It is an object of the present invention to provide a method for manufacturing silica glass in the form of a flat plate, a rod, or a tube without bubbles that can avoid bending.

[課題を解決するための手段] 本願節1の本発明は、ケイ酸エステルを塩基性水溶液及
び有機溶媒からなる反応溶液中で反応させ球状シリカス
ラリーを生成する工程と、このスラリー中のシリカ濃度
を調整した後有機バインダを添加してスラリーの粘度を
調整する工程と、前記スラリーを成型する工程と、乾燥
、脱脂後加熱する工程とを具備することを特徴とするシ
リカガラスの製造方法である。
[Means for Solving the Problems] The present invention in Section 1 includes a step of reacting a silicate ester in a reaction solution consisting of a basic aqueous solution and an organic solvent to produce a spherical silica slurry, and a step of reacting a silicate ester in a reaction solution consisting of a basic aqueous solution and an organic solvent, and adjusting the silica concentration in this slurry. A method for producing silica glass comprising the steps of adjusting the viscosity of the slurry by adding an organic binder after adjusting the slurry, molding the slurry, and heating after drying and degreasing. .

本願節2の発明は、ケイ酸エステルを塩基性水溶液及び
有機溶媒からなる反応溶液中で反応させ球状シリカスラ
リーを生成する工程と、このスラリー中のシリカ濃度を
調整する工程と、有機バインダを添加し前記スラリーを
脱気しながら混練りした後成型する工程と、乾燥、脱脂
後加熱する工程とを具備することを特徴とするシリカガ
ラスの製造方法である。
The invention of Section 2 of the present application includes a step of reacting a silicate ester in a reaction solution consisting of a basic aqueous solution and an organic solvent to produce a spherical silica slurry, a step of adjusting the silica concentration in this slurry, and a step of adding an organic binder. This method of producing silica glass is characterized by comprising a step of kneading the slurry while deaerating it and then molding it, and a step of heating it after drying and degreasing.

本発明に係るケイ酸エステルは特に限定されないが、例
えばテトラメトキシシラン、テトラエトキシシラン、テ
トラプロホトキシシラン、テトライソプロポキシシラン
等の炭素数4以下の低級アルコールなどのエステルを用
いることが好ましい。
The silicic acid ester according to the present invention is not particularly limited, but it is preferable to use an ester such as a lower alcohol having 4 or less carbon atoms, such as tetramethoxysilane, tetraethoxysilane, tetraprophotoxysilane, and tetraisopropoxysilane.

本発明に係る塩基性水溶液は特に限定されないが、高純
度シリカを得るためにはアンモニア、アンモニウム塩、
アミン類等の有機物を用いることが好ましい。
The basic aqueous solution according to the present invention is not particularly limited, but in order to obtain high purity silica, ammonia, ammonium salt,
It is preferable to use organic substances such as amines.

本発明に係る有機溶媒は、ケイ酸エステルと塩基性水溶
液とを溶解するものであれば特に限定されないが、メタ
ノール、エタノール、イソプロパツール、ブタノールな
どのアルコール類やアセトンなどのケトン類が良い。こ
れらは一種類又は二種類以上用いても良い。前記6機溶
媒は、ケイ酸エステルと塩基性水溶液が直接混合しない
ので、両者を希釈させて混合反応させるために使用する
The organic solvent according to the present invention is not particularly limited as long as it dissolves the silicate ester and the basic aqueous solution, but alcohols such as methanol, ethanol, isopropanol, butanol, and ketones such as acetone are preferable. One type or two or more types of these may be used. Since the silicate ester and the basic aqueous solution do not mix directly, the six solvents are used to dilute the two for a mixed reaction.

本発明に係る有機バインダは、特に限定されないが、例
えばポリビニルブチラード(PVB)。
The organic binder according to the present invention is not particularly limited, but for example, polyvinyl butyrald (PVB).

メチルセルロースなどが好適である。また、有機バイン
ダの添加とともに可塑剤例えばジブチルフタレートを添
加しても良い。
Methylcellulose and the like are suitable. Furthermore, a plasticizer such as dibutyl phthalate may be added together with the organic binder.

[作用] まず、本願節1の発明の作用について説明する。[Effect] First, the operation of the invention of Section 1 of the present application will be explained.

■まず、ケイ酸エステルを塩基性水溶液及び有機溶媒か
らなる反応溶液中で反応させ球状シリカスラリーを生成
する(粒子生成工程)。これにより、真球状でかつ粒径
の良くそろったシリカ(810□)粒子が得られる。粒
径は、0.03〜5μm、好ましくは0.05〜1.5
μmの球状粒子が良い。粒径が0.03μmよりも小さ
いと得られたシリカガラスに泡が多く含まれ、粒径が5
μmよりも大きいと製造中に割れが生じ易いとともに透
明体を得ることも難しい。粒子は、単独であるいは2種
類以上の異なる粒径の粒子を混合して用いる。
(1) First, a silicate ester is reacted in a reaction solution consisting of a basic aqueous solution and an organic solvent to produce a spherical silica slurry (particle production step). As a result, silica (810□) particles that are perfectly spherical and have a uniform particle size are obtained. Particle size is 0.03-5 μm, preferably 0.05-1.5
μm spherical particles are preferable. When the particle size is smaller than 0.03 μm, the obtained silica glass contains many bubbles, and the particle size is less than 5 μm.
If it is larger than μm, cracks are likely to occur during manufacturing and it is also difficult to obtain a transparent body. The particles may be used alone or in combination of two or more types of particles with different particle sizes.

なお、シリカ粒子を含む加水分解液は、必要に応じて濃
縮しても良い。前記反応溶液は塩基、水。
Note that the hydrolyzed solution containing silica particles may be concentrated if necessary. The reaction solution includes a base and water.

有機溶媒から成るが、これにケイ酸エステルを添加する
ことにより球状シリカスラリーを生成する。
It consists of an organic solvent, and by adding a silicate ester to it, a spherical silica slurry is produced.

ここで、反応溶液中の塩基、水の濃度は夫々1.0〜7
.5 mol /I 、 1.0〜80mol /Iの
範囲が好適である。また、ケイ酸エステルはそのまま添
加しでもよいが、溶媒でo、oot〜5sol/j!程
度に希釈するのが良い。更に、反応で水が消費されるの
で、ケイ酸エステルの添加と同時に水を添加しても良い
Here, the base and water concentrations in the reaction solution are each 1.0 to 7.
.. 5 mol/I, and a range of 1.0 to 80 mol/I is suitable. Moreover, the silicate ester may be added as it is, but it can be added as a solvent to o,oot~5sol/j! It is best to dilute it to a certain extent. Furthermore, since water is consumed in the reaction, water may be added simultaneously with the addition of the silicate ester.

■次に、スラリー中のシリカ濃度を調整した後、スラリ
ーに有機バインダを添加して粘度を調整する(ta度、
粘度調整工程)。なお、上記■で得られた球状シリカス
ラリの濃度は、合成時の組成によっても異なるが、0.
1〜5wt%程度であるので、濃度の調整を行う。ここ
に、濃度は、目標とする薄板の厚さによっても異なるが
、自立薄板とする場合は1〜95v【%、好ましくは3
0〜g5vL%に調整する。濃度調整の方法は、特に限
定されないが、遠心濃縮法、減圧分離法、限外濾過法等
が好適である。また、有機バインダの添加により粘度は
15〜500 pols、好ましくは30〜150 p
oisに調整する。
■Next, after adjusting the silica concentration in the slurry, an organic binder is added to the slurry to adjust the viscosity (ta degree,
viscosity adjustment process). It should be noted that the concentration of the spherical silica slurry obtained in the above (2) varies depending on the composition at the time of synthesis, but is 0.
Since it is about 1 to 5 wt%, the concentration is adjusted. Here, the concentration varies depending on the target thickness of the thin plate, but in the case of a self-supporting thin plate, it is 1 to 95v[%, preferably 3
Adjust to 0-g5vL%. The concentration adjustment method is not particularly limited, but centrifugal concentration, vacuum separation, ultrafiltration, and the like are suitable. Also, by adding an organic binder, the viscosity can be increased from 15 to 500 pols, preferably from 30 to 150 pols.
Adjust to ois.

■次に、シリカ濃度と粘度を調整したスラリを例えば薄
板状に成型する(成型工程)。
(2) Next, the slurry with adjusted silica concentration and viscosity is molded into, for example, a thin plate (molding process).

■次いで、成型体を乾燥、脱脂後、加熱する(乾燥、脱
脂、加熱工程)。ここで、乾燥は成型体から溶媒、水な
どを除去するために行うものである。乾燥温度は、溶媒
によっても異なるが、大体50〜200℃程度である。
(2) Next, the molded body is dried, degreased, and then heated (drying, degreasing, and heating step). Here, drying is performed to remove solvent, water, etc. from the molded product. The drying temperature varies depending on the solvent, but is generally about 50 to 200°C.

脱脂は、有機バインダーを除去するために行うもので、
その温度範囲は大体400〜800℃である。上記■の
工程で乾燥。
Degreasing is performed to remove organic binders.
The temperature range is approximately 400-800°C. Dry in step ① above.

脱脂後加熱することにより、透明シリカガラスが得られ
る。ここに、透明化温度はシリカの粒径によって若干光
なるが、1150〜1600℃程度である。
Transparent silica glass is obtained by heating after degreasing. Here, the transparency temperature varies slightly depending on the particle size of the silica, but is approximately 1150 to 1600°C.

また、雰囲気は特に制御しなくても透明体は得られる。Furthermore, a transparent body can be obtained without particularly controlling the atmosphere.

しかし、(イ)減圧下、あるいは(ロ)He、あるいは
(ハ)H2,あるいは(ニ)600〜1000℃でCN
2含有雰囲気中で前処理を行なった後減圧もしくはHe
−0□、He雰囲気とする((12処理後に02処理を
行うと、Cj!2濃度を低減できる)。こうした雰囲気
を用いると、アルカリ金属、OHなどの不純物の少ない
シリカガラスが得られる。
However, (a) under reduced pressure, or (b) He, or (c) H2, or (d) CN at 600 to 1000°C.
After pretreatment in an atmosphere containing 2, the pressure is reduced or He
-0□, He atmosphere ((If the 02 treatment is performed after the 12 treatment, the Cj!2 concentration can be reduced). When such an atmosphere is used, silica glass with less impurities such as alkali metals and OH can be obtained.

次に、本願第2の発明の作用について説明する。Next, the operation of the second invention of the present application will be explained.

■粒子生成工程;この工程は本願第1の発明のそれと同
様である。
(2) Particle generation step: This step is similar to that of the first invention of the present application.

■スラリー調整工程;この]二程では、上記■で得られ
た球状シリカスラリーの濃度は、合成時の組成によって
も異なるが、0.1〜5vt%程度であるので、濃度の
調整を行う。ここに、濃度は、目標とする薄板の厚さに
よっても異なるが、自立薄板や管の場合、1〜90vt
%、好ましくは70〜9ovt%に調整するのが好まし
い。濃度調整の方法は、本願第1の発明で記述した通り
である。
(2) Slurry adjustment step: In this second step, the concentration of the spherical silica slurry obtained in (1) above is about 0.1 to 5 vt%, although it varies depending on the composition at the time of synthesis, so the concentration is adjusted. The concentration here varies depending on the target thickness of the thin plate, but in the case of freestanding thin plates or pipes, it is 1 to 90vt.
%, preferably 70 to 9 ovt%. The density adjustment method is as described in the first invention of the present application.

■成型工程;この工程では、有機バインダを添加したス
ラリーを減圧によって脱気しながら混練した後、板状、
もしくは棒状、もしくは管状に成型を行う ■乾燥、脱脂、加熱工程;ここで、乾燥は成型体から溶
媒、水などを除去するために行う。乾燥温度は、大体室
温〜50℃程度である。脱脂の温度範囲及び雰囲気は、
記述した本願第1の発明と同様である。
■Forming process: In this process, the slurry to which an organic binder has been added is kneaded while degassing under reduced pressure.
Alternatively, the molded product is molded into a rod shape or a tube shape. ①Drying, degreasing, and heating process; Here, drying is performed to remove solvent, water, etc. from the molded product. The drying temperature is approximately room temperature to 50°C. The temperature range and atmosphere for degreasing are as follows:
This is similar to the described first invention of the present application.

以下、本発明の実施例について説明する。Examples of the present invention will be described below.

[実施例1] まず、撹拌機付きのガラス製反応容器にエタノール15
00mj! 、 29%アンモニア水200mjJを加
えて混合し、反応溶液とした。また、エタノールl00
0m 41とテトラエトキシシラン(Sl(OC2H5
) a 、東芝シリコーン社(製))250m、Qを混
合し、原料溶液を調整した。次に、20℃に調整した前
記反応溶液に前記原料溶液を添加し、8時間撹拌すると
、粒径0.4μmの単分散シリカ粒子を含む球状シリカ
スラリーが得られた。
[Example 1] First, 15% of ethanol was added to a glass reaction vessel equipped with a stirrer.
00mj! , 200 mjJ of 29% aqueous ammonia was added and mixed to obtain a reaction solution. Also, ethanol 100
0m 41 and tetraethoxysilane (Sl(OC2H5
) a, Toshiba Silicone Co., Ltd. (manufactured) 250m, and Q were mixed to prepare a raw material solution. Next, the raw material solution was added to the reaction solution adjusted to 20° C. and stirred for 8 hours to obtain a spherical silica slurry containing monodispersed silica particles with a particle size of 0.4 μm.

つづいて、このスラリーを真空エバポレーターを用いて
5倍に濃縮した。次いで、この濃縮スラリーにPVB 
(有機バインダー)4重量部及びジブチルフタレート(
可塑剤)2重量部添加し、スラリーの粘度をI X 1
02potsに調整した。ひきつづき、このスラリーを
第1図に示す如く成型体1を支持する支持体2及びドク
ター3からなる装置4を用いて、フィルム状に引き伸ば
し、厚さ0.31の薄板に成型した(なお、図中の5は
スラリーである)。更に、この薄板を50℃で乾燥し、
600℃で脱脂し、1000℃で5%C11295%H
e雰囲気中で処理した後、o、t torrの減圧雰囲
気として1250℃に加熱すると、厚さ0.2msの泡
のない板状のシリカガラスが得られた。
Subsequently, this slurry was concentrated five times using a vacuum evaporator. This concentrated slurry is then injected with PVB.
(Organic binder) 4 parts by weight and dibutyl phthalate (
2 parts by weight of plasticizer) was added to reduce the viscosity of the slurry to I
Adjusted to 02 pots. Subsequently, this slurry was stretched into a film and formed into a thin plate with a thickness of 0.31 mm using a device 4 consisting of a support 2 supporting the molded body 1 and a doctor 3 as shown in FIG. 5 is slurry). Furthermore, this thin plate was dried at 50°C,
Degreased at 600℃, 5%C11295%H at 1000℃
After the treatment in an atmosphere of 300 mL, the glass was heated to 1250° C. under a reduced pressure of 0, t torr to obtain a bubble-free plate-like silica glass with a thickness of 0.2 ms.

上記実施例1によれば、エタノール(有機溶媒)及びア
ンモニア水(塩基性水溶液)からなる反応溶液にエタノ
ール及びテトラエトキシシラン(ケイ酸エステル)から
なる原料溶液を添加して所定の粒径の単分散シリカ粒子
を含むスラリーを形成し、このスラリー中のシリカの濃
度、粘度調整を行なった後、乾燥、脱脂、及び加熱工程
を行うため、泡がなく、もって結合強度及び可塑性を増
して乾燥時の割れ1反り1曲がりを回避し得る高密0 度のシリカガラスを得ることができる。
According to Example 1 above, a raw material solution consisting of ethanol and tetraethoxysilane (silicate ester) is added to a reaction solution consisting of ethanol (organic solvent) and aqueous ammonia (basic aqueous solution) to obtain particles of a predetermined particle size. After forming a slurry containing dispersed silica particles and adjusting the concentration and viscosity of the silica in this slurry, drying, degreasing, and heating processes are performed.Therefore, there are no bubbles and the bonding strength and plasticity are increased. It is possible to obtain high-density 0 degree silica glass that can avoid cracking, warping, and bending.

[実施例2] まず、実施例1と同様な反応溶液及び原料溶液を調整し
た。次に、20℃に調整した前記反応溶液に前記原料溶
液を添加し、8時間撹拌すると、粒径0.7μmの単分
散シリカ粒子を含む球状シリカスラリーが得られた。つ
づいて、このスラリーを真空エバポレーターを用いて6
倍に濃縮した。次いで、この濃縮スラリーにPVB5i
Jii部及びジブチルフタレート2重量部添加し、スラ
リーの粘度をI X 10’ polsに調整した。ひ
きつづき、このスラリーを第1図に示す装置4を用いて
、フィルム状に引き伸ばし、厚さ0.5−一の薄板に成
型した。
[Example 2] First, the same reaction solution and raw material solution as in Example 1 were prepared. Next, the raw material solution was added to the reaction solution adjusted to 20° C. and stirred for 8 hours to obtain a spherical silica slurry containing monodispersed silica particles with a particle size of 0.7 μm. Next, this slurry was evaporated using a vacuum evaporator.
Concentrated twice. Then, PVB5i was added to this concentrated slurry.
and 2 parts by weight of dibutyl phthalate were added to adjust the viscosity of the slurry to I x 10' pols. Subsequently, this slurry was stretched into a film using the apparatus 4 shown in FIG. 1 and formed into a thin plate having a thickness of 0.5-1.

更に、この薄板を50℃で乾燥し、600℃で脱脂し、
1000℃で5%CJ295%He雰囲気中で処理した
後、o、t torrの減圧雰囲気として1250℃に
加熱すると、厚さ0.3mmの泡のない板状のシリカガ
ラスが得られた。
Furthermore, this thin plate was dried at 50°C, degreased at 600°C,
After processing at 1000° C. in a 5% CJ295% He atmosphere, the sample was heated to 1250° C. under a reduced pressure atmosphere of o, t torr to obtain a bubble-free plate-like silica glass with a thickness of 0.3 mm.

[実施例3] まず、撹拌機付きのガラス反応容器にエタノ−1 ル500mN 、イソプロパツール500 mll 、
 n−ブタノール500m、17及び20%アンモニア
水200m、pを加えて混合し、反応溶液とした。また
、エタノール400 mll 、  イソプロパツール
300 mD 、 n−ブタツル300mN及び前記テ
トラエトキシシラン250mBを混合し、原料溶液を調
整した。次に、20℃に調整した前記反応溶液に前記原
料溶液を添加し、8時間撹拌すると、粒径0.5μmの
+1を分散シリカ粒子を含むスラリーが得られた。つづ
いて、このスラリーを限外濾過によって5倍に濃縮した
。次いで、この濃縮スラリーにPVB(Q機バインダ)
5重量部及びジブチルフタレート(可塑剤)2重量部添
加し、スラリーの粘度をI X In2potsに調整
した。ひきつづき、このスラリーを第1図に示す装置4
を用いて、フィルム状に引き伸ばし、厚さ0.3mmの
薄板に成型した。更に、この薄板を50℃で乾燥し、6
00℃で脱脂し、1000℃で5%C#295%He雰
囲気中で処理した後、0. 1torrの減圧雰囲気と
して1250℃に加熱すると、厚さ0.31−の泡のな
い板状のシリカガラスが得られ1ま た。
[Example 3] First, in a glass reaction vessel equipped with a stirrer, 500 mN of ethanol, 500 ml of isopropanol,
500 m of n-butanol and 200 m of 17 and 20% ammonia water were added and mixed to prepare a reaction solution. Further, 400 ml of ethanol, 300 mD of isopropanol, 300 mN of n-butatol, and 250 mB of the tetraethoxysilane were mixed to prepare a raw material solution. Next, the raw material solution was added to the reaction solution adjusted to 20° C. and stirred for 8 hours to obtain a slurry containing +1 dispersed silica particles with a particle size of 0.5 μm. This slurry was then concentrated five times by ultrafiltration. Next, PVB (Q machine binder) is added to this concentrated slurry.
5 parts by weight and 2 parts by weight of dibutyl phthalate (plasticizer) were added to adjust the viscosity of the slurry to I x In2pots. Subsequently, this slurry is transferred to the apparatus 4 shown in FIG.
was used to stretch it into a film and form it into a thin plate with a thickness of 0.3 mm. Furthermore, this thin plate was dried at 50°C, and
After degreasing at 00°C and processing at 1000°C in a 5% C#295% He atmosphere, 0. When heated to 1250°C in a reduced pressure atmosphere of 1 torr, a bubble-free plate-shaped silica glass with a thickness of 0.31 mm was obtained.

[実施例4] まず、実施例1と同様、反応溶液及び原料溶液を調整し
た後、所定の温度1時間で拡散して粒径0.4μmの単
分散シリカ粒子を含む球状シリカスラリーを得た。次に
、このスラリーを真空エバポレーター用いて70倍に濃
縮した。つづいて、このスラリーに水IBgを添加し、
更にメチルセルロース系バインダー(商品名セランダー
、ユケン工業(株)製)8gを添加し、減圧しながら混
練した。
[Example 4] First, in the same manner as in Example 1, a reaction solution and a raw material solution were prepared, and then diffused at a predetermined temperature for 1 hour to obtain a spherical silica slurry containing monodispersed silica particles with a particle size of 0.4 μm. . Next, this slurry was concentrated 70 times using a vacuum evaporator. Subsequently, water IBg was added to this slurry,
Further, 8 g of a methylcellulose binder (trade name: Selander, manufactured by Yuken Kogyo Co., Ltd.) was added and kneaded under reduced pressure.

次いで、このスラリーを厚さ0.8gmの薄板に押しだ
して成型した。更に、この薄板を50℃で乾燥し、40
0℃で脱脂し、800℃で5%CNz95%He雰囲気
中で処理した後、0.1 torrの減圧雰囲気として
1250℃に加熱すると、厚さ0.6Iの泡のない板状
のシリカガラスが得られた。
Next, this slurry was extruded and molded into a thin plate having a thickness of 0.8 gm. Furthermore, this thin plate was dried at 50°C and heated to 40°C.
After degreasing at 0°C, processing at 800°C in a 5%CNz95%He atmosphere, and heating to 1250°C in a reduced pressure atmosphere of 0.1 torr, a bubble-free plate-like silica glass with a thickness of 0.6I was formed. Obtained.

実施例4によれば、所定の反応溶液及び原料溶液を添加
して所定の粒径の単分散シリカ粒子を含むスラリーを形
成し、このスラリー中のシリカの濃度調整を行ない、更
に前記スラリーを成型した3 後、乾燥、脱脂、及び加熱二[程を行うため、泡がなく
、もって結合強度及び可塑性を増して乾燥時の割れ9反
り1曲がりを回避し得る高密度の板状のシリカガラスを
得ることができる。
According to Example 4, a predetermined reaction solution and a raw material solution are added to form a slurry containing monodispersed silica particles of a predetermined particle size, the concentration of silica in this slurry is adjusted, and the slurry is further molded. After drying, degreasing, and heating, the high-density plate-shaped silica glass is produced without bubbles, increasing bonding strength and plasticity, and avoiding cracking, warping, and bending during drying. Obtainable.

[実施例5] まず、撹拌機付きのガラス反応容器にエタノール150
0mj! 、 29%アンモニア水300m、9を加え
て混合し、反応溶液とした。以下、実施例4と同様にし
て厚さ0.6園■の泡のない板状のシリカガラスを得た
[Example 5] First, 150 ml of ethanol was added to a glass reaction container equipped with a stirrer.
0mj! , 300ml of 29% aqueous ammonia was added and mixed to obtain a reaction solution. Thereafter, in the same manner as in Example 4, a bubble-free plate-shaped silica glass having a thickness of 0.6 cm was obtained.

[実施例6] 実施例4において、外径15aug、内径12−一の管
状に押しだしたものについても、外径14−霧、内径1
1−の泡のない板状のシリカガラスが得られた。
[Example 6] In Example 4, the extruded tube with an outer diameter of 15 aug and an inner diameter of 12-1 was also used.
A bubble-free plate-like silica glass of 1- was obtained.

[実検例7〕 実施例4において、800℃で5%CfI295%He
雰囲気中で熱処理を行った後、0.3LOrrの減圧雰
囲気としたもにについても、1250℃に加熱すると泡
のないシリカガラスが得られた。
[Example 7] In Example 4, 5% CfI295% He at 800°C
After heat treatment in an atmosphere, bubble-free silica glass was obtained when heated to 1250° C. even in a reduced pressure atmosphere of 0.3 LOrr.

なお、上記実施例では、ケイ酸エステルとして4 テトラエトキシを用いた場合について述べたが、これに
限らず、既述した[手段コの欄で述べたテトラメトキン
などの炭素数4以下の低級アルコルなどのエステルを用
いてもよい。
In addition, although the above-mentioned example described the case where 4 tetraethoxy was used as the silicate ester, it is not limited to this. esters may also be used.

上記実施例では、塩基性水溶液としてアンモニア水を用
いた場合について述べたが、これに限らず、既述した[
手段]の欄で述べたアンモニウム塩アミン等の有機物を
用いてもよい。
In the above example, the case where aqueous ammonia was used as the basic aqueous solution was described, but the invention is not limited to this.
An organic substance such as ammonium salt amine described in the section ``Means'' may also be used.

上記実施例では、有機溶媒としてエタノールを用いた場
合について述べたが、これに限らず、既述した[手段]
の欄で述べたメタノール、n−プロパツールなどを用い
てもよい。
In the above example, the case where ethanol was used as the organic solvent was described, but the method is not limited to this.
Methanol, n-propertool, etc. mentioned in the section above may also be used.

[発明の効果コ 以上詳述した如く本発明方法によれば、泡の発生を著し
く低減し、もって結合強度及び可塑性を増して乾燥時の
割れ1反り2曲がりを回避し得る高密度の平板状、棒状
、環状のシリカガラスを得ることができる。
[Effects of the Invention] As detailed above, the method of the present invention significantly reduces the generation of bubbles, thereby increasing the bonding strength and plasticity, and forming a high-density flat plate that can avoid cracking, warping, and bending during drying. , rod-shaped, and ring-shaped silica glass can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係るスラリー引き伸ばし装置5 の説明図である。 1・・・成型体、2・・・支持体、3・・・ドクタスラ
リー
FIG. 1 is an explanatory diagram of a slurry stretching device 5 according to the present invention. 1... Molded body, 2... Support body, 3... Doctor slurry

Claims (2)

【特許請求の範囲】[Claims] (1)ケイ酸エステルを塩基性水溶液及び有機溶媒から
なる反応溶液中で反応させ球状シリカスラリーを生成す
る工程と、このスラリー中のシリカ濃度を調整した後有
機バインダを添加してスラリーの粘度を調整する工程と
、前記スラリーを成型する工程と、乾燥、脱脂後加熱す
る工程とを具備することを特徴とするシリカガラスの製
造方法。
(1) A step of reacting a silicate ester in a reaction solution consisting of a basic aqueous solution and an organic solvent to produce a spherical silica slurry, and after adjusting the silica concentration in this slurry, adding an organic binder to adjust the viscosity of the slurry. A method for producing silica glass, comprising a step of adjusting, a step of molding the slurry, and a step of heating after drying and degreasing.
(2)ケイ酸エステルを塩基性水溶液及び有機溶媒から
なる反応溶液中で反応させ球状シリカスラリーを生成す
る工程と、このスラリー中のシリカ濃度を調整する工程
と、有機バインダを添加し前記スラリーを脱脂しながら
混練りした後成型する工程と、乾燥、脱脂後加熱する工
程とを具備することを特徴とするシリカガラスの製造方
法。
(2) A step of reacting a silicate ester in a reaction solution consisting of a basic aqueous solution and an organic solvent to produce a spherical silica slurry, a step of adjusting the silica concentration in this slurry, and a step of adding an organic binder to the slurry. A method for producing silica glass, comprising the steps of kneading and molding while degreasing, and heating after drying and degreasing.
JP32390689A 1989-12-15 1989-12-15 Production of silica glass Pending JPH03187933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32390689A JPH03187933A (en) 1989-12-15 1989-12-15 Production of silica glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32390689A JPH03187933A (en) 1989-12-15 1989-12-15 Production of silica glass

Publications (1)

Publication Number Publication Date
JPH03187933A true JPH03187933A (en) 1991-08-15

Family

ID=18159936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32390689A Pending JPH03187933A (en) 1989-12-15 1989-12-15 Production of silica glass

Country Status (1)

Country Link
JP (1) JPH03187933A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006315910A (en) * 2005-05-12 2006-11-24 Shinetsu Quartz Prod Co Ltd Method for manufacturing silica glass article and silica glass article obtained by the method
JP2009120444A (en) * 2007-11-14 2009-06-04 Kyushu Univ Green sheet for glass and glass material produced by baking green sheet
JP2015143646A (en) * 2014-01-31 2015-08-06 株式会社東芝 Measuring device of slurry adhesive power and method therefor
WO2023248932A1 (en) * 2022-06-24 2023-12-28 Agc株式会社 Green sheet and sintered compact, and methods for producing those

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006315910A (en) * 2005-05-12 2006-11-24 Shinetsu Quartz Prod Co Ltd Method for manufacturing silica glass article and silica glass article obtained by the method
JP2009120444A (en) * 2007-11-14 2009-06-04 Kyushu Univ Green sheet for glass and glass material produced by baking green sheet
JP2015143646A (en) * 2014-01-31 2015-08-06 株式会社東芝 Measuring device of slurry adhesive power and method therefor
WO2023248932A1 (en) * 2022-06-24 2023-12-28 Agc株式会社 Green sheet and sintered compact, and methods for producing those

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