JPH03171260A - Graphic editor device - Google Patents

Abstract

PURPOSE:To easily designate and correct the design alteration part of a constitution element by directly correcting the layout pattern of the constitution element on a three-dimensional graphic which is screen-displayed. CONSTITUTION:CPU 12 is provided with a position relation decision means 18, a three-dimensional graphic display means 19 and a correction support means 20. Thus, the three-dimensional position relation of the elements constituting a semiconductor integrated circuit is decided based on plane pattern information for respective layers. The constitution elements of the semiconductor integrated circuit is displayed on a CRT graphic by the three-dimensional graphic in accordance with the decided position relation. Next, the desired design of the semiconductor integrated circuit is executed by directly designating and correcting the constitution elements whose design is to be altered by a designer on the three-dimensional graphic which is screen-displayed. Thus, the position and the form of the constitution element of LSI can easily be grasped and the design alteration part of the constitution element can easily be designated and corrected.

Description

Detailed Description of the Invention [Purpose of the Invention (Industrial Field of Application)] The present invention displays a layout pattern of components of a semiconductor integrated circuit three-dimensionally on a screen, and displays the layout pattern on the three-dimensionally displayed screen. The present invention relates to a graphic editor device capable of making corrections.

(Prior Art) In general, a semiconductor integrated circuit B (hereinafter referred to as LSI) is manufactured by performing processing such as patterning and etching on a semiconductor substrate based on a predetermined mask pattern for each layer from the bottom layer in the manufacturing process. It has multiple layers of components.

That is, as shown in FIG. 5(a), one circuit that complies with the conventional LSI consists of a silicon substrate 31, a conductive portion 35 consisting of a P well 32, a diffusion layer 33, and a polysilicon layer 34 on the silicon substrate 31. and a non-conductive silicon oxide film 36 on a silicon substrate 31, and further includes a multilayer basic logic element 37 having a non-conductive silicon oxide film 36 on a silicon substrate 31, and a lower layer wiring 3 on the basic logic element 37.
8 and three upper layer wirings.

In addition, FIG. 5(a) is a mask pattern diagram of FIG.
As shown in b), a contact 40 is provided on the basic logic element 37 to electrically connect the contact portion between the wiring 38, the wiring 39, and the conductive portion 35.

Furthermore, as shown in FIG. 6, which is an example of the structure of an LSI integrated with the circuit shown in FIG. . The upper layer wiring 39 not only connects one basic logic element 37 to the adjacent basic logic element 37, but also connects the other basic logic element 3 by going over the adjacent basic logic element 37.
7 or the LSI input/output element 42.

Basic logic element 37 which is an element of LSI having the above-mentioned ellipse
, wiring 38, and three wiring patterns,
In order to prevent the wiring 38, the three wirings, and the conductive part 35 from coming into contact with each other and causing a short circuit, the designer designed the wiring 38, the wiring 39, and the conductive part 35 so that they do not overlap each other except for the contact 40. Ta.

Therefore, when the LSI components are viewed from above, the conductive portion 35 is not covered by the wiring 38 and the wiring 39, and the wiring 38 is not covered by the wiring 39, so the designer can It was possible to easily grasp the positions and shapes of the LSI components.

Therefore, when modifying, adding, or deleting the position and shape of the elliptical elements of an LSI, the designer uses a graphic editor device that can display the positional relationship of the elliptical elements on a two-dimensional screen, and moves the LSI components upward. The mask pattern was displayed as a two-dimensional view, then the component to be modified was specified, and its position and shape were modified. (Problems to be Solved by the Invention) However, with recent advances in LSI manufacturing technology, the upper layer wiring 39 is sandwiched between appropriate insulators to form a multilayer structure, making it possible to manufacture LSIs with three or more layers of wiring. As a result, the graphic editor device that displays the above-mentioned mask pattern diagram has a problem in that it becomes difficult to grasp the position and shape of the LSI components, and it is difficult to specify and modify the components. It has arisen.

The reason for this is that even if the wiring 39 sandwiched between insulators overlaps the wiring 38, the wiring 39 of a different layer, or the conductive part 35, it will not contact and short-circuit, and the designer can freely arrange the wiring on the basic logic element 37. This is because the pattern of the wiring 39 can be designed, so that when the wiring 39 in a plurality of different layers is viewed from above, the wiring 39 overlaps and may cover the entire surface of the basic logic element 37.

Also, as the number of layers used as three wiring increases, when looking at the wiring 39 on the mask pattern diagram, the three wirings between different eyebrows will overlap and the wiring 39 will become densely packed. This is because it becomes difficult to determine the position and shape of.

SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned problems of the prior art.The purpose of the present invention is to make it possible to easily grasp the positions and shapes of LSI components, and to detect changes in the design of LSI components. It is an object of the present invention to provide a graphic editor device that is easy to specify and modify.

Summary of the Invention 1 (Means for Solving the Problems) The present invention for solving the above problems is based on data regarding the layout pattern of each layer of a semiconductor integrated circuit, or based on the data and instructions from the outside. A positional relationship determination means for determining the three-dimensional positional relationship of the structure elements of the integrated circuit, and a three-dimensional positional relationship of the structure elements of the semiconductor integrated circuit determined by the means to determine the three-dimensional positional relationship of the elliptical elements. A three-dimensional diagram display means for displaying a diagram on the screen, and a work for directly modifying the layout pattern of the tank precept elements on the three-dimensional diagram displayed on the screen by the three-dimensional diagram display means in order to change the three-dimensional layout pattern of the component. It is characterized by being equipped with a correction support means to support.

(Function) The graphic editor device of the present invention provides a graphic editor for controlling a semiconductor integrated circuit according to the designer's convenience, based on planar pattern information used when designing a mask pattern for each layer of a semiconductor integrated circuit. The structural relationship between F and W is determined, and the components of the semiconductor integrated circuit are displayed in a three-dimensional diagram on a CRT screen or the like in accordance with this determined positional relationship.Next, the designer attempts to modify the design. A desired semiconductor integrated circuit can be designed by directly specifying and modifying the elliptical elements on the three-dimensional diagram displayed on the screen.

That is, since the components of a semiconductor integrated circuit are displayed three-dimensionally on a CRT screen or the like, a designer can easily recognize the positions and shapes of components that overlap and cannot be distinguished when viewed in a plan view. Also, tf4fi. which should be changed. Modifications can be made directly on the 3D diagram, where elements can be easily identified.

(Example) An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an explanatory diagram showing the overall configuration of a graphic editor device according to an embodiment of the present invention.

The graphic editor device includes a CPU 12 having a built-in main storage section 1l, a mask pattern information storage section 14 connected to the CPU 2 via a bus 13, and a keyboard 15.
, the mouse 16 and the CRT display 17 are omitted.

Here, the CPU 12 operates a positional relationship determining step 18 for determining the three-dimensional positional relationship of the components of a semiconductor integrated circuit (hereinafter referred to as LSI) based on instructions from the designer, and A three-dimensional diagram display means that instructs to display the position and shape of the tank component on the screen in a perspective view from the viewpoint specified by the designer, and the designer's correction regarding changes in the layout pattern of the displayed component. A correction support means 20 is provided to support the work.

The main storage unit 11 not only stores input data, but also stores C
The results processed by the PU 12 are also stored.

The mask pattern information storage unit 14 stores planar pattern information of masks for each layer used when manufacturing LSIs by masking, and the order in which the masks are used.

In the above ellipse, when the designer specifies an LSI to be modified using the keyboard 15, the CPU 12 retrieves planar pattern information of the mask for each layer used in manufacturing the corresponding LSI from the mask pattern information storage unit 14. and read the mask usage order. Next, the positional relationship determining means 18 uses the data read by the cpU 12 to
Determine the three-dimensional positional relationship of the basic logic circuits, wiring, and contacts that are the components of the device. This positional relationship is
1, and the second
As shown in the figure, a perspective view 21 is displayed on the screen of the CRT display 17.

Here, in addition to the perspective view 21, the screen shown in FIG.
For the convenience of the designer, an indication 22 is made of where the elliptical element displayed in the perspective view 21 is located on the LSI.

The LSI also includes a viewpoint position specifying section 23 that allows the designer to specify a viewpoint with respect to the perspective view 21 by zooming, moving the display location, or specifying the line of sight direction using the mouse cursor of the mouse 16 or an input pen, and the LSI configuration. A menu 24 for modifying the position and shape of the element is displayed.

For example, when the designer specifies enlargement in the viewpoint position specifying section 23, the perspective view 21 is enlarged and a specific element is clearly displayed, as shown in FIG. As shown in (b), the perspective view 2l is reduced and a relatively wide area is displayed.

Furthermore, when the designer specifies the movement of the display section in the vertical, front, back, left, or right directions in the viewpoint position specification section 23, the display location of the component moves according to the specification. The screen display moves to the wiring layer or the lower wiring layer.

Furthermore, when the designer sequentially changes the line-of-sight direction from θ=0° to θ=90° in the viewpoint position specifying unit 23, the display screen will display the glabella of the component viewed horizontally from the front (θ=0゜゜) to the display (θ = 45°) that looks at the components and between the components from diagonally above the front shown in Fig. 2, and then further to the display corresponding to the conventional plan view (θ = 90').
It changes to.

Next, when the designer operates the mouse 16 to designate an element on the screen to be modified in the layout pattern, the designated component element is displayed in the modification support means 20 of the CPU 12.
is specified and stored in the main storage unit l1.

Here, for example, the arrow P shown in the perspective view 21 of FIG.
When the point indicated by is specified with the mouse cursor of the mouse 16, the range specified by the mouse cursor becomes a three-dimensional area V, as shown in FIG.

The reason for this is that when a plan view is displayed, the point on the screen indicated by the mouse cursor corresponds to the point on the screen, but when a three-dimensional three-dimensional view is displayed, the point on the screen that the mouse cursor points to corresponds to the point on the screen. One point corresponds to a straight line. This is because the mouse cursor actually points to a surface rather than a single point, so it corresponds to a three-dimensional object. Therefore, the number of elliptical elements specified by the mouse cursor is often multiple.

Therefore, in this example, in order to match the general sense of humans,
The elliptical element C (shown in Figure 2), which is an elliptical element within the plane area A displayed on the screen and which is closest to the upper right corner of the plane area A pointed to by the mouse cursor, is It has been decided that this is the specified modification target.

Further, when the designer directly specifies deletion or insertion of wiring on the screen using a mouse cursor or an input pen from the modification menu 24 shown in FIG. 2, the modification is made by the modification support means 20. At the same time, the corrected position and shape of the elliptical element are stored in the main storage section 11, and the revised perspective view is displayed on the CRT display 17 by the stereoscopic view display means 19.

Therefore, in this embodiment, the pattern design of the LSI components is carried out using perspective drawings, and the position and shape of the elliptical elements, especially the connection relationships between the components between the different eyebrows, are instantly determined by appealing to the designer's visual sense. Can convey information in an easy-to-understand manner.

In addition, the designer can easily position the viewpoint with respect to the perspective view while checking on the display screen, so the designer can quickly search for and enlarge the tank element to be changed, and also It is easy to identify elements. Furthermore, the designer can directly modify the structural elements identified on the perspective view by selecting the modification menu as appropriate, and can check the modification results on the perspective view.
Desired correction work can be performed quickly, reliably, and easily.

Furthermore, the designer can check the position and shape of the modified elliptical element at any time using the perspective view on the display screen, and since the above position and shape can be easily recognized, the designer can decide what work will be required in the future. In the above description of this embodiment, the line of sight with respect to the perspective view is limited to the front, but it is also possible to view the LSI components from any direction, such as backward or left/right. You can. In addition, if there are too many elliptical elements in an LSI and it is difficult to understand the positions and shapes of the elliptical elements even if they are displayed using a perspective view, only some layers of the elliptical elements are displayed. You may also do this. In other words, only a few consecutive layers are displayed, and for example, the designer can move the display part of the perspective view upwards (downward), and then move the displayed top layer (bottom layer) above (downward) ) layers may be displayed.

Furthermore, the pattern of the mask, which is the basis of the positional relationship of the elliptical elements of the LSI, is planar. Therefore, when a designer needs to draw and add components of a complex shape using a graphic editor, it may be easier for the designer to do so on a plan view than on a perspective view. Therefore, when displaying the elliptical elements of the LSI, it may be done using a perspective view that is easy to grasp, and when modifying the components, it may be displayed using a plan view.

Furthermore, the wiring, which is a component of the LSI, is strip-shaped, the contact is rectangular, and both components have a simple planar shape.

In contrast, basic logic elements are usually constructed from patterns with complex shapes. Therefore, when modifying wiring and contacts, as in this embodiment, a perspective view is used that makes it easy to understand the situation within and between wiring layers, and when modifying basic logic elements, complex shapes are drawn. The present invention is not limited to the above-described embodiments, but can be implemented in any appropriate manner by making appropriate design changes.

[Effects of the Invention] As explained above, in the present invention, the three-dimensional positional relationship of the components of the semiconductor integrated circuit is determined based on data regarding the layout pattern of each layer of the semiconductor integrated circuit, or based on the data and instructions from the outside. a positional relationship determining means for determining a positional relationship; a three-dimensional diagram displaying means for displaying a three-dimensional diagram of the component on a screen using the three-dimensional positional relationship of the component of the semiconductor integrated circuit determined by the means; In order to change the three-dimensional layout pattern, the designer is provided with a modification support means that supports the work of directly modifying the layout pattern of the horizontal elements on the three-dimensional diagram displayed on the screen by the three-dimensional diagram display means. It is possible to easily grasp the positions and shapes of the structural elements of the tank, and it is also easy to designate and modify the design changes of the structural elements, so that the design work can be carried out quickly.

[Brief explanation of the drawing]

1 to 4 show an embodiment of the graphic editor device of the present invention, FIG. 1 is an explanatory diagram showing the overall ellipse, FIG. 2 is an explanatory diagram of the screen display of a CRT display, and FIG.
Figures (a> is an explanatory diagram when the perspective view shown in Figure 2 is enlarged, Figure 3 (b) is an explanatory diagram when the perspective view shown in Figure 2 is reduced, and Figure 4 is specified by the mouse. Explanatory diagram of three-dimensional area, 5th
Figures 6 to 6 show conventional semiconductor integrated circuits, and Figure 5 (
a) is an elliptical diagram of one circuit, FIG. 5(b) is a planar mask pattern diagram of one circuit shown in FIG. 5(a), and FIG. 6 is a wiring shape when there are two wiring layers. FIG. 12... CPU 14... Mask pattern information storage section 16... Mouse 17... CRT display 1 1 2 8... Positional relationship determining means 9... Three-dimensional diagram display means 0... Correction support means

Claims (1)

[Claims] a positional relationship determining means for determining the three-dimensional positional relationship of the components of the semiconductor integrated circuit based on data regarding the layout pattern of each layer of the semiconductor integrated circuit, or the data and instructions from the outside; 3D diagram display means for displaying the component in a 3D diagram on a screen using the 3D positional relationship of the component of the semiconductor integrated circuit; and 3D diagram display means for changing the 3D layout pattern of the component. What is claimed is: 1. A graphic editor apparatus comprising: a correction support means for supporting a work of directly correcting a layout pattern of the component on a three-dimensional diagram displayed on a screen.