JPH0317293A - Device for discriminating corrosion preventive steel sheet - Google Patents

Device for discriminating corrosion preventive steel sheet

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Publication number
JPH0317293A
JPH0317293A JP12407089A JP12407089A JPH0317293A JP H0317293 A JPH0317293 A JP H0317293A JP 12407089 A JP12407089 A JP 12407089A JP 12407089 A JP12407089 A JP 12407089A JP H0317293 A JPH0317293 A JP H0317293A
Authority
JP
Japan
Prior art keywords
sensor
steel plate
steel sheet
probe
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12407089A
Other languages
Japanese (ja)
Other versions
JPH0784676B2 (en
Inventor
Osamu Morinaga
森永 修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Motors Corp
Original Assignee
Mitsubishi Motors Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Motors Corp filed Critical Mitsubishi Motors Corp
Priority to JP12407089A priority Critical patent/JPH0784676B2/en
Publication of JPH0317293A publication Critical patent/JPH0317293A/en
Publication of JPH0784676B2 publication Critical patent/JPH0784676B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

PURPOSE:To discriminate the presence or absence of a corrosion preventive plating on line by maintaining the specified distance between the probe of a sensor and the surface of a steel sheet by means of a jig in contact with the steel sheet and discriminating the quantity of electricity inputted to a controller. CONSTITUTION:The positioning jig 2 is screwed to the outer periphery of the prove 1a of the sensor 1. The jig 2 maintains the specified distance between the probe 1a and the outside surface of the steel sheet when the jig 2 is pressed to the outside surface of the steel sheet W by regulating the amt. of screwing of the probe 1a. The signal of the sensor 1 is fetched in the controller 4. The controller 4 is constituted as a microcomputer to divide the change in the output of the quantity of electricity of the sensor 1 varying with the presence or absence of the corrosion preventive layer formed on the surface of the steel sheet W and the fluctuation in the thickness thereof to plural regions of a specified width and to determine the discrimination signal corresponding to the respective regions. The region between the region where there is the corrosion preventive layer and the region where there is no corrosion preventive layer is previously determined as the region where the discrimination is infeasible. The erroneous detection of the presence of absence of the corrosion preventive layer is prevented in this way.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、普通鋼板の中から防止錆鋼板を判別する装置
に関し、特に自動車生産ラインにおけるボデー材料とし
ての鋼板の亜鉛メッキの有熟を判別するのに用いて好適
な防錆鋼板判別装置に関する. 〔従来の技術〕 冬期に、道路の凍結を防止すべく道路上に塩をまく地域
があるが、このような地域を走行する自動車に対して1
0年間の耐久性を保障するには、自動車部品、特にボデ
ーやドア等の耐蝕性を向上させなければならず、そのた
め防錆材料として亜鈴メッキ鋼板が使用される. 一方、亜鉛メッキされていない通常の鋼板(以下普通鋼
板という)は、値段が安く、塗装性も良好であり、しか
もボデー組立て時の溶接性も良好であるので、特に防錆
に対する要求が強くない地域に供給される自動車につい
ては、普通鋼板を使用するほうが合理的である。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device for determining anti-corrosion steel sheets from ordinary steel sheets, and particularly for determining the ripeness of galvanization of steel sheets as body materials in automobile production lines. This article relates to a rust-proof steel plate discrimination device suitable for use in [Conventional technology] In some regions, salt is sprinkled on roads to prevent roads from freezing during the winter.
To guarantee 0-year durability, it is necessary to improve the corrosion resistance of automobile parts, especially bodies and doors, and for this reason, tin plated steel sheets are used as a rust-preventing material. On the other hand, ordinary steel sheets that are not galvanized (hereinafter referred to as ordinary steel sheets) are inexpensive, easy to paint, and have good weldability when assembling the body, so there are no particularly strong requirements for rust prevention. For automobiles supplied to the region, it is more rational to use ordinary steel plates.

このような事情から、同一車種の同一部材に対して、普
通鋼板と亜鉛メッキ鋼板という2つのことなる材料が生
産ライン上を流れるようになり、この材料の8!預を自
動車生産ライ?において種分けし、種類に応じたその後
の取扱いを対応させるべく検知手段が必要とされるよう
になっている.ところで、部材表面の状況を調べるのに
通常想定される手段としては、光学的な手段が考えられ
、部材の表面に光を照射し、表面での光の反射率の違い
でメッキの有無を検知する手法が考えられる.そして、
冷間圧延された鋼板(SPCC)と、それに亜鉛メッキ
された鋼板とでは、板表面の反射率が全く異なるため、
赤色光や赤外線等を用いて充分区分けが可能である. 〔発明が解決しようとする課題〕 しかしながら、熱間圧延された鋼板(SPHCSAP}
{>とそれに亜鉛メッキされた鋼板とでは、板表面の光
の反射率に大きな差異がなく、かなりの経験者の目視に
よってすら識別が困難であり、ましてや上述のような光
学的手法での識別は極めて困難であって、ほとんど実用
に供し得ないという問題点がある. 本発明は、このような問題点の解決をはかろうとするも
ので、特に熱間圧延鋼板扛それに亜鉛メッキを施したも
のとの識別を誤まりなく行なうことができ、十分にライ
ンでの使用に供し得るような防錆鋼板判別装置を提供す
ることを目的とする.〔課題を解決するための手段〕 上述の目的を達成するため、本発明の防錆鋼板判別装置
は,プローブと鋼板との接離による磁束変化に対応して
異なる電気量を出力するセンサと、計測時に上記鋼板と
当接し上記センサの上記プローブと上記鋼板の外面との
間に介在してそれらの間の距離を一定に保つ治具と、上
記鋼板の表面に施された防錆層の有無と厚さ変動とによ
り異なる上記センサの電気量出力の変化を一定幅の複数
領域に分け各領域に対応する判別信号に変換して出力す
るコントローラとをそなえ、同コントローラ内における
複数領域のうちの防錆層有りの領域と無しの領域との間
の領域が判別不能領域とされたこことを特徴としている
. 〔作 用〕 上述の本発明の防WIf!4板判別装置では、計測時に
センサのプローブと鋼板の外面との間の距離が鋼板に当
接する治具によって一定に保たれ、その状態で鋼板の表
面に施された防錆層の存否と厚さ変動とにより、異なる
電気量がセンサからコントローラに出力される。コント
ローラに入った電気量は予め区分けされた一定幅の複数
領域のうちのどのWt域に相当するかを判別され、その
判別の結果に基づいて各領域に対応する判別信号に変換
されてコントローラから出力される.その際,複数の領
域のうちの防錆層有りのiii域と無しの領域との間の
領域に当るセンサからの電気量に対しては、それに対応
するコントローラ出力は判別不能信号とされる. 〔実 施 例〕 次に、本発明の実施例について説明すると、第1図はそ
の一実施例としての防錆鋼板判別装置を信号系のみで示
すシステム図であり、第2図はその作用を示すもので、
(a)は防錆鋼板とプローブおよび治具の計測時の位置
関係を示す断面図、(b)は普通鋼板とプローブおよび
治具の計測時の位置関係を示す断面図、(c)はそれら
の位置とセンサ出力との関係を示すグラフであり、第3
図はそのコントローラ内の処理マップ図であり、第4図
はそのコントローラの動作を示すフローチャートであり
、第5図はそのセンサの動作原理を示す模式図であり、
第6図はそのセンサ形式の他例の動作原理を示す模式図
であり、第7図はそのセンサ出力特性を示すグラフであ
る. 第1図に示すように、この防錆鋼板判別装置は、センサ
1と、センサ1のプローブ1aに取付けられた位置決め
治具2と、センサ1の出力を増幅するアンプ3と、アン
プ3の出力を判別信号に変換はで出力するコントローラ
4とをそなえ、コントローラ4の出力は計測された鋼板
を加工ラインに送り、あるいは除外する制御装置5に接
続されている. 詐述すると、センサ1はこの例では、第5図に示すよう
に周知の差動変圧藷形うず電流距離センサで構成されて
おり、このセンサ1のプローブ1aは、交流電流源に端
子A,Bを接続されたコイル11と、端子C−Fを差動
接続されたコイル12,13とをそなえており、端子C
,Eに生ずる差動出力電圧Vが、アンプ3を経て増幅さ
れコントローラ4に出力されるよう接続されている.そ
して、このようなセンサ1では、1ローブ1aのコイル
12および 13を貫く磁束が鋼板Wの接近により変化し、コイル1
3を貫く磁束がコイルl2を貫く磁束よりも減少するこ
とにより端子C,E間の電圧が上昇するよう動作する。
Due to these circumstances, two different materials, ordinary steel sheet and galvanized steel sheet, are flowing on the production line for the same parts of the same car model, and 8! Do you use your deposit to produce cars? Detection means are now needed to classify the species and to handle the subsequent treatment according to the type. By the way, optical means are usually considered as the means to investigate the condition of the surface of a component, in which the surface of the component is irradiated with light and the presence or absence of plating is detected by the difference in the reflectance of light on the surface. One possible method is to do this. and,
Cold-rolled steel plates (SPCC) and galvanized steel plates have completely different reflectances on their surfaces, so
It is possible to sufficiently differentiate using red light, infrared light, etc. [Problem to be solved by the invention] However, hot rolled steel plate (SPHCSAP)
There is no significant difference in the light reflectance of the plate surface between the galvanized steel plate and the galvanized steel plate, and it is difficult to distinguish it even by the naked eye of an experienced person, much less by the optical method described above. The problem is that it is extremely difficult and almost impossible to put it into practical use. The present invention is an attempt to solve these problems.In particular, it is possible to accurately distinguish hot-rolled steel sheets from those coated with galvanized steel sheets, and the present invention can be used satisfactorily in production lines. The purpose of this research is to provide a rust-proof steel plate discrimination device that can be used in the future. [Means for Solving the Problems] In order to achieve the above-mentioned object, the rust-proof steel plate discrimination device of the present invention includes a sensor that outputs different amounts of electricity in response to changes in magnetic flux due to contact and separation between the probe and the steel plate; Presence or absence of a jig that comes into contact with the steel plate during measurement and is interposed between the probe of the sensor and the outer surface of the steel plate to maintain a constant distance between them, and a rust prevention layer applied to the surface of the steel plate. and a controller that divides changes in the electrical quantity output of the sensor, which differ depending on thickness fluctuations, into multiple regions of a constant width, converts it into a discrimination signal corresponding to each region, and outputs the same. The feature is that the area between the area with and without the anti-rust layer is an indistinguishable area. [Function] The above-mentioned prevention of WIf! of the present invention! In the 4-plate discrimination device, the distance between the sensor probe and the outer surface of the steel plate is kept constant by a jig that contacts the steel plate during measurement, and in this state, the presence or absence and thickness of the anti-corrosion layer applied to the surface of the steel plate are determined. Due to the variation in power, different amounts of electricity are output from the sensor to the controller. The amount of electricity that enters the controller is determined to which Wt region it corresponds to among multiple regions of a constant width divided in advance, and based on the result of the determination, it is converted into a discrimination signal corresponding to each region and sent from the controller. It will be output. At this time, for the amount of electricity from the sensor that corresponds to a region between region iii with and without a rust prevention layer among the plurality of regions, the corresponding controller output is set as an indistinguishable signal. [Embodiment] Next, an embodiment of the present invention will be explained. Fig. 1 is a system diagram showing only a signal system of a rust-proof steel plate discriminating device as an embodiment, and Fig. 2 shows its operation. It shows,
(a) is a cross-sectional view showing the positional relationship between the rust-preventing steel plate, the probe, and the jig during measurement, (b) is a cross-sectional view showing the positional relationship between the ordinary steel plate, the probe, and the jig during measurement, and (c) is a cross-sectional view of them. This is a graph showing the relationship between the position of the sensor and the sensor output.
The figure is a processing map diagram in the controller, FIG. 4 is a flowchart showing the operation of the controller, and FIG. 5 is a schematic diagram showing the operating principle of the sensor.
FIG. 6 is a schematic diagram showing the operating principle of another example of the sensor type, and FIG. 7 is a graph showing the sensor output characteristics. As shown in FIG. 1, this rust-proof steel plate discrimination device includes a sensor 1, a positioning jig 2 attached to a probe 1a of the sensor 1, an amplifier 3 that amplifies the output of the sensor 1, and an output of the amplifier 3. The system is equipped with a controller 4 that converts the measured steel plate into a discrimination signal and outputs the same, and the output of the controller 4 is connected to a control device 5 that sends the measured steel plate to the processing line or excludes it. To state it simply, the sensor 1 in this example is constituted by a well-known differential transformer type eddy current distance sensor as shown in FIG. It has a coil 11 connected to terminal B, and coils 12 and 13 connected differentially to terminal C.
, E are connected so that the differential output voltage V generated at the amplifiers 3 and 3 is amplified and output to the controller 4. In such a sensor 1, the magnetic flux passing through the coils 12 and 13 of one lobe 1a changes as the steel plate W approaches, and the coil 1
The voltage between terminals C and E increases as the magnetic flux passing through coil 12 decreases more than the magnetic flux passing through coil 12.

センサ1のプローブ1aの外周には位置決め治具2が螺
着されており、この治具2は、そのプローブ1aのねじ
込み量を調整することにより、治具2を鋼板Wの外面に
当接させた際の、プローブ1aと鋼板外面との距離を一
定に保つよう作用する. このように構成されたセンサでは、第2図に示すように
、防錆IPとして亜鈴メッキを施された鋼板では、プロ
ーブ1aと鋼板面との間の距離が同図(a)に示すよう
にL 十Dとなり、一方、亜鉛メッキなしの普通鋼板で
は、(b)に示すようにLとなり、それぞれの出力は(
c)に示す電圧■,および■2を示すこととなる. ところで、鋼板における亜鉛メッキの厚さは5〜6μと
通常の塗装厚の80〜100μに比べて極端に薄いため
、上述の電圧差VI  V2は極めて少ないぐちなみに
、L0でIOVを示すものとすると■v2は0.2V程
度〉. 実際の生産ラインでこのように微細な出力差に基づいて
メッキ層の有無を判別してしまうのは非常に危険であり
、メッキ層の厚さむt,や、鋼板表面へのゴミの付着等
による計測距離の誤差により逆の判定をしてしまうと、
生産ラインから仕様を満足し得ない製品を送り出してし
まう事態が生ずる. そこで、この防錆鋼板判別装置では、コン1・ローラ4
内にこのような点を考慮した処置が講じられている.コ
ントローラ4は、入力される信号幅を一定幅の複数領域
に分け、各領域に対応した判別信号を定めた、第3図に
示すようなマッフ゜データをメモリとしてそなえるマイ
クロコンピュータとして構成されており、その内部での
信号処理は、第4図に示すようなフローにより行なわれ
る.すなわち、プローブlaに取付けられた治具2の鋼
板W/\の当接によりフローはスタートし、検知開始が
イエスであると、センサ1からの信号の取込みが行なわ
れ、次いで電圧値がC以下か否かの判断が行なわれね、
そして、この結果がイエスであると、判別信号は防錆鋼
板を表示し、フローを終了してリセットされる. 一方、他のフローにおいて、センサ1からの信号の取込
みj表、電圧値がC以下でないと判断されると、次に電
圧値がAとBとの間に入っているか否かの判断が行なわ
れる。そして、この結果がイエスであると判別信号は普
通鋼板を表示し、このフローも終了してリセットされる
A positioning jig 2 is screwed onto the outer periphery of the probe 1a of the sensor 1, and the jig 2 can be brought into contact with the outer surface of the steel plate W by adjusting the screwing amount of the probe 1a. It acts to keep the distance between the probe 1a and the outer surface of the steel plate constant when the probe 1a is pressed. In the sensor configured in this way, as shown in Fig. 2, in the case of a steel plate coated with diminutive plating as anti-rust IP, the distance between the probe 1a and the steel plate surface is as shown in Fig. 2(a). On the other hand, in the case of ordinary steel plate without galvanizing, it becomes L as shown in (b), and the respective output is (
The voltages ■ and ■2 shown in c) are shown. By the way, the thickness of the galvanized steel plate is 5 to 6μ, which is extremely thin compared to the normal coating thickness of 80 to 100μ, so the above-mentioned voltage difference VI V2 is extremely small.By the way, if L0 indicates IOV, ■v2 is about 0.2V>. In an actual production line, it is very dangerous to judge the presence or absence of a plating layer based on such minute output differences, and it is very dangerous to judge the presence or absence of a plating layer based on such minute output differences. If the opposite judgment is made due to an error in the measured distance,
A situation arises in which a product that does not meet the specifications is sent out from the production line. Therefore, in this rust-proof steel plate discrimination device, controller 1 and roller 4
Measures have been taken to take these points into account. The controller 4 is configured as a microcomputer that has muff data as a memory, as shown in FIG. 3, which divides the input signal width into a plurality of regions of constant width and determines a discrimination signal corresponding to each region. Internal signal processing is performed according to the flow shown in Figure 4. That is, the flow starts with the contact of the steel plate W/\ of the jig 2 attached to the probe la, and if the start of detection is YES, the signal from the sensor 1 is taken in, and then the voltage value is lower than C. No judgment is made as to whether
If the result is YES, the discrimination signal will display the rust-proof steel plate, the flow will end, and the process will be reset. On the other hand, in another flow, if it is determined that the voltage value is not below C in the signal input table from sensor 1, then it is determined whether the voltage value is between A and B. It will be done. If the result is YES, the determination signal displays ordinary steel plate, and this flow is also terminated and reset.

また,上記フローにおいて、電圧値がAとBとの値に入
っていないと1”1断された場合は、判別信号は↑り別
不能W4域を示す表示とされ、フローを終了してリセッ
トされる. 判別装置では、コントローラ4内のマップデータに判別
不能領域が設けられており、その幅も計測精度や計測条
件に応じ適宜変更可能なしのてあることはいうまでもな
いから、この幅の適宜の設定により、’M5錆眉Pの有
無の誤検知が確実に防止される効果が得r,れるように
なる。
In addition, in the above flow, if the voltage value is not within the values of A and B and it is determined that the voltage value is not within the values of A and B, the discrimination signal will be displayed to indicate the ↑ undifferentiated W4 area, and the flow will be terminated and reset. In the discrimination device, an indiscernible area is provided in the map data in the controller 4, and it goes without saying that the width of the area can be changed as appropriate depending on the measurement accuracy and measurement conditions. By appropriately setting , it is possible to reliably prevent erroneous detection of the presence or absence of the 'M5 rust eyebrow P.

以上、本発明を一実施例に基づき訂述したが、本発明は
上述の実施例のみに限定されるものではなく、特許請求
の範囲に記載の事項の範囲内で種々改変して実施可能な
ものであり、例えば、第6図に示すように、センサ1は
池の形式としての℃磁式膜厚計に変えることもできる.
ちなみに、この膜厚計の動作原理は、プローブを栴成す
る鉄心10人りコイル14とt流計15、交流電流16
わよびこれらをつなぐ回路とから構成され、鉄心lO人
りコイル14から生ずる交番磁束により交番磁界が形成
され、鋼板Wの近接距離に応してこの磁界が変化する.
鋼板Wの近接による電流変化は、この場合第7図に示す
ように防錆層の厚さDに応じて上述の例では、上述の実
施例における電圧信号は電流信号に置換えられ、その値
と距離との関係は逆となるので、それらの値に対応する
マツブデータやフロー構成の変更も必要となることはい
うまでもない. また、コントローラ内の出力変換についても、判別不能
領域を防錆層の有無の領域の外側に付加的に設けてもよ
い. 〔発明の効果〕 以上詳述したように、本発明の防錆鋼板判別装置によれ
ば、光学的な手法での識別が困難であった熱間圧延鋼板
の防錆メッキの有無を検知することを可能とすることが
できるばかりでなく、不確実な領域を避けての防錆層の
有無の判別が行なわれるのて、誤検知のおそれがなくな
る効果が得られ、特に生産ラインに有効に適合させるこ
とができる利点もある。
Although the present invention has been described above based on one embodiment, the present invention is not limited to the above embodiment, and can be implemented with various modifications within the scope of the claims. For example, as shown in FIG. 6, the sensor 1 can be changed to a C magnetic film thickness meter in the form of a pond.
By the way, the operating principle of this film thickness meter is as follows: 10 iron cores forming the probe, a coil 14, a t-current meter 15, and an alternating current 16.
An alternating magnetic field is formed by the alternating magnetic flux generated from the iron core 10 coil 14, and this magnetic field changes according to the proximity distance of the steel plate W.
In this case, as shown in FIG. 7, the current change due to the proximity of the steel plate W depends on the thickness D of the anti-rust layer.In the above example, the voltage signal in the above embodiment is replaced with a current signal, and its value Since the relationship with distance is reversed, it goes without saying that it is also necessary to change the matsub data and flow configuration corresponding to those values. Furthermore, regarding output conversion within the controller, an indistinguishable region may be additionally provided outside the region of presence/absence of the rust prevention layer. [Effects of the Invention] As detailed above, according to the rust-proof steel plate discrimination device of the present invention, it is possible to detect the presence or absence of rust-proof plating on a hot-rolled steel plate, which has been difficult to identify using optical methods. Not only is it possible to avoid uncertain areas when determining the presence or absence of a rust preventive layer, it eliminates the risk of false positive detection, making it particularly suitable for production lines. There is also the advantage of being able to

【図面の簡単な説明】[Brief explanation of drawings]

Claims (1)

【特許請求の範囲】[Claims] プローブと鋼板との接離による磁束変化に対応して異な
る電気量を出力するセンサと、計測時に上記鋼板と当接
し上記センサの上記プローブと上記鋼板の外面との間に
介在してそれらの間の距離を一定に保つ治具と、上記鋼
板の表面に施された防錆層の有無と厚さ変動とにより異
なる上記センサの電気量出力の変化を一定幅の複数領域
に分け各領域に対応する判別信号に変換して出力するコ
ントローラとをそなえ、同コントローラ内における複数
領域のうちの防錆層有りの領域と無しの領域との間の領
域が判別不能領域とされたこことを特徴とする、防錆鋼
板判別装置。
A sensor that outputs a different amount of electricity in response to changes in magnetic flux due to contact and separation between the probe and the steel plate, and a sensor that comes into contact with the steel plate during measurement and is interposed between the probe of the sensor and the outer surface of the steel plate, and is interposed between them. A jig that keeps the distance constant, and changes in the electrical quantity output of the sensor, which differs depending on the presence or absence of the anti-corrosion layer on the surface of the steel plate and variations in thickness, are divided into multiple regions with a constant width and corresponding to each region. The invention is characterized in that the area between the area with the anti-corrosion layer and the area without the anti-rust layer among the plural areas in the controller is set as an indistinguishable area. , Rust-proof steel plate discrimination device.
JP12407089A 1989-05-16 1989-05-16 Anti-corrosion steel plate discrimination device Expired - Lifetime JPH0784676B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12407089A JPH0784676B2 (en) 1989-05-16 1989-05-16 Anti-corrosion steel plate discrimination device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12407089A JPH0784676B2 (en) 1989-05-16 1989-05-16 Anti-corrosion steel plate discrimination device

Publications (2)

Publication Number Publication Date
JPH0317293A true JPH0317293A (en) 1991-01-25
JPH0784676B2 JPH0784676B2 (en) 1995-09-13

Family

ID=14876198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12407089A Expired - Lifetime JPH0784676B2 (en) 1989-05-16 1989-05-16 Anti-corrosion steel plate discrimination device

Country Status (1)

Country Link
JP (1) JPH0784676B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511805A (en) * 2002-12-23 2006-04-06 ラム リサーチ コーポレーション System, method and apparatus for thin film substrate signal separation using eddy currents
CN109855521A (en) * 2019-01-04 2019-06-07 清华大学深圳研究生院 The measuring method of the effective measurement position of hall probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511805A (en) * 2002-12-23 2006-04-06 ラム リサーチ コーポレーション System, method and apparatus for thin film substrate signal separation using eddy currents
CN109855521A (en) * 2019-01-04 2019-06-07 清华大学深圳研究生院 The measuring method of the effective measurement position of hall probe

Also Published As

Publication number Publication date
JPH0784676B2 (en) 1995-09-13

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