JPH03183146A - Holding structure of contact maker for test handler use - Google Patents

Abstract

PURPOSE:To reduce a load to be exerted on the mounting part of a base part of a contact maker when the contact comes into contact with an object under test and to make a life as the contact long by a method wherein an elastically deformable reinforcement piece which is attached to the base part of the contact is installed at a holder. CONSTITUTION:A reinforcement piece 21 which is attached to a base part of a contact part 7 is inserted into and held by a holder 9; its whole body is formed of a material which can be deformed elastically. The tip part of the reinforcement piece 21 is set in such a way that its size protrudes forward from a contact part 7b of the contact maker 7. In such a holding structure of the contact maker for test handler use, the reinforcement piece 21 can be bent to the base part 7a by following a flexual deformation when the contact 7 comes into contact with a lead 3a of a workpiece 3. As a result, it is possible to reduce a load to be exerted on the mounting part of the base part 7a of the contact maker 7.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a holding structure for a contact for a test handler used during testing of semiconductor devices.

[Conventional technology]

Generally, test handlers as shown in FIGS. 3 and 4 are used to test semiconductor devices.

Conventionally, testing of a semiconductor device by this type of test handler is performed through the following operations.

That is, when a workpiece 3 as a test object (semiconductor device) is transferred to the contact portion 2 of the index table 1, the workpiece 3 is lifted upward from the pallet 5 as the support 4 moves upward.

On the other hand, when the plate 6 moves downward, the contactor 7 contacts the lead 3a of the workpiece 3 and is elastically deformed.

Here, the reference numeral 8 in the figure is a pick press, and the reference numeral 9 is an insulating holder.

By the way, as shown in FIGS. 5 and 6, the holding structure of this type of contact for a test handler is formed by a base portion 7a held by a holder 9 and a contact portion 7b connected at right angles to this base portion 7a. Therefore, when the contact portion 7b contacts the workpiece 3, the base portion 7a bends to form a convex portion on the lower side (work side) to obtain contact pressure.

[Problem to be solved by the invention]

However, in the conventional holding structure for a contact for a test handler, the base 7a of the contact 7 is bent to obtain contact pressure against the lead 3a of the workpiece 3, so when contacting the workpiece 3, the base against the holder 9 is There was a problem in that an excessive load was applied to the mounting portion of 7a, reducing the lifespan of the contact.

The present invention has been made in view of the above circumstances, and is a test handler that can reduce the load applied to the mounting part of the base when it comes into contact with a workpiece, thereby increasing the lifespan of the contactor. This provides a holding structure for the contact.

[Means to solve the problem]

The holding structure for a contactor for a test handler according to the present invention is as follows:
A contact holding structure consisting of a base held in a holder and a contact part connected at right angles to the base and in contact with the test object, the holder having an elastically deformable reinforcing piece attached to the base of the contact. It was established in

[For production]

In the present invention, the reinforcing piece can be deflected following the deflection deformation of the base when the contactor contacts the workpiece.

〔Example〕

EMBODIMENT OF THE INVENTION Hereinafter, the structure etc. of this invention will be explained in detail by the Example shown in the figure.

1 and 2 are a perspective view and a cross-sectional view showing a holding structure for a contactor for a test handler according to the present invention, and in these figures, the same members as in FIGS. However, detailed explanation will be omitted. In the figure, a reinforcing piece 21 is attached to the base 7a of the contact 7, is inserted and held in the holder 9, and is made entirely of an elastically deformable material. The tip portion (free end portion) of this reinforcing piece 21 is dimensioned to protrude further than the contact portion 7b of the contactor 7.

In such a holding structure for a contact for a test handler, when the contact 7 contacts the lead 3a of the workpiece 3, the reinforcing piece 21 can be deflected to follow the bending deformation of the base 7a. The load applied to the attachment portion of the base 7a can be reduced.

In this embodiment, the case where one reinforcing piece 21 is used is shown, but the present invention is not limited to this. For example, when the contact pressure increases, two or three reinforcing pieces are used.
The number of sheets may be changed as appropriate.

Incidentally, the test of the semiconductor device by the test handler in the present invention is performed in the same manner as in the conventional example.

That is, when a workpiece (semiconductor device) 3 as a test object is transferred to the contact portion 2 of the index table 1, the workpiece 3 is lifted upward from the pallet 5 as the support 4 moves upward.

On the other hand, when the plate 6 moves downward, the contact portion 7b of the contactor 7 comes into contact with the lead 3a of the workpiece 3.

At this time, the contactor 7 is bent so that the base portion 7a and the reinforcing piece 21 form a convex portion on the lower side (work side) to obtain contact pressure.

〔Effect of the invention〕

As explained above, according to the present invention, there is provided a contact holding structure consisting of a base held by a holder and a contact part that is connected to the base and comes into contact with a test object, the contact part attached to the base of the contact. Since the holder is provided with an elastically deformable reinforcing piece, it is possible to bend the reinforcing piece following the bending deformation of the base when the contactor contacts the test object. Therefore, the load applied to the base attachment portion of the contact when it comes into contact with the test object can be reduced, so that the life of the contact can be extended.

[Brief explanation of drawings]

1 and 2 are a perspective view and a sectional view showing a holding structure for a contact for a test handler according to the present invention, FIG. 3 is a plan view showing a conventional test handler, and FIG. 4 shows the contact portion thereof. 5 and 6 are a perspective view and a sectional view showing a conventional holding structure for a contactor for a test handler. 3...Work, 3a...Lead, 7...Contact, 7a...Base, 7b...Contact part, 9...
...Holder, 21...Reinforcement piece. Agent Masuo Oiwa Figure 3

Claims (1)

[Claims] A contact holding structure consisting of a base held in a holder and a contact part connected to the base and in contact with a test object, wherein an elastically deformable reinforcing piece attached to the base of the contact is attached to the holder. A holding structure for a contactor for a test handler, characterized in that: