JPH03162660A - Potentiometric sensor - Google Patents
Potentiometric sensorInfo
- Publication number
- JPH03162660A JPH03162660A JP1302888A JP30288889A JPH03162660A JP H03162660 A JPH03162660 A JP H03162660A JP 1302888 A JP1302888 A JP 1302888A JP 30288889 A JP30288889 A JP 30288889A JP H03162660 A JPH03162660 A JP H03162660A
- Authority
- JP
- Japan
- Prior art keywords
- titanium nitride
- film
- nitride film
- sensor
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims abstract description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- 239000010936 titanium Substances 0.000 claims abstract description 5
- 229920000620 organic polymer Polymers 0.000 claims description 11
- 108010093096 Immobilized Enzymes Proteins 0.000 claims description 6
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 3
- 229920006254 polymer film Polymers 0.000 abstract 2
- 238000005549 size reduction Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 16
- 239000007788 liquid Substances 0.000 description 10
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 8
- 239000004202 carbamide Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 239000002555 ionophore Substances 0.000 description 5
- 230000000236 ionophoric effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 108090000790 Enzymes Proteins 0.000 description 4
- 102000004190 Enzymes Human genes 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 108010046334 Urease Proteins 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 1
- 235000010469 Glycine max Nutrition 0.000 description 1
- 244000068988 Glycine max Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
- 229940081735 acetylcellulose Drugs 0.000 description 1
- -1 antibodies Proteins 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 150000003983 crown ethers Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000008141 laxative Substances 0.000 description 1
- 230000002475 laxative effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 238000004313 potentiometry Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000005028 tinplate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/4035—Combination of a single ion-sensing electrode and a single reference electrode
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業Ｅの利用分野
本発明は、各神イオン濃度や生体機能性物質（酵素、抗
体、レセプタ等）？！４度を電拉変化として検出するポ
テンショメトリックセンサに関する。[Detailed Description of the Invention] (a) Field of Application of Industry E The present invention is applicable to various ion concentrations and biologically functional substances (enzymes, antibodies, receptors, etc.). ! The present invention relates to a potentiometric sensor that detects 4 degrees as an electric power change.
（ロ）従来の技術
従来のポテンショメトリックセンサとしては、各種のイ
オンセンサが知られている。これらイオンセンサには、
ガラス選択ｎｉＪを利用した電位検出電極とガラス製の
比較電極とを組み合わせたものがよく用いられている。(B) Prior Art Various ion sensors are known as conventional potentiometric sensors. These ion sensors include
A combination of a potential detection electrode using glass selection niJ and a comparison electrode made of glass is often used.
また、最近では、電界効果トランジスタ（ＦＥＴ）のゲ
ートにイオン感受性膜を設け、このゲートを感応部とし
て利用するＴ Ｓ Ｆ ＥＴ （ｉｏｎ ｓｅｌｅｃｔ
ｉｖｅ ＦＥＴ ）が検討されている。In addition, recently, TSFET (ion select
ive FET) are being considered.
（ハ）発明が解決しようとする課題
上記従来のガラス製ポテンショメトリックセンサは、構
造的にも材質的にも小型化が困難であり、高価である。(c) Problems to be Solved by the Invention The conventional glass potentiometric sensor described above is difficult to miniaturize in terms of structure and material, and is expensive.
また、破損しやすく取り扱いに注意が必要で、内部液や
液絡部を有しているため保守、管理の手間もかかる。In addition, they are easily damaged and must be handled with care, and because they have internal liquid and liquid junctions, maintenance and management are time-consuming.
一方、ＩＳＦＥＴは小型化容易で、破田しにくく、保守
、管理も不要であるものの、構造及び製造工程が復雑で
、高価な製造設備が必要であり、量産しない限り安価に
ならない。また、特性のばらつきが大きく、駆動同路も
定重圧・宗電漆のものを必要とし、ガラス製のものより
複雑、高価なものとなってしまう。さらに、ＩＳＦＥＴ
は素子自体は小さいが、必ずリードを必要とするので大
きくなり、価格も上がる。On the other hand, although ISFETs are easy to miniaturize, are difficult to break, and require no maintenance or management, they have a complicated structure and manufacturing process, require expensive manufacturing equipment, and cannot be cheap unless they are mass-produced. In addition, the characteristics vary widely, and the driving circuit requires constant pressure and Soden lacquer, making it more complicated and expensive than a glass one. Furthermore, ISFET
Although the element itself is small, it always requires leads, which increases the size and price.
本発明は上記に鑑みなされたもので、小型、低価格、取
り扱いが容易で、特性に優れたポテンショメトリックセ
ンサの提｛Ｊｊを目的としている。The present invention was made in view of the above, and aims to provide a potentiometric sensor {Jj that is small in size, low in price, easy to handle, and has excellent characteristics.
（二）課題を解決するための手段及び作用上記課題を解
決するため、第１請求Ｉｎのポテンショメトリックセン
サは、電極支持ス（材−１二に、箇１及び第２の窒化チ
タン膜を形成し、この第１の窒化チタン膜を電拉検出電
極とするとともに、前記第２の窒化チタン膜は有機高分
子膜で被謂し、比較電極とするものである。(2) Means and operation for solving the problem In order to solve the above problem, the potentiometric sensor of the first claim In has a structure in which the first and second titanium nitride films are formed on the electrode support (material 1). The first titanium nitride film is used as an electrolysis detection electrode, and the second titanium nitride film is an organic polymer film and is used as a comparison electrode.
この第１ ｇｆＩ求項ポテンショメトリソクセンサは、
窒化チタンの水素イオン（Ｈ゛）感応性を利用して、被
検液中のＨ″濃度を検出するが、簡単な構造であるため
、特性のばｈつきが少なく、内部液も有さないため保守
管理も不要である。また、製造も容易で低価格化が可能
である。This first gfI potentiometry sensor is
The hydrogen ion (H゛) sensitivity of titanium nitride is used to detect the H'' concentration in the sample liquid, but because it has a simple structure, there is little variation in characteristics and there is no internal liquid. Therefore, maintenance management is not required.It is also easy to manufacture and can be manufactured at low cost.
一方、窒化チタンは４体であり、その抵抗値も俄いので
、簡単な電拉斧測定同路が適用できる。On the other hand, since titanium nitride has four bodies and its resistance value is low, a simple electric ax measurement method can be applied.
また、窒化チタンは機転（的，７Ｑｉ ｆｆを有してい
るから、直接コネクタに接続できて、リードが不要とな
り、その簡単な構造とあいまって、センナの小Ｊｕｌ化
を図ることができる。Furthermore, since titanium nitride has a 7Qi ff, it can be directly connected to a connector, eliminating the need for leads. Combined with its simple structure, it is possible to reduce the size of the senna.
第２請求項、第３請求項のポテンショメトリックセンサ
は、第１の窒化チタン膜を、それぞれイオン選択■タ、
固定化酵素膜で被覆したもので、被栓液中の特定イオン
濃度、醇素の火質となる物質の濃度を検出する。それ以
外の点については、第ｌ請求項の場合と同様である。In the potentiometric sensors of the second and third claims, the first titanium nitride film is an ion selector, an ion selector, an ion selector,
It is coated with an immobilized enzyme membrane and detects the concentration of specific ions in the plugged liquid and the concentration of substances that cause flammability of the soybean. The other points are the same as the case of the first claim.
（汀））実施例
く実施例１〉
この発明の第１の実施例を第１図及び第２図に基づいて
以下に説明する。(Embodiment 1) A first embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
この実施例は、本発明を水素イオン濃度すなわちｐＨ測
定に適用したものであり、第１図（ａ）は、実施例ポテ
ンショメトリックセンサ（以下単にセンサという）１の
平面図、第１図（ｂ）は、同センサｌの断面図である。In this example, the present invention is applied to the measurement of hydrogen ion concentration, that is, pH. FIG. ) is a sectional view of the same sensor l.
２は、絶縁性基板（電極支持基材）であり、この実施例
では、耐水性、窒化チタン膜の接着性、経済性などを考
虜してセラミック基板を用いた。2 is an insulating substrate (electrode support base material), and in this example, a ceramic substrate was used in consideration of water resistance, adhesion of the titanium nitride film, economical efficiency, etc.
なお、絶縁性基板には、ポリイミドフィルム等も使用可
能である。Note that a polyimide film or the like can also be used as the insulating substrate.
この絶縁性基板２上には、第１の窒化チタン膜３、第２
の窒化チタン膜４が並設されている。この窒化チタン膜
３、４は、絶縁性基板２全面に亘り窒化チタン膜を形成
した後、ダイシングにより個々の窒化チタン膜３、４に
分離したものである。On this insulating substrate 2, a first titanium nitride film 3 and a second titanium nitride film 3 are formed.
titanium nitride films 4 are arranged in parallel. The titanium nitride films 3 and 4 are obtained by forming a titanium nitride film over the entire surface of the insulating substrate 2 and then separating it into individual titanium nitride films 3 and 4 by dicing.
最初に窒化チタン膜を形成するには、ＣＶＤ法、スパッ
タ法などが適用できる。窒化チタン膜の厚さはｌμｍも
あれば十分なので、短時間で製膜することができ、セン
サの量産性を高めることができる。To initially form the titanium nitride film, CVD, sputtering, or the like can be applied. Since the titanium nitride film has a sufficient thickness of 1 μm, it can be formed in a short time, and the mass productivity of the sensor can be improved.
絶縁性基板２上には、絶縁ＩＩＩ！Ｊ５が形成され、穿
化チタン膜３、４は、Ｈ″選沢電極部３ａ、比較電極部
４ａ、接続部３ｂ、４ｂを除いて被覆される。絶縁膜５
の形戊には、例えば感光性ポリイミド＃．４脂を塗布し
、これをホトマスクを用いて感光し、現像・リンスして
不要な部分を除去している（ホトリソグラフィ）。この
ホトリソグラフィにより精度よく絶縁１１５を形成する
ことができる。On the insulating substrate 2, there is an insulation III! J5 is formed, and the perforated titanium films 3 and 4 are covered except for the H'' selective electrode part 3a, the comparison electrode part 4a, and the connecting parts 3b and 4b.Insulating film 5
For example, photosensitive polyimide #. 4 resin is applied, exposed to light using a photomask, developed and rinsed to remove unnecessary parts (photolithography). This photolithography allows the insulation 115 to be formed with high precision.
比較電極部４ａ−ヒには、有機高分子膜６が形成される
。有機高分子膜６には、例えばポリ塩化ビニル等が使用
される。この有機高分子膜６の形或には、塗布法や重合
法で形成できるが、塗布法がより節便である。An organic polymer film 6 is formed on the comparison electrode section 4a-hi. For example, polyvinyl chloride or the like is used for the organic polymer film 6. The organic polymer film 6 can be formed in any form by a coating method or a polymerization method, but the coating method is more convenient.
この実施例センサｌは、第ｌ図（Ｃ）に示すよ、うに、
直接コネクタＣに装着して、測定回路に接続することが
できる。第２図は、このセンサ１で標準ｐ Ｈ溶液を測
定した結果を示しており、センサ出力（ｍＶ）とｐ Ｈ
との間にはよい直線関係が認められ、センサ１が十分に
ρＨセンサとして使用できることがＧＷ ｊ．ｆｆｌで
きる。This embodiment sensor 1 is as shown in FIG. 1(C).
It can be directly attached to connector C and connected to the measurement circuit. Figure 2 shows the results of measuring a standard pH solution with this sensor 1, and shows the sensor output (mV) and pH
A good linear relationship was observed between GW j. I can ffl.
〈実施例２〉
この発明の第２の実施例を第３因及び第４図に７Ｓづい
て以下に説明する。<Embodiment 2> A second embodiment of the present invention will be described below with reference to the third factor and FIG. 4.
この実施例は、本発明をカリウム（Ｋ゛）イオン濃度の
測定に適用したものであり、第３［ｍ（ａ）、第３図（
ｂ）は、それぞれ実施例センサ１ｌの平面園、断面口を
示しており、図中第Ｉ図（ａ）（ｔ））と同し符号を付
したものは、第１の実施例と同様の構成要素を示してい
る。In this example, the present invention is applied to the measurement of potassium (K゛) ion concentration.
b) shows the plane view and cross-sectional opening of the embodiment sensor 1l, respectively, and the same reference numerals as in FIGS. Shows the components.
このセンサｌ１では、イオン選択電梅部３ａ上をイオン
選択１９１７で被覆している。このイオン選択膜１７は
、イオノフォアを含有する有椴高分子１１２である。イ
オノフォアとしてはＫ゛イオンに対する選択感応性があ
ればよく、例えばハリノマイシンやクラウンエーテル等
が使用できる。このイオンノフォアを含有する有機高分
子Ｉ１９！．とじては、ポリ塩化ビニルなどが使用でき
る。この五機高分子１模は、比較電横部４ａを被謂ずる
有機高分子膜６と同じ材質であってもよいし、異なる材
質であってもよい。In this sensor l1, the ion selection panel 3a is covered with an ion selection 1917. This ion selective membrane 17 is an ionophore-containing Aritsu polymer 112. The ionophore only needs to be selectively sensitive to K ions; for example, halinomycin, crown ether, etc. can be used. Organic polymer I19 containing this ionophore! ．． For the closure, polyvinyl chloride or the like can be used. The five-layer polymer 1 model may be made of the same material as the organic polymer film 6 covering the comparative electrode horizontal portion 4a, or may be made of a different material.
第４図は、このセンサ１ｌの出力（ｍＶ）とＫ゜イオン
の濃度の関係を示したものである。１０〜１０−’〔Ｍ
）の濃度で、出力と濃度は良好な直線関係を示しており
、Ｋ＋イオンセンサとして使用できることが確認できる
。FIG. 4 shows the relationship between the output (mV) of this sensor 1l and the concentration of K° ions. 10~10-' [M
), the output and concentration show a good linear relationship, confirming that it can be used as a K+ ion sensor.
なお、イオノフォアを他の神？Ｑに代えることにより、
例えばＣ ａ ”イオン等の讃度を検出することができ
る。また、イオノフォアを含有する有機高分子１漠の代
わりに、適切な配合比のＮＡＳガラス（Ｓｉｎｇ、Ａ
ｅ ｚ Ｏ ３、Ｎａ２０の三元素ガラス）の■９を形
成することで、Ｎａ”やＫ゜の凋度を検出ずることもで
きる。このガラスｎ９の形成には墜布・乾燥法が利用で
きる。By the way, is the ionophore another god? By replacing Q with
For example, it is possible to detect the concentration of Ca'' ions, etc.In addition, instead of an organic polymer containing an ionophore, NAS glass (Sing, A
By forming a 3-element glass (e z O 3, Na 20) (■9), it is also possible to detect the intensities of Na'' and K゜.To form this glass n9, a drying method can be used. .
〈実施例３〉
この発明の第３の実施例を第５図及び第６図に基づいて
以下に説明する。<Embodiment 3> A third embodiment of the present invention will be described below based on FIGS. 5 and 6.
この実施例は、本発明を尿素濃度の測定に適用したもの
であり、第５図（ａ）、第５図（ｂ）は、それぞれ実施
例センサ２１の平面図、断面図を示しており、図中第１
図（ａ）（ｂ）と同じ符号を付したものは、第１の実施
例と同様の構成要素である。In this example, the present invention is applied to the measurement of urea concentration, and FIGS. 5(a) and 5(b) show a plan view and a sectional view of the example sensor 21, respectively. 1st in the diagram
Components with the same reference numerals as those in FIGS. (a) and (b) are the same as those in the first embodiment.
このセンザ２ｌでは、酵素電極部３ａ゛上を、固定化醇
素１１Δ２７で被覆している。固定化酵素＋１ｆｆ２７
は、ウレアーゼをグルタルアルデヒドで架橋固定したり
、高分子膜中に包括固定したものである。固定化酵素膜
２７は、さらに保護膜２８で被覆され、被検液から保護
される。この保護膜２８は、被検液中の基質（この場合
は尿素）をｊｍ遇させることができるもので、例えばア
セチルセルロスやポリウレタンが使用できる。固定化酵
素ＩＩ９２７、保護膜２８は、塗布・乾燥法で形成する
ことができる。In this sensor 2l, the enzyme electrode portion 3a' is coated with the immobilized fluorine 11Δ27. Immobilized enzyme +1ff27
In this method, urease is cross-linked with glutaraldehyde or encased in a polymer membrane. The immobilized enzyme membrane 27 is further covered with a protective membrane 28 to protect it from the test liquid. This protective film 28 can protect the substrate (urea in this case) in the test liquid, and can be made of, for example, acetyl cellulose or polyurethane. The immobilized enzyme II927 and the protective film 28 can be formed by a coating and drying method.
第６図は、センサ２ｌの出力（ｍＶ）と尿素濃度（ｍＭ
）との関係を説明する図である。このセンサ２１では、
固定化酵素１ｆ’Ｊ２７中で以下の反応が住し、その際
に律じる電位変化が、センサ出力として検出される。Figure 6 shows the output (mV) of the sensor 2l and the urea concentration (mM
) is a diagram illustrating the relationship between In this sensor 21,
The following reaction takes place in the immobilized enzyme 1f'J27, and the potential change that governs this reaction is detected as a sensor output.
ウレｙ−ｆ
尿素十Ｈ ｚ Ｏ Ｃ ０ ２ ＋ ２ Ｎ Ｈ
３第６同より、尿素濃度０．５〜５ （ｍＭ）におい
て、尿素濃度と重極出力はよい直線関係を示しており、
このセンサ２１が尿素センサとして十分に使用できるこ
とが確認できる。Urea y-f Urea 10Hz O C 0 2 + 2 N H
3. From No. 6, at a urea concentration of 0.5 to 5 (mM), the urea concentration and the polar output show a good linear relationship,
It can be confirmed that this sensor 21 can be satisfactorily used as a urea sensor.
なお、ここでは酵素としてウレアーゼを用いているが、
反応に伴い電位変化を住しる酵素ならば、他のものも使
用でき、その酊素の基質濃度を測定することが可能であ
る。Although urease is used as the enzyme here,
Other enzymes can be used as long as they exhibit potential changes as a result of the reaction, and the substrate concentration of the laxative can be measured.
（へ）発明の効果
以上説明したように、本発明のポテンショメトリックセ
ンサは、以下に列挙する利点を有している。(F) Effects of the Invention As explained above, the potentiometric sensor of the present invention has the following advantages.
ｉ：構造及び製造工程が簡単で、小型化、低価格化、量
産化が容易である。i: The structure and manufacturing process are simple, and it is easy to downsize, reduce costs, and mass-produce.
ｉｉ：構造が簡単なため、センサ間の特性のばらつきが
少ない。ii: Since the structure is simple, there is little variation in characteristics between sensors.
ｉｉｉ ：任意の形状に製作することができる。iii: Can be manufactured into any shape.
１ｖ：窒化チタンは導体であり、その電気祇抗を気にす
ることなく、簡単で安価な電位差測定回路を適用するこ
とができる。1v: Titanium nitride is a conductor, and a simple and inexpensive potential difference measurement circuit can be applied without worrying about its electrical resistance.
Ｖ：窒化チタンは、さらに機械的強度も有しているので
、リード部を設けなくても、ｉｉ’ｊ接コネクタに挿入
して使用できる。V: Since titanium nitride also has mechanical strength, it can be used by being inserted into the ii'j connector without providing a lead part.
ｖｉ：窒化チタンは化学的に安定な物質であり、被検液
中に溶出することが少なく、長間に亘って安定して使用
することができる、
ｖｉｉ ：内部液や液銘部がないため、センサの保守・
管理の必要がなくなる。vi: Titanium nitride is a chemically stable substance that rarely elutes into the test liquid and can be used stably for a long time. vii: There is no internal liquid or liquid marking part. , sensor maintenance/
There is no need for management.
ｖｉｉｉ ：従来のポテンショメトリソクセンサに比べ
応答速度がはやい。viii: Faster response speed than conventional potentiometric sensors.
第１図（ａ）は、第１の実施例に係るポテンシ９メトリ
ックセンサの外観平面図、第１ｒｌ（ｂ）は、同ポテン
ショメトリックセンサの第１図（ａ）中１ｂ−１ｂ線に
おける断面図、第１図（Ｃ）は、同ボテンショメトリソ
クセンサのコネクタとの接続を説明する斜視図、第２図
は、同ポテンショメトリックセンサの特性を説明する図
、第３図（ａ）は、第２の実施例に係るポテンショメト
リックセンサの外観平面図、第３図（ｂ）は、同ポテン
ショメトリンクセンサの第３図（ａ）中ｍｂ−ｍｂ線に
おける断面閃、第４図は、同ボテンショメトリックセン
ザの特性を説明する同、第５［ＥＺＨａ）は、第３の実
施例に係るポテンショメ１・リソクセンザの外観平面図
、第５図（ｂ）は、同ボテンショメ１・リソクセンサの
第５図（ａ）中ｖｂ−ｖｂ線における断面閃、第６図は
、同ボテンショメトリンクセンサの特Ｐ｝を説明する図
である。
２：絶縁性茫板、
３：第１の穿化チタン膜、
４：第２の穿化チタン膜、６：有機高分子１１Ｑ、ｌ７
：イオン選択■タ、 ２７：固定化酔素ＩＸ。FIG. 1(a) is an external plan view of the potentiometric sensor according to the first embodiment, and 1rl(b) is a cross-sectional view of the potentiometric sensor taken along line 1b-1b in FIG. 1(a). , FIG. 1(C) is a perspective view illustrating the connection of the potentiometric sensor with the connector, FIG. 2 is a diagram illustrating the characteristics of the potentiometric sensor, and FIG. 3(a) is FIG. 3(b) is a plan view of the external appearance of the potentiometric sensor according to the second embodiment, and FIG. 5 [EZHa], which explains the characteristics of the potentiometric sensor, is an external plan view of the potentiometric sensor 1 and the sensor according to the third embodiment, and FIG. A cross-sectional view taken along the line vb-vb in FIG. 5(a) is shown, and FIG. 6 is a diagram illustrating the characteristic P of the potentiometer link sensor. 2: Insulating tin plate, 3: First perforated titanium film, 4: Second perforated titanium film, 6: Organic polymer 11Q, 17
: Ion selection ■ta, 27: Immobilized intoxicant IX.
Claims (3)
を形成し、この第１の窒化チタン膜を電位検出電極とす
るとともに、前記第２の窒化チタン膜は有機高分子膜で
被覆し、比較電極とするポテンショメトリックセンサ。(1) First and second titanium nitride films are formed on an electrode support base material, the first titanium nitride film is used as a potential detection electrode, and the second titanium nitride film is an organic polymer film. A potentiometric sensor coated with and used as a reference electrode.
を形成し、この第１の窒化チタン膜をイオン選択膜で被
覆し、電位検出電極とすると共に、前記第２の窒化チタ
ン膜は有機高分子膜で被覆し、比較電極とするポテンシ
ョメトリックセンサ。(2) Forming first and second titanium nitride films on the electrode supporting base material, covering the first titanium nitride film with an ion-selective film to serve as a potential detection electrode, and A potentiometric sensor in which the titanium film is covered with an organic polymer film and used as a reference electrode.
を形成し、この第１の窒化チタン膜を固定化酵素膜で被
覆し、電位検出電極とすると共に、前記第２の窒化チタ
ン膜は有機高分子膜で被覆し、比較電極とするポテンシ
ョメトリックセンサ。(3) Form first and second titanium nitride films on the electrode support base material, cover the first titanium nitride film with an immobilized enzyme film, and use it as a potential detection electrode. The titanium nitride film is covered with an organic polymer film and is used as a reference electrode in a potentiometric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1302888A JP2855718B2 (en) | 1989-11-21 | 1989-11-21 | Potentiometric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1302888A JP2855718B2 (en) | 1989-11-21 | 1989-11-21 | Potentiometric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03162660A true JPH03162660A (en) | 1991-07-12 |
| JP2855718B2 JP2855718B2 (en) | 1999-02-10 |
Family
ID=17914311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1302888A Expired - Lifetime JP2855718B2 (en) | 1989-11-21 | 1989-11-21 | Potentiometric sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2855718B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005088319A2 (en) * | 2004-03-10 | 2005-09-22 | Roche Diagnostics Gmbh | Test element analysis system with contact surfaces coated with hard material |
| EP3225978A4 (en) * | 2014-11-26 | 2018-05-30 | Universitat Autònoma de Barcelona | Probe for the continuous monitoring in real time of chemical parameters of interest directly in the ground, and system for the continuous monitoring in real time of said chemical parameters of interest |
-
1989
- 1989-11-21 JP JP1302888A patent/JP2855718B2/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005088319A2 (en) * | 2004-03-10 | 2005-09-22 | Roche Diagnostics Gmbh | Test element analysis system with contact surfaces coated with hard material |
| WO2005088319A3 (en) * | 2004-03-10 | 2007-08-16 | Roche Diagnostics Gmbh | Test element analysis system with contact surfaces coated with hard material |
| JP2007535660A (en) * | 2004-03-10 | 2007-12-06 | エフ．ホフマン−ラ ロシュ アーゲー | Test element analysis system having a contact surface coated with a hard material |
| KR100842697B1 (en) * | 2004-03-10 | 2008-07-01 | 에프. 호프만-라 로슈 아게 | Test element analysis system with contact surfaces coated with hard material |
| AU2005220306B2 (en) * | 2004-03-10 | 2009-04-09 | F. Hoffmann-La Roche Ag | Test element analysis system with contact surfaces coated with hard material |
| JP4823211B2 (en) * | 2004-03-10 | 2011-11-24 | エフ．ホフマン−ラ ロシュ アーゲー | Test element analysis system having a contact surface coated with a hard material |
| US8673213B2 (en) | 2004-03-10 | 2014-03-18 | Roche Diagnostics Operations, Inc. | Test element analysis system with contact surfaces coated with hard material |
| US9638655B2 (en) | 2004-03-10 | 2017-05-02 | Roche Diagnostics Operations, Inc. | Test element analysis system with contact surfaces coated with hard material |
| EP3225978A4 (en) * | 2014-11-26 | 2018-05-30 | Universitat Autònoma de Barcelona | Probe for the continuous monitoring in real time of chemical parameters of interest directly in the ground, and system for the continuous monitoring in real time of said chemical parameters of interest |
| US10578579B2 (en) | 2014-11-26 | 2020-03-03 | Universitat Autonoma De Barcelona | Probe for the continuous monitoring in real time of chemical parameters of interest directly in the ground and system for the continuous monitoring in real time of said chemical parameters of interest |
| AU2015352385B2 (en) * | 2014-11-26 | 2021-06-24 | Universitat Autonoma De Barcelona | Probe for the continuous monitoring in real time of chemical parameters of interest directly in the ground, and system for the continuous monitoring in real time of said chemical parameters of interest |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2855718B2 (en) | 1999-02-10 |
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