JPH03165084A - Magnetic coupling device - Google Patents
Magnetic coupling deviceInfo
- Publication number
- JPH03165084A JPH03165084A JP30534289A JP30534289A JPH03165084A JP H03165084 A JPH03165084 A JP H03165084A JP 30534289 A JP30534289 A JP 30534289A JP 30534289 A JP30534289 A JP 30534289A JP H03165084 A JPH03165084 A JP H03165084A
- Authority
- JP
- Japan
- Prior art keywords
- magnet rotor
- magnetic coupling
- coupling device
- bulkhead
- halogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 title claims abstract description 19
- 238000010168 coupling process Methods 0.000 title claims abstract description 19
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 19
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 14
- 150000002367 halogens Chemical class 0.000 claims abstract description 14
- 238000005192 partition Methods 0.000 claims description 19
- 239000011810 insulating material Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 abstract description 10
- 238000001816 cooling Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- 239000004809 Teflon Substances 0.000 abstract description 4
- 229920006362 Teflon® Polymers 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Abstract
Description
【発明の詳細な説明】
〔産業上の利用公費〕
この発明はレーザ装置姿と用いられる磁気カップリング
装置に関し、特にレーザ媒質としてハロゲンを用いるレ
ーザ装置に適したものである。DETAILED DESCRIPTION OF THE INVENTION [Public Expenses for Industrial Use] The present invention relates to a laser device and a magnetic coupling device used therein, and is particularly suitable for a laser device using halogen as a laser medium.
第３図は、従来、戸般に市販されているレーザ容器壁さ
れている磁気カップリング装置を示す断面構成図である
０図にかいて、（１）はレーザ容器壁、０はレーザ容器
壁（１）の一部であって、磁気カップリング装置のため
に設けられた、非磁性の導電体からなる隔壁、（３）は
内部磁石回転子、（４）は外部磁石回転子、（５）は内
部磁石回転子（３）に接続された回転翼、（６）は外部
磁石回転子（４）に接続された駆動用モータである。FIG. 3 is a cross-sectional configuration diagram showing a magnetic coupling device that is conventionally available on the market and has a laser container wall. In FIG. (1) is a partition wall made of a non-magnetic conductor provided for a magnetic coupling device, (3) is an internal magnet rotor, (4) is an external magnet rotor, (5 ) is a rotor blade connected to an internal magnet rotor (3), and (6) is a drive motor connected to an external magnet rotor (4).
次に動作について説明する。磁気カップリング装置は駆
動用モータ（６）と回転翼（５）のそれぞれに連結され
た内部磁石回転子（３）と外部磁石回転子（４）が、隔
壁（２）を挾むようにして相対向しており、磁石の設引
力によって回転を伝達するものである。Next, the operation will be explained. The magnetic coupling device has an internal magnet rotor (3) and an external magnet rotor (4) connected to a drive motor (6) and a rotor blade (5), respectively, facing each other with a partition wall (2) in between. The rotation is transmitted by the attractive force of the magnet.
隔壁（２）と内部磁石回転子（３）と外部磁石回転子（
４）との間隔はミリ単位で調整されており、隔壁（２）
は磁力を有効に伝えるために電リオーダの厚みに設定さ
れている。The bulkhead (2), the internal magnet rotor (3) and the external magnet rotor (
The distance between the bulkhead (2) and the bulkhead (2) is adjusted in millimeters.
is set to have a thickness on the order of electricity in order to effectively transmit magnetic force.
従来の磁気カップリング装置では、磁力線が導電体隔壁
（２）を貫いており、回転に比例した渦電流が導電体隔
壁（２）に流れる。必要伝達トルク強度が大き（なると
、この渦電流による損失が無視できなくなる。In a conventional magnetic coupling device, magnetic lines of force penetrate the conductor partition wall (2), and eddy currents proportional to rotation flow through the conductor partition wall (2). If the required transmission torque strength becomes large (the loss due to this eddy current cannot be ignored).
また、レーザガスとしてハロゲンを用いる場合には、ニ
ッケルなどが最適の材料であるが、隔壁伐）は非磁性材
料である必要があり、これらの材料は使用するξとがで
きなかった。Further, when using halogen as the laser gas, nickel or the like is the most suitable material, but the partition wall must be made of a non-magnetic material, and these materials cannot be used.
従来の磁気カップリング装置は以上のように構成されて
いるので、必要伝達トルク強度に対応する電力の何倍も
のモータ電力を必要とし伝達効率が低（、隔壁が熱膨張
により変形しないように効果的な冷却手段を必要とし構
造が複雑である、またレーザ媒質としてハロゲンを用い
られないという問題点があった。Conventional magnetic coupling devices are configured as described above, so they require motor power many times as much as the power corresponding to the required transmission torque strength, resulting in low transmission efficiency. There are problems in that it requires a cooling means, has a complicated structure, and cannot use halogen as a laser medium.
この発明は上記のような問題点を解消するためになされ
たもので、冷却手段を必要とせず、伝達効率が高（、耐
ハロゲン性に優れた磁気カップリング装置を得ることを
目的とする。This invention was made to solve the above-mentioned problems, and aims to provide a magnetic coupling device that does not require a cooling means, has high transmission efficiency (and has excellent halogen resistance).
この発明の磁気カップリング装置は、外部磁石回転子と
内部磁石回転子との間の隔壁を、内部磁石回転子に対向
する内側は耐ハロゲン性絶縁物質から成−１外部磁石回
転子に対向する外側は機械的強度の高い絶臂物賀から成
る二重構造としたものである。In the magnetic coupling device of the present invention, the partition wall between the external magnet rotor and the internal magnet rotor is made of a halogen-resistant insulating material on the inside facing the internal magnet rotor. The outside has a double structure made of zetsumonoga, which has high mechanical strength.
この発明における磁気カップリング装置は、隔壁を絶縁
物としたため、渦電流の発生による電力損出がなく伝達
効率が高（、冷却手段を必要としない。Since the magnetic coupling device of the present invention uses an insulator as the partition wall, there is no power loss due to the generation of eddy currents, and the transmission efficiency is high (and no cooling means is required).
また、絶縁物隔壁を２重構造とし耐ハロゲン性材料がレ
ーザガスと接するようにしたので、隔壁の腐食やν−ザ
ガスの劣化をもたらすことがない。Further, since the insulating partition wall has a double structure so that the halogen-resistant material comes into contact with the laser gas, corrosion of the partition wall and deterioration of the v-zagas will not occur.
【実施例］
以下、この発明の一実施例を図について説明する。第隼
図紘この考案の一実施例の磁気カップリング装置を示す
断面構成図である０図において、（７）は内部磁石回転
子（３）に対向する内側は耐ハロゲン性絶縁物質から成
外、外部磁石回転子（４）に対向する外側は機械的強度
の高い絶縁物質から成る二重構造絶縁物隔壁であり、他
は従来例と同じ構成である。[Example] An example of the present invention will be described below with reference to the drawings. In Figure 0, which is a cross-sectional configuration diagram showing a magnetic coupling device according to an embodiment of this invention, (7) shows that the inner side facing the internal magnet rotor (3) is made of a halogen-resistant insulating material. The outer side facing the external magnet rotor (4) is a double structure insulating partition made of an insulating material with high mechanical strength, and the other structure is the same as that of the conventional example.
先述のように、磁力をできるだけ有効に伝えるため化は
隔壁をできるだけ薄くし、磁石、即ち内部磁石回転子（
３）と外部磁石回転子（４）間の距離をできるだけ近づ
けた方が望ましい、一方、エキシマレーザなどのように
レーザガス圧力が高い場合には、構造上、機械的強度を
保つようにする必要がある。この実施例で杜、磁気カッ
プリング装置を円筒形とし、耐圧性を増すように工夫し
ている。As mentioned earlier, in order to transmit the magnetic force as effectively as possible, the partition walls are made as thin as possible, and the magnets, that is, the internal magnet rotor (
3) and the external magnet rotor (4) as close as possible. On the other hand, when the laser gas pressure is high, such as with an excimer laser, it is necessary to maintain mechanical strength due to the structure. be. In this embodiment, the magnetic coupling device is made cylindrical to increase pressure resistance.
かつ、円筒形隔壁（７）の外側は、ＦＲＰや機械強度の
高いセラミック（チッ化シリコンなど）を用いその内側
にテフロンコーティング、テフロンの内張、アルミナセ
ラミックの内張など耐ハロゲン性材料を配設しである。In addition, the outside of the cylindrical partition wall (7) is made of FRP or ceramic with high mechanical strength (silicon nitride, etc.), and the inside is coated with halogen-resistant materials such as Teflon coating, Teflon lining, and alumina ceramic lining. It is set up.
第２図は円筒形隔壁に、従来の導電体隔壁（実験例では
ステンレス、５ＵＳ３１６）を用いた場合（＆）と、こ
の考案による絶縁物隔壁を用いた場合６）の伝達効率を
モータ回転数の関数として示した特性図である０図より
明かなようにξの考案の場合、１０％はどの伝達効率が
得られているのに対し、従来方式では７０％はどが渦電
流による損失として失われ、伝達効率は僅かに３０％程
にすぎない。Figure 2 shows the transmission efficiency at motor rotational speed when a conventional conductive partition wall (stainless steel, 5US316 in the experimental example) is used for the cylindrical partition wall (&) and when an insulating partition wall according to this invention is used (6). As is clear from Figure 0, which is a characteristic diagram showing the characteristics as a function of The transmission efficiency is only about 30%.
以上のように、乙の発明によれば、レーザ媒質のガス循
環を行い、レーザ容器内部に配設される回転翼化、上記
容器外部に配設される駆動用モータの回転を伝える外部
磁石１ｇ１転子と内部磁石回転子、及び上記磁石回転千
間に配設され、上記レーザ媒質と外気とを遮断する隔壁
を備えるレーザ装置の磁気カップリング装置において、
上記隔壁を上記内部磁石回転子に対向する内側は耐ハロ
ゲン性絶縁物質から成り、上記外部磁石回転子に対向す
る外侮は機械的強度の高い絶縁物質から成る二重構造と
したので、伝達効率が高く、冷却手段を必要とせずかつ
耐ハロゲン性に優れた磁気カップリング装置が得られる
効果がある。As described above, according to the invention of B, the external magnet 1g1 performs gas circulation of the laser medium, transforms into a rotary blade disposed inside the laser container, and transmits the rotation of the drive motor disposed outside the container. A magnetic coupling device for a laser device comprising a trochanter, an internal magnet rotor, and a partition wall disposed between the magnet rotations and blocking the laser medium from the outside air,
The inner side of the partition facing the internal magnet rotor is made of a halogen-resistant insulating material, and the outer wall facing the external magnet rotor has a double structure made of an insulating material with high mechanical strength, so that the transmission efficiency is improved. This has the effect of providing a magnetic coupling device that does not require a cooling means and has excellent halogen resistance.
第１図はこの発明の一実施例のレーザ装置の磁気カップ
リング装置を示す断面構成図であり、第２図は従来例と
この発明との伝達効率を比較した特性図であり、第３図
は従来例を示す断面構成図である。
図において、（１）はレーザ容器壁、（２）は隔壁、（
３）は内部磁石回転子、（４）は外部磁石回転子、（５
）は回転翼、（６）は駆動モータ、（υは２重構造絶縁
物隔壁である。
なお、図中、同一符号は同一または相当部分を示す。FIG. 1 is a cross-sectional configuration diagram showing a magnetic coupling device of a laser device according to an embodiment of the present invention, FIG. 2 is a characteristic diagram comparing the transmission efficiency of the conventional example and the present invention, and FIG. is a cross-sectional configuration diagram showing a conventional example. In the figure, (1) is the laser container wall, (2) is the partition wall, (
3) is an internal magnet rotor, (4) is an external magnet rotor, and (5) is an external magnet rotor.
) is a rotary blade, (6) is a drive motor, and (υ is a double structure insulating bulkhead.) In the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
れる回転翼に、上記容器外部に配設される駆動用モータ
の回転を伝える外部磁石回転子と内部磁石回転子、及び
上記両磁石回転子間に配設され、上記レーザ媒質と外気
とを遮断する隔壁を備えるレーザ装置の磁気カップリン
グ装置において、上記隔壁を上記内部磁石回転子に対向
する内側は耐ハロゲン性絶縁物質から成り、上記外部磁
石回転子に対向する外側は機械的強度の高い絶縁物質か
ら成る二重構造としたことを特徴とする磁気カップリン
グ装置。an external magnet rotor and an internal magnet rotor that perform gas circulation of the laser medium and transmit the rotation of a drive motor located outside the container to a rotor blade located inside the laser container; and an internal magnet rotor that rotates both of the magnets. In a magnetic coupling device for a laser device, the inner side of the partition wall facing the internal magnet rotor is made of a halogen-resistant insulating material, A magnetic coupling device characterized in that the outer side facing the external magnet rotor has a double structure made of an insulating material with high mechanical strength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305342A JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305342A JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03165084A true JPH03165084A (en) | 1991-07-17 |
| JP2738086B2 JP2738086B2 (en) | 1998-04-08 |
Family
ID=17943959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1305342A Expired - Fee Related JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2738086B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3522103A1 (en) * | 1984-06-21 | 1986-01-09 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo, Okayama | CRYSTALLINE ALPHA-MALTOSE, METHOD FOR THEIR PRODUCTION, USE IN FOOD, FOOD AND METHOD FOR THEIR PRODUCTION |
| JPH0538930U (en) * | 1991-10-30 | 1993-05-25 | 三菱重工業株式会社 | Gas laser oscillator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069363A (en) * | 1983-09-26 | 1985-04-20 | Teikoku Denki Seisakusho:Kk | Barrier wall of magnet coupling |
| JPS63184381A (en) * | 1987-01-27 | 1988-07-29 | Toshiba Corp | Gas laser oscillator |
-
1989
- 1989-11-22 JP JP1305342A patent/JP2738086B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069363A (en) * | 1983-09-26 | 1985-04-20 | Teikoku Denki Seisakusho:Kk | Barrier wall of magnet coupling |
| JPS63184381A (en) * | 1987-01-27 | 1988-07-29 | Toshiba Corp | Gas laser oscillator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3522103A1 (en) * | 1984-06-21 | 1986-01-09 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo, Okayama | CRYSTALLINE ALPHA-MALTOSE, METHOD FOR THEIR PRODUCTION, USE IN FOOD, FOOD AND METHOD FOR THEIR PRODUCTION |
| JPH0538930U (en) * | 1991-10-30 | 1993-05-25 | 三菱重工業株式会社 | Gas laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2738086B2 (en) | 1998-04-08 |
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