JPH03177108A - Pulse generator - Google Patents

Abstract

PURPOSE:To improve efficiency by providing a satuable reactor for reverse current prevention having the voltage-time product of large enough to prevent saturation while the pulse compression of a first stage is executed. CONSTITUTION:One end of the satuable reactor 12 for reverse current prevention is connected to a capacitor 3 for charging at its one end, and the other end is connected to the junction point of the capacitor 4 for compression and the satuable reactor 8. Since this satuable reactor 12 for reverse current prevention becomes high impedance in a non-saturated state for a period that the pulse compression of the first stage is executed, it prevents a pulse current from flowing in a reverse direction. Thus, a pulse current in the reverse direction is prevented from flowing after time when the pulse compression of the first stage is executed, and the pulse generation device of high efficiency can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an M-severus generator used as a power source for a pulsed laser such as an excimer laser or a carbon dioxide laser.

[Prior art] Figure 3 is, for example, Obtronics (1983) No. 12.
is a circuit diagram showing a conventional pulse generator using a two-stage elliptical magnetic pulse compression circuit shown on page 57 of
In the figure, (1) is a charging resistor, one end of which is connected to the high-voltage power supply terminal +HV, and the other end connected to a switching element, such as a thyratron (2).
grounded via. (3> is a charging capacitor, one end of which is connected to the connection point between the charging resistor (1) and the thyratron (2),
The other end is grounded via a series circuit consisting of a reactor (7) and a pulse compression capacitor (4). (8)
is a saturable reactor for magnetic pulse compression, and one end of this saturable reactor (8) is connected to the connection point of the reactor (7> and the pulse compression capacitor (4)), and the other end is connected to the pulse compression capacitor (4). (9) is a saturable reactor for magnetic pulse compression, and one end of this saturable reactor (9) is connected to the saturable reactor (8) and the capacitor for pulse compression (5). It is connected to the connection point, and the other end is grounded via a pulse compression capacitor (6). A laser oscillator (10) and a charging reactor (11) are connected between both ends of this pulse compression capacitor (6). connected in parallel.

The conventional pulse generator is constructed as described above, and its operation will be explained in detail below. FIG. 4 is a waveform diagram showing voltages and TL flows at various parts during operation of a conventional pulse generator. In FIGS. 3 and 4, first, a voltage V.-■ is applied between the high-voltage power supply terminal +l (V and the ground) to connect the charging resistor (1).

Photoelectric capacitor (3), reactor (7), saturable reactor (8), (9), charging reactor (1)
1) to charge the charging capacitor (3) to a predetermined current V, -V. In this case, since the charging capacitor (3>) is slowly charged, almost no voltage is applied to the reactor (7), the saturable reactors <8), <9), and the charging reactor (11).

Next, when thyratron <2> is ignited at time tJ1t o, the loop of photoelectric capacitor (3), thyratron (2>), pulse compression capacitor (4>), and reactor (7) is energized from time t0 to time t1. Width τ.(=t+
to), a pulse current ■ with a peak value ■1 flows, and at time t1, when a pulse voltage V2 is generated in the pulse compression capacitor (4〉), the pulse T, FA I + becomes zero, and the pulse voltage V2 becomes a peak value - When Vp2 is reached, the voltage time of the pulse voltage V2 from time t0 to time t1 is expressed as the saturable reactor (8) t by the interval product S V2dt.
.

saturates and becomes low impedance. As a result, pulse compression capacitors (4), (5), saturable reactor (
8) in the loop from time t1 to time L2 with an energization width τ2(
= t2 tI), a pulse current ■2 with a peak value Jp2 flows, and a pulse voltage V is generated in the pulse compression capacitor (5).The pulse compression capacitors (4), (5) and the saturated saturable reactor ( Since the loop inductance of 8> is set smaller than the inductance of the charging capacitor (3>, thyratron (2), pulse compression capacitor (4), and reactor <7>), the pulse current ■2 is a pulse Compared to the current I, the peak value is thicker (1, 2> I, I), and the current width is smaller (τ2
τ1), that is, the first stage of pulse compression is performed.

Next, at time t2, the pulse current I2 becomes zero, and the pulse voltage V applied to the pulse compression capacitor (5) changes to a peak value of -2. When the voltage-time product 2 tS V3 dt of the pulse voltage ■ from time t1 to time t2 is reached, the saturable reactor (9)
becomes saturated and becomes a low impedance. As a result, the current flow width τ, (1
, -12), a pulse current I3 having a peak value of 11 flows, and a pulse voltage ■ is generated in the pulse compression capacitor (6). Pulse compression capacitors (5), (6).

Since the inductance of the loop of the saturated saturable reactor (9) is set smaller than the inductance of the loop of the pulse compression capacitors (4), (5) and the saturated saturable reactor (8), the pulse TL flow I , has a large peak value compared to the pulse current I2 (I -z>
I, 2), the energization width becomes smaller (τ, τ2), that is, the second stage of pulse compression is performed.

Finally, at time t, the pulse current ■ becomes zero and the pulse voltage V applied to the pulse compression capacitor (6〉) reaches the pulse height compression −■, and the pulse height compression −V,4 becomes the laser oscillator ( Since the voltage is set equal to the breakdown voltage between the pair of electrodes provided in the pulse compression capacitor (10), a glow discharge occurs between the electrodes.
6), Pulse current ■ in the loop of laser oscillator <10>,
flows, and the electric energy multiplied by M in the pulse compression capacitor (6>) is injected into the gas space within the laser oscillator Bo, and a laser beam is output.

[Problems to be Solved by the Invention] In a conventional pulse generator using a magnetic pulse compression circuit, from time 1+ when the first stage pulse compression is performed to time t.
2, the pulse current 11 flows in the opposite direction from time 1 to time t. As a result, the charging capacitor (3
) Only a portion of the energy stored in the ℃ air is transmitted to the laser oscillator (1o), and the electrical energy remaining in the charging capacitor (3) is ultimately transferred to the thyratron (2), saturable reactor (8), etc. Since the pulse generator is consumed as a loss of each elliptic element, there is a problem that the efficiency of the pulse generator decreases.

This invention was made in order to solve the above-mentioned problems.
．． The purpose of this invention is to prevent the pulse current 11 from flowing in the opposite direction from then on and to obtain an efficient pulse generator.

[Means for Solving the Problems] The pulse generator according to the present invention generates a voltage-time product of a size necessary to avoid saturation by the voltage applied during the period in which the first stage pulse compression is performed. It is equipped with a saturable reactor for blocking reverse current.

[Function] In this invention, the saturable reactor for reverse current blocking is in a non-saturated state and has a high impedance during the period when the first stage pulse compression is performed, so that the pulse current does not flow in the opposite direction. to prevent

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
The figure is a circuit diagram showing an embodiment of the pulse generator according to the present invention, and in the figure, (1) to (6) and (8) to (11) are completely the same as the conventional apparatus. (12) is a reverse current blocking saturable reactor, one end of which is connected to the other end of the charging capacitor (3), and the other end connected to the pulse compression capacitor (4) and the saturable reactor (8). Connected to points.

Next, the operation will be explained. FIG. 2 is a waveform diagram showing voltages and currents at various parts during operation of the pulse generator according to the present invention. In Figures 1 and 2, first, a voltage V, = V is applied between the high voltage power supply terminal +) IV and the ground, and the charging resistor (1), the charging capacitor (3), and the reverse current blocking A current is passed through the saturable reactor (12), the saturable reactors (8), (9), and the charging reactor (11), and the charging capacitor (3) is set to a predetermined voltage V,
=-V. In this case, the charging capacitor (
3) is slowly charged, so the saturable reactor (12) for reverse current blocking.

Almost no voltage is applied to the saturable reactors (8), (9) and the charging reactor (11).

Next, when the thyratron (2) is ignited at time t0, the thyratron (2) becomes a low impedance, so the voltage Vs++ is applied to the reverse current blocking saturable reactor (12), which is in a non-saturated state and has a high impedance. applied.

Reverse current blocking saturable reactor (12) 4: Applied Sarel V, - 1mM S'''V, dtt on the hour.

When reaches a designed constant value at time t'o, the reverse current blocking saturable reactor (12) becomes saturated and has a low impedance. As a result, the loop of charging capacitor (3), thyratron (2), capacitor (4), and reverse current blocking saturable reactor (12) is connected at time t'. '+-t',), a pulse current I having a peak value of 1. flows, and a pulse voltage V2 is generated in the pulse compression capacitor (4).

Next, at time t', when the pulse current ■ becomes zero and the pulse voltage ■2 reaches the peak value -■, the voltage of the pulse voltage V2 from time t'o to time t'1 increases during the voltage time t'. Product, 1. . Saturable reactor (8〉
becomes saturated and becomes a low impedance. As a result, the pulse compression capacitors (4), (5) and the saturable reactor (8) pass through the loop from time t' to t'2.
(=t'z t'+), a pulse current I2 with a peak value 2'2 flows, and a pulse voltage V is generated in the pulse compression capacitor (5). Pulse compression capacitor (4), (
5), the inductance of the loop of the saturated saturable reactor (8) is the same as that of the pulse charging capacitor (3), the thyratron (2), the pulse compression capacitor (4), and the saturated saturable reactor for blocking reverse current (12). Since it is set smaller than the loop inductance, pulse current 2 has a larger peak value than pulse current 11 ((I
, '2> I p+), the conduction width becomes smaller (τ,
, ), that is, the first stage of pulse compression is performed.

In this case, when the pulse current ■1 becomes zero at time t'1,
A voltage of opposite polarity to the voltage applied to the reverse current blocking saturable reactor (12) from time t0 to time t'o is applied from time t' to time t' as shown by diagonal lines in FIG.
2, the saturable reactor for reverse current blocking (12) immediately becomes unsaturated at time st''. As a result, the saturable reactor for reverse current blocking (1
2) has a high impedance, the pulse current 11 is blocked and does not flow in the opposite direction, and the saturable reactor (12) for blocking reverse current is designed to have a voltage-time product larger than 14 Vτ2. ing. That is, η△BS ≧ Vτ2 (where η is the number of windings, ΔB is the amount of change in magnetic flux density of the magnetic core,
S is the effective cross-sectional area of the magnetic core), so the electrical energy accumulated in the pulse compression capacitor (4) in the first stage pulse compression is transferred to the pulse compression capacitor (4).
5) From time t'+ to time t'2, the pulse current 1. can be prevented from flowing in the opposite direction.

Next, second-stage pulse compression and output of laser light are performed, but these operations are similar to those of conventional pulse generators.

[Effects of the Invention] As detailed above, the present invention provides a saturable reactor for blocking reverse flow that has a voltage-time product of a size necessary to prevent saturation during the first stage pulse compression. Since the pulse current is provided, it is possible to prevent the pulse current from flowing in the opposite direction while the first stage pulse compression is being performed, resulting in an effect that a highly efficient pulse generator can be obtained.

[Brief explanation of drawings]

Fig. 1 is a circuit diagram showing an implementation of the pulse generator according to the present invention, Fig. 2 is a waveform diagram showing voltage and current to explain its operation, and Fig. 3 shows a conventional pulse generator. The circuit diagram and FIG. 4 are waveform diagrams showing voltage and current to explain the operation. In the figure, (2> is Thyratron, (4), (5
) is a pulse compression capacitor, (8) is a saturable reactor, and (12) is a saturable reactor for blocking reverse current. 3. In the figures, the same reference numerals indicate the same or corresponding parts. Attorney Zeng Wado Terukei 2nd figure 4th figure procedural amendment document October 17th, 2016

Claims (1)

[Claims] It consists of a switching element that is connected between both ends of a power supply and generates pulses by switching, and a saturable reactor and a pair of capacitors that are electrically connected to this switching element, and compresses the pulse to generate a pulse with a steeper rise. A pulse compression circuit that generates a and another saturable reactor having a voltage-time product of a certain magnitude.