JPH0318162U - - Google Patents
Info
- Publication number
- JPH0318162U JPH0318162U JP7661189U JP7661189U JPH0318162U JP H0318162 U JPH0318162 U JP H0318162U JP 7661189 U JP7661189 U JP 7661189U JP 7661189 U JP7661189 U JP 7661189U JP H0318162 U JPH0318162 U JP H0318162U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- cavity
- opening
- open top
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 7
- 239000008188 pellet Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076611U JP2503756Y2 (ja) | 1989-06-29 | 1989-06-29 | 蒸着用るつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076611U JP2503756Y2 (ja) | 1989-06-29 | 1989-06-29 | 蒸着用るつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0318162U true JPH0318162U (US20100056889A1-20100304-C00004.png) | 1991-02-22 |
| JP2503756Y2 JP2503756Y2 (ja) | 1996-07-03 |
Family
ID=31618237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989076611U Expired - Lifetime JP2503756Y2 (ja) | 1989-06-29 | 1989-06-29 | 蒸着用るつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503756Y2 (US20100056889A1-20100304-C00004.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1288331A1 (en) * | 2001-09-03 | 2003-03-05 | Hoya Corporation | Vapor deposition crucible opened on both sides |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6250460A (ja) * | 1985-08-30 | 1987-03-05 | Mitsubishi Heavy Ind Ltd | 蒸発方法 |
-
1989
- 1989-06-29 JP JP1989076611U patent/JP2503756Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6250460A (ja) * | 1985-08-30 | 1987-03-05 | Mitsubishi Heavy Ind Ltd | 蒸発方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1288331A1 (en) * | 2001-09-03 | 2003-03-05 | Hoya Corporation | Vapor deposition crucible opened on both sides |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503756Y2 (ja) | 1996-07-03 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |