JPH0317633U - - Google Patents

Info

Publication number
JPH0317633U
JPH0317633U JP7730489U JP7730489U JPH0317633U JP H0317633 U JPH0317633 U JP H0317633U JP 7730489 U JP7730489 U JP 7730489U JP 7730489 U JP7730489 U JP 7730489U JP H0317633 U JPH0317633 U JP H0317633U
Authority
JP
Japan
Prior art keywords
wafer
mounting table
holding means
holding
wafer mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7730489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0715137Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989077304U priority Critical patent/JPH0715137Y2/ja
Publication of JPH0317633U publication Critical patent/JPH0317633U/ja
Application granted granted Critical
Publication of JPH0715137Y2 publication Critical patent/JPH0715137Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1989077304U 1989-06-30 1989-06-30 ウエハー保持装置 Expired - Fee Related JPH0715137Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989077304U JPH0715137Y2 (ja) 1989-06-30 1989-06-30 ウエハー保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989077304U JPH0715137Y2 (ja) 1989-06-30 1989-06-30 ウエハー保持装置

Publications (2)

Publication Number Publication Date
JPH0317633U true JPH0317633U (ko) 1991-02-21
JPH0715137Y2 JPH0715137Y2 (ja) 1995-04-10

Family

ID=31619568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989077304U Expired - Fee Related JPH0715137Y2 (ja) 1989-06-30 1989-06-30 ウエハー保持装置

Country Status (1)

Country Link
JP (1) JPH0715137Y2 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318969A (en) * 1976-08-06 1978-02-21 Nippon Telegr & Teleph Corp <Ntt> Wafer fixing method
JPS5963727A (ja) * 1982-10-05 1984-04-11 Toshiba Corp 試料保持用テ−ブル装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318969A (en) * 1976-08-06 1978-02-21 Nippon Telegr & Teleph Corp <Ntt> Wafer fixing method
JPS5963727A (ja) * 1982-10-05 1984-04-11 Toshiba Corp 試料保持用テ−ブル装置

Also Published As

Publication number Publication date
JPH0715137Y2 (ja) 1995-04-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees