JPH0316280Y2 - - Google Patents

Info

Publication number

JPH0316280Y2

JPH0316280Y2 JP2009581U JP2009581U JPH0316280Y2 JP H0316280 Y2 JPH0316280 Y2 JP H0316280Y2 JP 2009581 U JP2009581 U JP 2009581U JP 2009581 U JP2009581 U JP 2009581U JP H0316280 Y2 JPH0316280 Y2 JP H0316280Y2

Authority

JP

Japan

Prior art keywords

basket

wafer

end wall

wafers

horizontal bar

Prior art date

1981-02-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 18
• 239000004065 semiconductor Substances 0.000 claims description 5
• 238000001035 drying Methods 0.000 description 4
• 239000007788 liquid Substances 0.000 description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
• 230000007246 mechanism Effects 0.000 description 2
• 230000001105 regulatory effect Effects 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 2
• 239000010703 silicon Substances 0.000 description 2
• 238000004381 surface treatment Methods 0.000 description 2
• 238000004140 cleaning Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 238000005192 partition Methods 0.000 description 1