JPH0315956Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to an air conditioner mainly used in a clean room. and,
A blower passage that sends temperature-controlled air from the temperature controller to the blower outlet is formed to have approximately the same width as the blower outlet, and a plurality of blower fans are arranged in the width direction of the blower passage and interposed therein. The present invention also relates to a temperature equalizing structure for an air conditioner that is capable of obtaining an air volume required to maintain the cleanliness of an air conditioned area and a temperature control capability commensurate with the air volume.

(Prior art) Conventionally, in the above air conditioner, a plurality of blowing fans are arranged in the width direction of the air passage formed to have approximately the same width as the air outlet, thereby controlling the amount of air blown from the air outlet. Although attempts have been made to equalize the temperature in the width direction of the outlet, no particular consideration has been given to equalizing the outlet temperature in the width direction of the outlet. (Unable to show references).

[Problem that the invention attempts to solve]

However, in the case of conventional devices, the temperature unevenness that has already occurred in the width direction of the temperature controller at the time of completion of passage through the temperature controller is carried over to the outlet through the air passage of the same width. Temperature unevenness of approximately ±1°C occurs in the blowout temperature in the width direction of the outlet, and especially since the blowout form is laminar to maintain cleanliness, the temperature unevenness of the blowout temperature may occur within the air-conditioned area. In recent years, for example, in the manufacture of LSIs, it has become necessary to suppress the temperature error within the air-conditioned area to less than ±0.05℃, but some kind of improvement is necessary. It was hot.

The purpose of the present invention is to effectively equalize the temperature of the air outlet to the area to be air-conditioned in the width direction of the air outlet by rational improvement using a plurality of blowing fans arranged in parallel.

[Means for solving problems]

The characteristic configuration of the temperature equalization structure of the air conditioner according to the present invention is that a plurality of blower fans are arranged in the width direction of the blower passage, which is formed to have approximately the same width as the blower outlet that blows out temperature-controlled air in a laminar flow through a filter. In the structure in which the air blower fans are installed, a wind direction adjustment mechanism is provided to change the direction of the outlet of each of the air blowing fans separately in the width direction of the air duct.
The effects are as follows.

[Effect]

In other words, there is a difference in the temperature of the air blown from each blower fan due to temperature unevenness carried over from the temperature controller.

Therefore, based on the temperature measurement results in the width direction of the outlet and the air duct, the fan blowing air directed toward the area where the measured blowing temperature is high is diverted by an appropriate angle toward the area where the measured blowing temperature is low. ,or,
By adjusting the direction of the blowing air of each fan using a wind direction adjustment mechanism so that the fan blowing air directed to a place where the measured blowing temperature is low is deflected by an appropriate angle toward the place where the measured blowing temperature is high. The temperature of the air sent to the air outlet can be equalized in the width direction of the air blowing path (that is, the width direction of the air outlet).

[Effect of idea]

As a result, the temperature of the temperature-controlled air blown out in a laminar flow from the outlet, which is approximately the same width as the airflow path, can be effectively uniformized in the width direction of the outlet. The temperature can now be suppressed to a large extent, and the temperature accuracy required for LSI manufacturing can now be achieved.

In addition, the improvement is as simple as making use of a plurality of blowing fans arranged side by side in the width direction of the blowing path, and making it possible to adjust the blowing direction of each blowing fan individually. because there is,
This is advantageous both in terms of production and cost.

〔Example〕

Next, embodiments of the present invention will be described based on the drawings.

1 to 3 show a clean room having a unit configuration, in which an air conditioner 2 is installed adjacent to a room 1 which is an area to be air-conditioned.

The entire ceiling of the chamber 1 has an air outlet 3 formed of a punched plate, and the ceiling portion serves as an air supply chamber 4 for the air outlet 3.

The punching plate 3a of the ceiling air outlet 3 can be opened and closed in each divided portion, and the high performance filter 5 is housed in the air supply chamber 4 side from the punching plate 3a.

That is, the conditioned air supplied from the air conditioner 2 is blown out from the entire surface of the ceiling in a downward laminar flow through the high-performance filter 5, thereby maintaining a high level of cleanliness in the room.

At the lower ends of two opposing walls of the four peripheral walls 6, exhaust ports 7 are arranged in parallel across the entire width of the wall, and the indoor air taken in from these exhaust ports 7 is sent to the air conditioner 2 via a return air passage 8. The air is returned to the return air chamber 9 at the bottom.

The air conditioner 2 is divided into an air conditioning equipment housing part 2A in the lower half and a blower equipment housing part 2B in the upper half, and the casings of both housing parts 2A and 2B have the same width as the room 1. It is formed so as to be placed along the wall 6 of the chamber 1.

The air conditioning equipment housing part 2A and the blower equipment housing part 2B are connected via a flexible duct 10 that has approximately the same width as their casings, and the ventilation equipment housing part 2B and the air supply chamber 4 are also connected to each other through a flexible duct 10 that has approximately the same width as their casings. They are connected via a wide flexible duct 11.

In other words, a series of air channels F for sending conditioned air adjusted by an air conditioning device to the ceiling outlet 3,
Casings for both housing parts 2A and 2B of the air conditioner 2,
Both flexible ducts 10, 11 and an air supply chamber 4 are formed to have the same width as the ceiling outlet 3.

In the figure, reference numeral 12 indicates a punching plate for regulating air provided at a position covering the ventilation openings of each high-performance filter 5, reference numeral 13 indicates a punching plate for regulating air stretched over the entire interior of the air supply chamber 4, and reference numeral 14 indicates an air supply chamber. 4
This is a punching plate installed at the inlet of the air conditioner to equalize the temperature of the conditioned air.

In the air conditioning device housing portion 2A, cooling coils 15 and reheating coils 16, each of which is an example of a temperature controller, are arranged vertically as air conditioning devices, and each of them is placed in the entire casing of the air conditioning device housing portion 2A. It is internally installed over the width, and those coils 1
A prefilter 17 is installed upstream of the filters 5 and 16.

A plurality of blower fans 18 are housed in the blower equipment housing part 2B, arranged at approximately equal pitches in the width direction, and the inside of the casing is partitioned into upper and lower parts by a partition plate 19, and the lower side is used for intake of air to the blower fans 18. A chamber, and a blower fan 1 is installed on the upper side.
8 Blowout nozzles 20 each connected to each outlet
It serves as an air supply chamber for the interior.

The blowout nozzle 20 has a vertically cylindrical main body and a horizontally oriented nozzle opening in the shape of an elbow with different diameters. By rotating, the direction of the nozzle opening (i.e., the direction of the blower fan 1 that blows into the air supply chamber 4 through the flexible duct 11)
8) The direction of the blown air is adjusted as appropriate in the 4 width direction of the air supply chamber.

In other words, if there is temperature unevenness in the outlet temperature in the outlet width direction (air supply chamber width direction) in the measurement results of the outlet temperature at the ceiling outlet 3,
The blow-off nozzle 20 facing the place where the measured blow-off temperature was high is deflected by an appropriate angle toward the place where the measured blow-off temperature was low, and the blow-off nozzle 20 facing the place where the measured blow-off temperature was low is changed. By adjusting the wind direction of each blow-off nozzle by changing its direction by an appropriate angle toward the point where the measured blow-out temperature was high, the blow-out temperature in the three width directions of the ceiling air outlet is made to be equalized. .

Further, regarding the equalization of the blowing temperature, the temperature equalization is further promoted by the above-mentioned temperature equalizing punching plate 14, and the temperature equalizing punching plate 14 is
They are provided over the entire width of the air supply chamber 4 in a meandering arrangement in the width direction of the air supply chamber 4 and in an arrangement that blocks the air blow path F at the entrance portion from the flexible duct 11 to the air supply chamber 4.

In other words, when conditioned air whose temperature is uneven in the width direction of the air passage F passes, the passing air conditioned air is moved toward one side and the other side in the width direction of the air passage F at each meandering bending pitch of the temperature equalization punching plate 14. The alternating directions diffuse and mix the high-temperature airflow portion and the low-temperature airflow portion of the conditioned air to equalize the temperature inside the supply air chamber 4, thereby reducing the blowout temperature to the ceiling blowing temperature. The temperature is equalized in the width direction of the outlet 3.

As shown in FIG. 4, in the temperature-uniforming punching plate 14, the downstream plate surface is opposite to the plate portion 1
4a, 14b, one plate portion 14
Hole a in hole a and hole b in the other plate portion 14b are alternately arranged at different positions in the direction of the boundary line l between both plate portions 14a and 14b, thereby making it possible for a hole to pass through both holes a and b. The conditioned air is not caused to collide with each other immediately after passing through the hole, but is allowed to travel as far as possible, thereby achieving temperature equalization through diffusion and mixing even more effectively.

[Another example]

Next, other embodiments of the present invention will be listed.

The air outlet 3 can be of any type, such as a type that is installed over the entire surface of the ceiling, a type that is installed in a long width on a part of the ceiling or wall, or a type that has multiple unit air outlets installed in parallel. Also, the specific blowout structure may be one in which the blowout side end face of the filter is exposed as it is as a blowout surface, or a mesh body is used to form the blowout surface, instead of the blowout surface formed by a punched plate. It can target various things such as things.

In the above-mentioned embodiment, the air passage F having approximately the same width as the air outlet 3 was formed with an air conditioner casing, a flexible duct, and an air supply chamber.
The specific configuration of the air duct F can be modified in various ways. For example, if the side wall of the air-conditioned room 1 has a double wall configuration, the restricted space between the inner and outer walls of the double wall configuration and the upper end thereof can be changed. An air passage F having approximately the same width as the air outlet 3 may be formed with a communicating ceiling air supply chamber.

The temperature controller includes a cooling coil that uses cold water, a direct expansion type cooling coil that uses fluorocarbon refrigerant, a heating coil that uses hot water or steam, or an electric heating coil.
Furthermore, various types of temperature controllers, such as washer type temperature controllers, or combinations thereof in multiple stages can be used.

Furthermore, instead of forming one temperature regulator to have approximately the same width as the outlet 3, a plurality of unit temperature regulators of the same type may be arranged in parallel over the entire width of the outlet.

The direction of the blowing air from each blower fan 18 is set to the blower path F.
In order to individually adjust the direction in the width direction, instead of providing the blowing nozzle 20 and configuring the blowing nozzle 20 to change the direction as in the previous embodiment, the blowing fan 18 itself is changed in direction. Alternatively, the specific wind direction adjustment structure can be improved in various ways, such as by providing a wind regulating blade at the outlet of the blower fan 18 and changing the direction of the blowing air by changing the angle of the wind regulating vane. , these are collectively referred to as the wind direction adjustment mechanism.

Furthermore, instead of configuring the direction of the blowing air to be adjusted when the blow-off nozzle 20 or the blower fan 18 is fixedly attached, the direction may be adjusted at any time by remote control or the like. In the control mode as shown in FIG. 5, blowout temperature detection sensors are arranged in parallel in the width direction of the blowout port 3, and the actuator for adjusting the wind direction of each blower fan 18 is controlled by the control device based on the detected temperature of these sensors. Various improvements can be made to the wind direction adjustment mechanism in terms of the adjustment operation structure, such as automatically adjusting the direction of the air blown from each of the blower fans 18 while performing feedback.

The number of blower fans 18 may be any number as long as it is two or more.

In the above embodiment, the meandering punching plate 14 was used for temperature equalization, but the meandering punching plate 14 may be omitted.

Although the present invention is suitable for an air conditioner intended for clean rooms, the air conditioner is not limited to clean rooms.

Incidentally, although reference numerals are written in the claims section of the utility model registration for convenience of comparison with the drawings, the present invention is not limited to the structure of the attached drawings by such entry.

[Brief explanation of drawings]

1 to 4 show embodiments of the present invention,
FIG. 1 is a partially broken perspective view, FIG. 2 is a sectional plan view, FIG. 3 is a sectional side view, and FIG. 4 is a partially enlarged view. FIG. 5 is a control system diagram showing another embodiment of the present invention. 3...Air outlet, 5...Filter, 15, 16
...Temperature controller, 18...Blower fan, 20...Blow direction adjustment mechanism, F...Blower path.

Claims (1)

[Scope of utility model registration request] An air outlet F is provided with an outlet 3 that blows out temperature-controlled air in a laminar flow through a filter 5, and includes temperature controllers 15 and 16, and a blower path F that sends the temperature-controlled air from the temperature regulators 15 and 16 to the outlet 3. are formed to have approximately the same width as the air outlet 3, and a plurality of air blowing fans 18 are provided in the air passage F,
In the air conditioner installed side by side in the width direction of the air passage F, the air conditioner is provided with a wind direction adjustment mechanism 20 for changing the direction of the air blown from each of the air blowing fans 18 separately in the width direction of the air passage F. Temperature equalization structure of the device.