JP6838624B2 - 3D LSI layout pattern display device, method, program, and 3D LSI layout pattern generator - Google Patents

Description

The present invention is a three-dimensional LSI layout pattern display device that can be used for applications such as data viewing related to LSI (Large-Scale Integration: large-scale integrated circuit) design, manufacturing, evaluation, and analysis, and structural analysis such as failure analysis. , Methods, programs, and 3D LSI layout pattern data generators.

In recent years, LSI design data has become multi-layered, and the multi-layered structure and cross-sectional structure have become more complicated. It is effective to make full use of display tools to visually grasp this complicated multi-layer structure, but conventional general LSI design data display tools are provided with a display function on a two-dimensional plane. The designer is forced to repeatedly enlarge / reduce the display and imagine and grasp the physical structure while switching the display / non-display for each layer, which is considerable for such work. It took time.

Patent Document 1 is mentioned as a document relating to three-dimensional visualization of LSI design data, and in this document, a specific data processing method for generating a three-dimensional LSI layout pattern from a two-dimensional LSI layout pattern is described in detail. However, various means for grasping the structure after three-dimensional visualization are not described in the document. Patent Document 2 is also a document relating to three-dimensional visualization of two-dimensional data, but the document relates to an electronic substrate, and a specific method for generating a three-dimensional layout pattern from a two-dimensional LSI layout pattern is described. Not at all.

Japanese Unexamined Patent Publication No. 3-171260 International Publication No. 2013/05/8117

In view of the above, the present invention facilitates structural analysis by three-dimensionally visualizing a layout pattern that was two-dimensionally displayed in a conventional general display tool in displaying multi-layered and complicated LSI design data. The purpose is to solve the above-mentioned problems of the prior art.

In order to achieve the above object, the present invention provides two-dimensional graphic data indicating the shapes and arrangements of a plurality of two-dimensional figures included in an LSI layout pattern including a plurality of layers, to which each of the plurality of two-dimensional figures belongs. The two-dimensional figure data storage unit that is stored in association with the layer of, and the area that includes at least a part of the two-dimensional figures among the plurality of two-dimensional figures should be generated from each of the two-dimensional figures included in the area. A characterization data input receiving unit that accepts input associated with each layer to which each of the two-dimensional figures included in the area belongs, and a two-dimensional figure data and characterization of the characterization data that characterizes each three-dimensional figure. Using the data, three-dimensional figure data indicating the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the region along the stacking direction is generated. A three-dimensional LSI layout in which a figure data generation unit and a three-dimensional figure whose shape and arrangement are indicated by three-dimensional figure data are associated with each layer to which each of the three-dimensional figures belongs and displayed in a predetermined stacking order. A pattern display unit is provided, and the characterization data indicates the thickness of some of the three-dimensional figures in relation to the stacking direction of the layer to which the self belongs, and another part of the three-dimensional figures. For the three-dimensional figure of, to the extent that some other three-dimensional figure does not reach the inside of the three-dimensional figure other than the self, from the two-dimensional figure that is the source of the self to the lower layer along the stacking direction. Provided is a three-dimensional LSI layout pattern display device which is data indicating that it is a three-dimensional figure generated while being expanded.

In the above display device, the lower layer may be the lowest layer among the plurality of layers.

In the above display device, each of the plurality of two-dimensional figures may be a polygon, and each three-dimensional figure is generated by extending each corresponding two-dimensional figure along the stacking direction of the layers. The three-dimensional graphic data generation unit may generate three-dimensional graphic data as data indicating the shape and arrangement of each surface in the polyhedron, and the shape and arrangement may be based on the two-dimensional graphic data. When at least one of the two-dimensional figures indicated with is cut by the outer edge of the region, the three-dimensional figure data generator is generated by expanding the cut two-dimensional figure along the stacking direction. Data showing the shape and arrangement of the cut surface when the figure is cut along the stacking direction at the outer edge is generated, and the shape and arrangement of the three-dimensional figure part inside the area of the three-dimensional figures to be cut are obtained. It may generate the data to be shown.

Further, the present invention is a display method executed by a three-dimensional LSI layout pattern display device, and is an area in which at least a part of two-dimensional figures included in a plurality of two-dimensional figures included in an LSI layout pattern including a plurality of layers is included. Accepts input associated with each layer to which each of the 2D figures included in the area belongs, of the characterization data that characterizes each 3D figure to be generated from each of the 2D figures contained in the area. Generated by expanding each of the two-dimensional figures included in the area along the stacking direction using the input reception process, the two-dimensional figure data indicating the shapes and arrangements of a plurality of two-dimensional figures, and the characterizing data. Each of the three-dimensional figures belongs to the generation process of generating the three-dimensional figure data indicating the shape and arrangement of each three-dimensional figure to be formed, and the three-dimensional figure whose shape and arrangement are indicated by the three-dimensional figure data. Including a display step of displaying in accordance with a predetermined stacking order in association with the layers of, the characterization data is the thickness of the layer to which the self belongs in the stacking direction for some 3D figures. In addition to showing, for another part of the three-dimensional figure, the other part of the three-dimensional figure becomes the source of the self as long as it does not reach the inside of the three-dimensional figure other than the self. Provided is a three-dimensional LSI layout pattern display method, which is data indicating that the three-dimensional figure is generated while being expanded from the two-dimensional figure to a lower layer along the stacking direction.

Further, in the present invention, the computer generates an area including at least a part of two-dimensional figures included in an LSI layout pattern including a plurality of layers from each of the two-dimensional figures included in the area. An input reception procedure for accepting input associated with each layer to which each of the two-dimensional figures included in the area belongs, and the shapes of a plurality of two-dimensional figures, of the characterization data that characterizes each three-dimensional figure to be performed. Using the two-dimensional graphic data indicating the arrangement and the characterization data, the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the region along the stacking direction can be obtained. The generation procedure for generating the three-dimensional graphic data to be shown and the three-dimensional graphic whose shape and arrangement are indicated by the three-dimensional graphic data are associated with each layer to which each of the three-dimensional graphic belongs and displayed according to a predetermined stacking order. It is a program for executing the display procedure to be performed, and the characterization data indicates the thickness of some of the three-dimensional figures in relation to the stacking direction of the layer to which the self belongs, and the three-dimensional figure. For another part of the three-dimensional figure, the layer from the two-dimensional figure that is the source of the self to the extent that the other part of the three-dimensional figure does not reach the inside of the three-dimensional figure other than the self. Provided is a three-dimensional LSI layout pattern display program, which is data indicating that the figure is a three-dimensional figure generated while being expanded along the stacking direction.

Further, in the present invention, two-dimensional graphic data indicating the shapes and arrangements of a plurality of two-dimensional graphics included in an LSI layout pattern including a plurality of layers is associated with each layer to which each of the plurality of two-dimensional graphics belongs. For the two-dimensional figure data storage unit to be stored and the area including at least a part of the two-dimensional figures among the plurality of two-dimensional figures, each three-dimensional figure to be generated from each of the two-dimensional figures included in the area is stored. Using the characterization data receiving unit that receives the characterization data to be characterized from the outside in association with each layer to which each of the two-dimensional figures included in the area belongs, and the two-dimensional figure data and the characterization data, A three-dimensional figure data generation unit that generates three-dimensional figure data indicating the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the area along the stacking direction. Data of a three-dimensional LSI layout pattern obtained by associating a three-dimensional figure whose shape and arrangement are indicated by three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displaying them in a predetermined stacking order. It is equipped with a three-dimensional LSI layout pattern data transmission unit that transmits the three-dimensional LSI layout pattern data to the outside, and the characterization data is the thickness of the layer to which the self belongs in the stacking direction for some of the three-dimensional figures. In addition to showing, for another part of the three-dimensional figure, the other part of the three-dimensional figure is the source of the self as long as the other part of the three-dimensional figure does not reach the inside of the three-dimensional figure other than the self. Provided is a three-dimensional LSI layout pattern data generation device, which is data indicating that the three-dimensional figure is generated while being expanded from the one-dimensional figure to a lower layer along the stacking direction.

According to the present invention, by three-dimensionally visualizing LSI design data, which is two-dimensional data composed of multiple layers and complicatedly, by defining layer information, it is possible to display an LSI layout pattern closer to the shape after manufacturing, and more. The structure can be easily grasped in a short time. In addition, since it is possible to grasp the shape after manufacturing from the design stage, it can be expected that the same shape image is shared in each process of design, manufacturing, evaluation, and analysis.

The figure which shows an example of the 2D LSI layout pattern. The figure which shows the layout pattern of the 1st layer (the highest layer) from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 2nd layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 3rd layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 4th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 5th layer (the lowest layer) from the top in the layout pattern of FIG. The screen image diagram which shows an example of the characterization data which characterizes each 3D figure to be generated from each of the 2D figures shown in FIG. FIG. 5 is a cross-sectional view showing a cross section when the three-dimensional structure determined from the two-dimensional LSI layout pattern of FIG. 1 and the characterization data of FIG. 3 is cut along the AA'line of FIG. A screen image diagram showing a three-dimensional LSI layout pattern obtained from the two-dimensional graphic data showing the two-dimensional LSI layout pattern of FIG. 1 and the three-dimensional graphic data generated by using the characterization data of FIG. The figure which shows another example of the 2D LSI layout pattern. FIG. 6 is a diagram showing a layout pattern of the first layer (top layer) from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 2nd layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 3rd layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 4th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 5th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 6th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 7th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 8th layer from the top in the layout pattern of FIG. The figure which shows the layout pattern of the 9th layer (the lowest layer) from the top in the layout pattern of FIG. A screen image showing an example of characterization data that characterizes each 3D figure to be generated from each of the 2D figures shown in FIG. FIG. 5 is a cross-sectional view showing a cross section when the three-dimensional structure determined from the two-dimensional LSI layout pattern of FIG. 6 and the characterization data of FIG. 8 is cut along the AA'line of FIG. A screen image diagram showing a three-dimensional LSI layout pattern obtained from the two-dimensional graphic data showing the two-dimensional LSI layout pattern of FIG. 6 and the three-dimensional graphic data generated by using the characterization data of FIG. The conceptual diagram which shows that the 3D display target area in the 2D LSI layout pattern of FIG. 1 is defined by the BB'line. FIG. 11 is a conceptual diagram showing a state in which a two-dimensional figure of an object belonging to the first layer from the top is cut in the layout pattern of FIG. 1 when a three-dimensional display target area is defined as shown in FIG. In the two-dimensional LSI layout pattern of FIG. 1, when the layout pattern in the three-dimensional display target area on the left side of the BB'line of FIG. 11 is made three-dimensional, the three-dimensional figures of some objects are cut off. A conceptual diagram showing how it looks. The figure which shows the configuration example of the 3D LSI layout pattern display device. The flowchart which shows an example of the operation of a 3D LSI layout pattern display device. A screen image diagram showing a two-dimensional or three-dimensional LSI layout pattern generated by a three-dimensional LSI layout pattern display device. The screen image figure when the 3D display target area is selected on the 2D LSI layout pattern. As shown in FIG. 17, a screen image diagram showing a three-dimensional LSI layout pattern generated when a three-dimensional display target area is selected. FIG. 6 is a screen image diagram when a three-dimensional display target area narrower than the area shown in FIG. 17 is selected on the two-dimensional LSI layout pattern. As shown in FIG. 19, a screen image diagram showing a three-dimensional LSI layout pattern generated when a three-dimensional display target area is selected. The image figure when the 3D display target area is selected on the 2D LSI layout pattern. As shown in FIG. 21, a screen image diagram showing a three-dimensional LSI layout pattern generated when a three-dimensional display target area is selected. FIG. 6 is a screen image diagram when a three-dimensional display target area narrower than the area shown in FIG. 21 is selected on the two-dimensional LSI layout pattern. As shown in FIG. 23, a screen image diagram showing a three-dimensional LSI layout pattern generated when a three-dimensional display target area is selected. The figure which shows an example of the 3D layout of an LSI including a FinFET. In the three-dimensional layout of FIG. 25, an image diagram in which a layer portion higher than the layer to which the object 310 belongs is hidden. FIG. 5 is a diagram showing a two-dimensional layout of objects constituting a part of the FinFET shown in FIG. 25 (the size and shape have been changed for ease of explanation). The figure which shows one of the side surfaces when the two-dimensional figure shown in FIG. 26 is expanded three-dimensionally. A screen image diagram when measuring a distance in a three-dimensional space using a three-dimensional LSI layout pattern. Screen image diagram of 3D LSI layout pattern. FIG. 6 is a screen image diagram when the equipotential tracking results are superimposed and displayed in the three-dimensional LSI layout pattern of FIG. 28A. Screen image diagram when the transmittance of the 3D LSI layout pattern is changed. Screen image diagram when the wire frame display of the 3D LSI layout pattern is changed. The figure which shows the configuration example of the server apparatus in a server / client type system. The figure which shows the configuration example of the client apparatus in a server / client type system. A flowchart showing an example of operation in a server / client type system.

Hereinafter, a three-dimensional LSI layout pattern display device, a method, a program, and a three-dimensional LSI layout pattern data generation device, which are exemplary embodiments of the present invention, will be described with reference to the drawings. However, the three-dimensional LSI layout pattern display device, method, program, and three-dimensional LSI layout pattern data generation device according to the present invention are not limited to the specific embodiments described below, and can be appropriately changed within the scope of the present invention. Keep in mind that. Individual functions, devices, elements, etc. included in the embodiments described later can be appropriately deleted or changed within the scope of the present invention, and any functions, devices, elements, etc. not included in the embodiments can be deleted or changed within the scope of the present invention. It is also possible to add it within. For example, in the following embodiment, it will be described that the CPU / GPU mainly executes various data processing and control related to the three-dimensional LSI layout pattern by executing the program. However, in order to carry out the present invention, such a configuration is provided. It is not essential to use it, and the present invention can be implemented by any configuration such as an ASIC (application specific integrated circuit), an embedded system, a microcomputer, and the like. It should be noted that the scales of the drawings, such as between the diagrams showing the two-dimensional and three-dimensional LSI layout patterns, and the diagram and the screen image, do not always match, and the dimensions of each object in the same drawing may also be included. Keep in mind that it is not always accurate. Similar objects included in each drawing are designated by the same reference numerals, but the configurations and operations of the objects are not always the same.

1. 1. Principle of 3D LSI layout pattern generation The principle of 3D LSI layout pattern generation will be described below. FIG. 1 is a diagram showing an example of a two-dimensional LSI layout pattern, and FIGS. 2A to 2E are diagrams showing layout patterns of the first to fifth layers from the top in the two-dimensional LSI layout pattern 200 of FIG. 1, respectively. Is. For example, the object "METAL" shown in FIG. 2A belongs to the first layer and is not shown in FIG. 2B showing the layout pattern of the second layer, but the object "METAL" is 1 from the top. It is a component of the second layer and has the thickness of the first layer (that is, it is in contact with the second layer). The same applies to other objects. For example, the object "POLY2" shown in FIG. 2D belongs to the fourth layer from the top and is not shown in FIG. 2E showing the layout pattern of the fifth layer. , It is assumed that the object "POLY2" is a component of the fourth layer from the top and has the thickness of the fourth layer (as described later, between the fourth layer and the fifth layer). Has an oxide film).

The shape and arrangement of each two-dimensional figure included in the two-dimensional LSI layout pattern 200 can be indicated by an ordered set of vertex coordinates in one example. For example, the shape and arrangement of the two-dimensional figure of the object "METAL" belonging to the first layer (from the top) shown in FIG. 2A is the ordered vertex coordinates P1, P2, P3, P4 in the two-dimensional xy coordinate system. A two-dimensional figure (rectangular in this example) of the object "METAL" is created by drawing a line segment on a two-dimensional plane so as to pass through the coordinates in the order of P1, P2, P3, P4, P5, which is indicated by P5. can get. However, it is assumed that the coordinates of the start point P1 and the end point P5 match.

Objects "CONT1", "CONT2", and "CONT3" belong to the second layer shown in FIG. 2B. The shape and arrangement of the two-dimensional figure of the object "CONT1" is indicated by the ordered apex coordinates P6, P7, P8, P9, P10, and passes through the apex in the order of P6, P7, P8, P9, P10. By drawing a line on a two-dimensional plane, a two-dimensional figure (square in this example) of the object "CONT1" can be obtained (the coordinates of the start point P6 and the end point P10 are assumed to match). The shape and arrangement of the two-dimensional figure of the object "CONT2" are similarly indicated by the ordered vertex coordinates P11, P12, P13, P14, and P15, and the shape and arrangement of the two-dimensional figure of the object "CONT3" are also shown. , Also indicated by the ordered vertex coordinates P16, P17, P18, P19, P20. The shapes and arrangements of the two-dimensional figures of each object shown in FIGS. 2C-2E are similarly indicated by an ordered set of vertex coordinates.

Here, the object "CONT1" belongs to the second layer shown in FIG. 2B, but the object "CONT1" also belongs to the layout pattern of the third layer shown in FIG. 2C and the fourth layer shown in FIG. 2D. It is shown. This is because the object "CONT1" corresponds to a contact element that connects the object "METAL" of the first layer (top layer) and the object "DIFF" of the fifth layer (bottom layer). That is, the object "CONT1" occupies a part of the 2nd to 4th layers and is in contact with the lower surface of the 1st layer and the upper surface of the 5th layer. Similarly, the object "CONT2" corresponds to the contact element connecting the object "METAL" of the first layer (top layer) and the object "POLY2" of the fourth layer, so that the object "CONT2" is of the second to third layers. It occupies a part and is in contact with the lower surface of the first layer and the upper surface of the fourth layer. Further, the object "CONT3" occupies a part of the second layer in order to correspond to the contact element connecting the object "METAL" of the first layer (top layer) and the object "POLY1" of the third layer. It is in contact with the lower surface of the first layer and the upper surface of the third layer.

FIG. 3 is a diagram (screen image diagram) showing an example of characterization data that characterizes each three-dimensional figure to be generated from each of the two-dimensional figures shown in FIG. 1, and is a diagram (screen image diagram) of the two-dimensional LSI layout pattern of FIG. Data for extending 200 to three dimensions is shown in FIG.

In the table of FIG. 3, the data values of "(order) 1, (definition name) METAL, (layer) 0, (thickness) 0.2" are displayed in the first row corresponding to the first layer. This means that the first layer is the layer (layer type) of the object "METAL", and the thickness of the first layer is 0.2 (in the present embodiment, the unit is μm. ) Is shown.
In the table of FIG. 3, the data values of "(order) 3, (definition name) POLY1, (layer) 2, (thickness) 0.2" are displayed in the third row corresponding to the third layer. This indicates that the third layer is the layer of the object "POLY1" and that the thickness of the third layer is 0.2.
In the table of FIG. 3, the data values of "(order) 4, (definition name) POLY2, (layer) 3, (thickness) 0.2" are displayed in the fourth row corresponding to the fourth layer. This indicates that the fourth layer is the layer of the object "POLY2" and that the thickness of the fourth layer is 0.2.
In the table of FIG. 3, the data values of "(order) 5, (definition name) DIFF, (layer) 4, (thickness) 0.4" are displayed in the fifth row corresponding to the fifth layer. This indicates that the fifth layer is the layer of the object "DIFF", and that the fifth layer has a thickness of 0.4.

Here, in the table of FIG. 3, the data values of "(order) 2, (definition name) CONT, (layer) 1, (thickness) blank" are displayed in the second row corresponding to the second layer. This indicates that the second layer is the layer of the object "CONT", but the thickness of the second layer is blank. In the present embodiment, such a layer having no thickness is interpreted as a contact layer. The contact layer in the present embodiment is a layer in which an object belonging to the layer is extended along the stacking direction to the lowest layer within a range that does not reach the inside of the three-dimensional figure of an object other than itself. Therefore, the objects "CONT1", "CONT2", and "CONT3" belonging to the contact layer, which is the second layer, are up to the fifth layer, which is the lowest layer, within the range that does not reach the inside of the three-dimensional figure of the object other than itself. It will be expanded. First, looking at the object "CONT1", as can be seen from the two-dimensional layout pattern 200 of FIGS. 1 to 2E and the cross-sectional view of FIG. 4, the fifth layer does not extend to the inside of the three-dimensional figure of the object other than itself. Therefore, it is extended to the 5th layer and connected to the object "DIFF" belonging to the 5th layer. Next, looking at the object "CONT2", as can be seen from the two-dimensional layout pattern 200 of FIGS. 1 to 2E and the cross-sectional view of FIG. 4, the fourth layer comes into contact with the object "POLY2" other than itself. It is extended to the layer of and connected to the object "POLY2" belonging to the fourth layer. Next, looking at the object "CONT3", as can be seen from the two-dimensional layout pattern 200 of FIGS. 1 to 2E and the cross-sectional view of FIG. 4, the third layer comes into contact with the object "POLY1" other than itself. It is extended to the third layer and connected to the object "POLY1" belonging to the third layer.

Here, in the table of FIG. 3, the thickness is blank in the second row, but the thickness of the contact layer (second layer) is "insulation" in the frame of "thickness setting" in the table of FIG. It is assumed that it is given by the value displayed in the "Layer" item. In the example of FIG. 3, 0.2 is displayed (the unit is μm), that is, the thickness of the second layer is 0.2 μm.

Further, in the table of FIG. 3, the value displayed in the item of "oxide film" in the frame of "thickness setting" ("0.2". The unit is μm) is the lowest layer in this example. It is assumed that the thickness of the oxide film exists between the object "DIFF" belonging to a certain fifth layer and the object "POLY2" belonging to the fourth layer, which is one layer above the object "DIFF". Therefore, the thickness of the object "CONT1" is 0.2 μm for the second layer, 0.2 μm for the third layer, 0.2 μm for the fourth layer, and 0.2 μm for the oxide film. It can be seen that the total is 0.8 μm. Next, the thickness of the object "CONT2" is 0.4 μm, which is the sum of the thickness of the second layer of 0.2 μm and the thickness of the third layer of 0.2 μm. The thickness of the object "CONT3" is 0.2 μm in the thickness of the second layer. An object identified as a "penetrating object" (contact, via) described later by the characterization data penetrates the oxide film unlike the "normal object" described later. As will be described later, since the object "CONT1" is a "penetrating object", it penetrates the oxide film.

By using the two-dimensional LSI layout pattern 200 shown in FIGS. 1 to 2E and the characterization data shown in the table of FIG. 3, the three-dimensional structure of the LSI layout pattern can be grasped and extended to the three-dimensional LSI layout pattern. It becomes possible. First, FIG. 4 shows a three-dimensional structure determined from the two-dimensional LSI layout pattern of FIG. 1 and the characterization data of FIG. 3 in a stacking direction (2 shown in FIG. 2A and the like along the lines AA'of FIG. It is a cross-sectional view which shows the cross section at the time of cutting in the direction (the direction perpendicular to the dimension xy plane) (the unit of the numerical value of the stacking direction (thickness direction) shown by a broken line is μm). By specifying structural parameters such as "thickness" in the stacking direction of the LSI layout pattern from the characterization data shown in the table of FIG. 3, it is possible to grasp the structure of the cross section.

Further, FIG. 5 is a screen image diagram showing a three-dimensional LSI layout pattern obtained from the two-dimensional graphic data showing the two-dimensional LSI layout pattern of FIG. 1 and the three-dimensional graphic data generated by using the characterization data of FIG. Is. However, it does not show the entire three-dimensional layout pattern, and the ends of the objects "METAL", "POLY1", and "DIFF" are not displayed. Hereinafter, the generation rules of each three-dimensional figure shown in FIG. 5 will be described.

1-1. Three-dimensional figure of a normal object First, regarding the object "METAL", the shape and arrangement of the two-dimensional figure can be shown using the vertex coordinates P1 to P5 as described above with reference to FIG. 2A. Here, each vertex is shown. Coordinates (x, y) of
P1: (0,0.8)
P2: (0,1.2)
P3: (3, 1.2)
P4: (3,0.8)
P5: (0,0.8)
(The unit of the coordinate values of x and y is μm. The same applies to the unit of other coordinates). The coordinate values are given for convenience of explanation, and do not always match the two-dimensional graphic data used to generate the three-dimensional LSI layout pattern 300 shown in FIG. 5 (about the screen image described later). The same applies).

In the table of FIG. 3, in the row corresponding to "METAL", the order is "1" and the thickness is "0.2". In this way, an object that is given a single numerical value as an order and a single numerical value as a thickness is recognized as an object (“normal object”) arranged in a single layer. When expanding the two-dimensional figure of the normal object "METAL" to a three-dimensional figure, the vertex coordinates P1 to P5 are changed from two-dimensional to three-dimensional by using 0.2, which is the thickness value given to the object "METAL". Extend to.

Specifically, first, the two-dimensional LSI layout pattern shown in FIG. 2A corresponds to the upper surface of the first layer as shown in the cross-sectional view of FIG. The z-axis is defined in the direction orthogonal to the xy plane from the first layer to the fifth layer, that is, from the top layer to the bottom layer, and the numerical value shown with the broken line in FIG. 4 is defined as the z coordinate value. If considered (assuming that the upper surface of the first layer is z = 0), the vertex coordinates P1 to P5 are represented as three-dimensional coordinates (x, y, z) as follows.
P1: (0,0.8,0)
P2: (0,1.2,0)
P3: (3,1.2,0)
P4: (3,0.8,0)
P5: (0,0.8,0)

The three-dimensional vertex coordinates P1 to P5 indicate the vertex coordinates of the upper surface of the three-dimensional figure of the object "METAL". Since the thickness of the object "METAL" is 0.2 (the unit is μm. The same applies to the units of other thicknesses), the apex coordinates of the lower surface of the three-dimensional figure of the object "METAL" are shown in the table below. Will be done.
P1': (0,0.8,0.2)
P2': (0, 1.2, 0.2)
P3': (3, 1.2, 0.2)
P4': (3,0.8,0.2)
P5': (0,0.8,0.2)

The shape and arrangement (position, orientation, etc.) of the three-dimensional figure of the object "METAL" are determined by the three-dimensional vertex coordinates P1 to P5 and P1'to P5'. Specifically, this three-dimensional figure can be grasped as an aggregate of the following surfaces constituting the three-dimensional figure.
First surface: A surface (upper surface) obtained by drawing a line segment so as to pass through the vertices in the order of P1, P2, P3, P4, P5.
Second surface: A surface (bottom surface) obtained by drawing a line segment so as to pass through the vertices in the order of P1', P2', P3', P4', P5'.
Third surface: A surface (side surface 1) obtained by drawing a line segment so as to pass through the vertices in the order of P1, P2, P2', P1', and P5.
Fourth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P2, P3, P3', P2', and P2 (side surface 2).
Fifth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P3, P4, P4', P3', and P3 (side surface 3).
Sixth surface: A surface (side surface 4) obtained by drawing a line segment so as to pass through the vertices in the order of P4, P5, P5', P4', and P4.

Therefore, the shape and arrangement of the three-dimensional figure of the object "METAL" is indicated by six ordered sets of three-dimensional vertex coordinates indicating the first to sixth surfaces, respectively.

The objects "POLY1", "POLY2", and "DIFF" are given individual numerical values in order in the table of FIG. 3, and are given individual numerical values as thickness, so that they are the same as the object "METAL". It is a "normal object". For the shape and arrangement of the three-dimensional figure of the "normal object", the vertex coordinates of the corresponding two-dimensional coordinates are expanded to three dimensions in the same manner as the object "METAL", and the vertex coordinates of the lower surface are introduced according to the "thickness". It can be determined by generating an ordered set of 3D vertex coordinates, each showing a plurality of faces that make up a 3D figure.

1-2. Three-dimensional figure of a penetrating object (contact) As already explained, since the thickness corresponding to the second layer in the table of FIG. 3 is blank, the second layer is a contact layer, and the contact layer The belonging object is extended along the stacking direction to the lowest layer within the range that does not reach the inside of the three-dimensional figure of the object other than itself. In this way, an object that extends to the lower layers within the range that does not reach the inside of the 3D figure of the object other than the self is called a "penetration object", and in particular, the object that extends to the inside of the 3D figure of the object other than the self is the "most". Objects that extend "to the lower layers" are called "contacts".

The vertices of the two-dimensional figure of the object "CONT1" are P6, P7, P8, P9, P10 shown in FIG. 2B (P10 corresponds to P6), and here, for convenience, the coordinates (x, y) of each vertex are set. ,
P6: (0.8, 0.9)
P7: (0.8, 1.1)
P8: (1,1.1)
P9: (1,0.9)
P10: (0.8, 0.9)
(The unit of the coordinate values of x and y is μm. The same applies to the unit of other coordinate values).

The object "CONT1" belongs to the second layer, and since the thickness of the first layer is 0.2 μm, the upper surface of the second layer has z = 0.2, so that the vertex coordinates P6 to P10 is represented as three-dimensional coordinates (x, y, z) as follows.
P6: (0.8, 0.9, 0.2)
P7: (0.8, 1.1, 0.2)
P8: (1,1.1,0.2)
P9: (1,0.9,0.2)
P10: (0.8, 0.9, 0.2)

The three-dimensional vertex coordinates P6 to P10 indicate the vertex coordinates of the upper surface of the three-dimensional figure of the object "CONT1". Since the object "CONT1" does not reach the inside of the three-dimensional figure of another object up to the bottom layer, it is expanded to the bottom layer and connected to the three-dimensional figure of the object "DIFF" belonging to the bottom layer. The apex coordinates of the lower surface of the three-dimensional figure of the object "CONT1" are expressed as follows (as already mentioned, there is an oxide film with a thickness of 0.2 μm between the 4th layer and the 5th layer. Exists. See Figure 4.).
P6': (0.8, 0.9, 1)
P7': (0.8, 1.1, 1)
P8': (1,1.1,1)
P9': (1,0.9,1)
P10': (0.8, 0.9, 1)

The shape and arrangement (position, orientation, etc.) of the three-dimensional figure of the object "CONT1" are determined by the three-dimensional vertex coordinates P6 to P10 and P6'to P10'. Specifically, this three-dimensional figure can be grasped as an aggregate of the following surfaces constituting the three-dimensional figure.
First surface: A surface (upper surface) obtained by drawing a line segment so as to pass through the vertices in the order of P6, P7, P8, P9, P10.
Second surface: A surface (bottom surface) obtained by drawing a line segment so as to pass through the vertices in the order of P6', P7', P8', P9', P10'.
Third surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P6, P7, P7', P6', P10 (side surface 1).
Fourth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P7, P8, P8', P7', P7 (side surface 2).
Fifth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P8, P9, P9', P8', P8 (side surface 3).
Sixth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P9, P10, P10', P9', P9 (side surface 4).

Therefore, the shape and arrangement of the three-dimensional figure of the object "CONT1" is indicated by six ordered sets of three-dimensional vertex coordinates indicating the first to sixth surfaces, respectively.

The shape and arrangement of the three-dimensional figures of the objects "CONT2" and "CONT3" can be shown in the same manner as the shape and arrangement of the three-dimensional figures of the object "CONT1". Since the object "CONT2" touches the three-dimensional figure of the object "POLY2" on the upper surface of the fourth layer, it is extended to the upper surface of the fourth layer, and the third order of each vertex of the lower surface of the object "CONT2". The z-coordinate in the original coordinates is 0.6 instead of 1. Further, since the object "CONT3" is in contact with the three-dimensional figure of the object "POLY1" on the upper surface of the third layer, it is extended to the upper surface of the third layer, and the third order of each vertex of the lower surface of the object "CONT3". The z-coordinate in the original coordinates is 0.4 instead of 1.

As described above, the three-dimensional figure to be included in the three-dimensional LSI layout pattern is determined by generating a plurality of ordered sets of three-dimensional vertex coordinates indicating the plurality of faces constituting the three-dimensional figure. be able to. Each of the three-dimensional figures thus generated is defined as each layer to which each three-dimensional figure belongs (the layer to which the two-dimensional figure that is the source of the three-dimensional figure belongs is defined as the layer to which the three-dimensional figure belongs. ), The three-dimensional LSI layout pattern can be displayed by displaying in accordance with the predetermined stacking order indicated by the value of the "order" item in FIG.

1-3. Three-dimensional figure of a penetrating object (via) As an example of a penetrating object, there is a "via" other than a contact. A "via" is an object that extends from a designated penetration start layer to a designated penetration end layer within a range that does not extend inside the three-dimensional figure of an object other than itself.

FIG. 6 shows an example of a two-dimensional LSI layout pattern including vias. 7A to 7I show layout patterns of the first (top layer) to ninth layer (bottom layer) from the top in the layout pattern of FIG. 6, respectively. Further, an example of characterization data that characterizes each three-dimensional figure to be generated from each of the two-dimensional figures shown in FIG. 6 is shown in FIG. 8, and the two-dimensional LSI layout pattern of FIG. 6 and the feature of FIG. 8 are shown. FIG. 9 shows a cross-sectional view showing a cross section when the three-dimensional structure determined from the data is cut along the line AA'of FIG. Further, FIG. 10 shows a screen image diagram showing a three-dimensional LSI layout pattern obtained from the two-dimensional graphic data showing the two-dimensional LSI layout pattern of FIG. 6 and the three-dimensional graphic data generated by using the characterization data of FIG. Shown in.

Among the objects shown, the objects "VIA1-1", "VIA1-2", "VIA1-3", "VIA2-1", "VIA2-2", and "VIA2-3" are vias. The objects "VIA1-1", "VIA1-2", "VIA1-3" belong to the second layer, and the objects "VIA2-1", "VIA2-2", "VIA2-3" belong to the sixth layer. belong to. In the table of FIG. 8, the definition name "VIA1" specifies the second layer (first as the via layer) which is the via layer, that is, "VIA1" in the table of FIG. Corresponds to the objects "VIA1-1", "VIA1-2", and "VIA1-3" in FIGS. 6 to 7I and 9. Similarly, in the table of FIG. 8, the definition name "VIA2" specifies the sixth layer (second as the via layer) which is the via layer, that is, in the table of FIG. 8, "VIA2". Corresponds to the objects "VIA2-1", "VIA2-2", and "VIA2-3" in FIGS. 6 to 7I and 9.

Here, in the table of FIG. 8, in the second row corresponding to the second layer which is the via layer, "(order) 2-4, (definition name) VIA1, (layer) 1, (thickness) 0. The data value of "2" is displayed, which is the second layer (penetration start layer) to the fourth layer (penetration end layer) within the range where the second layer does not reach the inside of the three-dimensional figure of the object other than itself. It is a layer to which the via penetrating the layer) belongs, and the thickness of the second layer is 0.2 μm. The layer number "1" represents the type of layer in which the second layer is the via layer.

First, looking at the object "VIA1-1", as can be seen from the two-dimensional layout patterns 200 of FIGS. 6 to 7I and the cross-sectional view of FIG. 9, the fifth layer extends to the inside of the three-dimensional figure of the object other than itself. There is no such thing, so it is extended to the 5th layer and connected to the object "M2" belonging to the 5th layer (penetrating the 2nd to 4th layers). Next, looking at the object "VIA1-2", as can be seen from the two-dimensional layout pattern 200 of FIGS. 6 to 7I and the cross-sectional view of FIG. 9, since the object "POLY2" other than itself is in contact with the fourth layer, it comes into contact with the object "POLY2". It is extended to the 4th layer and connected to the object "POLY2" belonging to the 4th layer (penetrating the 2nd to 3rd layers). Next, looking at the object "VIA1-3", as can be seen from the two-dimensional layout pattern 200 of FIGS. 6 to 7I and the cross-sectional view of FIG. 9, the object "POLY1" other than itself is contacted in the third layer. It is extended to the third layer and connected to the object "POLY1" belonging to the third layer (penetrating the second layer). Similarly, as can be seen from the two-dimensional layout pattern 200 of FIGS. 6 to 7I, the characterization data table of FIG. 8, and the cross-sectional view of FIG. 9, the object "VIA2-1" penetrates the 6th to 8th layers and is an object. "VIA2-2" penetrates the 6th to 7th layers, and the object "VIA2-3" penetrates the 6th layer. In the table of FIG. 8, the data value of "6-9" is displayed in the "order" of the row corresponding to the sixth layer, and the sixth layer is the third order of the object other than the self. It is shown that the vias that penetrate the 6th layer (penetration start layer) to the 9th layer (penetration end layer) belong to the range that does not reach the inside of the original figure, but the 9th layer is an object. Since "DIFF" belongs, none of the objects "VIA2-1" to "VIA2-3" penetrates the ninth layer.

The vertices of the two-dimensional figure of the object "VIA1-1" are P6, P7, P8, P9, P10 shown in FIG. 7B (P10 corresponds to P6), and here, for convenience, the coordinates of each vertex (x, y). ),
P6: (0.8, 0.9)
P7: (0.8, 1.1)
P8: (1,1.1)
P9: (1,0.9)
P10: (0.8, 0.9)
And.

The object "VIA1-1" belongs to the second layer, and since the thickness of the first layer is 0.2 μm, the upper surface of the second layer is z = 0.2, so the apex coordinates. P6 to P10 are represented as three-dimensional coordinates (x, y, z) as follows.
P6: (0.8, 0.9, 0.2)
P7: (0.8, 1.1, 0.2)
P8: (1,1.1,0.2)
P9: (1,0.9,0.2)
P10: (0.8, 0.9, 0.2)

The three-dimensional vertex coordinates P6 to P10 indicate the vertex coordinates of the upper surface of the three-dimensional figure of the object "VIA1-1". Since the object "VIA1-1" does not reach the inside of the three-dimensional figure of other objects up to the fifth layer, it is extended to the fifth layer and becomes the three-dimensional figure of the object "M2" belonging to the fifth layer. Be connected. The coordinates of the vertices of the lower surface of the three-dimensional figure of the object "VIA1-1" are represented as follows.
P6': (0.8, 0.9, 0.8)
P7': (0.8, 1.1, 0.8)
P8': (1,1.1,0.8)
P9': (1,0.9,0.8)
P10': (0.8, 0.9, 0.8)

The shape and arrangement (position, orientation, etc.) of the three-dimensional figure of the object "VIA1-1" are determined by the three-dimensional vertex coordinates P6 to P10 and P6'to P10'. Specifically, this three-dimensional figure can be grasped as an aggregate of the following surfaces constituting the three-dimensional figure.
First surface: A surface (upper surface) obtained by drawing a line segment so as to pass through the vertices in the order of P6, P7, P8, P9, P10.
Second surface: A surface (bottom surface) obtained by drawing a line segment so as to pass through the vertices in the order of P6', P7', P8', P9', P10'.
Third surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P6, P7, P7', P6', P10 (side surface 1).
Fourth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P7, P8, P8', P7', P7 (side surface 2).
Fifth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P8, P9, P9', P8', P8 (side surface 3).
Sixth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P9, P10, P10', P9', P9 (side surface 4).

Therefore, the shape and arrangement of the three-dimensional figure of the object "VIA1-1" will be indicated by six ordered sets of three-dimensional vertex coordinates, respectively, showing the first to sixth surfaces.

The shape and arrangement of the three-dimensional figures of the objects "VIA1-2" and "VIA1-3" can be shown in the same manner as the shape and arrangement of the three-dimensional figures of the object "VIA1-1". Since the object "VIA1-2" is in contact with the three-dimensional figure of the object "POLY2" on the upper surface of the fourth layer, it is expanded to the upper surface of the fourth layer, and the lower surface of the object "VIA1-2". The z-coordinate in the three-dimensional coordinates of each vertex is 0.6 instead of 0.8. Further, since the object "VIA1-3" touches the three-dimensional figure of the object "POLY1" on the upper surface of the third layer, it is extended to the upper surface of the third layer, and each vertex of the lower surface of the object "CONT3". The z-coordinate in the three-dimensional coordinates of is 0.4 instead of 0.8.

The shape and arrangement of the three-dimensional figures of the objects "VIA2-1", "VIA2-2", and "VIA2-3" are also determined by generating a plurality of ordered sets of three-dimensional vertex coordinates by the same principle. can do. In the table of FIG. 8, the value displayed in the item of "oxide film" in the frame of "thickness setting" ("0.2". The unit is μm) is the lowest layer in this example. It is assumed that the thickness of the oxide film exists between the object "DIFF" belonging to a certain 9th layer and the object "POLY4" belonging to the 8th layer which is one layer above the object "DIFF". Therefore, the z coordinate of the upper surface of the three-dimensional figure of the objects "VIA2-1", "VIA2-2", and "VIA2-3" is 1, as can be seen from the thickness of each layer shown in the table of FIG. Taking into account the thickness of the film, the z-coordinate of the lower surface of the three-dimensional figure of "VIA2-1" connected to the object "DIFF" in the ninth layer is 1.8. The z-coordinate of the lower surface of the three-dimensional figure of the object "VIA2-2" is 1.4, and the z-coordinate of the lower surface of the three-dimensional figure of the object "VIA2-2" is 1.2.

In the above description, the example in which the two-dimensional figure of each object is a quadrangle is used, but the shape of the two-dimensional figure of all objects including the normal object and the penetrating object may be arbitrary. For example, if the two-dimensional figure of an object is an n-sided polygon (n is an integer of 3 or more), the shape and arrangement of the n-sided polygon can be shown using (n + 1) ordered two-dimensional coordinates. It can be done (the coordinates of the start point and the end point match), and it can be extended to a three-dimensional figure basically by the same principle as the one explained so far.

1-4. Generation of cut surface according to area designation In the examples so far, the area in the frame shown by the rectangle further outside the object "DIFF" in FIG. 1 or FIG. 6 is set as the three-dimensional display target area, and two. In the dimensional LSI layout pattern, it was explained that the two-dimensional figures included in the area are each expanded to three dimensions (in the two-dimensional layout patterns of FIGS. 1 and 6), there are objects outside the area. Although they may be arranged, the display of objects outside the area is omitted in FIGS. 1 and 6), and any area can be selected as the three-dimensional display target area. For example, in FIGS. 1 and 6. The entire area including all the objects not shown may be selected, or an area smaller than the area illustrated by the rectangle in FIG. 1 or 6 may be selected.

FIG. 11 shows an example of a three-dimensional display target area different from the area selected in FIGS. 1, 6 and the like. In the two-dimensional LSI layout pattern shown in FIG. 11 (assuming that the two-dimensional LSI layout pattern is the same as in FIG. 1 and its three-dimensional structure is also shown by the characterization data in FIG. 3), it is more than the object "DIFF". Further, it is assumed that the area on the left side of the BB'line is selected as the three-dimensional display target area among the areas in the frame shown by the outer rectangle. It can be seen that the two-dimensional figure of the object "POLY1" is cut by the outer edge of the three-dimensional display target area (by the BB'line).

When the two-dimensional figure of the object is cut at the outer edge of the three-dimensional display target area in this way, two-dimensional coordinate and three-dimensional coordinate data indicating the shape and arrangement of the cut surface are generated as described below. It is effective to display the cut surface in the three-dimensional LSI layout pattern in order to grasp the three-dimensional structure of the LSI.

FIG. 12 shows how the two-dimensional figure of the object belonging to the first layer from the top is cut in the layout pattern of FIG. 1 when the three-dimensional display target area is defined as shown in FIG. The shape and arrangement of the two-dimensional figure of the object "METAL" are shown by a set of ordered vertex coordinates P1, P2, P3, P4, P5 as described above, but in the three-dimensional display target area shown in FIG. , Of the two-dimensional figures of the object "METAL", the two-dimensional figure portion on the left side of the BB'line (the side where the x-coordinate value becomes smaller in the coordinate system of FIG. 12) is expanded to the three-dimensional figure. Assuming that the BB'line is a straight line parallel to the y-axis where x = 2.4, the vertex coordinates of the above-mentioned two-dimensional figure portion extended to the three-dimensional figure among the two-dimensional figures of the object "METAL" ( x, y) is
P1: (0,0.8)
P2: (0,1.2)
P3-1: (2.4, 1.2)
P4-1: (2.4, 0.8)
P5: (0,0.8)
Then, the shape and arrangement of the two-dimensional graphic portion are shown by the ordered set of vertex coordinates P1, P2, P3-1, P4-1, and P5.

Using the set of ordered vertex coordinates P1, P2, P3-1, P4-1, P5 and the characterization data corresponding to the object "METAL" shown in FIG. 3, the two-dimensional graphic portion has already been formed. It can be extended to the 3D figure part by the same principle as the generation of the 3D figure of the normal object described above.

Specifically, if the z coordinate on the upper surface of the first layer in which the object "METAL" exists is set to z = 0, the vertex coordinates P1, P2, P3-1, P4-1, P5 of the two-dimensional graphic portion are , Represented as three-dimensional coordinates (x, y, z) as follows.
P1: (0,0.8,0)
P2: (0,1.2,0)
P3-1: (2.4, 1.2, 0)
P4-1: (2.4, 0.8, 0)
P5: (0,0.8,0)

The three-dimensional vertex coordinates P1, P2, P3-1, P4-1, and P5 indicate the vertex coordinates of the upper surface of the three-dimensional graphic portion obtained by expanding the two-dimensional graphic portion of the object "METAL". Since the thickness of the object "METAL" is 0.2, the apex coordinates of the lower surface of the three-dimensional graphic portion of the object "METAL" are represented as follows.
P1': (0,0.8,0.2)
P2': (0, 1.2, 0.2)
P3-1': (2.4, 1.2, 0.2)
P4-1': (2.4, 0.8, 0.2)
P5': (0,0.8,0.2)

The shape of the three-dimensional graphic portion of the object "METAL" by the three-dimensional vertex coordinates P1, P2, P3-1, P4-1, P5 and P1', P2', P3-1', P4-1', P5'. And the arrangement (position, orientation, etc.) are determined. Specifically, this three-dimensional graphic portion can be grasped as an aggregate of the following surfaces constituting the three-dimensional graphic portion.
First surface: A surface (upper surface) obtained by drawing a line segment so as to pass through the vertices in the order of P1, P2, P3-1, P4-1, P5.
Second surface: A surface (bottom surface) obtained by drawing a line segment so as to pass through the vertices in the order of P1', P2', P3-1', P4-1', and P5'.
Third surface: A surface (side surface 1) obtained by drawing a line segment so as to pass through the vertices in the order of P1, P2, P2', P1', and P5.
Fourth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P2, P3-1, P3-1', P2', and P2 (side surface 2).
Fifth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P3-1, P4-1, P4-1', P3-1', and P3-1 (side surface 3).
Sixth surface: A surface obtained by drawing a line segment so as to pass through the vertices in the order of P4-1, P5, P5', P4-1', and P4-1 (side surface 4).

Therefore, the shape of the three-dimensional figure portion (the portion on the left side of the BB'line) obtained by cutting the three-dimensional figure of the object "METAL" in the stacking direction (z direction) on the BB'line. The arrangement will be indicated by an ordered set of six three-dimensional vertex coordinates, each indicating the first to sixth surfaces. When cutting the 3D figure of the object of each layer along the BB'line in the stacking direction, the objects "CONT3", "POLY1", and "DIFF" are cut in the same manner in addition to the object "METAL". The shape and arrangement of each 3D graphic portion in the 3D display target area when these objects are cut are also indicated by a plurality of ordered sets of 3D vertex coordinates by the same principle. If the shape and arrangement of each three-dimensional graphic portion are determined in this way, the three-dimensional LSI layout pattern shown in FIG. 5 includes a cut surface when cut from the broken line in FIG. 13 in the stacking direction. The pattern can be displayed, and it becomes easy to grasp the three-dimensional structure including the cut surface.

2. 2. Three-dimensional LSI layout pattern display device Next, the configuration and operation of the three-dimensional LSI layout pattern display device that generates and displays the three-dimensional LSI layout pattern described above will be described.

2-1. Configuration of 3D LSI Layout Pattern Display Device FIG. 14 shows a configuration example of a 3D LSI layout pattern display device. The three-dimensional LSI layout pattern display device 1 includes a processing device 2, a recording device 3, an input / output device 4, and a display device 5.

The processing device 2 includes a CPU (Central Processing Unit), a GPU (Graphics Processing Unit) 6, and a temporary memory 11 such as a RAM (Random Access Memory). When the CPU / GPU 6 executes the three-dimensional graphic data generation program 12 using the LSI design data 14 recorded in the recording device 3, the CPU / GPU 6 has an area designation data input receiving unit 7 and a characterizing data input receiving unit 7. 8. It functions as a three-dimensional graphic data generation unit 9. In one example, the CPU functions as the area designation data input reception unit 7 and the characterization data input reception unit 8, and the GPU functions as the three-dimensional graphic data generation unit 9. However, how to assign the function related to the three-dimensional LSI layout pattern display to the CPU and the GPU is arbitrary. For example, all the processing may be performed by the CPU without mounting the GPU. Further, the CPU / GPU 6 performs overall operation control such as control of the input / output device 4 and the display device 5 in the three-dimensional LSI layout pattern display device 1 by executing various programs 13 recorded in the recording device 3. It functions as various control units 10. In one example, the CPU controls the operation of the input / output device 4, and the GPU controls the drawing and the like in the display device 5, but the allocation of these functions is also arbitrary, and even if the CPU does all the operations without mounting the GPU. Good.

The area designation data input receiving unit 7 is a functional unit that receives an input for designating a three-dimensional display target area, which has been described with reference to FIG. 11 and the like. In one example, a user uses an input / output device 4 such as a mouse. , The three-dimensional display target area is specified by moving a bar such as the BB'line of FIG. 11 displayed on the display device 5, and the input of data indicating the designated three-dimensional display target area is specified as an area. The data input reception unit 7 accepts the data (records in the temporary memory 11 for subsequent processing). When the entire area of the two-dimensional LSI layout pattern is expanded to three dimensions and displayed as a three-dimensional LSI layout pattern, it is not necessary to specify the area. Therefore, the area designation data input receiving unit 7 may be omitted.

The characterization data input reception unit 8 is a function unit that receives input of characterization data as shown in the tables of FIGS. 3 and 8, and in one example, the user uses an input / output device 4 such as a mouse and a keyboard. Then, the contents corresponding to each item are input into the table as shown in FIGS. 3 and 8 displayed in a window on the display device 5, and the data input receiving unit 8 features the input of the data indicating the input contents. Accept (record in temporary memory 11 for subsequent processing).

The three-dimensional figure data generation unit 9 specifies an area by using the LSI design data (two-dimensional figure data) 14 indicating the two-dimensional LSI layout pattern and the characterization data for which the characterization data input reception unit 8 has received the input. Area designation for which data input reception unit 7 has received input The shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the three-dimensional display target area indicated by the data along the stacking direction. It is a functional unit that generates three-dimensional graphic data (data indicating a plurality of ordered sets of three-dimensional vertex coordinates for each three-dimensional graphic).

As described above, the various control units 10 are functional units that perform overall operation control in the three-dimensional LSI layout pattern display device 1, and as one of the functions, the three-dimensional figure data generation unit 9 has generated three dimensions. A drawing program such as a 3D (3-dimensions) graphic engine is executed using the graphic data to display the three-dimensional LSI layout pattern on the display device 5.

The recording device 3 is a recording device including a hard disk drive, SSD (Solid State Drive), and the like, and is two-dimensional graphic data indicating the shapes and arrangements of a plurality of two-dimensional graphics included in an LSI layout pattern including a plurality of layers. (Data showing an ordered set of vertex coordinates for each 2D figure) is stored in association with each layer to which each of the plurality of 2D figures belongs. Specifically, each two-dimensional figure provides data showing a set of two-dimensional vertex coordinates indicating the shape and arrangement of each two-dimensional figure included in the two-dimensional LSI layout pattern described with reference to FIG. It is stored in association with the order of each layer to which it belongs. The recording device 3 stores such two-dimensional graphic data and other data used for displaying the two-dimensional LSI layout pattern as LSI design data.

Further, the recording device 3 records a three-dimensional graphic data generation program 12 and various programs 13 for making the CPU / GPU 6 function as various functional units already described. In one example, the various programs 13 include an LSI design data editing program for adding new data to the LSI design data (two-dimensional graphic data) 14 and changing or deleting existing data, and an LSI design data. A display program for displaying a two-dimensional LSI layout pattern is included, and the user can arbitrarily edit and display the two-dimensional LSI layout pattern by executing the program by the CPU.

The input / output device 4 is an input device such as a mouse or keyboard for the user to input commands and data to the three-dimensional LSI layout pattern display device 1, and an output device such as a speaker for outputting audio as needed. including.

The display device 5 is a display device such as a liquid crystal display device and an organic electro-luminescence (organic EL) display device, and functions as a three-dimensional LSI layout pattern display unit 15 under the control of a CPU / GPU 6. .. The three-dimensional LSI layout pattern display unit 15 has a function of associating a three-dimensional figure whose shape and arrangement are indicated by three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displaying them in a predetermined stacking order. This section displays the three-dimensional LSI layout pattern described with reference to FIGS. 5, 10 and the like.

2-2. Operation of the 3D LSI Layout Pattern Display Device Next, an example of the operation of the 3D LSI layout pattern display device having the configuration shown in FIG. 14 will be described with reference to the flowchart of FIG.

First, the various programs 13 recorded in the recording device 3 of the three-dimensional LSI layout pattern display device 1 include a two-dimensional LSI layout pattern display program as described above, and the programs are executed by the CPU / GPU. As a result, the two-dimensional LSI layout pattern is displayed on the display device 5 (step S1501). A screen image showing the two-dimensional LSI layout pattern 200 is shown in FIG.

Next, the area designation data input receiving unit 7 receives the input of the area designation data indicating the area designated by the user using the input / output device 4 such as a mouse and a keyboard (step S1502). In one example, while the two-dimensional LSI layout pattern 200 as shown in FIG. 17 is displayed on the display device 5, the user moves the three-dimensional display target area change bar 202 up and down by a drag operation using a mouse. The three-dimensional display target area 201 is arbitrarily changed with, and the three-dimensional display target area is specified and specified by an operation such as clicking a software button (not shown) displayed on the screen of the display device 5 with a mouse. The area designation data input receiving unit 7 receives the input of the area designation data indicating the mouse area and stores it in the temporary memory 11. If the sides other than the three-dimensional display target area change bar 202 surrounding the three-dimensional display target area 201 can be moved by the drag operation using the mouse in the same manner, the user can further freely display the three-dimensional display target area 201. Can be specified.

Next, the three-dimensional graphic data generation unit 9 reads the two-dimensional graphic data in the three-dimensional display target area from the recording device 3 and stores it in the temporary memory 11 (step S1503). In the example of FIG. 17, among all the data of the two-dimensional figures included in the two-dimensional LSI layout pattern 200, the data of the two-dimensional figures included in the three-dimensional display target area 201 is read. When there is a two-dimensional figure cut by the outer edge (each side of the rectangle in FIG. 17) of the three-dimensional display target area 201, the data of such a two-dimensional figure is also read for the cut surface display process described above. (If the object of the two-dimensional figure to be cut is omitted from the three-dimensional LSI layout pattern, it is not necessary to read the data of such a two-dimensional figure.).

Next, the characterization data input receiving unit 7 receives the input of the characterization data by the user, which is performed from the input / output device 4 by using the window display as shown in FIGS. 3 and 8 displayed on the display device 5. (Step S1504). Specifically, the input contents for the data items such as "order", "definition name", "layer", "thickness", "insulating layer", and "oxide film" shown in the tables of FIGS. 3 and 8 are shown. The data is received by the characterizing data input receiving unit 7 in association with the number of each layer (specified from the input value of the "order"), and these are stored in the temporary memory 11.

Next, the three-dimensional graphic data generation unit 9 uses the two-dimensional graphic data and the characterizing data stored in the temporary memory 11 to set each of the two-dimensional graphics included in the three-dimensional display target area along the stacking direction. (Step S1505), the three-dimensional graphic data indicating the shape and arrangement of each three-dimensional graphic generated by the expansion is generated (step S1505). As described above, the three-dimensional graphic data here is data indicating a plurality of ordered sets of three-dimensional vertex coordinates. For example, when the three-dimensional graphic is a hexahedron, the set corresponds to each surface. Since the data to be shown is generated, a total of six data sets are generated corresponding to one three-dimensional figure. In the mode of generating the cut surface according to the area designation described above, data indicating the shape and arrangement of the three-dimensional graphic portion in the three-dimensional display target area among the objects to be cut is generated. The three-dimensional graphic data generated in this way is stored in the temporary memory 11 and then used for the three-dimensional display processing by a drawing program such as a 3D graphic engine. Further, the generated three-dimensional graphic data is recorded in the recording device 3 for later distance measurement and the like.

Next, the display device 5 is controlled by the CPU or GPU executing a drawing program such as the 3D graphic engine, and the display device 5 that functions as the three-dimensional LSI layout pattern display unit 15 is the generated three-dimensional. A three-dimensional figure whose shape and arrangement are indicated by graphic data is associated with each layer to which each of the three-dimensional figures belongs, and is displayed as a three-dimensional LSI layout pattern according to a predetermined stacking order (step S1506). Any known or unknown engine can be used as the 3D graphic engine, but in one example, the GPU executes the 3D graphic engine.
1) Color specification (RGB value), transparency setting 2) Shape specification (point, line, triangle, quadrangle, ...)
3) Designation of a row of vertices (in the case of a quadrangle, 5 vertices on the first surface, 5 vertices on the second surface, ...)
The three-dimensional LSI layout pattern is drawn by the procedure (RGB values and transparency settings can be specified at any time via the input / output device 4).

In one example, as shown in FIG. 16, the three-dimensional LSI layout pattern 300 is displayed corresponding to the two-dimensional LSI layout pattern 200. The three-dimensional LSI layout pattern display device 1 is in a waiting state in which a display command for the three-dimensional LSI layout pattern can be received at any time in the state where the two-dimensional LSI layout pattern is displayed, and in one example, the area designation data is input. Steps S1502 to S1503 in FIG. 15 are performed with this as a trigger, and steps S1504 to S1506 are subsequently performed with the input of the characterization data as a trigger. With such a configuration, the three-dimensional LSI layout pattern can be displayed in real time according to the user's request. It should be noted that the function realized by the GPU executing the drawing program allows the user to perform the three-dimensional LSI layout pattern displayed on the display device 5 via the input from the input / output device 4 such as a mouse and keyboard. It is possible to perform each operation of enlargement / reduction / rotation / movement, whereby the LSI layout pattern can be recognized three-dimensionally from various directions.

3. 3. Various Examples of 3D LSI Layout Patterns Various examples of 3D LSI layout patterns that can be generated according to the present embodiment will be described below.

3-1. Example of displaying a three-dimensional LSI layout pattern according to an area designation FIG. 17 is a screen image diagram when a three-dimensional display target area is selected on a two-dimensional LSI layout pattern, and is a tertiary generated in a state where the area is specified in this way. The screen image of the original LSI layout pattern is shown in FIG. 18 (The screen image does not display the image of the entire screen, but is partially cut out for explanation. It is also basic in other screen image diagrams. Same as above.). Here, in the two-dimensional LSI layout pattern as shown in FIG. 17, a screen image when the three-dimensional LSI layout pattern is displayed after moving the three-dimensional display target area change bar 202 upward as shown in FIG. 19 is shown. Shown in 20. In FIG. 19, a part of the two-dimensional figure included in the two-dimensional LSI layout pattern is cut by the three-dimensional display target area change bar 202, and accordingly, in the three-dimensional LSI layout pattern shown in FIG. It can be seen that the cut surface of the three-dimensional figure corresponding to the cut two-dimensional figure is displayed. In this way, by arbitrarily designating the three-dimensional display target area and cutting the two-dimensional figure at an arbitrary position, the cut surface of the three-dimensional figure of the object corresponding to the cut two-dimensional figure is displayed and the cross section is displayed. It becomes possible to grasp the structure. In one example, as shown in FIGS. 21 to 24, if the three-dimensional LSI layout pattern is displayed while moving the three-dimensional display target area change bar 202 in the two-dimensional LSI layout pattern, the three-dimensional figure of the same object can be displayed. It is possible to grasp the cross-sectional structure at various positions.

3-2. Example of displaying a three-dimensional LSI layout pattern including a three-dimensional figure having a complicated shape FIG. 25 is a diagram showing an example of a three-dimensional layout of an LSI including a FinFET (FinField-Effective Transistor), and FIG. 25A is a diagram of FIG. 25. It is an image diagram which hides the layer part higher than the layer to which an object 310 belongs in a three-dimensional layout. FIG. 26 is a diagram showing a two-dimensional layout of the object 310 forming a part of the FinFET shown in FIG. 25 (the size and shape have been changed for ease of explanation). The shapes of the upper surface and the lower surface of the object 310 are not the same, and the lower surface has a stepped shape. However, a three-dimensional LSI layout including a three-dimensional figure of such an object has been used in the present embodiment. It can be generated and displayed by the same principle as the one described.

In the layer to which the object 310 belongs (the layer to which the upper surface of the object 310 belongs), the two-dimensional figure of the object 310 is the ordered vertex coordinates P1, P2, P3, P4, P5, P6, P7 in the two-dimensional xy coordinate system. , P8, P9, and by drawing a line segment on a two-dimensional plane so as to pass through the coordinates in the order of P1, P2, P3, P4, P5, P6, P7, P8, P9, the upper surface of the object 310. Two-dimensional figure of is obtained.

In the characterization data of the object 310 given in the same format as the table of FIGS. 3 and 8, it is assumed that the item of "thickness" is blank and the object 310 is defined as "contact". As described above, the "contact" is extended along the stacking direction to the lowest layer within the range that does not reach the inside of the three-dimensional figure of the object other than itself, but in the two-dimensional figure of the object 310 shown in FIG. 26, When the shaded area is extended toward the lowest layer along the stacking direction, it comes into contact with a three-dimensional figure of an object belonging to another layer before reaching the lowest layer. Therefore, when expanding the two-dimensional figure of the object 310 shown in FIG. 26 to a three-dimensional figure, it is placed on the two-dimensional plane so as to pass through the vertices in the order of the three regions (P10, P11, P12, P13, P14) of the shaded area. The two-dimensional figure part obtained by drawing a line segment and the two-dimensional figure obtained by drawing a line segment on a two-dimensional plane so as to pass through the vertices in the order of P15, P16, P17, P18, P19. The figure part and the two-dimensional figure part obtained by drawing a line on the two-dimensional plane so as to pass through the vertices in the order of P20, P21, P22, P23, P24) are only up to the upper surface of the other layer. It will not be expanded. On the other hand, in the two-dimensional figure of the object 310 shown in FIG. 26, a line segment is drawn on the two-dimensional plane so as to pass through the vertices in the order of four regions (P1, P10, P13, P8, P9) other than the shaded portion. The two-dimensional figure part obtained by this, and the two-dimensional figure part obtained by drawing a line segment on the two-dimensional plane so as to pass through the vertices in the order of P11, P15, P18, P12, P11, and P16, A two-dimensional graphic part obtained by drawing a line segment on a two-dimensional plane so as to pass through the vertices in the order of P20, P23, P17, P16, and P21, P2, P3, P4, P5, P6, P7, The two-dimensional graphic portion obtained by drawing a line segment on the two-dimensional plane so as to pass through the vertices in the order of P22 and P21) is extended to the lowest layer.

In this way, even when a two-dimensional figure is expanded by a different length for each part, the three-dimensional figure obtained by such expansion can be grasped as an aggregate of a plurality of faces, and so far. Data showing the shape and arrangement of the three-dimensional figure can be given by the same principle as the described principle. Specifically, the three-dimensional vertex coordinates (x, y, z) of the vertices P1 to P24 are determined as follows from the two-dimensional graphic data given in advance and the thickness value of each layer given by the characterization data. Suppose.
P1: (1.2, 0.3, 3)
P2: (1.2, 1.7, 3)
P3: (1, 1.7, 3)
P4: (1, 2, 3)
P5: (1.7, 2, 3)
P6: (1.7, 1.7, 3)
P7: (1.5, 1.7, 3)
P8: (1.5, 0.3, 3)
P9: (1.2, 0.3, 3)
P10: (1.2, 0.5, 3)
P11: (1.2, 0.7, 3)
P12: (1.5, 0.7, 3)
P13: (1.5, 0.5, 3)
P14: (1.2, 0.5, 3)
P15: (1.2, 0.9, 3)
P16: (1.2, 1.1, 3)
P17: (1.5, 1.1, 3)
P18: (1.5, 0.9, 3)
P19: (1.2, 0.9, 3)
P20: (1.2, 1.3, 3)
P21: (1.2, 1.5, 3)
P22: (1.5, 1.5, 3)
P23: (1.5, 1.3, 3)
P24: (1.2, 1.3, 3)

Assuming that the thickness of the contact layer to which the object 310 belongs (data value of the "insulating layer" item of "thickness setting" in the tables of FIGS. 3 and 8) is 0.2, the two-dimensional coordinates (x, y) It is assumed that the area in the layer one layer below the range corresponds to the three-dimensional figure of the object belonging to the layer one layer below the contact layer to which the object 310 belongs. In this case, since the shaded portion of the two-dimensional figure of the object 310 shown in FIG. 26 is extended only to the upper surface of the layer one layer below, that is, 0.2 (μm), the lower surface portion corresponding to each vertex of the shaded portion. An ordered set of vertex coordinates of is determined as follows.
(First part)
P10': (1.2, 0.5, 3.2)
P11': (1.2, 0.7, 3.2)
P12': (1.5, 0.7, 3.2)
P13': (1.5, 0.5, 3.2)
P14': (1.2, 0.5, 3.2)

(Second part)
P15': (1.2, 0.9, 3.2)
P16': (1.2, 1.1, 3.2)
P17': (1.5, 1.1, 3.2)
P18': (1.5, 0.9, 3.2)
P19': (1.2, 0.9, 3.2)

(Third part)
P20': (1.2, 1.3, 3.2)
P21': (1.2, 1.5, 3.2)
P22': (1.5, 1.5, 3.2)
P23': (1.5, 1.3, 3.2)
P24': (1.2, 1.3, 3.2)

On the other hand, in the two-dimensional figure of the object 310 shown in FIG. 26, the portion other than the shaded portion is extended to the upper surface of the lowest layer. The data value of the "insulating layer" item is 0.2 (μm), and the total value of the "thickness" of the layers between the contact layer and the lowest layer is 0.3 (μm), and the "thickness". If the data value of the "Oxide film" item in "Settings" is "0 (μm)", the part other than the shaded area is extended to the upper surface of the lowest layer, that is, by 0.5 (μm). , The ordered set of the vertex coordinates of the lower surface portion corresponding to each vertex of the portion other than the shaded portion is determined as follows.
(First part)
P1'': (1.2, 0.3, 3.5)
P10'': (1.2, 0.5, 3.5)
P13'': (1.5, 0.5, 3.5)
P8'': (1.5, 0.3, 3.5)
P9'': (1.2, 0.3, 3.5)

(Second part)
P11'': (1.2, 0.7, 3.5)
P15'': (1.2, 0.9, 3.5)
P18'': (1.5, 0.9, 3.5)
P12'': (1.5, 0.7, 3.5)
P11'': (1.2, 0.7, 3.5)

(Third part)
P16'': (1.2, 1.1, 3.5)
P20'': (1.2, 1.3, 3.5)
P23'': (1.5, 1.3, 3.5)
P17'': (1.5, 1.1, 3.5)
P16'': (1.2, 1.1, 3.5)

(4th part)
P21'': (1.2, 1.5, 3.5)
P2'': (1.2, 1.7, 3.5)
P3'': (1, 1.7, 3.5)
P4'': (1, 2, 3.5)
P5'': (1.7, 2, 3.5)
P6'': (1.7, 1.7, 3.5)
P7'': (1.5, 1.7, 3.5)
P22'': (1.5, 1.5, 3.5)
P21'': (1.2, 1.5, 3.5)

By using these vertex coordinates, each surface constituting the three-dimensional figure of the object 310 can be represented as an ordered set of three-dimensional vertex coordinates. Specifically, there are seven lower surface portions of the three-dimensional figure, but the three lower surface portions corresponding to the shaded portions are P10', P11', P12', P13', and P14'(first portion). , P15', P16', P17', P18', P19'(second part) and P20', P21', P22', P23', P24' (third part), shaded part The four lower surface portions corresponding to the portions other than the above are also P1'', P10'', P13'', P8'', P9'' (first portion) and P11'', P15'', P18''. , P12'', P11'' (second part), P16'', P20'', P23'', P17'', P16'' (third part), P21'', P2'' , P3'', P4'', P5'', P6'', P7'', P22'', P21'' (fourth part). Regarding the side surfaces, for example, the side surfaces that can be seen when viewed from the arrow direction (from the right) in FIG. 26 are a set of ordered vertex coordinates P5, P5 ″, P6 ″, P6, P5 (first part). And P8, P7, P7'', P22'', P22', P23', P23'', P17'', P17', P18', P18'', P12'', P12', P13', P13' It is divided into', P8'', and P8 (second part), and the side surface is expressed as two sets of vertex coordinates ordered respectively. Other faces are similarly represented using an ordered set of vertex coordinates. Even in the case of a "via" in which the object 310 is not extended to the lowest layer, a three-dimensional figure can be represented by data by the same principle.

As described above, even if it is a three-dimensional figure having a complicated shape, each surface can still be represented by an ordered set of vertex coordinates, and therefore, a three-dimensional figure as a plurality of sets of ordered vertex coordinates. Data can be generated, and therefore a 3D LSI layout pattern containing such an object can be generated and displayed on the same principle.

3-3. Other Additional Functions Various additional functions can be realized by using the three-dimensional LSI layout pattern displayed according to the present embodiment. FIG. 27 is a screen image diagram when measuring a distance in a three-dimensional space using a three-dimensional LSI layout pattern. When the user clicks an arbitrary point on the three-dimensional LSI layout pattern 300 with a mouse or the like while the three-dimensional LSI layout pattern is displayed on the display device 5, the CPU receives data for identifying the clicked point. Entered. The CPU executes various programs included in the 3D graphic engine (assumed to be included in the various programs 13) to generate three-dimensional graphic data included in the three-dimensional LSI layout pattern (generated in step S1505 in the flowchart of FIG. 15). The three-dimensional coordinates of the clicked point in the three-dimensional layout pattern are specified by using (assuming that the data is recorded in the recording device 3), and the three-dimensional coordinates are displayed on the display device 5. (See points A and B in FIG. 27). Further, when an arbitrary two points are clicked in the three-dimensional LSI layout pattern and then the software button (not shown) for instructing the distance measurement is clicked with the mouse, the data for identifying the clicked two points is input to the CPU. About two points As described above, by specifying the three-dimensional coordinates in the three-dimensional LSI layout pattern and executing various programs included in the 3D graphic engine, the distance between the two points in the three-dimensional LSI layout pattern can be determined. The relative positions are calculated and displayed on the display device 5 (in FIG. 27, the distances and relative coordinates between points C and D and between points E and F are displayed, respectively).
In addition, as shown in FIGS. 28A and 28B, by displaying the equipotential tracking results superimposed on the three-dimensional LSI layout pattern (various analysis programs such as equipotential tracking are also included in the various programs 13, the CPU / The GPU performs this and displays it on top of the three-dimensional LSI layout), making it even easier to understand the three-dimensional structure and characteristics of the LSI. In addition, changing the transmittance (see Fig. 28C. By changing the transmittance by input from an external device (mouse, keyboard, etc.) and displaying it, it is possible to recognize figures that are originally hidden behind the scenes, improving visibility. (See Fig. 28D. By changing the display / non-display, thickness, and shading of the wire frame, visibility can be improved in the same way as changing the transmittance), etc. By executing various image processing programs (assumed to be included in various programs 13) on the CPU / GPU, the visibility of the three-dimensional LSI layout pattern can be improved.

4. Server / client type system It is not essential that the same device performs processing such as generation of 3D graphic data and display of 3D LSI layout pattern in this embodiment, and the server device generates 3D graphic data. The processing may be distributed to a plurality of devices by a server / client type system or the like in which the client device performs input of area designation data, characterization data, display of a three-dimensional LSI layout pattern, and the like. As an example, FIG. 29 shows a configuration example of a server device in a server / client type system, and FIG. 30 shows a configuration example of a client device.

4-1. Configuration of Server Device and Client Device The three-dimensional LSI layout pattern generation device (server device) 16 shown in FIG. 29 includes a processing device 2-1, a recording device 3-1 and an input / output device 4-1 and a display device 5. -1 and network device 17-1 are provided.

The processing device 2-1 includes a CPU and a GPU 6-1 and a temporary memory 11-1 such as a RAM, as described above in connection with FIG. When the CPU / GPU 6-1 executes the three-dimensional graphic data generation program 12 using the LSI design data 14 recorded in the recording device 3-1 the CPU / GPU 6-1 can be used as the three-dimensional graphic data generation unit 9. Function. In one example, the GPU functions as a three-dimensional graphic data generation unit 9. Further, the CPU / GPU 6-1 executes various programs 13-1 recorded in the recording device 3-1 to cause the input / output device 4-1 and the display device 5-1 in the three-dimensional LSI layout pattern generation device 16. It functions as various control units 10-1 that perform overall operation control such as control.

The three-dimensional graphic data generation unit 9 uses the LSI design data (two-dimensional graphic data) 14 indicating the two-dimensional LSI layout pattern and the characterization data received by the characterization data reception unit 19 to be used as an area designation data reception unit. A three-dimensional figure showing the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the three-dimensional display target area indicated by the area designation data received by 18 along the stacking direction. It is a functional part that generates data.

As described above, the various control units 10-1 are functional units that perform overall operation control in the three-dimensional LSI layout pattern generation device 16, and as one of the functions, the three-dimensional graphic data generation unit 9 has generated them. A drawing program such as a 3D graphic engine is executed using the three-dimensional graphic data, and the three-dimensional LSI layout pattern data transmission unit 20 is controlled in order to transmit the generated image data from the network device 17-1 to the client device 21.

As already described in connection with FIG. 14, the recording device 3-1 is a recording device including a hard disk drive, SSD, etc., and has a shape of a plurality of two-dimensional figures included in an LSI layout pattern including a plurality of layers. The two-dimensional graphic data indicating the arrangement is stored (recorded) in association with each layer to which each of the plurality of two-dimensional figures belongs, and such two-dimensional graphic data and the two-dimensional LSI are stored (recorded) as LSI design data. In addition to storing other data used for displaying the layout pattern, the three-dimensional graphic data generation program 12 and various programs 13-1 already described are recorded. In one example, various programs 13-1 include an LSI design data editing program for adding new data to the LSI design data (two-dimensional graphic data) 14 and changing or deleting existing data, and an LSI. A display program that displays a two-dimensional LSI layout pattern using design data is included, and when the CPU executes the program, the user can arbitrarily edit the two-dimensional LSI layout pattern and display it (display). The display program may be omitted if it is performed only on the client device 21 side).

The input / output device 4-1 includes an input device such as a mouse and a keyboard, and an output device such as a speaker for outputting audio as needed, as described above in connection with FIG. The display device 5-1 is a display device such as a liquid crystal display device and an organic EL display device, as already described in connection with FIG.

The network device 17-1 is a variety of devices including a communication circuit, a communication antenna, and the like for communicating directly with an external client device 21 via a communication line 25 such as the Internet, and is a three-dimensional graphic. Area-designated data receiving unit 18, characterizing data to send and receive various data to and from the client device 21 under the control of the data generation program 12 and the CPU / GPU 6-1 that executes various programs 13-1. It functions as a receiving unit 19 and a three-dimensional LSI layout pattern data transmitting unit 20. The area designation data receiving unit 18 is a functional unit that receives input data for designating a three-dimensional display target area from the client device 21, which has been described with reference to FIG. 11 and the like (the entire area of the two-dimensional LSI layout pattern is three-dimensional). In the case of expanding to and displaying as a three-dimensional LSI layout pattern, it is not necessary to specify the area. Therefore, the area designation data receiving unit 18 may be omitted.) Further, the characterizing data receiving unit 19 is shown in FIGS. It is a functional unit that receives the characterization data as shown in the table 8 from the client device 21 (these received data are recorded in the temporary memory 11-1 for the subsequent processing by the CPU / GPU 6-1). .). The three-dimensional LSI layout pattern data transmission unit 20 is a three-dimensional LSI layout pattern data (image data in one example) generated by the CPU / GPU 6-1 executing the three-dimensional graphic data generation program 12 and various programs 13-1. ) Is a functional unit for transmitting to the client device 21.

The three-dimensional LSI layout pattern display client device 21 shown in FIG. 30 includes a processing device 2-2, a recording device 3-2, an input / output device 4-2, a display device 5-2, and a network device 17-2. To be equipped.

The processing device 2-2 includes a CPU and a GPU 6-2, and a temporary memory 11-2 such as a RAM, as described above in connection with FIG. When the CPU / GPU 6-2 executes the input reception program 26 recorded in the recording device 3-2, the CPU / GPU 6-2 functions as the area designation data input reception unit 7 and the characterizing data input reception unit 8. .. Further, the CPU / GPU 6-2 executes the various programs 13-2 recorded in the recording device 3-2 to execute the input / output device 4-2 and the display device 5-2 in the three-dimensional LSI layout display client device 21. It functions as various control units 10-2 that perform overall operation control such as control.

The area designation data input receiving unit 7 is a functional unit that receives an input for designating a three-dimensional display target area, which has been described with reference to FIG. 11 and the like. In one example, a user uses an input / output device 4-2 such as a mouse. The three-dimensional display target area is specified by moving a bar such as the BB'line of FIG. 11 displayed on the display device 5-2, and the data indicating the designated three-dimensional display target area is used. The input is received by the area designation data input receiving unit 7 (recorded in the temporary memory 11-2 for subsequent processing. This data is three-dimensionally transmitted from the three-dimensional LSI layout pattern display client device 21 by the network device 17-2. It is transmitted to the LSI layout pattern data generation device 16.). As already described, when the entire area of the two-dimensional LSI layout pattern is expanded to three dimensions and displayed as a three-dimensional LSI layout pattern, it is not necessary to specify the area. Therefore, the area designation data input receiving unit 7 is omitted. It doesn't matter.

The characterization data input reception unit 8 is a function unit that receives input of characterization data as shown in the tables of FIGS. 3 and 8, and in one example, the user is an input / output device 4-2 such as a mouse and a keyboard. The contents corresponding to each item are input to the table as shown in FIGS. 3 and 8 displayed in a window on the display device 5-2, and the input of the data indicating the input contents is characterized and the data input is performed. The reception unit 8 receives the data (records it in the temporary memory 11-2 for subsequent processing. This data is stored by the network device 17-2 from the three-dimensional LSI layout pattern display client device 21 to the three-dimensional LSI layout pattern data generation device. It is sent to 16.).

As described above, the various control units 10-2 are functional units that control the overall operation of the three-dimensional LSI layout pattern display client device 16, and one of the functions is to control the display device 5-2 and display the display. The device 5-2 displays the three-dimensional LSI layout pattern indicated by the three-dimensional LSI layout pattern data received from the three-dimensional LSI layout pattern data generation device 16 as an image on the display device 5-2.

The recording device 3-2 is a recording device including a hard disk drive, an SSD, and the like, as described above in connection with FIG. 14, and records the input reception program 26 and various programs 13-2.

The input / output device 4-2 includes an input device such as a mouse and a keyboard for the user to input commands and data to the three-dimensional LSI layout pattern display client device 21, and a speaker for outputting audio as needed. Includes output devices.

The display device 5-2 is a display device such as a liquid crystal display device or an organic EL display device, and functions as a three-dimensional LSI layout pattern display unit 15 under the control of a CPU / GPU 6-2. The three-dimensional LSI layout pattern display unit 15 displays the three-dimensional LSI layout pattern indicated by the three-dimensional LSI layout pattern data received from the three-dimensional LSI layout pattern data generation device 16 as an image on the display device 5-2.

The network device 17-2 is a variety of devices for directly communicating with an external three-dimensional LSI layout pattern data generation device 16 including a communication circuit, a communication antenna, etc., via a communication line 25 such as the Internet in one example. In order to send and receive various data to and from the three-dimensional LSI layout pattern data generation device 16 under the control of the CPU / GPU 6-2, the area designation data transmission unit 22, the characterizing data transmission unit 23, It functions as a three-dimensional LSI layout pattern data receiving unit 24. The area designation data transmission unit 22 is a functional unit that transmits input data for designating a three-dimensional display target area to the three-dimensional LSI layout pattern data generation device 16 described with reference to FIG. 11 and the like (two-dimensional LSI layout). When the entire area of the pattern is expanded to three dimensions and displayed as a three-dimensional LSI layout pattern, it is not necessary to specify the area. Therefore, the area designation data transmission unit 22 may be omitted.) Reference numeral 23 denotes a functional unit that transmits the characterization data as shown in the tables of FIGS. 3 and 8 to the three-dimensional LSI layout pattern data generation device 16. The three-dimensional LSI layout pattern data receiving unit 24 is a functional unit for receiving three-dimensional LSI layout pattern data (image data in one example) from the three-dimensional LSI layout pattern data generation device 16.

4-2. Operation of server / client type system Next, a server / client type including a three-dimensional LSI layout pattern data generation device having the configuration shown in FIG. 29 and a three-dimensional LSI layout pattern display client device having the configuration shown in FIG. An example of the operation of the system will be described with reference to the flowchart of FIG.

First, the various programs 13-1 recorded in the recording device 3-1 of the three-dimensional LSI layout pattern data generation device 16 have the same two-dimensional LSI as the various programs 13 in the three-dimensional LSI layout pattern display device 1 of FIG. A layout pattern data generation program is included, and when the program is executed by the CPU / GPU6-1, data such as an image showing a two-dimensional LSI layout pattern is generated, and various programs 13-1 are executed. The network device 17-1 under the control of the CPU transmits the two-dimensional LSI layout pattern data to the three-dimensional LSI layout pattern display client 21 in the form of image data or the like. The CPU / GPU 6-2 of the three-dimensional LSI layout pattern display client device 21 controls the display device 5-2 by executing various programs 13-2, and the display device 5-2 displays the two-dimensional LSI layout pattern. (Step S3101).

Next, the area designation data input reception unit 7 of the three-dimensional LSI layout pattern display client 21 is designated by the user using an input / output device 4-2 such as a mouse and a keyboard, as in step S1502 in the flowchart of FIG. It accepts the input of the area designation data indicating the area that has been created (step S3102). As described above, the area designation data transmission unit 22 of the three-dimensional LSI layout pattern display client 21 transmits input data (area designation data) for designating the three-dimensional display target area to the three-dimensional LSI layout pattern data generation device 16. , The area designation data receiving unit 18 of the three-dimensional LSI layout pattern data generation device 16 receives this (step S3103).

Next, the three-dimensional figure data generation unit 9 of the three-dimensional LSI layout pattern data generation device 16 records the two-dimensional figure data in the three-dimensional display target area in the same manner as in step S1503 in the flowchart of FIG. It is read from 1 and stored in the temporary memory 11-1 (step S3104).

Next, the characterization data input receiving unit 8 of the three-dimensional LSI layout pattern display client 21 is displayed on the display device 5-2 as in step S1504 in the flowchart of FIG. 15, as shown in FIGS. 3 and 8. The input of the characterization data by the user, which is performed from the input / output device 4-2 by using the window display, is accepted (step S3105). As described above, the characterization data transmission unit 23 of the 3D LSI layout pattern display client 21 transmits the characterization data to the 3D LSI layout pattern data generation device 16, and features the 3D LSI layout pattern data generation device 16. The attached data receiving unit 19 receives this (step S3106).

Next, the three-dimensional graphic data generation unit 9 of the three-dimensional LSI layout pattern data generation device 16 features the two-dimensional graphic data stored in the temporary memory 11-1 as in step S1505 in the flowchart of FIG. Using the data, 3D graphic data showing the shape and arrangement of each 3D graphic generated by expanding each of the 2D graphic included in the 3D display target area along the stacking direction is generated. (Step S3107). As described above, the 3D LSI layout pattern data transmission unit 20 of the 3D LSI layout pattern data generation device 16 transmits the 3D LSI layout pattern data to the 3D LSI layout pattern display client device 21 to transmit the 3D LSI layout pattern data to the 3D LSI layout pattern display client device 21. The three-dimensional LSI layout pattern data receiving unit 24 of the pattern display client device 21 receives this (step S3108).

Next, the various control units 10-2 of the three-dimensional LSI layout pattern display client device 21 control the display device 5-2 as described above, and the display device 5-2 serves as the three-dimensional LSI layout pattern display unit 15. , The three-dimensional LSI layout pattern indicated by the three-dimensional LSI layout pattern data received from the three-dimensional LSI layout pattern data generation device 16 is displayed as an image on the display device 5-2 (step S3109). The three-dimensional LSI layout pattern display client device 21 is in a waiting state in which a display command for the three-dimensional LSI layout pattern can be received at any time in the state where the two-dimensional LSI layout pattern is displayed, and in one example, the area designation data is input. Steps S3102 to S3104 in FIG. 31 are performed with the trigger being performed, and steps S3105 to S3109 are continuously performed with the input of the characterization data as a trigger. With such a configuration, the three-dimensional LSI layout pattern can be displayed in real time according to the user's request. As already described in connection with FIG. 15, it is possible to perform each operation of enlargement / reduction / rotation / movement for the three-dimensional LSI layout pattern via input of a mouse, keyboard, or the like. As a result, the LSI layout pattern can be recognized three-dimensionally from various directions.

The present invention can be used to grasp its three-dimensional structure in LSI design, manufacturing, evaluation, and analysis, but the scope in which the present invention can be used is not limited to these.

1 Three-dimensional LSI layout pattern display device 2,2-1,2-2
Processing equipment 3,3-1,3-2
Recording device 4,4-1,4-2
Input / output devices (keyboard, mouse, etc.)
5,5-1,5-2
Display devices 6,6-1,6-2
CPU / GPU
7 Area designation data input reception unit 8 Characterizing data input reception unit 9 Three-dimensional graphic data generation unit 10, 10-1, 10-2
Various control units 11, 11-1, 11-2
Temporary memory (RAM)
12 Three-dimensional graphic data generation program 13, 13-1, 13-2
Various programs (OS, drawing program, etc.)
14 LSI design data (two-dimensional graphic data)
15 3D LSI layout pattern display unit 16 3D LSI layout pattern data generation device (server device)
17, 17-1, 17-2
Network equipment (communication antenna, communication circuit, etc.)
18 Area designation data reception unit 19 Characterizing data reception unit 20 Three-dimensional LSI layout pattern data transmission unit 21 Three-dimensional LSI layout pattern display client device 22 Area designation data transmission unit 23 Characterizing data transmission unit 24 Three-dimensional LSI layout pattern data reception Part 25 Communication line (Internet, etc.)
26 Input reception program 200 Two-dimensional LSI layout pattern 201 Three-dimensional display target area 202 Three-dimensional display target area change bar 203 Outside the three-dimensional display target area 211,212,213
Object 300 3D LSI layout pattern 301, 302, 303
Cut surface 310-316
Objects 317 Software buttons and other icons on the screen METAL, M1, M2, POLY1, POLY2, POLY3, POLY4, CONT1, CONT2, CONT3, VIA1-1, VIA1-2, VIA1-3, VIA2-1, VIA2-2, VIA2-3, DIFF
object

Claims (6)

Two-dimensional graphic data indicating the shapes and arrangements of a plurality of two-dimensional figures included in an LSI layout pattern including a plurality of layers, and the shapes and arrangements of the plurality of two-dimensional figures are ordered. A two-dimensional graphic data storage unit that stores two-dimensional graphic data indicated by each set of dimensional vertex coordinates in association with each layer to which each of the plurality of two-dimensional graphics belongs.
For a region including at least a part of the two-dimensional figures among the plurality of two-dimensional figures, the characterization data for characterizing each three-dimensional figure to be generated from each of the two-dimensional figures included in the area. A characteristic data input receiving unit that accepts input associated with each layer to which each of the two-dimensional figures included in the area belongs,
Using the two-dimensional graphic data and the characterization data, the shape and arrangement of each three-dimensional graphic generated by expanding each of the two-dimensional graphics included in the region along the stacking direction can be obtained. It is a three-dimensional graphic data generation unit that generates the three-dimensional graphic data shown.
Generated from each of the two-dimensional figures included in the region, which is obtained by expanding each set of two-dimensional vertex coordinates indicating the shape and arrangement of each of the two-dimensional figures included in the region to three dimensions. Each set of ordered 3D top apex coordinates, indicating the shape and placement of the top of each 3D figure to be made,
With each set of ordered 3D bottom vertex coordinates corresponding to each set of 3D top vertex coordinates
A three-dimensional graphic data generation unit that generates the three-dimensional graphic data using
A three-dimensional LSI layout pattern display unit that associates a three-dimensional figure whose shape and arrangement are indicated by the three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displays them in a predetermined stacking order. With
In the 3D graphic data, the shape and arrangement of the 3D graphic is indicated by a set of ordered 3D vertex coordinates given to each of the plurality of faces constituting the 3D graphic.
The characterization data indicates the thickness of some of the three-dimensional figures with respect to the stacking direction of the layers to which they belong, and the three-dimensional figures of another part of the three-dimensional figures. On the other hand, the other part of the three-dimensional figure is extended from the two-dimensional figure that is the source of the self to the lower layer along the stacking direction within the range that does not reach the inside of the three-dimensional figure other than the self. Ri Ah with data indicating that it is a three-dimensional figure to be generated while,
In the other part of the three-dimensional figure, the length that can be extended along the stacking direction from the two-dimensional figure that is the source of the self to the lower layer is within a range that does not reach the inside of the three-dimensional figure other than the self. If at least some of the parts that make up the two-dimensional figure differ, the three-dimensional figure data generator is given an ordered three-dimensional vertex of the lower surface portion that is given separately for each part that makes up the two-dimensional figure. By using a set of coordinates, a three-dimensional figure generated by expanding the plurality of parts constituting the two-dimensional figure in the stacking direction by at least a part different length in the plurality of parts. Generates 3D graphic data showing shape and arrangement,
Three-dimensional LSI layout pattern display device. The three-dimensional LSI layout pattern display device according to claim 1, wherein the lower layer is the lowest layer among the plurality of layers. Each of the plurality of two-dimensional figures is a polygon, and each of the three-dimensional figures is a polyhedron generated by extending each corresponding two-dimensional figure along the stacking direction of the layers. The three-dimensional graphic data generation unit generates the three-dimensional graphic data as data indicating the shape and arrangement of each surface in the polyhedron.
When at least one of the two-dimensional figures whose shape and arrangement are indicated by the two-dimensional figure data is cut by the outer edge of the region, the three-dimensional figure data generation unit stacks the cut two-dimensional figures. Data showing the shape and arrangement of the cut surface when the three-dimensional figure generated by expanding along the direction is cut along the stacking direction at the outer edge is generated, and the cut three-dimensional figure Among them, data showing the shape and arrangement of the three-dimensional graphic portion inside the region is generated.
The three-dimensional LSI layout pattern display device according to claim 1 or 2. A display method executed by a three-dimensional LSI layout pattern display device.
For an area including at least a part of two-dimensional figures included in an LSI layout pattern including a plurality of layers, each three-dimensional figure to be generated from each of the two-dimensional figures included in the area. An input reception process that accepts input associated with each layer of the characteristic data that characterizes the figure, to which each of the two-dimensional figures included in the area belongs.
Two-dimensional graphic data showing the shapes and arrangements of the plurality of two-dimensional figures, and the shapes and arrangements of the plurality of two-dimensional figures are indicated by each set of ordered two-dimensional vertex coordinates. Using the dimensional graphic data and the characterization data, the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the region along the stacking direction are shown. It is a generation process that generates three-dimensional graphic data .
Generated from each of the two-dimensional figures included in the region, which is obtained by expanding each set of two-dimensional vertex coordinates indicating the shape and arrangement of each of the two-dimensional figures included in the region to three dimensions. Each set of ordered 3D top apex coordinates, indicating the shape and placement of the top of each 3D figure to be made,
With each set of ordered 3D bottom vertex coordinates corresponding to each set of 3D top vertex coordinates
A three-dimensional graphic data generation process for generating the three-dimensional graphic data using
A display step of associating a three-dimensional figure whose shape and arrangement are indicated by the three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displaying them in a predetermined stacking order is included.
In the 3D graphic data, the shape and arrangement of the 3D graphic is indicated by a set of ordered 3D vertex coordinates given to each of the plurality of faces constituting the 3D graphic.
The characterization data indicates the thickness of some of the three-dimensional figures with respect to the stacking direction of the layers to which they belong, and the three-dimensional figures of another part of the three-dimensional figures. On the other hand, the other part of the three-dimensional figure is extended from the two-dimensional figure that is the source of the self to the lower layer along the stacking direction within the range that does not reach the inside of the three-dimensional figure other than the self. Ri Ah with data indicating that it is a three-dimensional figure to be generated while,
In the other part of the three-dimensional figure, the length that can be extended along the stacking direction from the two-dimensional figure that is the source of the self to the lower layer is within a range that does not reach the inside of the three-dimensional figure other than the self. If at least some of the parts that make up the two-dimensional figure differ, the three-dimensional figure data generation step is an ordered three-dimensional vertex of the lower surface portion that is given separately for each part that makes up the two-dimensional figure. By using a set of coordinates, a three-dimensional figure generated by expanding the plurality of parts constituting the two-dimensional figure in the stacking direction by at least a part different length in the plurality of parts. Generates 3D graphic data showing shape and arrangement,
Three-dimensional LSI layout pattern display method. On the computer
For an area including at least a part of two-dimensional figures included in an LSI layout pattern including a plurality of layers, each three-dimensional figure to be generated from each of the two-dimensional figures included in the area. An input reception procedure for accepting input associated with each layer to which each of the two-dimensional figures included in the area belongs of the characterization data that characterizes the figure, and
Two-dimensional graphic data showing the shapes and arrangements of the plurality of two-dimensional figures, and the shapes and arrangements of the plurality of two-dimensional figures are indicated by each set of ordered two-dimensional vertex coordinates. Using the dimensional graphic data and the characterization data, the shape and arrangement of each three-dimensional figure generated by expanding each of the two-dimensional figures included in the region along the stacking direction are shown. This is a generation procedure for generating 3D graphic data .
Generated from each of the two-dimensional figures included in the region, which is obtained by expanding each set of two-dimensional vertex coordinates indicating the shape and arrangement of each of the two-dimensional figures included in the region to three dimensions. Each set of ordered 3D top apex coordinates, indicating the shape and placement of the top of each 3D figure to be made,
With each set of ordered 3D bottom vertex coordinates corresponding to each set of 3D top vertex coordinates
The three-dimensional graphic data generation procedure for generating the three-dimensional graphic data using
A program for executing a display procedure of associating a three-dimensional figure whose shape and arrangement are indicated by the three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displaying them in a predetermined stacking order. And
In the 3D graphic data, the shape and arrangement of the 3D graphic is indicated by a set of ordered 3D vertex coordinates given to each of the plurality of faces constituting the 3D graphic.
The characterization data indicates the thickness of some of the three-dimensional figures with respect to the stacking direction of the layers to which they belong, and the three-dimensional figures of another part of the three-dimensional figures. On the other hand, the other part of the three-dimensional figure is extended from the two-dimensional figure that is the source of the self to the lower layer along the stacking direction within the range that does not reach the inside of the three-dimensional figure other than the self. Ri Ah with data indicating that it is a three-dimensional figure to be generated while,
In the other part of the three-dimensional figure, the length that can be extended along the stacking direction from the two-dimensional figure that is the source of the self to the lower layer is within a range that does not reach the inside of the three-dimensional figure other than the self. If at least some of the parts that make up the two-dimensional figure differ, the three-dimensional figure data generation procedure is given separately for each part that makes up the two-dimensional figure, the ordered three-dimensional vertices of the bottom part. By using a set of coordinates, a three-dimensional figure generated by expanding the plurality of parts constituting the two-dimensional figure in the stacking direction by at least a part different length in the plurality of parts. Generates 3D graphic data showing shape and arrangement,
3D LSI layout pattern display program. Two-dimensional graphic data indicating the shapes and arrangements of a plurality of two-dimensional figures included in an LSI layout pattern including a plurality of layers, and the shapes and arrangements of the plurality of two-dimensional figures are ordered. A two-dimensional graphic data storage unit that stores two-dimensional graphic data indicated by each set of dimensional vertex coordinates in association with each layer to which each of the plurality of two-dimensional graphics belongs.
For an area including at least a part of the two-dimensional figures among the plurality of two-dimensional figures, the characterization data that characterizes each three-dimensional figure to be generated from each of the two-dimensional figures included in the area is obtained. A characteristic data receiving unit that receives from the outside in association with each layer to which each of the two-dimensional figures included in the area belongs,
Using the two-dimensional graphic data and the characterization data, the shape and arrangement of each three-dimensional graphic generated by expanding each of the two-dimensional graphics included in the region along the stacking direction can be obtained. It is a three-dimensional graphic data generation unit that generates the three-dimensional graphic data shown.
Generated from each of the two-dimensional figures included in the region, which is obtained by expanding each set of two-dimensional vertex coordinates indicating the shape and arrangement of each of the two-dimensional figures included in the region to three dimensions. Each set of ordered 3D top apex coordinates, indicating the shape and placement of the top of each 3D figure to be made,
With each set of ordered 3D bottom vertex coordinates corresponding to each set of 3D top vertex coordinates
A three-dimensional graphic data generation unit that generates the three-dimensional graphic data using
A three-dimensional LSI layout pattern obtained by associating a three-dimensional figure whose shape and arrangement are indicated by the three-dimensional figure data with each layer to which each of the three-dimensional figures belongs and displaying them in a predetermined stacking order. It is equipped with a 3D LSI layout pattern data transmitter that transmits the data of
In the 3D graphic data, the shape and arrangement of the 3D graphic is indicated by a set of ordered 3D vertex coordinates given to each of the plurality of faces constituting the 3D graphic.
The characterization data indicates the thickness of some of the three-dimensional figures with respect to the stacking direction of the layers to which they belong, and the three-dimensional figures of another part of the three-dimensional figures. On the other hand, the other part of the three-dimensional figure is extended from the two-dimensional figure that is the source of the self to the lower layer along the stacking direction within the range that does not reach the inside of the three-dimensional figure other than the self. Ri Ah with data indicating that it is a three-dimensional figure to be generated while,
In the other part of the three-dimensional figure, the length that can be extended along the stacking direction from the two-dimensional figure that is the source of the self to the lower layer is within a range that does not reach the inside of the three-dimensional figure other than the self. If at least some of the parts that make up the two-dimensional figure differ, the three-dimensional figure data generator is given an ordered three-dimensional vertex of the lower surface portion that is given separately for each part that makes up the two-dimensional figure. By using a set of coordinates, a three-dimensional figure generated by expanding the plurality of parts constituting the two-dimensional figure in the stacking direction by at least a part different length in the plurality of parts. Generates 3D graphic data showing shape and arrangement,
Three-dimensional LSI layout pattern data generator.