JPH03169521A - Molding device for resin sealing - Google Patents

Molding device for resin sealing

Info

Publication number
JPH03169521A
JPH03169521A JP31144989A JP31144989A JPH03169521A JP H03169521 A JPH03169521 A JP H03169521A JP 31144989 A JP31144989 A JP 31144989A JP 31144989 A JP31144989 A JP 31144989A JP H03169521 A JPH03169521 A JP H03169521A
Authority
JP
Japan
Prior art keywords
plunger
resin
tip surface
cull
trouble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31144989A
Other languages
Japanese (ja)
Inventor
Yoshinori Uemoto
植本 良典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP31144989A priority Critical patent/JPH03169521A/en
Publication of JPH03169521A publication Critical patent/JPH03169521A/en
Pending legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

PURPOSE:To constitute the title device so that a cull is removed reliably from a plunger, a foreign matter is not left behind within a mold and trouble is not generated, by a method wherein a tip surface of the plunger coming into contact with resin is made into roughened surface finish having specific surface roughness. CONSTITUTION:A tip surface of a plunger coming into contact with resin is made into roughened surface finish whose surface roughness Hmax falls within a range of 5-15mum. The tip surface 5a of the plunger 5 is made into roughened finish with, for example, discharge processing or a sand blaster and the tip surface 5a possesses appropriate unevenness. Consequently, the air is intruded into a space between thermally-cured resin 4 and the tip surface of the plunger 5 and a cull 13 is removed reliably and easily without being stuck vacuously to the tip surface 5a of the plunger 5, in a molding process. Therefore, though a trouble with the residual cull is generated conventionally at the rate of one time to about thousand times of molding processes, it becomes that the trouble is not generated at all and productivity is improved drastically.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は半導体の樹脂封止などに用いられる樹脂封止用
成形装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a molding device for resin encapsulation used for resin encapsulation of semiconductors.

[従来の技術] 第1図はトランスファモールド成形装置の一例を示す断
面図である。第1図において,予め予備成形された樹脂
が予備加熱されて下金型1のポット2に投入され上金型
3及び下金型1より熱を受けて溶融する。溶融した樹脂
4はプランジャ5によって移送され、ゲート7を経てキ
ャビティ8を充填する。なお、上金型3と下金型1との
間には、リードフレーム王Oが挿入されている。
[Prior Art] FIG. 1 is a sectional view showing an example of a transfer molding apparatus. In FIG. 1, preformed resin is preheated and put into a pot 2 of a lower mold 1, where it receives heat from an upper mold 3 and a lower mold 1 and melts. The molten resin 4 is transferred by the plunger 5 and fills the cavity 8 through the gate 7. Note that a lead frame king O is inserted between the upper mold 3 and the lower mold 1.

樹脂4が硬化するまで上金型3と下金型1とは閉じた状
態で保持され、硬化後に第2図に示すように、下金型1
が下方へ移動される。
The upper mold 3 and the lower mold 1 are held in a closed state until the resin 4 is cured, and after the resin 4 is cured, the lower mold 1 is closed as shown in FIG.
is moved downward.

下金型lが下降した後、第3図に示すように、下金型1
の上面において、プランジャ5の表面には樹脂注入の際
にゲート7に充填されずに残留した樹脂であるカルエ3
が残っている。
After the lower mold 1 is lowered, as shown in FIG.
On the upper surface, the surface of the plunger 5 is filled with resin 3 that remains without being filled into the gate 7 during resin injection.
remains.

第3図の状態から戒形品9を下金型1から取り出すと,
第4図に示すように、リードフレーム10上の対向する
一対の半導体本体1lがゲート7の部分で硬化した樹脂
12を介してカル13に一体的に接続されている。
When the precept-shaped product 9 is taken out from the lower mold 1 in the state shown in Fig. 3,
As shown in FIG. 4, a pair of opposing semiconductor bodies 1l on a lead frame 10 are integrally connected to a cull 13 via a hardened resin 12 at a gate 7 portion.

上記のような成形工程において、戒形品9を下金型1か
ら取り出す時には、プランジャ5の先端表面5aのカル
13がプランジャ5から完全に除去されることが必要で
ある。
In the above-described molding process, when taking out the shaped article 9 from the lower mold 1, it is necessary that the cull 13 on the tip surface 5a of the plunger 5 be completely removed from the plunger 5.

しかし、従来、プランジャ5の先端表面5aを鏡面仕上
げしていた為に、カル13がプランジャ5の先端表面5
aから除去されずに残り、次の半製品の成形工程におい
て,プランジャ5を押し上げ樹脂をプレスしようとする
際に残留カルが異物として作用してトラブルが発生する
ことがあった。
However, since the tip surface 5a of the plunger 5 was conventionally finished with a mirror finish, the cull 13
When the plunger 5 is pushed up and the resin is pressed in the next semi-finished product molding process, the residual cal may act as foreign matter, causing trouble.

ところで、鏡面仕上げしたプランジャ5の離型性が悪く
なる原因は以下のようなものであると考えられる。
By the way, it is thought that the reason why the mold releasability of the mirror-finished plunger 5 deteriorates is as follows.

即ち,第1図において、プランジャ5が押し上げられ樹
脂4がキャビティ8及びゲート7に充填してくると鏡面
仕上げされたプランジャ5の先端表面5aと樹脂4とが
完全に密着する。樹脂4は熱硬化されると3%程体積が
収縮するが、プランジャ5には樹脂4を移送する為の圧
力が連続的に加えられており、プランジャ5の表面5a
も樹脂4の収縮に伴い樹脂4に密着したまま移動する.
したがって、第2図において、上金型3を上方へ移動し
て成形品9を下金型lから取り出そうとする際に、カル
13とプランジャ5の先端表面5aとは完全に密着した
ままである。その為、カル13をプランジャ5から離そ
うとした時にカルl3とプランジャ5の間に外気が侵入
できず、カル13がプランジャ5に真空吸着してしまう
ことがあるのである。
That is, in FIG. 1, when the plunger 5 is pushed up and the resin 4 fills the cavity 8 and the gate 7, the mirror-finished tip surface 5a of the plunger 5 and the resin 4 are brought into complete contact. When the resin 4 is thermally cured, its volume shrinks by about 3%, but pressure is continuously applied to the plunger 5 to transfer the resin 4, and the surface 5a of the plunger 5
also moves while remaining in close contact with the resin 4 as the resin 4 contracts.
Therefore, in FIG. 2, when the upper mold 3 is moved upward to take out the molded product 9 from the lower mold 1, the cull 13 and the tip surface 5a of the plunger 5 remain in complete contact with each other. . Therefore, when trying to separate the cull 13 from the plunger 5, outside air cannot enter between the cull 13 and the plunger 5, and the cull 13 may be vacuum-adsorbed to the plunger 5.

[発明が解決しようとする問題点コ この発明は、上記の従来の問題点を解消しプランジャか
らカルが確実に除去され、金型内に異物等が残らずにト
ラブル等が発生することがない、工程の自動化に適した
樹脂封止用成形装置を提供することを目的とする。
[Problems to be Solved by the Invention] This invention solves the above-mentioned conventional problems, and ensures that the cull is removed from the plunger, so that no foreign matter remains in the mold, and no trouble occurs. The purpose of the present invention is to provide a molding device for resin sealing that is suitable for process automation.

[問題点を解決する為の手段] 上記目的を達成する為に、この発明は、成型金型と、樹
脂を加圧移動させ該成型金型内に注入するプランジャと
を有する樹脂封止用成形装置において、樹脂と接触する
前記プランジャの先端表面を面粗さHmaxが5〜15
μの範囲の粗面仕上げにしたことを特徴とするものであ
る。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a molding for resin sealing that includes a molding die and a plunger for moving resin under pressure and injecting it into the molding die. In the device, the tip surface of the plunger that comes into contact with the resin has a surface roughness Hmax of 5 to 15.
It is characterized by a rough surface finish in the μ range.

[作用] 上記の構或において、プランジャの表面が適度の凹凸を
有するので、カルとプランジャとの間に隙間ができて、
カルとプランジャとが真空吸着してしまうことがない。
[Function] In the above structure, since the surface of the plunger has moderate unevenness, a gap is created between the cull and the plunger,
There is no possibility that the cull and the plunger will be vacuum-adsorbed.

[実施例] 本発明によれば、プランジャ5の先端表面5aがたとえ
ば放電加工、サンドブラスタ等により面粗さHmaxが
6μの粗面仕上げにされ、プランジャ5の先端表面5a
は適度の凹凸を有する.その結果、第工図乃至第4図に
示されるような成形工程において、熱硬化した樹脂4と
プランジャ5の先端表面5aとの間に大気が侵入し、カ
ル13がプランジャ5の先端表面5aに真空吸着するこ
となく、カル13が確実にかつ容易に除去される。
[Example] According to the present invention, the tip surface 5a of the plunger 5 is roughened with a surface roughness Hmax of 6μ by, for example, electrical discharge machining, sandblaster, etc.
has moderate unevenness. As a result, in the molding process as shown in the engineering drawings to FIG. Cal 13 is reliably and easily removed without vacuum adsorption.

したがって、従来のプランジャを使用した場合には残留
カルによるトラブルが約1000回の成形工程にl回の
割合で発生するのが、本発明のプランジャでは残留カル
がないので,トラブルが全く発生しなくなり生産性が著
しく向上する。
Therefore, when a conventional plunger is used, troubles due to residual cal occur at a rate of approximately 1 out of 1000 molding processes, but with the plunger of the present invention, there is no residual cal, so no trouble occurs at all. Productivity improves significantly.

なお,プランジャ5の先端表面5aの表面粗さH m 
a xを15μ以上にすると、面表面が深い小孔を有し
樹脂がこの小孔に入り込んでしまうので、逆にカル13
とプランジャ5の離型性が悪くなる。
In addition, the surface roughness H m of the tip surface 5a of the plunger 5
If a x is 15 μ or more, the surface has deep pores and the resin will enter these pores, so on the contrary, the cal 13
As a result, the mold releasability of the plunger 5 deteriorates.

また、プランジャ5の先端表面5aの表面粗さHmax
を5μ以下にすると鏡面仕上げとの差が小となり、従来
技術のようにカルエ3とプランジャ5の離型性が悪くな
る。
In addition, the surface roughness Hmax of the tip surface 5a of the plunger 5
If it is less than 5μ, the difference from the mirror finish becomes small, and the mold releasability of the curve 3 and the plunger 5 deteriorates as in the prior art.

[効果コ この発明によれば,プランジャの先端表面を面粗さHm
axが5〜l5μの範囲の粗面仕上げにすることにより
、カルとプランジャの離型性が良くなり金型内へのカル
残留が著しく減少し、異物プレス等のトラブルがなくな
り生産性が著しく向上する。
[Effects] According to this invention, the tip surface of the plunger has a surface roughness of Hm.
By providing a rough surface finish with ax in the range of 5 to 15μ, the mold releasability between the cull and the plunger is improved, the amount of cull remaining in the mold is significantly reduced, and troubles such as foreign matter pressing are eliminated, and productivity is significantly improved. do.

【図面の簡単な説明】 第1図は樹脂が注入される状態を示すトランスファモー
ルド成形装置の断面図、第2図は上金型が上方へ移動さ
れた状態を示す断面図、第3図は第2図の下金型の内面
を示す上面図、第4図は金型から取り出された成形品を
示す上面図である。 エ・・・下金型、 3・・・上金型、 13・・・カル、   5・・・プランジャ、5a・・
・プランジャの先端表面。
[Brief explanation of the drawings] Fig. 1 is a cross-sectional view of the transfer molding device showing the state in which resin is injected, Fig. 2 is a cross-sectional view showing the state in which the upper mold is moved upward, and Fig. 3 is a cross-sectional view showing the state in which the upper mold is moved upward. FIG. 2 is a top view showing the inner surface of the lower mold, and FIG. 4 is a top view showing the molded product taken out from the mold. E...Lower mold, 3...Upper mold, 13...Cull, 5...Plunger, 5a...
・Plunger tip surface.

Claims (1)

【特許請求の範囲】[Claims] (1)成型金型と、樹脂を加圧移動させ該成型金型内に
注入するプランジャとを有する樹脂封止用成形装置にお
いて、樹脂と接触する前記プランジャの先端表面を面粗
さHmaxが5〜15μの範囲の粗面仕上げにしたこと
を特徴とする樹脂封止用成形装置
(1) In a resin sealing molding device having a molding die and a plunger for moving resin under pressure and injecting it into the molding die, the tip surface of the plunger that comes into contact with the resin has a surface roughness Hmax of 5. A molding device for resin sealing characterized by having a rough surface finish in the range of ~15μ.
JP31144989A 1989-11-29 1989-11-29 Molding device for resin sealing Pending JPH03169521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31144989A JPH03169521A (en) 1989-11-29 1989-11-29 Molding device for resin sealing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31144989A JPH03169521A (en) 1989-11-29 1989-11-29 Molding device for resin sealing

Publications (1)

Publication Number Publication Date
JPH03169521A true JPH03169521A (en) 1991-07-23

Family

ID=18017355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31144989A Pending JPH03169521A (en) 1989-11-29 1989-11-29 Molding device for resin sealing

Country Status (1)

Country Link
JP (1) JPH03169521A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479613U (en) * 1990-11-21 1992-07-10

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55123441A (en) * 1979-03-15 1980-09-22 Hitachi Ltd Metal mold for molding resin sealing insert
JPS5993315A (en) * 1982-11-19 1984-05-29 Hitachi Ltd Mold

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55123441A (en) * 1979-03-15 1980-09-22 Hitachi Ltd Metal mold for molding resin sealing insert
JPS5993315A (en) * 1982-11-19 1984-05-29 Hitachi Ltd Mold

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479613U (en) * 1990-11-21 1992-07-10

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