JPH0316280Y2 - - Google Patents
Info
- Publication number
- JPH0316280Y2 JPH0316280Y2 JP2009581U JP2009581U JPH0316280Y2 JP H0316280 Y2 JPH0316280 Y2 JP H0316280Y2 JP 2009581 U JP2009581 U JP 2009581U JP 2009581 U JP2009581 U JP 2009581U JP H0316280 Y2 JPH0316280 Y2 JP H0316280Y2
- Authority
- JP
- Japan
- Prior art keywords
- basket
- wafer
- end wall
- wafers
- horizontal bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009581U JPH0316280Y2 (US07709020-20100504-C00068.png) | 1981-02-17 | 1981-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009581U JPH0316280Y2 (US07709020-20100504-C00068.png) | 1981-02-17 | 1981-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57134842U JPS57134842U (US07709020-20100504-C00068.png) | 1982-08-23 |
JPH0316280Y2 true JPH0316280Y2 (US07709020-20100504-C00068.png) | 1991-04-08 |
Family
ID=29818018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009581U Expired JPH0316280Y2 (US07709020-20100504-C00068.png) | 1981-02-17 | 1981-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0316280Y2 (US07709020-20100504-C00068.png) |
-
1981
- 1981-02-17 JP JP2009581U patent/JPH0316280Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57134842U (US07709020-20100504-C00068.png) | 1982-08-23 |
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