JPH03165098A - Cooling system - Google Patents

Abstract

PURPOSE:To control the rate of flow to respective cooling parts so that its flow rate is kept uniform and improve cooling efficiency by detecting each flow velocity in respective branch parts and regulating fluid resistance in respective branch points by detection signals in such a way as to allow a controlling fluid resistance regulating means to move in vertical direction. CONSTITUTION:On the occasion of spraying a cooling medium from a nozzle 6, each flow velocity is detected just before its flow teaches respective branch parts by a flow velocity detecting means 13 which is provided in the vicinity of respective branch points p-t and the flow rate is operated just before its flow reaches respective branch party by each flow rate reading means 14. Signals indicating the flow rate that is operated just before its flow reaches respective branch parts are notified into a drive controlling means 15. Judging comprehensively from the flow rate in respective cooling parts by the use of the above drive controlling means 15, vertical motions of each protrusion 17 for the flow rate resistance adjustment means 22 in each branch part are transmitted to a shaft 16 and then, the flow rate resistance is controlled independently according to the motions of each protrusion.

Description

[Detailed Description of the Invention] [Summary] This invention relates to a cooling system, particularly a liquid cooling cooling system associated with conduction cooling and immersion cooling, to eliminate variations in the flow rate of a refrigerant in each cooling section for a plurality of heat generating elements,
The purpose is to provide the same level of flow rate in each cooling section, and at least a cooling plate A having a large refrigerant supply flow path that branches and supplies refrigerant to correspond to a plurality of heat generating elements mounted on a board; In a cooling system comprising a cooling plate B having a large refrigerant return flow path that returns the refrigerant that has absorbed heat from a plurality of heating elements, the flow velocity in front of each point where the refrigerant branches is detected. The cooling plate A is provided with a flow velocity detecting means for detecting the flow velocity and a means for adjusting the fluid resistance at each branch point by vertical movement thereof, and a drive for driving the fluid resistance adjusting means by obtaining a signal from the flow velocity detecting means. Constructed to have a means of control.

[Industrial application field]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to cooling systems, and particularly to liquid-cooled cooling systems associated with conduction cooling and immersion cooling.

In recent years, in liquid cooling systems, there has been a tendency to use a type in which a refrigerant supply path and a return path are provided separately. This has excellent cooling ability and is suitable for cooling the increased heat generation of elements due to high-density packaging.

Hereinafter, in this example, thermal conduction cooling will be described as an example of cooling.

[Conventional technology] The conventional system will be explained below with reference to FIG.

A large refrigerant supply channel 41 through which a refrigerant circulates is formed therein, and a nozzle 36 is provided so that the refrigerant is injected from the large refrigerant supply channel 41 to a plurality of heating elements 32 mounted on the substrate 31. The formed cooling plate A33 and the cooling plate B34 having a large refrigerant return flow path 42 through which the refrigerant whose temperature has become higher than that at the time of supply by transferring the heat generated by the plurality of heat generating elements 32 to the refrigerant return are sealed using a sealing material. Tightening and fixing (not shown) is performed via 40 to form one cooling plate.

On the other hand, since a hole is formed in the cooling plate A33 during processing, the hole is kept confidential by a sealing sensor 37, and furthermore, the upper part of the cooling plate A33 and B34 is
A connecting part 38 is provided to be connected to a refrigerant pipe.

Further, the side surface of the heat generating elements 32 of the cooling plate B34 is fixed to the substrate 31 via a container 39 with bolts or the like, and on the other hand, elastic heat transfer bodies 35 are formed corresponding to the mounting positions of the plurality of heat generating elements 32. Heat generating element 32 of heat transfer body 35
A heat transfer plate 43 is welded to one end of the side by brazing or the like.

Next, to explain the operation of the cooling system configured as described above, the refrigerant injected from the large refrigerant supply flow path 41 through the nozzle 36 collides with the heat exchanger plate 43, and at that time, heat transfer occurs between the heating elements. Removes the heat generated by 32. Then, the refrigerant that has become hotter than when it was supplied is transferred to the large refrigerant supply flow path 41.
The refrigerant is returned through a large refrigerant return flow path 42 which is a different route.

[Problem to be solved by the invention]

However, in conventional cooling systems, if the flow paths are parallel, the total fluid resistance from the cooling plate inlet to the outlet is reduced, but the flow rate of the refrigerant at each branch point that supplies refrigerant to multiple heating elements varies. will occur.

This is largely due to fluid resistance (friction between refrigerants) from the large refrigerant supply flow path to the nozzle and from the element cooling portion to the large refrigerant return flow path.

When the above-mentioned variations occur, variations also occur in the cooling of the heating elements, which has the drawback of hindering the cooling capacity.

Therefore, an object of the present invention is to suppress variations in the flow rate of refrigerant at each branch point to a plurality of heating elements, and to equalize the flow rate at each branch point.

[Means to solve the problem]

This purpose is at least to provide a cooling plate A3 having a large refrigerant supply flow path 11 that branches and supplies refrigerant to a plurality of heat generating elements 2 mounted on a substrate 1, and to remove heat from the plurality of heat generating elements 2. In a cooling system comprising a cooling plate B4 having a large refrigerant return flow path 12 for returning refrigerant, a flow velocity detection means 13 for detecting the flow velocity in front of each point where the refrigerant branches; Means 2 for adjusting fluid resistance at each branch point by vertical movement
2 is achieved by a cooling system characterized by having a drive control means 15 provided on the cooling plate A3 and driving the fluid resistance adjustment means 22 by obtaining a signal from the flow velocity detection means 13. .

[Effect]

When the total flow rate of coolant flowing in the cooling plate is Q, the flow rate flowing in each nozzle 6 (total number: 0, n=5 in this example), that is, in each element cooling portion, is ideally Q/n. The flow rate other than the branch part in the large refrigerant supply flow path is between 1nlet and p: Q between p and q; Q・(n−1)/n between qr: Q・(n−2)/n r−s The interval: Q・2/n s- is necessarily defined as the interval: Q/n.

In the present invention, in order to obtain this predetermined value, each flow velocity at each branch point is detected, and the fluid resistance adjustment means 22 is moved up and down to adjust the fluid resistance at each branch point based on the detection signal. By adjusting the amount, it is possible to eliminate variations in the flow rate of the refrigerant to the cooling section.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to FIGS. 1 and 2.

FIG. 1 is a diagram explaining the present invention in detail, and FIG. 2 is a cross-sectional view taken along line A-A'' in FIG.

In the figure, 1 is a substrate, 2 is a heating element, 3 is a cooling plate A, 4 is a cooling plate B, 5 is an elastic heat transfer body, 6 is a nozzle, 7 is a sealing sensor, and 8 is a connecting part.

9 is a container, 10 is a sealing material, 11 is a large refrigerant supply flow path, 12 is a large refrigerant return flow path, 13 is a flow rate detection means, 14 is a flow rate reader, and 15 is a drive control means.

16 is a shaft, 17 is a protrusion, and 18 is a bellows.

19 is a slider, 20 is a flange, and 21 is a heat exchanger plate.

Reference numeral 22 indicates fluid resistance adjusting means.

In the figures, the same reference numerals indicate the same objects.

As shown in FIG. 1, a large refrigerant supply channel 11 through which a refrigerant circulates is formed inside the large refrigerant supply channel 11, and a plurality of heating elements 2 mounted on a substrate 1 are supplied from the large refrigerant supply channel 11. A cooling plate A3 in which nozzles 6 are formed so that the refrigerant is injected, and a large refrigerant return flow path 2 in which the refrigerant, which has become hotter than when it was supplied, returns through heat transfer between the heat generated by the plurality of heating elements 2 and the refrigerant. A single cooling plate is formed by tightening and fixing the cooling plate B4 (not shown) through the sealing material 10.

In this cooling plate A3, a foil is attached to the bottom of a truncated cone-shaped object, for example, to detect the flow velocity in front of each branch part, and the coolant flows through the large coolant supply channel 11 on this foil. A flow velocity detection means 13 is provided which determines the flow velocity by the fluid force caused by the deflection of the refrigerant when it collides with the refrigerant.

The output light of the flow velocity detection means 13 is provided with a flow rate reader 14 that converts the flow velocity determined by the flow velocity detection means 13 into a flow rate.

The output light of the flow rate reading means 14 is transmitted through a shaft 16 to a fluid resistance adjusting means 22 which will be described later.
It is also connected to a drive control means 15 that drives the substrate 1 in a vertical direction.

As shown in FIG. 2, the fluid resistance adjusting means 22 has a circular projection 17 fixed to the tip of the shaft 16 via a flange 20, and both sides of the projection 17 are made of elastic material. It is covered by a bellows 18.

When actually raising/lowering the protrusion 17, use this bellows 1.
The movement is performed by the expansion and contraction of 8. Furthermore, sliders 19 are formed on both sides of the bellows 18, one end of which contacts the flange 20 to guide the bellows 18, and the other end of which is fixed to the cooling plate A3. The above-mentioned protrusion 17 is set so that its tip slightly enters the inner path of the large refrigerant supply flow path 11 under normal conditions.

The inner diameter of the bellows 18 when it is most contracted is larger than the cross-sectional area of the projection 17.

Further, since a hole is formed in the cooling plate A3 during processing, the hole is kept confidential by the sealing sensor 7, and further, the cooling plate A3. A connecting part 8 connected to a refrigerant pipe is provided on the upper part of B4.

Also, the side of the heating element 2 of the cooling plate B4 is connected to the container 9.
Elastic heat transfer bodies 5 are formed corresponding to the mounting positions of the plurality of heat generating elements 2, and one end of the elastic heat transfer body 5 on the side of the heat generating elements 2 is fixed to the substrate 1 by bolts or the like. The hot plate 21 is welded by brazing or the like.

Next, to explain the operation of the cooling system configured as described above, the refrigerant injected from the large refrigerant supply channel 11 through the nozzle 6 collides with the heat exchanger plate 21, and at that time, the heat transfer occurs between the heating elements. Take away the heat generated by 2. The refrigerant, which has a higher temperature than when it was supplied, is returned through the refrigerant return large flow path 12 which is a different route from the previous refrigerant supply large flow path 11.

In injecting the refrigerant from the nozzle 6 as described above,
The above-mentioned flow velocity detecting means 13 provided near each branch point p- detects the flow velocity before each branch part, and the flow rate reading means 14 calculates the flow rate before each branch part. A signal indicating the calculated flow rate before each branch portion is notified to the drive control means 15, and the drive control means 15
Then, the vertical movement of the protrusion 17 of the flow resistance adjusting means 22 in each branched part is transmitted to the shaft 16 and controlled independently for each protrusion based on a comprehensive judgment based on the flow rate of each cooling part. Specifically, if the flow rate is large, the shaft 16 is driven to contract the bellows 18 and the protrusion 17 is lowered to increase the fluid resistance.On the other hand, if the flow rate is small, the shaft 16 is driven to contract the bellows 18. The protrusion 17 is extended to raise the protrusion 17, and the fluid resistance is controlled to be small, so that the fluid resistance of each branch part is almost the same, and the variation in the flow rate of the refrigerant in each branch part is eliminated.

Therefore, there is no variation in the flow rate, and the heating elements 2 mounted on the substrate 1 can be uniformly cooled.

In this embodiment, the case of conductive liquid cooling has been described, but the present invention is not limited to this, and is also applicable to impingement jet type immersion cooling.

[Effects of the Invention] As described in detail above, in the present invention, the flow rate to each cooling section is controlled uniformly, so that the cooling efficiency is improved.

Furthermore, even if the physical properties of the refrigerant change for some reason (for example, the refrigerant temperature changes from low to high temperature), this system can control the flow rate distribution to each cooling section, improving the maintainability of the system.

[Brief explanation of the drawing]

FIG. 1 is a diagram explaining the present invention in detail, FIG. 2 is a sectional view taken along line A-A'' in FIG. 1, and FIG. 3 is a diagram showing a conventional structure. , 1 -----------... substrate, 2 -----------
------1 heating element. 3...〜・−・−・Cooling plate A. 4---1--...Cooling plate B. 11---------1.---Refrigerant supply large flow path. 12...--...--Large refrigerant return flow path. 13 ----------First-stream speed detection means. 15----------Drive control means. 2 -...--Fluid resistance adjustment means. are shown respectively.

Claims (1)

[Claims] At least a large refrigerant supply channel (
11); and a cooling plate B (4) having a large refrigerant return flow path (12) for returning the refrigerant that has taken the heat from the plurality of heating elements (2). A cooling system comprising: flow velocity detection means (13) for detecting the flow velocity in front of each point where the refrigerant branches; and means (13) for adjusting fluid resistance at each branch point by vertical movement of the flow velocity detection means (13).
22) is provided on the cooling plate A (3), and includes a drive control means (15) that receives a signal from the flow rate detection means (13) and drives the fluid resistance adjustment means (22). Features a cooling system.