JPH0317633U - - Google Patents
Info
- Publication number
- JPH0317633U JPH0317633U JP7730489U JP7730489U JPH0317633U JP H0317633 U JPH0317633 U JP H0317633U JP 7730489 U JP7730489 U JP 7730489U JP 7730489 U JP7730489 U JP 7730489U JP H0317633 U JPH0317633 U JP H0317633U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting table
- holding means
- holding
- wafer mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005096 rolling process Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989077304U JPH0715137Y2 (ja) | 1989-06-30 | 1989-06-30 | ウエハー保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989077304U JPH0715137Y2 (ja) | 1989-06-30 | 1989-06-30 | ウエハー保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0317633U true JPH0317633U (ar) | 1991-02-21 |
| JPH0715137Y2 JPH0715137Y2 (ja) | 1995-04-10 |
Family
ID=31619568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989077304U Expired - Fee Related JPH0715137Y2 (ja) | 1989-06-30 | 1989-06-30 | ウエハー保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715137Y2 (ar) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5318969A (en) * | 1976-08-06 | 1978-02-21 | Nippon Telegr & Teleph Corp <Ntt> | Wafer fixing method |
| JPS5963727A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | 試料保持用テ−ブル装置 |
-
1989
- 1989-06-30 JP JP1989077304U patent/JPH0715137Y2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5318969A (en) * | 1976-08-06 | 1978-02-21 | Nippon Telegr & Teleph Corp <Ntt> | Wafer fixing method |
| JPS5963727A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | 試料保持用テ−ブル装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0715137Y2 (ja) | 1995-04-10 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |