JPH0316051U - - Google Patents
Info
- Publication number
- JPH0316051U JPH0316051U JP7678689U JP7678689U JPH0316051U JP H0316051 U JPH0316051 U JP H0316051U JP 7678689 U JP7678689 U JP 7678689U JP 7678689 U JP7678689 U JP 7678689U JP H0316051 U JPH0316051 U JP H0316051U
- Authority
- JP
- Japan
- Prior art keywords
- light
- emitting diode
- outer ring
- angle prism
- surface inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7678689U JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7678689U JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0316051U true JPH0316051U (sv) | 1991-02-18 |
JPH0641163Y2 JPH0641163Y2 (ja) | 1994-10-26 |
Family
ID=31618568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7678689U Expired - Fee Related JPH0641163Y2 (ja) | 1989-06-29 | 1989-06-29 | 表面検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0641163Y2 (sv) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004072628A1 (ja) * | 2003-02-12 | 2004-08-26 | Hitachi, Ltd. | 欠陥検査装置及びその方法 |
WO2012033022A1 (ja) * | 2010-09-07 | 2012-03-15 | キリンテクノシステム株式会社 | 表面検査装置 |
JP2017096844A (ja) * | 2015-11-26 | 2017-06-01 | 澁谷工業株式会社 | 物品検査装置 |
-
1989
- 1989-06-29 JP JP7678689U patent/JPH0641163Y2/ja not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004072628A1 (ja) * | 2003-02-12 | 2004-08-26 | Hitachi, Ltd. | 欠陥検査装置及びその方法 |
JP2004264054A (ja) * | 2003-02-12 | 2004-09-24 | Hitachi Ltd | 欠陥検査装置及びその方法 |
WO2012033022A1 (ja) * | 2010-09-07 | 2012-03-15 | キリンテクノシステム株式会社 | 表面検査装置 |
JP2017096844A (ja) * | 2015-11-26 | 2017-06-01 | 澁谷工業株式会社 | 物品検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0641163Y2 (ja) | 1994-10-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |