JPH03176668A - Wind speed sensor - Google Patents

Wind speed sensor

Info

Publication number
JPH03176668A
JPH03176668A JP31679489A JP31679489A JPH03176668A JP H03176668 A JPH03176668 A JP H03176668A JP 31679489 A JP31679489 A JP 31679489A JP 31679489 A JP31679489 A JP 31679489A JP H03176668 A JPH03176668 A JP H03176668A
Authority
JP
Japan
Prior art keywords
wind speed
temperature sensor
sensor
thin film
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31679489A
Other languages
Japanese (ja)
Inventor
Shinichi Osada
慎一 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP31679489A priority Critical patent/JPH03176668A/en
Publication of JPH03176668A publication Critical patent/JPH03176668A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To detect a wind speed with small noise oscillation and good responsiveness by forming a thin film resistance temperature sensor for a heater, a thin film resistance temperature sensor for fluid temperature measurement, and a detecting circuit on one substrate and using a constant temperature method. CONSTITUTION:The thin film resistance temperature sensor 14 for the heater is heated and a flow of air contacts it to absorb its heat. A detecting circuit 18 detects variation in the resistance value of the temperature sensor 14 for the heater. Further, the thin film resistance temperature sensor 16 for fluid temperature measurement measures the temperature of the air and an error in wind speed measurement due to the temperature of the air is corrected. The signals of those temperature sensor 14 for the heater and temperature sensor 16 for fluid temperature measurement are inputted to the detecting circuit 18, which outputs a detection signal corresponding to the wind speed. This detection signal is inputted to an external circuit which processes the signal through a lead-out line 20a. The power source for the sensor 10 is connected to the detecting circuit 18 through lead-out lines 20b and 20c. Consequently, the wind speed is detected with samall noise generation and good responsiveness.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は風速センサに関し、特に発熱した抵抗体が空
気の流れによって温度変化することを利用して風速を検
出する、風速センサに関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a wind speed sensor, and more particularly to a wind speed sensor that detects wind speed by utilizing the temperature change of a resistor that generates heat due to air flow.

(従来技術) 従来、抵抗体を用いた風速センサとしては、熱線方式の
風速センサがある。これは、発熱した抵抗体の温度が風
速によって変化することを利用する方式であり、その関
係式は次式のとおりである。
(Prior Art) Conventionally, as a wind speed sensor using a resistor, there is a hot wire type wind speed sensor. This is a method that utilizes the fact that the temperature of the resistor that generates heat changes depending on the wind speed, and the relational expression is as follows.

p= (A+B /T)(Tゎ−T、)ここで、Pはヒ
ータ電力、■は風速、T1はヒータ温度、T、は流体温
度、AおよびBは定数である。この関係式かられかるよ
うに、風速を求めるためには、ヒータ温度と同時に流体
温度も検出しなければならない。そのため、一般的に、
風速を測定するためにヒータ用センサと流体温度測定用
センサとが用いられる。
p=(A+B/T)(Tゎ-T,) Here, P is the heater power, ■ is the wind speed, T1 is the heater temperature, T is the fluid temperature, and A and B are constants. As can be seen from this relational expression, in order to determine the wind speed, the fluid temperature must be detected at the same time as the heater temperature. Therefore, generally
A heater sensor and a fluid temperature sensor are used to measure wind speed.

抵抗体を用いて風速を検出するための回路方式としては
、第3図に示すような定電流法と、第4図に示すような
定温度法とがある。第3図に示す定電流法では、ヒータ
用抵抗温度センサ1が定電流源2に接続されることによ
って発熱する。ヒータ用抵抗温度センサ1に空気の流れ
が接触することによってヒータ用抵抗温度センサ■の熱
が奪われる。それによってヒータ用抵抗温度センサ1の
抵抗値が変化し、それにともなう電圧変化が、抵抗3を
介してオペアンプを含む検出回路4に入力される。この
ヒータ用抵抗温度センサlの電圧変化によって、風速が
検出される。このとき、流体温度測定用抵抗温度センサ
5と可変抵抗6による分圧回路による信号が、抵抗7を
介して検出回路4に入力される。流体温度測定用抵抗温
度センサ5によって空気の温度が測定され、空気の温度
による風速の誤差が補正される。
Circuit methods for detecting wind speed using a resistor include a constant current method as shown in FIG. 3 and a constant temperature method as shown in FIG. 4. In the constant current method shown in FIG. 3, a heater resistance temperature sensor 1 is connected to a constant current source 2 to generate heat. When the air flow comes into contact with the heater resistance temperature sensor 1, heat is removed from the heater resistance temperature sensor (2). As a result, the resistance value of the heater resistance temperature sensor 1 changes, and the resulting voltage change is inputted via the resistor 3 to the detection circuit 4 including an operational amplifier. The wind speed is detected by the voltage change of this heater resistance temperature sensor l. At this time, a signal from a voltage dividing circuit including the resistance temperature sensor 5 for measuring fluid temperature and the variable resistor 6 is inputted to the detection circuit 4 via the resistor 7. The temperature of the air is measured by the resistance temperature sensor 5 for measuring fluid temperature, and an error in wind speed due to the temperature of the air is corrected.

第4図に示す定温度法では、ヒータ用抵抗温度センサ1
.抵抗8a、抵抗8b、流体温度測定用抵抗温度センサ
5および可変抵抗9でブリフジ回路が形成される。この
ブリフジ回路においても、空気の流れに接触することに
よってヒータ用抵抗温度センサ1の抵抗値が変化し、ま
た空気の温度によって流体温度測定用抵抗温度センサ5
の抵抗値が変化する。これらのセンサの抵抗値の変化に
よる出力が検出回路4に入力され、風速が検出される。
In the constant temperature method shown in FIG.
.. The resistor 8a, the resistor 8b, the resistance temperature sensor 5 for measuring fluid temperature, and the variable resistor 9 form a bridge circuit. In this Brifuji circuit as well, the resistance value of the heater resistance temperature sensor 1 changes when it comes into contact with the air flow, and the resistance value of the resistance temperature sensor 5 for fluid temperature measurement changes depending on the air temperature.
resistance value changes. Outputs resulting from changes in the resistance values of these sensors are input to the detection circuit 4, and the wind speed is detected.

この定温度法では、ヒータ用抵抗温度センサ1の抵抗値
変化を、フィードバックにより打ち消すように働く。
In this constant temperature method, changes in the resistance value of the heater resistance temperature sensor 1 are canceled out by feedback.

(発明が解決しようとする課題) 抵抗体を用いて風速を検出する場合、定電流法では、風
速の検出がヒータ用抵抗温度センサの特性に依存するた
め、その応答性が悪い。また、定温度法を用いた場合、
フィードバックによって電気的に応答性がよくなるが、
センサが検出回路のフィードバックループ内に組み込ま
れているため、センサ部分を長く引き延ばすと、ノイズ
や発振などの問題が発生する。
(Problems to be Solved by the Invention) When detecting wind speed using a resistor, the constant current method has poor responsiveness because detection of the wind speed depends on the characteristics of the resistance temperature sensor for the heater. In addition, when using the constant temperature method,
Feedback improves electrical responsiveness, but
Since the sensor is integrated into the feedback loop of the detection circuit, extending the sensor section over a long period of time creates problems such as noise and oscillation.

これらの問題を解決する方法として、たとえば特開昭6
2−59865号公報にヒータ用抵抗温度センサと流体
温度測定用抵抗温度センサとを1つのセンサで併用し、
時分割で測定する方法が示されている。しかしながら、
このような方法では、センサを時分割で使用するため、
システムとしての応答性が悪くなったり、電気回路構成
が複雑になるなどの問題がある。
As a way to solve these problems, for example,
Publication No. 2-59865 discloses a combination of a heater resistance temperature sensor and a fluid temperature measurement resistance temperature sensor in one sensor,
A method for measuring in time division is shown. however,
In this method, sensors are used in a time-sharing manner, so
There are problems such as poor system responsiveness and complicated electric circuit configuration.

それゆえに、この発明の主たる目的は、ノイズや発振な
どの問題が少なく、かつ応答性のよい風速センサを提供
することである。
Therefore, the main object of the present invention is to provide a wind speed sensor that is free from problems such as noise and oscillation and has good responsiveness.

(課題を解決するための手段) この発明は、基板と、基板上に形成されるヒータ用薄膜
抵抗温度センサと、基板上に形成される流体温度測定用
薄膜抵抗温度センサと、基板上に形成され、ヒータ用薄
膜抵抗温度センサと流体温度測定用薄膜抵抗温度センサ
とが接続される検出回路とを含み、定温度法によって風
速が検出される、風速センサである。
(Means for Solving the Problems) The present invention includes a substrate, a thin film resistance temperature sensor for a heater formed on the substrate, a thin film resistance temperature sensor for measuring fluid temperature formed on the substrate, and a thin film resistance temperature sensor formed on the substrate. This wind speed sensor includes a detection circuit to which a thin film resistance temperature sensor for a heater and a thin film resistance temperature sensor for measuring fluid temperature are connected, and detects wind speed by a constant temperature method.

(作用) 1つの基板上にヒータ用薄膜抵抗温度センサ。(effect) Thin film resistance temperature sensor for heater on one board.

流体温度測定用薄膜抵抗温度センサおよび検出回路が形
成され、各センサと検出回路とが接続される。そして、
定温度法によって風速が検出される。
Thin film resistance temperature sensors and detection circuits for measuring fluid temperature are formed, and each sensor is connected to the detection circuit. and,
Wind speed is detected by constant temperature method.

〈発明の効果) この発明によれば、定温度法が採用されているため、風
速を検出するときの応答性が良好である。
(Effects of the Invention) According to the present invention, since a constant temperature method is employed, responsiveness when detecting wind speed is good.

しかも、各センサと検出回路とが近接した位置に形成さ
れるため、ノイズや発振などの問題が少ない。
Furthermore, since each sensor and the detection circuit are formed close to each other, there are fewer problems such as noise and oscillation.

この発明の上述の目的、その他の目的、特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。
The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

(実施例) 第1図はこの発明の一実施例を示す平面図である。この
風速センサ10は基板12を含む。基板12上には、ヒ
ータ用薄膜抵抗温度センサ14および流体温度測定用薄
膜抵抗温度センサ16が貼着される。さらに、基板12
上には、検出回路18が印刷法によって形成される。こ
の検出回路18としては、第4図に示すような定温度法
の回路が形成される。そして、ヒータ用薄膜抵抗温度セ
ンサ14および流体温度測定用薄膜抵抗温度センサ16
が検出回路18に接続される。
(Embodiment) FIG. 1 is a plan view showing an embodiment of the present invention. This wind speed sensor 10 includes a substrate 12 . On the substrate 12, a thin film resistance temperature sensor 14 for a heater and a thin film resistance temperature sensor 16 for measuring fluid temperature are attached. Furthermore, the substrate 12
On top, a detection circuit 18 is formed by a printing method. As this detection circuit 18, a constant temperature circuit as shown in FIG. 4 is formed. Then, a thin film resistance temperature sensor 14 for a heater and a thin film resistance temperature sensor 16 for measuring fluid temperature.
is connected to the detection circuit 18.

この風速センサ10では、ヒータ用薄膜抵抗温度センサ
14が加熱され、空気の流れが接触することによってそ
の熱が奪われる。この温度変化にともなうヒータ用薄膜
抵抗温度センサ14の抵抗値の変化が検出回路18によ
って検出される。また、流体温度測定用薄膜抵抗温度セ
ンサ16によって空気の温度が測定され、空気の温度に
よる風速測定の誤差が補正される。これらのヒータ用薄
膜抵抗温度センサI4および流体温度測定用薄膜抵抗温
度センサ16の信号が検出回路18に人力され、風速に
対応する検出信号が出力される。この検出信号が、引き
出しり−ド20aを介して信号を処理するための外部回
路に入力される。また、この風速センサ10のための電
源が、引き出しリード20bおよび20cによって検出
回路18に接続される。
In this wind speed sensor 10, the heater thin film resistance temperature sensor 14 is heated, and the heat is removed by contact with the air flow. The detection circuit 18 detects a change in the resistance value of the heater thin film resistance temperature sensor 14 due to this temperature change. Furthermore, the temperature of the air is measured by the thin film resistance temperature sensor 16 for measuring fluid temperature, and an error in wind speed measurement due to the temperature of the air is corrected. Signals from the heater thin film resistance temperature sensor I4 and the fluid temperature measurement thin film resistance temperature sensor 16 are input to the detection circuit 18, and a detection signal corresponding to the wind speed is output. This detection signal is input to an external circuit for processing the signal via the drawer 20a. Further, a power source for this wind speed sensor 10 is connected to the detection circuit 18 through lead leads 20b and 20c.

この風速センサ10は、定温度法によって風速が測定さ
れるため、定電流法による測定に比べて応答性が良好で
ある。しかも、1つの基板12上にヒータ用薄膜抵抗温
度センサ14.流体温度測定用薄膜抵抗温度センサ16
および検出回路18が形成されるため、各センサ14.
16と検出回路18とが近接して形成され、ノイズや発
振などの問題が少ない。また、各センサ14,16とと
もに検出回路18が組み込まれているため、風速に対応
した検出信号が得られるインテリジエンI・センサとす
ることができる。
This wind speed sensor 10 measures wind speed using a constant temperature method, and therefore has better responsiveness than measurement using a constant current method. Furthermore, a heater thin film resistance temperature sensor 14 is mounted on one substrate 12. Thin film resistance temperature sensor 16 for fluid temperature measurement
and a detection circuit 18 are formed, so that each sensor 14.
16 and the detection circuit 18 are formed close to each other, reducing problems such as noise and oscillation. Further, since the detection circuit 18 is incorporated together with each sensor 14, 16, the Intelligent I sensor can obtain a detection signal corresponding to the wind speed.

なお、上述の実施例では、ヒータ用薄膜抵抗温度センサ
14および流体温度測定用薄膜抵抗温度センサ16は基
板12に貼着することによって形成されたが、第2図に
示すように、これらのセンサ14,16は基板12上に
印刷することによって形成してもよい。こうすることに
よって、風速センサ10は、各センサ14,16を基1
反12に貼着したものに比べて、小型化することができ
る。
In the above embodiment, the heater thin film resistance temperature sensor 14 and the fluid temperature measurement thin film resistance temperature sensor 16 were formed by adhering them to the substrate 12, but as shown in FIG. 14 and 16 may be formed by printing on the substrate 12. By doing this, the wind speed sensor 10 can be configured based on each sensor 14, 16.
It can be made smaller compared to the one attached to the 12-piece surface.

この発明の風速センサ10では、ヒータ用センサおよび
流体温度測定用センサとして薄膜タイプのものを使用し
たが、これは熱線式のセンサを使用した場合に比べて、
風速センサを小型化することができるためである。また
、熱線式のセンサでは、ヒータ用センサを150℃程度
に設定しないと十分な風速検知を行うことができず、安
全面および保守面で問題があった。しかし、薄膜タイプ
のセンサを用いたこの発明の風速センサでは、ヒータ用
センサを50上程度にすることによって、10 m /
sec以上の風速を検出することができろ。
In the wind speed sensor 10 of the present invention, a thin film type sensor is used as a heater sensor and a fluid temperature measurement sensor, but compared to a case where a hot wire type sensor is used, this
This is because the wind speed sensor can be downsized. Further, with the hot wire type sensor, sufficient wind speed detection cannot be performed unless the heater sensor is set at about 150° C., which poses problems in terms of safety and maintenance. However, in the wind speed sensor of the present invention using a thin film type sensor, by setting the heater sensor to about 50 or more, it is possible to achieve a speed of 10 m /
Be able to detect wind speeds greater than sec.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例を示す平面図である。 第2図はこの発明の他の実施例を示す平面図である。 第3図は風速センサに用いられる定電流方式の検出回路
を示す回路図である。 第4図は風速センサに用いられる定温度方式の検出回路
を示す回路図である。 図において、10は風速センサ、12は基板、14はヒ
ータ用薄膜抵抗温度センサ、I6は流体温度測定用薄膜
抵抗温度センサ、18は検出回路を示す。
FIG. 1 is a plan view showing an embodiment of the present invention. FIG. 2 is a plan view showing another embodiment of the invention. FIG. 3 is a circuit diagram showing a constant current type detection circuit used in a wind speed sensor. FIG. 4 is a circuit diagram showing a constant temperature detection circuit used in a wind speed sensor. In the figure, 10 is a wind speed sensor, 12 is a substrate, 14 is a thin film resistance temperature sensor for a heater, I6 is a thin film resistance temperature sensor for measuring fluid temperature, and 18 is a detection circuit.

Claims (1)

【特許請求の範囲】  基板、 前記基板上に形成されるヒータ用薄膜抵抗温度センサ、 前記基板上に形成される流体温度測定用薄膜抵抗温度セ
ンサ、および 前記基板上に形成され、前記ヒータ用薄膜抵抗温度セン
サと前記流体温度測定用薄膜抵抗温度センサとが接続さ
れる検出回路を含み、 定温度法によって風速が検出される、風速センサ。
[Scope of Claims] A substrate, a thin film resistance temperature sensor for a heater formed on the substrate, a thin film resistance temperature sensor for measuring fluid temperature formed on the substrate, and a thin film resistance temperature sensor for the heater formed on the substrate. A wind speed sensor, comprising a detection circuit to which a resistance temperature sensor and the thin film resistance temperature sensor for fluid temperature measurement are connected, and detecting wind speed by a constant temperature method.
JP31679489A 1989-12-05 1989-12-05 Wind speed sensor Pending JPH03176668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31679489A JPH03176668A (en) 1989-12-05 1989-12-05 Wind speed sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31679489A JPH03176668A (en) 1989-12-05 1989-12-05 Wind speed sensor

Publications (1)

Publication Number Publication Date
JPH03176668A true JPH03176668A (en) 1991-07-31

Family

ID=18081002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31679489A Pending JPH03176668A (en) 1989-12-05 1989-12-05 Wind speed sensor

Country Status (1)

Country Link
JP (1) JPH03176668A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136620A (en) * 1982-12-30 1984-08-06 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Measuring device for flow rate of fluid
JPS6038619A (en) * 1983-07-11 1985-02-28 ゼネラル モーターズ コーポレーシヨン Sensing circuit for quantity of air
JPS61170618A (en) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc Semiconductor sensor for detecting flow rate
JPS63201529A (en) * 1987-02-17 1988-08-19 Sharp Corp Temperature compensating method for flow sensor
JPS63266360A (en) * 1987-04-24 1988-11-02 Rion Co Ltd Flow velocity detecting device
JPH0212019A (en) * 1988-06-30 1990-01-17 Ngk Spark Plug Co Ltd Flow rate measuring instrument

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136620A (en) * 1982-12-30 1984-08-06 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Measuring device for flow rate of fluid
JPS6038619A (en) * 1983-07-11 1985-02-28 ゼネラル モーターズ コーポレーシヨン Sensing circuit for quantity of air
JPS61170618A (en) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc Semiconductor sensor for detecting flow rate
JPS63201529A (en) * 1987-02-17 1988-08-19 Sharp Corp Temperature compensating method for flow sensor
JPS63266360A (en) * 1987-04-24 1988-11-02 Rion Co Ltd Flow velocity detecting device
JPH0212019A (en) * 1988-06-30 1990-01-17 Ngk Spark Plug Co Ltd Flow rate measuring instrument

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