JPH03183351A - Linear motor device - Google Patents

Linear motor device

Info

Publication number
JPH03183351A
JPH03183351A JP31867889A JP31867889A JPH03183351A JP H03183351 A JPH03183351 A JP H03183351A JP 31867889 A JP31867889 A JP 31867889A JP 31867889 A JP31867889 A JP 31867889A JP H03183351 A JPH03183351 A JP H03183351A
Authority
JP
Japan
Prior art keywords
magnetic field
forming member
field forming
movable
movable body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31867889A
Other languages
Japanese (ja)
Other versions
JP2644053B2 (en
Inventor
Toshiaki Kagawa
敏章 香川
Hiroshi Ishii
洋 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1318678A priority Critical patent/JP2644053B2/en
Priority to DE69009841T priority patent/DE69009841T2/en
Priority to EP90304115A priority patent/EP0393994B1/en
Priority to US07/509,806 priority patent/US5208497A/en
Publication of JPH03183351A publication Critical patent/JPH03183351A/en
Application granted granted Critical
Publication of JP2644053B2 publication Critical patent/JP2644053B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/70758Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709Vibration, e.g. vibration detection, compensation, suppression or isolation

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Linear Motors (AREA)

Abstract

PURPOSE:In a linear motor used for a copying machine, to reduce the resiliency arising in a magnetic field forming member by arranging a movable member freely in shifting on a field forming member, which is supported freely in shifting by a base frame. CONSTITUTION:A base frame 4 supports a magnetic field forming member 3 freely in shifting through rollers 16a and 16b, bearings 9a and 9b, and a shaft 10. The magnetic field forming member 3 supports movable bodies 1 and 2 through the shaft 10, a bearing 8, and a roller 11. An optical system consisting of mirror, or the like is put on the movable body 1. The movable body 2 is equipped with coil members 6a, 6b, and 6c, and the magnetic field forming member 3 is equipped with permanent magnets 12a and 12b. When currents are applied to the coil members 6a-6c to generate magnetic fluxes, thrust occurs in the movable body 2. For this reason, when the movable body 1 shifts in the direction of an arrow a, the resiliency in the direction of an arrow b occurs in the magnetic field forming member 3. Since the magnetic field forming member 3 is movable to the base frame 4, it moves in the direction of arrow b, and absorbs this resiliency.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はリニアモータ装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a linear motor device.

[従来の技術] 複写機やページプリンタ等の光学走査装置又は磁気ディ
スク駆動装置では、走査駆動のために又はアクセス駆動
のためにリニアモータ装置を用いることが考えられる。
[Prior Art] In optical scanning devices or magnetic disk drive devices such as copying machines and page printers, it is conceivable to use a linear motor device for scanning drive or access drive.

一般的に、このようなリニアモータ装置は、ベースフレ
ームと、可動部材と、この可動部材を前記ベースフレー
ムに対して直線移動させるように駆動するための磁場形
成部材とを備えている。
Generally, such a linear motor device includes a base frame, a movable member, and a magnetic field forming member for driving the movable member to move linearly with respect to the base frame.

このようなリニアモータ装置は、本出願人による別の出
願である特願昭63−68425号「リニアモータおよ
びリニアモータを使用した直線駆動装置」、特願昭63
−129982号「直線駆動装置」、特願昭63−21
7276号「直線駆動装置」、特願昭62−33264
3号「複写機の光学系移動装置j等に説明されている。
Such a linear motor device is disclosed in Japanese Patent Application No. 63-68425 “Linear Motor and Linear Drive Device Using Linear Motor”, which is another application filed by the present applicant.
-129982 "Linear drive device", patent application 1986-21
No. 7276 “Linear drive device”, patent application No. 62-33264
No. 3 "Optical system moving device for copying machine j, etc."

例えば、第7図に概念的に示すように、−膜内にリニア
モータ装置は、ベースフレームAと、ベースフレームA
に対して相対的に直線移動し得るように構成された磁場
形成部材Bと、例えば回転電動機のコイル部材に相当す
る可動子Cと、同様に例えば回転電動機のロータに相当
する可動体りとを有している。可動体り及び可動子Cは
、磁場形成部材BによってベースフレームAに対して直
線的に駆動を受けるように構成されている。第7図に概
念的に示されたリニアモータ装置は、磁場形成部材Bが
可動子C及び可動体りをベースフレームAに対して相対
移動させる際、当該磁場形成部材Bに生じる反発力を吸
収すべく当該磁場形成部材BをベースフレームAに対し
て相対的に移動させるように構成された移動手段Eを備
えている。
For example, as conceptually shown in FIG.
A magnetic field forming member B configured to be linearly movable relative to the magnetic field forming member B, a movable element C corresponding to, for example, a coil member of a rotary electric motor, and a movable body corresponding to, for example, a rotor of a rotary electric motor. have. The movable body and the movable element C are configured to be driven linearly with respect to the base frame A by the magnetic field forming member B. The linear motor device conceptually shown in FIG. 7 absorbs the repulsive force generated in the magnetic field forming member B when the magnetic field forming member B moves the movable element C and the movable body relative to the base frame A. A moving means E configured to move the magnetic field forming member B relative to the base frame A is provided.

尚、磁場形成部材Bは例えば永久磁石等で構成すること
ができる。
Incidentally, the magnetic field forming member B can be composed of, for example, a permanent magnet.

このように構成されたリニアモータ装置は、可動体りの
重量をFl、磁場形成部材Bの重量をF2及び摩擦係数
をμとすると、可動体りとベースフレームAとの間には
摩擦負荷Flμが、磁場形成部材BとベースフレームA
との間には摩擦負荷F2μが夫々生じている。
In the linear motor device configured in this way, if the weight of the movable body is Fl, the weight of the magnetic field forming member B is F2, and the coefficient of friction is μ, there is a frictional load Flμ between the movable body and the base frame A. However, magnetic field forming member B and base frame A
A frictional load F2μ is generated between the two.

ここでリニアモータ装置が作動して可動体り及び可動子
Cが駆動され移動する場合の当該可動子C及び可動体り
の移動方向を正方向として矢印aで示し、磁場形成部材
Bに生じる反発力によって受ける当該磁場形成部材Bの
移動方向を負方向として矢印すで示す。また、可動子C
及び可動体り並びに磁場形成部材Bの夫々に作用する力
を以下加速力と定義する。
Here, when the linear motor device operates and the movable body C and the movable element C are driven and moved, the direction of movement of the movable body C and the movable body C is shown as the positive direction by an arrow a, and the repulsion generated in the magnetic field forming member B is shown. The moving direction of the magnetic field forming member B, which is affected by the force, is indicated by an arrow as a negative direction. Also, mover C
The force acting on the movable body and the magnetic field forming member B is hereinafter defined as acceleration force.

従って、可動体りの加速力をFl(t)、可動体りに生
じる発生推力をF2(+) 、磁場形成部材Bの加速力
をFm (t)及び磁場形成部材Bに生じる反発力をF
l(t)とすると、当該磁場形成部材Bの加速力Fm(
t)は以下のように表わせる。
Therefore, the acceleration force of the movable body is Fl(t), the thrust generated in the movable body is F2(+), the acceleration force of the magnetic field forming member B is Fm(t), and the repulsion force generated in the magnetic field forming member B is F
l(t), the acceleration force Fm(
t) can be expressed as follows.

Fl(1)  =F2(1)  −FlμF+(t) 
 =−F2(t) Fm(1)  =F+(t)  +F2μ、’、Fm(
t)  =−Fl)  −F1μ+F2μ可動体りとベ
ースフレームAとの間の摩擦負荷F1μが、磁場形成部
材BとベースフレームAとの間の摩擦負荷F2μに比べ
て大きい場合には、磁場形成部材Bの加速力Fm (t
)が、当該摩擦負荷F1μと摩擦負荷F2μとの差が生
じていない場合に比べて大きくなる。
Fl(1) =F2(1) −FlμF+(t)
=-F2(t) Fm(1) =F+(t) +F2μ,',Fm(
t) = -Fl) -F1μ+F2μIf the frictional load F1μ between the movable body and the base frame A is larger than the frictional load F2μ between the magnetic field forming member B and the base frame A, the magnetic field forming member Acceleration force Fm (t
) becomes larger than when there is no difference between the frictional load F1μ and the frictional load F2μ.

その結果、磁場形成部材Bの移動距離が所望以上に長く
なってしまう恐れがある。
As a result, the moving distance of the magnetic field forming member B may become longer than desired.

磁場形成部材Bが所望以上に移動してしまうことによっ
て、当該磁場形成部材Bを元の位置、即ち初期位置に復
帰させるための復帰移動手段に加わる負荷が大きくなる
恐れがある。特に高速複写機に於ける前記復帰移動手段
に於いて例えば、パルスモータを用いる場合には、当該
パルスモータ自体が発熱したり、脱調が生じたりして正
常に動作ができなくなり、磁場形成部材Bを元の位置に
復帰させることができなくなる可能性がある。
If the magnetic field forming member B moves more than desired, there is a risk that a large load will be applied to the return moving means for returning the magnetic field forming member B to its original position, that is, the initial position. In particular, when a pulse motor is used as the return movement means in a high-speed copying machine, for example, the pulse motor itself generates heat or loses synchronization, making it impossible to operate normally, and the magnetic field forming member There is a possibility that B cannot be returned to its original position.

[発明が解決しようとする課題] このように従来のリニアモータ装置は、前述の可動子及
び可動体を有する可動部材を磁場形成部材によって直線
移動させて駆動した場合に、磁場形成部材に生じる反発
力によってこの可動部材を所望の位置に正確に停止させ
ることが非常に難しいという欠点を有している。
[Problems to be Solved by the Invention] As described above, the conventional linear motor device has a problem in that when the movable member having the above-mentioned movable element and movable body is linearly moved and driven by the magnetic field forming member, repulsion occurs in the magnetic field forming member. It has the disadvantage that it is very difficult to stop this movable member accurately at a desired position by force.

本発明は、前述の諸点に鑑み成されたものであって、そ
の目的とするところは、磁場形成部材に生じる反発力を
低減させることによって、可動部材を所望の正確な位置
に、比較的容易に停止させることができるリニアモータ
装置を提供することにある。
The present invention has been made in view of the above-mentioned points, and its purpose is to relatively easily move the movable member to a desired accurate position by reducing the repulsive force generated in the magnetic field forming member. An object of the present invention is to provide a linear motor device that can be stopped at any time.

[課題を解決するための手段] 前記目的は、本発明によれば、ベースフレームと、この
ベースフレームに対して相対的に直線移動し得るように
構成された磁場形成部材と、この磁場形成部材上に配置
されており、当該磁場形成部材によって前記ベースフレ
ームに対して直線的に駆動されるように構成された可動
部材とを備えており、前記磁場形成部材による前記可動
部材の前記相対的な直線移動が行なわれるときに、この
磁場形成部材に生じる反発力を吸収すべく構成されてい
ることを特徴とするリニアモータ装置によって達成され
る。
[Means for Solving the Problem] According to the present invention, the object is to provide a base frame, a magnetic field forming member configured to be linearly movable relative to the base frame, and a magnetic field forming member configured to move linearly relative to the base frame. a movable member arranged above the base frame and configured to be driven linearly with respect to the base frame by the magnetic field forming member, and the relative movement of the movable member by the magnetic field forming member is provided. This is achieved by a linear motor device characterized in that it is configured to absorb the repulsive force generated in the magnetic field forming member when linear movement is performed.

[作用コ 本発明によるリニアモータ装置は、前記磁場形成部材上
に配置された可動部材が前記ベースフレームに対して直
線的に駆動されたときに、当該磁場形成部材に生じた反
発力を吸収すべく、当該磁墳形成部材が、前記ベースフ
レーム及び前記可動部材の夫々に対して相対的に直線移
動する。
[Operation] The linear motor device according to the present invention absorbs the repulsive force generated in the magnetic field forming member when the movable member disposed on the magnetic field forming member is driven linearly with respect to the base frame. Therefore, the porcelain tomb forming member linearly moves relative to each of the base frame and the movable member.

更に、本発明によるリニアモータ装置の基本な原理を、
第6図に基づいて概略的に説明する。
Furthermore, the basic principle of the linear motor device according to the present invention is
This will be schematically explained based on FIG.

このリニアモータ装置は、ベースフレーム4と、ベース
フレーム4に対して直線移動し得るように構成された磁
場形成部材3と、磁場形成部材3上に配置されており、
この磁場形成部材3によってベースフレーム4に対して
直線的に駆動されるように構成された可動部材とを有し
ている。
This linear motor device includes a base frame 4, a magnetic field forming member 3 configured to be able to move linearly with respect to the base frame 4, and arranged on the magnetic field forming member 3,
It has a movable member configured to be driven linearly with respect to the base frame 4 by the magnetic field forming member 3.

この可動部材は可動子2及び可動体lを備えている。This movable member includes a movable element 2 and a movable body l.

磁場形成部材3とベースフレーム4との間には当該磁場
形成部材3がベースフレーム4に対して相対的に直線移
動し得るように移動手段5aが備えられている。
A moving means 5a is provided between the magnetic field forming member 3 and the base frame 4 so that the magnetic field forming member 3 can move linearly relative to the base frame 4.

また磁場形成部材3と可動体1との間には当該可動体1
が磁場形成部材3に対して相対的に直線移動し得るよう
に移動手段5aと同様の別の移動手段5bが備えられて
いる。即ち、磁場形成部材3は、ベースフレーム4及び
可動体1の夫々に対して相対的に直線移動し得るように
構成されている。
Moreover, between the magnetic field forming member 3 and the movable body 1, the movable body 1
Another moving means 5b similar to the moving means 5a is provided so that the magnetic field forming member 3 can move linearly relative to the magnetic field forming member 3. That is, the magnetic field forming member 3 is configured to be able to move linearly relative to each of the base frame 4 and the movable body 1.

このように構成されたリニアモータ装置が作動して可動
体1が駆動され移動する場合の当該可動体1の移動方向
は正方向として矢印aで示されており、磁場形成部材3
に生じる反発力によって受ける当該磁場形成部材3の移
動方向は負方向として矢印すで示されている。
When the linear motor device configured as described above operates and the movable body 1 is driven and moved, the direction of movement of the movable body 1 is shown as a positive direction by an arrow a, and the direction in which the movable body 1 moves is indicated by an arrow a.
The direction in which the magnetic field forming member 3 moves due to the repulsive force generated is indicated by an arrow as a negative direction.

このリニアモータ装置は、可動体lの重量をFl。This linear motor device reduces the weight of the movable body l to Fl.

磁場形成部材3の重量をF2及び摩擦係数をμとすると
、可動体lと磁場形成部材3との間の摩擦負荷はF1μ
、磁場形成部材3とベースフレーム4との間の摩擦負荷
はF2μ、可動体1の加速力は Fl(i)、可動体1
に生じる発生推力はF2(1) 、磁場形成部材3の加
速力はFm (t)及び磁場形成部材3に生じる反発力
はFl(t)  となり、磁場形成部材3の加速力Fm
 (t)は以下のように表わせる。
If the weight of the magnetic field forming member 3 is F2 and the friction coefficient is μ, the frictional load between the movable body l and the magnetic field forming member 3 is F1μ
, the frictional load between the magnetic field forming member 3 and the base frame 4 is F2μ, the acceleration force of the movable body 1 is Fl(i), the movable body 1
The thrust generated in the magnetic field forming member 3 is F2(1), the accelerating force of the magnetic field forming member 3 is Fm (t), the repulsive force generated in the magnetic field forming member 3 is Fl(t), and the accelerating force of the magnetic field forming member 3 is Fm
(t) can be expressed as follows.

Fl(1) =F2(1)−Flμ F+(t) =−F2(f) Fm(t) =F+(t)  +F1μ+F2μ、’、
Fm(t)  −−Fl(t)  +F2μこれは、可
動体1と磁場形成部材3との間の摩擦負荷F1μの影響
が打消されてしまうことを示している。
Fl(1) =F2(1)-Flμ F+(t) =-F2(f) Fm(t) =F+(t) +F1μ+F2μ,',
Fm(t) --Fl(t) +F2μ This indicates that the influence of the frictional load F1μ between the movable body 1 and the magnetic field forming member 3 is canceled out.

以上から、前述のように可動子2及び可動体1を備えた
可動部材を磁場形成部材3の上を当該磁場形成部材3に
対して相対的に直線移動を自在に行なうことができるよ
うに構成することによって、磁場形成部材3の加速力F
m (t)を低減することができる。それ故に、磁場形
成部材3を元の初期位置に復帰させるための前述した復
帰移動手段に加わる負荷を最小限にすることができる。
From the above, as described above, the movable member including the movable element 2 and the movable body 1 is configured so that it can freely move linearly on the magnetic field forming member 3 relative to the magnetic field forming member 3. By doing so, the acceleration force F of the magnetic field forming member 3
m (t) can be reduced. Therefore, the load applied to the above-mentioned return moving means for returning the magnetic field forming member 3 to its original initial position can be minimized.

[実施例] 次に、本発明によるリニアモータ装置の一実施例を説明
する。この一実施例は、本発明を走査露光方式の複写機
に適用した場合である。
[Example] Next, an example of the linear motor device according to the present invention will be described. This embodiment is a case where the present invention is applied to a scanning exposure type copying machine.

第1図から第3図の夫々に示すように、リニアモータ装
置0は、走査露光方式の複写機の本体の内部に固定され
たベースフレーム4と、ベースフレーム4に対して相対
的に直線移動し得るように構成された磁場形成部材3と
、磁場形成部材3及びベースフレーム4の夫々に対して
相対的に直線移動し得るように構成された可動部材とを
備えている。
As shown in each of FIGS. 1 to 3, the linear motor device 0 moves linearly relative to a base frame 4 fixed inside the main body of a scanning exposure type copying machine. The magnetic field forming member 3 is configured to be able to move in a straight line relative to the magnetic field forming member 3 and the base frame 4, respectively.

この可動部材は可動子2及び可動体1の夫々を含んでい
る。
This movable member includes a movable element 2 and a movable body 1, respectively.

可動体1は、第5図に示すような光学ユニットLを装着
し得るように構成されている。
The movable body 1 is configured so that an optical unit L as shown in FIG. 5 can be attached thereto.

更に可動体1は、第1図及び第2図に示すように、第1
の可動体1a及び第2の可動体1bの夫々によって構成
されている。
Furthermore, as shown in FIGS. 1 and 2, the movable body 1
The movable body 1a and the second movable body 1b each constitute the movable body 1a and the second movable body 1b.

第1の可動体1aは細長く平らな形状を有している。こ
の第Iの可動体1aには、第1のミラー24及びランプ
ユニット等(図示せず)が装着されている。
The first movable body 1a has an elongated and flat shape. A first mirror 24, a lamp unit, etc. (not shown) are attached to this I-th movable body 1a.

第2の可動体Toは、第1の可動体1aと同様に細長く
平らな形状を有している。
The second movable body To has an elongated and flat shape similarly to the first movable body 1a.

この第2の可動体1bには、第2のミラー25及び第3
のミラー26が装着されている。
This second movable body 1b includes a second mirror 25 and a third mirror 25.
A mirror 26 is attached.

これらの第1のミラー24、第2のミラー25、第3の
ミラー26の夫々に対して、当該第1のミラー24から
第3のミラー26の夫々を経た光を倒立させて結像すべ
く配置されたレンズ27と、このレンズ27からの光を
感光体ドラム29に反射すべく当該レンズ27と感光体
ドラム29との間に配置された第4のミラー28とを加
えることによって複写機の光学系を構成している。
For each of the first mirror 24, second mirror 25, and third mirror 26, the light that has passed from the first mirror 24 to the third mirror 26 is inverted to form an image. By adding the lens 27 and the fourth mirror 28 that is arranged between the lens 27 and the photoreceptor drum 29 to reflect the light from the lens 27 onto the photoreceptor drum 29, the copying machine can be improved. It makes up the optical system.

可動子2は、第1の可動体1aの両側の端部3Qa及び
端部30bの夫々に固定された可動ヨーク7a及び可動
ヨーク7b、並びに第2の可動体1bの両側の端部30
c及び端部3Qdの夫々に固定された可動ヨーク7c及
び可動ヨーク7dを備えている。
The movable element 2 includes a movable yoke 7a and a movable yoke 7b fixed to the ends 3Qa and 30b on both sides of the first movable body 1a, and the ends 30 on both sides of the second movable body 1b.
The movable yoke 7c and the movable yoke 7d are fixed to the end portion 3Qd and the end portion 3Qd, respectively.

可動ヨークの各々には、3つのコイル部材、即ちコイル
部材6a、  コイル部材6b及びコイル部材6Cが装
着されている。
Each movable yoke is equipped with three coil members, ie, a coil member 6a, a coil member 6b, and a coil member 6C.

これらの可動ヨークの各々は、対応する3つのコイル部
材から発生される磁束の通路を構成している。
Each of these movable yokes constitutes a path for the magnetic flux generated from the three corresponding coil members.

更に可動体1a及び可動体1bは、可動ヨーク7a及び
可動ヨーク7cの夫々に装着された軸受8,8を有して
いる。
Furthermore, the movable body 1a and the movable body 1b have bearings 8, 8 mounted on the movable yoke 7a and the movable yoke 7c, respectively.

軸受8は軸10に摺動自在に支持されている。The bearing 8 is slidably supported on the shaft 10.

軸IOは、後述する磁場形成部材3を構成している固定
ヨーク13g と固定ヨーク13bとを相互に連結する
連結板14a及び連結板14bの夫々を貫通し、且つ当
該固定ヨークI3a及び固定ヨーク13bの夫々に各ホ
ルダ15a及びホルダ+5bを介して固定されている。
The axis IO passes through each of a connecting plate 14a and a connecting plate 14b that mutually connect a fixed yoke 13g and a fixed yoke 13b that constitute a magnetic field forming member 3, which will be described later, and also passes through the fixed yoke I3a and the fixed yoke 13b. is fixed to each of the holders 15a and 5b via the holders 15a and 5b.

可動子2は可動ヨーク7b及び可動ヨーク7dの夫々に
装着されたローラ11. 1+を有している。
The movable element 2 includes rollers 11. mounted on each of a movable yoke 7b and a movable yoke 7d. It has 1+.

ローラ11は磁場形成部材3の固定ヨーク13bに支持
されている。
The roller 11 is supported by a fixed yoke 13b of the magnetic field forming member 3.

これらのローラIt、  If及び軸10に摺動自在に
支持された軸受8,8によって、第6図に概念的に示さ
れた磁場形成部材3と可動体上との間に備えられた、当
該可動体1の磁場形成部材3に対する相対的に直線移動
を行なわせ得る移動手段5bを構成している。
These rollers It, If and bearings 8, 8 slidably supported on the shaft 10 allow the magnetic field forming member 3, which is conceptually shown in FIG. It constitutes a moving means 5b that can linearly move the movable body 1 relative to the magnetic field forming member 3.

磁場形成部材3は、前述の3つのコイル部材の列、即ち
コイル部材6a、  コイル部材6b及びコイル部材6
cの各列に対応して多極的に着磁された永久磁石11a
及び永久磁石12bと、永久磁石12a及び永久磁石+
21+の夫々を直線上に配列して固定するための固定ヨ
ーク13a及び固定ヨークHbとを有している。
The magnetic field forming member 3 includes the above-mentioned three rows of coil members, namely, the coil member 6a, the coil member 6b, and the coil member 6.
Permanent magnet 11a magnetized multipolarly corresponding to each row of c.
and permanent magnet 12b, permanent magnet 12a and permanent magnet +
It has a fixed yoke 13a and a fixed yoke Hb for linearly arranging and fixing each of the 21+.

これらの永久磁石12a及び永久磁石12bの夫々は、
第3図に示すように前記3つのコイル部材の列と協働し
て3相のブラシレスモータを構成すべく当該3つのコイ
ル部材の列に対して所定の間隙を有して配置されている
Each of these permanent magnets 12a and 12b is
As shown in FIG. 3, the three coil member rows are arranged with a predetermined gap in order to form a three-phase brushless motor in cooperation with the three coil member rows.

また、固定ヨークlla及び固定ヨーク+3bは、夫々
の両端部に於いて連結板14a及び連結板+4bによっ
て連結され、枠体14として一体化されている。
Further, the fixed yoke lla and the fixed yoke +3b are connected at both ends thereof by a connecting plate 14a and a connecting plate +4b, and are integrated as a frame 14.

ベースフレーム4と磁場形成部材3との間には、当該磁
場形成部材3の矢印a及び矢印すの方向に関する移動を
可能にする移動手段5a (第6図)が設けられている
A moving means 5a (FIG. 6) is provided between the base frame 4 and the magnetic field forming member 3, which allows the magnetic field forming member 3 to move in the directions of arrows a and 3.

この移動手段5aは、磁場形成部材3の一部を構成する
ベースフレーム4に取付けられた一対の軸受92.軸受
9bと、磁場形成部材3の一部を構成する固定ヨーク1
3bに取付けられた一対のローラ162、ローラ16b
とによって構成されている。
This moving means 5a includes a pair of bearings 92. Bearing 9b and fixed yoke 1 forming part of magnetic field forming member 3
A pair of rollers 162 attached to roller 3b, roller 16b
It is composed of.

軸受9a、軸受9bは、軸10を摺動自在に支持するよ
うに構成されている。
The bearings 9a and 9b are configured to slidably support the shaft 10.

尚、このように構成されたリニアモータ装置Oの作動状
態に於いて、前述の3つのコイル部材の列であるコイル
部材6a、  コイル部材6b及びコイル部材6cの夫
々は、例えば第1の可動体1aに固定された可動ヨーク
7a及び可動ヨーク7b、並びに第2の可動体1bに固
定された可動ヨーク7c及び可動ヨーク7dにホール素
子(図示せず)を装着し、このホール素子による励磁の
切換えによって直線移動動作のための駆動力を生起する
ことができる。
In addition, in the operating state of the linear motor device O configured in this way, each of the above-mentioned three coil member rows, ie, the coil member 6a, the coil member 6b, and the coil member 6c, is connected to the first movable body, for example. A Hall element (not shown) is attached to the movable yoke 7a and the movable yoke 7b fixed to the second movable body 1a, and the movable yoke 7c and the movable yoke 7d fixed to the second movable body 1b, and the excitation is switched by the Hall element. can generate the driving force for the linear motion.

また第1の可動体1a及び第2の可動体1bは、光路長
を一定に保つために同期運転するのが好ましい。
Further, it is preferable that the first movable body 1a and the second movable body 1b operate synchronously in order to keep the optical path length constant.

第1図及び第2図の夫々に示された、磁場形成部材3を
初期位置に復帰させるための前述の復帰移動手段17は
、特に第4図に拡大されて示されている。
The aforementioned return moving means 17 for returning the magnetic field forming member 3 to its initial position, shown in each of FIGS. 1 and 2, is particularly shown enlarged in FIG. 4.

即ち復帰移動手段17は、ベースフレーム4に固定的に
装着された枠体22と、この枠体22に装着されたパル
スモータ21と、このパルスモータ21の作動を制御す
べく当該パルスモータ21に接続された制御装置23と
、パルスモータ21の回転駆動力によって回転される第
1のギア20aと、この第1のギア2(laの回転によ
って回転される第2のギア2Qbと、この第2のギア2
0bの回転によって回転されるプーリ19と、このプー
リ19に巻回されて磁場形成部材3を移動させるべく、
両端部に於いて、当該磁場形成部材3を構成している固
定ヨーク13aに一体的に設けられた2つの突起部材3
1の夫々に連結されたワイヤ18とを備えている。
That is, the return moving means 17 includes a frame 22 fixedly attached to the base frame 4, a pulse motor 21 attached to the frame 22, and a motor connected to the pulse motor 21 to control the operation of the pulse motor 21. The connected control device 23, the first gear 20a rotated by the rotational driving force of the pulse motor 21, the second gear 2Qb rotated by the rotation of the first gear 2 (la), and the second gear 2Qb rotated by the rotation of the first gear 2 (la) gear 2
In order to move the pulley 19 rotated by the rotation of 0b and the magnetic field forming member 3 wound around this pulley 19,
At both ends, two protruding members 3 are provided integrally with the fixed yoke 13a that constitutes the magnetic field forming member 3.
1 and wires 18 connected to each of the wires 18.

このように構成された復帰移動手段17に於いては、パ
ルスモータ21が作動して回転による駆動力が生起され
ると、第↓のギア20a1第2のギア20b及びプーリ
目の夫々も当該回転の方向に対応して回転する。
In the return moving means 17 configured in this way, when the pulse motor 21 is activated and a driving force is generated by rotation, each of the ↓-th gear 20a1, the second gear 20b, and the pulley eye also rotates. Rotate according to the direction of.

その結果ワイヤ18は当該回転の方向に対応する矢印a
及び矢印すのいずかの方向に移動し、従って固定ヨーク
Haを含む磁場形成部材3を矢印a及び矢印すのいずか
の方向に移動させることができる。
As a result, the wire 18 is moved by the arrow a corresponding to the direction of rotation.
Therefore, the magnetic field forming member 3 including the fixed yoke Ha can be moved in either the direction of the arrow a or the arrow B.

これらのことから磁場形成部材3が、初期位置に復帰す
る方向がいずれ方向にも選択され得ることが理解されよ
う。
From these facts, it will be understood that the direction in which the magnetic field forming member 3 returns to its initial position can be selected in any direction.

次に、本実施例によるリニアモータ装置Oを作動させた
場合の状態について説明する。
Next, a description will be given of a state when the linear motor device O according to this embodiment is operated.

可動子2に於ける可動ヨーク7a、可動ヨーク7b。A movable yoke 7a and a movable yoke 7b in the movable element 2.

可動ヨーク7C及び可動ヨーク7dの各々に装着された
3つのコイル部材、即ちコイル部材6g、  コイル部
材6b及びコイル部材6cに電流を供給して磁束を発生
させることによって可動子2には推力が発生する。
Thrust is generated in the mover 2 by supplying current to three coil members attached to each of the movable yoke 7C and the movable yoke 7d, that is, the coil member 6g, the coil member 6b, and the coil member 6c to generate magnetic flux. do.

各可動子2に推力が発生されると、当該可動子2に一体
化された可動体1a及び可動体1bの各々が当該可動子
2と共に走査方向、例えば第1図に示す矢印aの方向に
移動する。
When thrust is generated in each movable element 2, each of the movable bodies 1a and 1b integrated with the movable element 2 moves in the scanning direction, for example, in the direction of arrow a shown in FIG. 1, together with the movable element 2. Moving.

可動体1a及び可動体1bの各々が矢印aの方向に移動
する際、前述の3つのコイル部材の列に対して所定の間
隙を有して配置された、磁場形成部材3の永久磁石12
a及び永久磁石+2bの夫々には、矢印aと逆の矢印す
で示す方向の反発力が生じる。
When each of the movable body 1a and the movable body 1b moves in the direction of arrow a, the permanent magnet 12 of the magnetic field forming member 3 is arranged with a predetermined gap with respect to the above-mentioned three rows of coil members.
A repulsive force is generated in each of permanent magnet a and permanent magnet +2b in the direction indicated by the arrow opposite to arrow a.

しかしながら、磁場形成部材3は、ベースフレム4との
間に当該磁場形成部材3を矢印a又は矢印すの方向に関
する移動を可能にする移動手段5aが設けられているの
で、例えば前述の矢印すで示す方向の反発力が生じても
当該矢印すの方向に移動することによって当該反発力を
吸収することができる。
However, since the magnetic field forming member 3 is provided with a moving means 5a between it and the base frame 4 that allows the magnetic field forming member 3 to move in the direction of the arrow a or Even if a repulsive force occurs in this direction, the repulsive force can be absorbed by moving in the direction of the arrow.

また、可動体1及び可動子2が前述の矢印aで示す走査
方向への移動が終了して元の位置に戻る、即ち矢印すで
示すリターン方向への移動を行なう場合、磁場形成部材
3の永久磁石12a及び永久磁石12bの夫々には、逆
に矢印すと反対の矢印aで示す方向の反発力が生じる。
Furthermore, when the movable body 1 and the movable element 2 return to their original positions after completing their movement in the scanning direction indicated by the arrow a, that is, move in the return direction indicated by the arrow, the magnetic field forming member 3 A repulsive force in the direction indicated by the opposite arrow a is generated in each of the permanent magnets 12a and 12b.

磁場形成部材3は、前述の場合と同様に移動手段5aに
より矢印aの方向に移動することによって前記反発力を
吸収することができる。
The magnetic field forming member 3 can absorb the repulsive force by moving in the direction of the arrow a by the moving means 5a, as in the case described above.

しかしながら、磁場形成部材3は、摩擦負荷等のために
元の待機位置、即ち正確な初期位置には厳密には復帰し
得ない。
However, the magnetic field forming member 3 cannot strictly return to the original standby position, that is, the correct initial position, due to frictional loads and the like.

従って、前述の復帰移動手段17によって磁場形成部材
3を正確な初期位置まで移動させる必要がある。
Therefore, it is necessary to move the magnetic field forming member 3 to the correct initial position using the return moving means 17 described above.

ここで、本実施例のリニアモータ装置0に於いて、可動
体1aの重量をFla 、可動体1bの重量をF1b1
磁場形成部材3の重量をF2及び摩擦係数をμとすると
、可動体1aと磁場形成部材3との間に生じている摩擦
負荷はFlaμ、可動体1bと磁場形成部材3との間に
生じている摩擦負荷はFibμ、磁場形成部材3とベー
スフレーム4との間に生じている摩擦負荷はF2μとな
る。
Here, in the linear motor device 0 of this embodiment, the weight of the movable body 1a is Fla, and the weight of the movable body 1b is F1b1.
If the weight of the magnetic field forming member 3 is F2 and the friction coefficient is μ, then the frictional load occurring between the movable body 1a and the magnetic field forming member 3 is Flaμ, and the frictional load occurring between the movable body 1b and the magnetic field forming member 3 is F2. The frictional load occurring between the magnetic field forming member 3 and the base frame 4 is F2μ.

また、走査方向を正方向として矢印aで示し、可動体1
aの加速力をFl、a(t)、可動体1aに発生する推
力をF2a (t)、可動体1bの加速力をFib(1
)、可動体1bに発生する推力をF2b (1)、磁場
形成部材3の加速力をFm(t) 、磁場形成部材3に
発生する反発力をF+(+) とすると、磁場形成部材
3の加速力Fm(0は、 Fla (t) = F2a (+) −Fla  u
Flb (+) = F2b (L) −Flb  μ
Fr(f)  =−F2aft)−F2b(f)Fm(
t)  =Fr(t)  +FIa  μ+F1b  
μ+F2μ、’、Fm(t)  =−Fla(t)−F
lb(t)+F2μとなる。
In addition, the scanning direction is shown as a positive direction by an arrow a, and the movable body 1
The acceleration force of a is Fl, a(t), the thrust generated in the movable body 1a is F2a (t), and the acceleration force of the movable body 1b is Fib(1
), the thrust force generated in the movable body 1b is F2b (1), the acceleration force of the magnetic field forming member 3 is Fm(t), and the repulsive force generated in the magnetic field forming member 3 is F+(+), then the force of the magnetic field forming member 3 is Acceleration force Fm (0 is Fla (t) = F2a (+) - Fla u
Flb (+) = F2b (L) −Flb μ
Fr(f) =-F2aft)-F2b(f)Fm(
t) =Fr(t) +FIa μ+F1b
μ+F2μ,', Fm(t) =-Fla(t)-F
lb(t)+F2μ.

従ってこれらのことから、可動体1a及び可動体1bが
磁場形成部材3の上で自在に直線移動し得るように構成
されているため、可動体1aの摩擦負荷Flaμ及び可
動体1bの摩擦負荷FToμの影響は打消され得、その
結果、磁場形成部材3の加速力Fmmが低減され得るた
め、前述の復帰移動手段17に加わる負荷を小さくする
ことができる。
Therefore, since the movable body 1a and the movable body 1b are configured to be able to freely move linearly on the magnetic field forming member 3, the frictional load Flaμ of the movable body 1a and the frictional load FToμ of the movable body 1b are reduced. can be canceled out, and as a result, the acceleration force Fmm of the magnetic field forming member 3 can be reduced, so that the load applied to the above-mentioned return movement means 17 can be reduced.

[発明の効果] 以上から、本発明によるリニアモータ装置は、前述の構
成、即ちベースフレームと、このベースフレームに対し
て相対的に直線移動し得るように構成された磁場形成部
材と、この磁場形成部材上に配置されており、当該磁場
形成部材によって前記ベースフレームに対して直線的に
駆動されるように構成された可動部材とを備えており、
前記磁場形成部材による前記可動部材の前記相対的な直
線移動が行なわれるときに、当該磁場形成部材に生じる
反発力を吸収すべく構成されていることを特徴とする構
成を有しているため、前記可動部材が磁場形成部材の上
に於いて自在に直線移動し得、当該可動部材に生ずる摩
擦負荷の影響を打消すことができる。
[Effects of the Invention] As described above, the linear motor device according to the present invention has the above-mentioned configuration, that is, a base frame, a magnetic field forming member configured to be able to move linearly relative to the base frame, and this magnetic field. a movable member arranged on the forming member and configured to be driven linearly with respect to the base frame by the magnetic field forming member,
When the relative linear movement of the movable member by the magnetic field forming member is performed, the magnetic field forming member is configured to absorb a repulsive force generated in the magnetic field forming member, The movable member can freely move in a straight line on the magnetic field forming member, and the influence of frictional load generated on the movable member can be canceled.

それ故、前記ベースフレームに対して相対的に移動可能
に構成された前記可動部材を、前記磁場形成部材によっ
て直線移動させるように駆動する場合に、前記磁場形成
部材に加わる加速力を低減し得るため、当該磁場形成部
材を所望の場所からそれ程ずらすことなく比較的正確な
位置に停止させることができる。
Therefore, when the movable member configured to be movable relative to the base frame is driven to linearly move by the magnetic field forming member, the acceleration force applied to the magnetic field forming member can be reduced. Therefore, it is possible to stop the magnetic field forming member at a relatively accurate position without shifting it from the desired position.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明によるリニアモータ装置の一実施例の
斜視図、第2図は、第1図に示した本発明によるリニア
モータ装置の一実施例の平面図、第3図は、第2図の■
−■線による断面図、第4図は、第2図に示した本発明
によるリニアモータ装置の一実施例の部分拡大平面図、
第5図は、本発明によるリニアモータ装置が適用される
走査露光複写機の光学系の説明図、第6図は、本発明に
よるリニアモータ装置の動作原理の概略説明図、第7図
は、−膜内なリニアモータ装置の動作原理の説明図であ
る。 1・・・・・・可動体、2・・・・・・可動子、3・・
・・・・磁場形成部材、4・・・・・・ベースフレーム
、5・・・・・・移動手段、6a6b、6c・・・・・
・コイル部材、7a、 7b、 7c、 7d・・・・
・・可動ヨーク、8・・・・・・軸受、10・・・・・
・軸、11・・・・・・ローラ、12a、 12b・・
・・・・永久磁石、13g、 13b・・・・・・固定
ヨーク、14g、 14b・・・・・・連結板、15a
、 15b・・・・・・ホルダ、17・・・・・・復帰
手段、18・・・・・・ワイヤ、21・・・・・・パル
スモータ、22・・・・・・枠体、23・・・・・・制
御装置、24.25.26.28・・・・・・ミラー、
27・・・・・・レンズ、29・・・・・・感光体ドラ
ム。 第7叉
1 is a perspective view of an embodiment of a linear motor device according to the present invention, FIG. 2 is a plan view of an embodiment of the linear motor device according to the present invention shown in FIG. ■ in Figure 2
4 is a partially enlarged plan view of an embodiment of the linear motor device according to the present invention shown in FIG.
FIG. 5 is an explanatory diagram of the optical system of a scanning exposure copying machine to which the linear motor device according to the present invention is applied, FIG. 6 is a schematic explanatory diagram of the operating principle of the linear motor device according to the present invention, and FIG. - An explanatory diagram of the operating principle of the intramembrane linear motor device. 1...Movable body, 2...Movable element, 3...
...Magnetic field forming member, 4...Base frame, 5...Movement means, 6a6b, 6c...
・Coil members, 7a, 7b, 7c, 7d...
...Movable yoke, 8...Bearing, 10...
・Shaft, 11...Roller, 12a, 12b...
...Permanent magnet, 13g, 13b...Fixed yoke, 14g, 14b...Connection plate, 15a
, 15b...Holder, 17...Returning means, 18...Wire, 21...Pulse motor, 22...Frame, 23 ...Control device, 24.25.26.28...Mirror,
27... Lens, 29... Photosensitive drum. 7th fork

Claims (1)

【特許請求の範囲】[Claims] ベースフレームと、該ベースフレームに対して相対的に
直線移動し得るように構成された磁場形成部材と、該磁
場形成部材上に配置されており、当該磁場形成部材によ
って前記ベースフレームに対して直線的に駆動されるよ
うに構成された可動部材とを備えており、前記磁場形成
部材による前記可動部材の前記相対的な直線移動が行な
われるときに、当該磁場形成部材に生じる反発力を吸収
すべく構成されていることを特徴とするリニアモータ装
置。
a base frame; a magnetic field forming member configured to be able to move linearly relative to the base frame; a movable member configured to be driven by the magnetic field forming member, and absorbing a repulsive force generated in the magnetic field forming member when the relative linear movement of the movable member by the magnetic field forming member is performed. A linear motor device characterized in that it is configured as follows.
JP1318678A 1989-04-17 1989-12-07 Linear motor device Expired - Lifetime JP2644053B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1318678A JP2644053B2 (en) 1989-12-07 1989-12-07 Linear motor device
DE69009841T DE69009841T2 (en) 1989-04-17 1990-04-17 Linear drive device.
EP90304115A EP0393994B1 (en) 1989-04-17 1990-04-17 A linear driving apparatus
US07/509,806 US5208497A (en) 1989-04-17 1990-04-17 Linear driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1318678A JP2644053B2 (en) 1989-12-07 1989-12-07 Linear motor device

Publications (2)

Publication Number Publication Date
JPH03183351A true JPH03183351A (en) 1991-08-09
JP2644053B2 JP2644053B2 (en) 1997-08-25

Family

ID=18101806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1318678A Expired - Lifetime JP2644053B2 (en) 1989-04-17 1989-12-07 Linear motor device

Country Status (1)

Country Link
JP (1) JP2644053B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020054015A (en) * 2018-09-21 2020-04-02 キヤノンマシナリー株式会社 Reaction force cancellation device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51114610A (en) * 1975-04-02 1976-10-08 Hitachi Ltd Supporting structure of linear motor
JPS60226076A (en) * 1984-04-24 1985-11-11 Nec Corp Magnetic disk device
JPS62114460A (en) * 1985-11-11 1987-05-26 Hitachi Ltd Voice coil motor
JPS6439685A (en) * 1987-08-04 1989-02-09 Fujitsu Ltd Magnetic disk device
JPH01238540A (en) * 1988-03-18 1989-09-22 Green Cross Corp:The Remedy for spinal disease participating type i lymphotropic virus of human t cell

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51114610A (en) * 1975-04-02 1976-10-08 Hitachi Ltd Supporting structure of linear motor
JPS60226076A (en) * 1984-04-24 1985-11-11 Nec Corp Magnetic disk device
JPS62114460A (en) * 1985-11-11 1987-05-26 Hitachi Ltd Voice coil motor
JPS6439685A (en) * 1987-08-04 1989-02-09 Fujitsu Ltd Magnetic disk device
JPH01238540A (en) * 1988-03-18 1989-09-22 Green Cross Corp:The Remedy for spinal disease participating type i lymphotropic virus of human t cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020054015A (en) * 2018-09-21 2020-04-02 キヤノンマシナリー株式会社 Reaction force cancellation device

Also Published As

Publication number Publication date
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