JPH0317273A - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPH0317273A
JPH0317273A JP13394890A JP13394890A JPH0317273A JP H0317273 A JPH0317273 A JP H0317273A JP 13394890 A JP13394890 A JP 13394890A JP 13394890 A JP13394890 A JP 13394890A JP H0317273 A JPH0317273 A JP H0317273A
Authority
JP
Japan
Prior art keywords
microwave
plasma
vacuum partition
partition window
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13394890A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579753B2 (OSRAM
Inventor
Kazuo Suzuki
和夫 鈴木
Atsushi Chiba
淳 千葉
Tadashi Sonobe
園部　正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HESCO
Hitachi Ltd
Original Assignee
HESCO
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HESCO, Hitachi Ltd filed Critical HESCO
Priority to JP13394890A priority Critical patent/JPH0317273A/ja
Publication of JPH0317273A publication Critical patent/JPH0317273A/ja
Publication of JPH0579753B2 publication Critical patent/JPH0579753B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP13394890A 1990-05-25 1990-05-25 マイクロ波プラズマ処理装置 Granted JPH0317273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13394890A JPH0317273A (ja) 1990-05-25 1990-05-25 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13394890A JPH0317273A (ja) 1990-05-25 1990-05-25 マイクロ波プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP28306486A Division JPS63137168A (ja) 1986-11-29 1986-11-29 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH0317273A true JPH0317273A (ja) 1991-01-25
JPH0579753B2 JPH0579753B2 (OSRAM) 1993-11-04

Family

ID=15116814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13394890A Granted JPH0317273A (ja) 1990-05-25 1990-05-25 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0317273A (OSRAM)

Also Published As

Publication number Publication date
JPH0579753B2 (OSRAM) 1993-11-04

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