JP2738086B2 - Magnetic coupling device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic coupling device used for a laser device, and is particularly suitable for a laser device using halogen as a laser medium.

[Conventional technology]

FIG. 3 is a sectional view showing a magnetic coupling device used in a conventional laser which is generally commercially available. In the drawing, (1) is a wall of the laser vessel, (2) is a part of the wall of the laser vessel (1), and is a partition made of a non-magnetic conductor provided for a magnetic coupling device;
(3) is an internal magnet rotor, (4) is an external magnet rotor,
(5) a rotor connected to the internal magnet rotor (3),
(6) is a driving motor connected to the external magnet rotor (4).

Next, the operation will be described. The magnetic coupling device comprises an internal magnet rotor (3) and an external magnet rotor (4) connected to a driving motor (6) and a rotor (5), respectively.
They face each other across the partition wall (2), and transmit rotation by the attraction of a magnet.

The distance between the partition (2), the internal magnet rotor (3) and the external magnet rotor (4) is adjusted in millimeters, and the partition (2) is set to a thickness of the order of millimeters in order to transmit magnetic force effectively. ing.

In the conventional magnetic coupling device, the lines of magnetic force pass through the conductive partition (2), and an eddy current proportional to the rotation flows through the conductive partition (2). When the required transmission torque intensity increases, the loss due to the eddy current cannot be ignored.

When halogen is used as the laser gas,
Nickel or the like is the optimum material, but the partition wall (2) must be a non-magnetic material, and these materials cannot be used.

[Problems to be solved by the invention]

Since the conventional magnetic coupling device is configured as described above, it requires many times the motor power corresponding to the required transmission torque intensity, has a low transmission efficiency, and has an effective cooling to prevent the partition from being deformed by thermal expansion. There is a problem in that it requires means and the structure is complicated, and halogen cannot be used as a laser medium.

The present invention has been made in order to solve the above problems, does not require a cooling means, high transmission efficiency,
An object of the present invention is to obtain a magnetic coupling device having excellent halogen resistance.

[Means for solving the problem]

In the magnetic coupling device according to the present invention, the partition wall between the external magnet rotor and the internal magnet rotor is formed such that the inside facing the internal magnet rotor is made of a halogen-resistant insulating material, and the outside facing the external magnet rotor is formed of a halogen-resistant insulating material. It has a double structure made of an insulating material having high mechanical strength.

[Action]

In the magnetic coupling device according to the present invention, since the partition is made of an insulating material, there is no power loss due to the generation of eddy current, the transmission efficiency is high, and no cooling means is required.

Further, since the insulating partition has a double structure and the halogen-resistant material is in contact with the laser gas, corrosion of the partition and deterioration of the laser gas do not occur.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a magnetic coupling device according to an embodiment of the present invention. In the drawing, (7) is a double-sided structure made of a halogen-resistant insulating material on the inner side facing the inner magnet rotor (3) and made of an insulating material having high mechanical strength on the outer side facing the outer magnet rotor (4). Structural insulation partition,
The other configuration is the same as that of the conventional example.

As described above, in order to transmit the magnetic force as effectively as possible, it is desirable that the partition wall be as thin as possible and the distance between the magnets, that is, the inner magnet rotor (3) and the outer magnet rotor (4) be as short as possible. On the other hand, when the laser gas pressure is high as in an excimer laser or the like, it is necessary to keep the mechanical strength structurally. In this embodiment, the magnetic coupling device is formed in a cylindrical shape so as to increase the pressure resistance. The outside of the cylindrical partition (7) is made of FRP or ceramics having high mechanical strength (silicon nitride, etc.), and a halogen-resistant material such as Teflon coating, Teflon lining, alumina ceramic lining is placed inside. It is set up.

Fig. 2 shows the transmission efficiency of the case where a conventional conductive partition (stainless steel, SUS316 in the experimental example) is used for the cylindrical partition (a) and the case where the insulating partition according to the present invention is used (b). FIG. 4 is a characteristic diagram shown as a function of a number. As is clear from the figure, in the case of this invention, about 90% of the transmission efficiency is obtained, whereas in the conventional method, about 70% is lost as the loss due to the eddy current, and the transmission efficiency is only about 30%. Only.

〔The invention's effect〕

As described above, according to the present invention, the external magnet rotor that circulates the gas of the laser medium and transmits the rotation of the driving motor disposed outside the container to the rotating wing disposed inside the laser container. And an internal magnet rotor, and a magnetic coupling device of a laser device having a partition disposed between the magnet rotor and blocking the laser medium and the outside air. The outer side facing the external magnet rotor is made of a halogen-resistant insulating material and has a double structure made of an insulating material with high mechanical strength, so it has high transmission efficiency, does not require cooling means, and has a halogen-resistant property. There is an effect that an excellent magnetic coupling device can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a magnetic coupling device of a laser device according to an embodiment of the present invention, FIG. 2 is a characteristic diagram comparing the transmission efficiency of a conventional example and the present invention, and FIG. It is sectional drawing which shows a prior art example. In the figure, (1) is a laser vessel wall, (2) is a partition,
(3) is an internal magnet rotor, (4) is an external magnet rotor,
(5) is a rotary blade, (6) is a drive motor, and (7) is a double-structure insulating partition. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (1)

(57) [Claims] An external magnet rotor and an internal magnet rotor that circulate gas of a laser medium and transmit rotation of a driving motor disposed outside the container to rotating blades disposed inside the laser container. And a magnetic coupling device of a laser device, which is provided between the two magnet rotors and has a partition for blocking the laser medium and the outside air, wherein the inside of the partition facing the internal magnet rotor has a halogen-resistant insulating material. A magnetic coupling device having an outer surface facing the external magnet rotor and having a double structure made of an insulating material having high mechanical strength.