JPH11166953A - Testing device of pulse power supply - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve a continuous and stable simulation load test according to a pulse power supply by providing a diode and a capacitor in series with the resistor of a simulation load, and preventing the short-circuiting of the coil winding of a transformer against the magnetic reset current of the transformer after a load discharge and returning the transformer to a non-saturated state. SOLUTION: A simulation load 4B, a diode D, a resistor R, and a saturable reactor Sin are connected in series and a peaking capacitor Cn is connected in parallel. The ground side of the capacitor Cn is charged by a pulse current In-1 from the final stage of a magnetic pulse compression circuit 3, the reactor Sin is saturated and is discharged, and energy is consumed by the resistor R. After the discharging operation of the load 4B, a magnetic reset current for returning the transformer to a non-saturation state is supplied. Although the resistor R of the load 4B is included at the secondary coil winding side of the transformer, the diode D prevents the both edges of the coil winding from being short-circuited due to the resistor R against the polarity of a reset current, thus positively returning the transformer to a non-saturated state and hence achieving a continuous and stable simulation test.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse power supply that combines a pulse generation circuit using a power semiconductor switch and a magnetic pulse compression circuit to generate a large current pulse with a narrow width and a high repetition, and particularly becomes a load. The present invention relates to a pulse power supply test device using a simulated load instead of a laser oscillation device.

[0002]

2. Description of the Related Art FIG. 3 shows an example of a conventional transformer step-up type pulse power supply. Pulse generating circuit 1, the provided first stage capacitor C ₀ of the power, leave initial charging the capacitor C ₀ by the high-pressure charger 2, pulses through the saturable reactor SI ₀ from the capacitor C ₀ ON control of the semiconductor switch SW A pulse current is supplied to the transformer PT.

The saturable reactor SI ₀ is connected to a capacitor C ₀
A magnetic switch operation is performed when the semiconductor switch SW is completely turned on, and a magnetic current is supplied to the pulse transformer PT.

In the magnetic pulse compression circuit 2, an (n-1) -stage magnetic pulse compression circuit is cascaded on the secondary side of the pulse transformer PT. In the first stage magnetic pulse compression circuit, a pulse current I boosted by the pulse transformer PT is used. ₀ capacitor C ₁ is high charged with supplies pulse current narrow that magnetic pulse compression by saturable reactor ST ₁ at the charging voltage of the capacitor C ₁ is operated magnetic switch to the next stage of the magnetic pulse compression circuit . Similarly, saturable reactors ST _2-
ST _n-1 magnetic switch operation and capacitors C _{2 to} C _n-1
, The magnetic pulse compression of the pulse width is performed.

The pulse output of the magnetic pulse compression circuit at the last stage supplies a narrow-width, high-voltage pulse current to a load 4 serving as a head of a laser oscillation device. The load 4 is a main discharge electrode LH
Is peaking capacitor C _n is provided in parallel to obtain a main discharge in the main discharge electrodes LH when peaking capacitor C _P at pulse current is charged to a predetermined voltage level.

FIG. 4 shows capacitors C ₀ and C _{1 to} C _n-1 ,
Of discharge voltage of C _n, indicates a waveform of the voltage V _n-2 ~V _n, the magnetic pulse compression operation, obtaining a discharge current output of the narrow width to the load 4 by being magnetic pulse compression as will later stage .

[0007] The pulse-compressed energy is emitted as light energy by a laser device and used as an excimer laser or a CO ₂ laser.

The pulse transformer PT is supplied with a reset current (DC) from an external magnetic reset circuit for returning to an unsaturated state after the discharging operation. Further, saturable reactors SI ₀ ~SI _n-1, the magnetic reset circuit for returning the saturation opposite polarity after saturation operation is provided.

Various modifications of the pulse generating circuit 1 and the magnetic pulse compression circuit 3 have been proposed, such as using a saturable transformer for the pulse transformer PT.

[0010]

In a conventional pulse power supply, the evaluation method as a power supply is based on the peak voltage of the last-stage capacitor, the pulse current width flowing from the capacitor to the laser head, and the like. As a test method for flowing to a load, there are a test method using an actual device combined with a laser oscillation device, and a simulated load test method simulating a head portion of the laser oscillation device.

The former test method using actual equipment requires various facilities for actually oscillating the laser. For example,
In the case of a XeCI excimer laser, Xe, HC
The test is performed by filling I and buffer gas (Ne or He) to 3 to 4 atm. In order to obtain stable oscillation with a high repetition frequency, charged particles or impurities generated in the main discharge electrode region in the previous discharge are required. Circulating equipment is required to remove from the discharge area by the next discharge.

As described above, in the test method using an actual machine, in order to actually perform laser oscillation and evaluate a pulse power source, a load device for stably operating the laser device becomes large. There is.

In this respect, the latter method of simulated load test simplifies the test because it uses a simulated load, but it is necessary to prepare an accurate simulated load.

FIG. 5 shows a conventional simulated load test apparatus.
Pulse power supply is a configuration that does not use a transformer, simulated load. 4A simulates the main discharge electrodes in series circuit of a resistor R and an inductance L and a saturable reactor SI _n, which is connected in parallel with the peaking capacitor C _n. The resistance R simulates a discharge resistance in the actual machine, and the inductance L simulates an oscillating discharge in the actual machine. The saturable reactor SI _n is configured to have a Vt (voltage-time product) necessary to suppress discharge to the main discharge electrode side until the capacitor C _n is charged with the pulse current In _-1 .

[0015] and would when using this conventional simulated load test of the transformer step-up pulse power source of FIG. 3, after the discharge from the peaking capacitor C _n is simulated load, at both ends of the resistor R is the same potential, the capacitor C The resistance at both ends of _n becomes extremely small.

For this reason, in the transformer PT, when the magnetic reset circuit attempts to return to the unsaturated state after the discharging operation,
The secondary winding of the transformer PT is close to a short-circuit state, and the supply of the magnetic reset current cannot return to a completely unsaturated state. In this case, in a continuous test, the pulse transformer PT reaches a magnetic saturation state, and there is a problem that the function of the transformer PT is lost, that is, a continuous stable test cannot be performed.

This problem also occurs when a saturable transformer is used instead of the pulse transformer.

An object of the present invention is to provide a test apparatus capable of performing a continuous and stable simulation load test by a pulse power supply having a transformer in a magnetic pulse compression circuit or the like.

[0019]

According to the present invention, in order to solve the above-mentioned problems, a diode or a capacitor is provided in series with the resistance of the simulated load, and the winding of the transformer is controlled by the magnetic reset current of the transformer after the simulated load is discharged. The transformer can be reliably returned to the unsaturated state by preventing the line from being short-circuited, and is characterized by the following configuration.

In a pulse power supply test apparatus in which a pulse current supplied through a transformer is subjected to magnetic pulse compression and supplied to a load by a pulse power supply test, the load of the pulse power supply is a simulated load of a laser. A peaking capacitor, and a series circuit of a saturable reactor, a resistor, and a diode connected in parallel to the peaking capacitor, wherein the diode is used for a magnetic reset current for returning to an unsaturated state after the transformer generates a pulse. It is characterized in that the winding of the transformer is prevented from being short-circuited by the resistor.

The simulated load is a peaking capacitor, and a series circuit of a saturable reactor, a resistor and a capacitor connected in parallel to the peaking capacitor, and the capacitor in series with the resistor is not connected after the transformer generates a pulse. The present invention is characterized in that a winding of the transformer is prevented from being short-circuited by the resistor against a magnetic reset current for returning to a saturated state.

[0022]

(First Embodiment) FIG. 1 shows a test apparatus using a simulated load according to an embodiment of the present invention.
The pulse generation circuit 1 and the magnetic pulse compression circuit 3 in the figure have a pulse transformer PT as in FIG.

The simulated load 4B is configured in series circuit of a diode D resistor R and the saturable reactors SI _n, are connected in parallel with the peaking capacitor C _n. Diode D
Orientation is in a forward direction with respect to the main discharge current I _n from the peaking capacitor C _n.

[0024] Operation in a test using such simulated load, the ground side of the pulse current I at _n-1 peaking capacitor C _n from the last stage of the magnetic pulse compression circuit 3 is charged, the saturable reactor SI in the charging _n saturates and discharges through diode D and resistor R, dissipating energy in resistor R.

Here, after the simulated load 4B is discharged, a magnetic reset current for returning the pulse transformer PT to an unsaturated state is supplied. At this time, the resistor R of the simulated load 4B is interposed on the secondary winding side of the pulse transformer PT. In this case, the pulse transformer PT can be reliably returned to the unsaturated state.

(Second Embodiment) FIG. 2 shows a test apparatus using a simulated load according to another embodiment of the present invention. This figure is different from FIG. 1 in a simulated load 4C.

The simulated load 4C is configured in series circuit with a saturable reset SI _n resistor R and capacitor C, is connected in parallel with the peaking capacitor C _n.

The operation in the test using such simulated load, the ground side of the pulse current I at _n-1 peaking capacitor C _n from the last stage of the magnetic pulse compression circuit 3 is charged, the saturable reactor SI in the charging _n saturates and discharges through capacitor C and resistor R, dissipating energy in resistor R.

[0029] Here, after the discharge operation of the simulated load 4C, the energy charged in capacitor C, as shown by the broken line arrow, to return to the ground side of the peaking capacitor C _n, each the energy of the magnetic pulse compression circuit 3 Capacitor C
_n-1 →... C ₂ → C _1, which is applied to the secondary winding of the pulse transformer PT, and further reaches the resistor R through the capacitors C _{1 to} C _n-1 and the saturable reactors SI _{1 to} SI _n. R
Consumed in

Thus, the energy of the capacitor C is consumed, and the capacitor C is connected to the diode D of FIG.
Similarly to the above, it is possible to prevent the winding of the transformer from being short-circuited by the resistor R against a current that causes the pulse transformer PT to be in an unsaturated state, and to surely return the pulse transformer PT to an unsaturated state. Can be.

In the above-described embodiments, the same operation and effect can be obtained by applying the present invention to a simulated load test of a pulse power supply using a saturable transformer instead of the pulse transformer PT.
Further, the simulated loads 4B and 4C can be provided with an inductance L for simulating an oscillating discharge in an actual machine, similarly to the simulated load 4A.

Further, according to the present invention, the magnetic pulse compression circuit 3
Also, the present invention can be applied to a case where the design of the pulse generation circuit 1 is appropriately changed.

[0033]

As described above, according to the present invention, a diode or a capacitor is provided in series with the resistance of the simulated load, and the winding of the transformer is short-circuited with respect to the magnetic reset current of the transformer after the simulated load is discharged. Therefore, even in a simulation test of a pulse power supply having a transformer, the transformer can be surely returned to an unsaturated state and a continuous and stable simulation test can be performed.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a simulated load test apparatus for a pulse power supply showing an embodiment of the present invention.

FIG. 2 is a configuration diagram of a simulated load test apparatus for a pulse power supply showing another embodiment of the present invention.

FIG. 3 is an example of a transformer step-up type pulse power supply.

FIG. 4 is an example of a magnetic pulse compression voltage waveform of a pulse power supply.

FIG. 5 is a conventional simulated load test device that does not use a transformer.

[Explanation of symbols]

1 ... pulse generating circuit 2 ... high voltage charger 3 ... magnetic pulse compression circuit 4 ... load 4A, 4B, 4C ... simulated load SW ... semiconductor switch SI ₀ ~SI _n ... saturable reactor _{C 0, C 1 ~C n-} 1 ... Capacitor C _n ... Peaking capacitor L ... Inductance R ... Resistance D ... Diode C ... Capacitor

Claims (2)

[Claims] 1. A pulse power supply test apparatus, wherein a pulse current supplied via a transformer is subjected to magnetic pulse compression and supplied to a load by a pulse power supply test, wherein the load of the pulse power supply is a simulated load of a laser. Is a series circuit of a peaking capacitor, a saturable reactor, a resistor, and a diode connected in parallel to the peaking capacitor.The diode has a magnetic reset current for returning to an unsaturated state after the transformer generates a pulse. ,
A testing apparatus for a pulse power supply, wherein a direction of the winding of the transformer is prevented from being short-circuited by the resistor. 2. The simulated load includes a peaking capacitor, a series circuit of a saturable reactor connected in parallel to the peaking capacitor, a resistor, and a capacitor. The capacitor in series with the resistor is not connected after the transformer generates a pulse. 2. The pulse power supply test apparatus according to claim 1, wherein the transformer winding is prevented from being short-circuited by the resistor against a magnetic reset current for returning to a saturated state.