JPH0318164U - - Google Patents

Info

Publication number
JPH0318164U
JPH0318164U JP7822989U JP7822989U JPH0318164U JP H0318164 U JPH0318164 U JP H0318164U JP 7822989 U JP7822989 U JP 7822989U JP 7822989 U JP7822989 U JP 7822989U JP H0318164 U JPH0318164 U JP H0318164U
Authority
JP
Japan
Prior art keywords
permanent magnets
magnetic poles
workpiece
work holder
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7822989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7822989U priority Critical patent/JPH0318164U/ja
Publication of JPH0318164U publication Critical patent/JPH0318164U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7822989U 1989-06-30 1989-06-30 Pending JPH0318164U (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7822989U JPH0318164U (da) 1989-06-30 1989-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7822989U JPH0318164U (da) 1989-06-30 1989-06-30

Publications (1)

Publication Number Publication Date
JPH0318164U true JPH0318164U (da) 1991-02-22

Family

ID=31621318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7822989U Pending JPH0318164U (da) 1989-06-30 1989-06-30

Country Status (1)

Country Link
JP (1) JPH0318164U (da)

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