JPH03153357A - Ink-jet printer head - Google Patents

Abstract

PURPOSE:To improve the pressure efficiency and arrange orifices, etc. in high density by a method wherein heating elements are continuously formed in an alley-like pattern on the surface of a substrate, a pressure chamber layer is provided on the substrate and has bulkheads each of which surrounds the heating element, an ink supply passage layer which is connected to the pressure chambers is formed on the pressure chamber layer, and an orifice layer is formed at a position corresponding to the heating elements and the pressure chambers. CONSTITUTION:A substrate 41, a pressure chamber layer 42, a supply passage layer 43 and an orifice plate 44 as an orifice layer are superposed upon another in turn and formed into a laminated body. Orifices 45 are continuously formed in a alley-like pattern on the orifice plate 44, and heating resistance bodies 46 are formed on the surface of the substrate 41 as heat generation elements. And, the orifices and the heating resistance bodies are coaxially located respectively. Rectangular loop bulkheads 47 each of which has the heating resistance body 46 in the center are formed on the pressure chamber layer 42, and pressure chambers 48 each having a symmetric shape with respect to the axis of the orifice 45 are formed by the pressure chamber layer 42. Ink supply passages 49 which open in all the circumferential directions with respect to the axes of the orifices are formed by the supply passage layer 43 which has openings facing the pressure chambers 48.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a bubble jet type ink jet printer head.

Conventional technology In recent years, inkjet printer heads have been developed to instantly heat a portion of the ink filled in the pressure chamber behind the orifice to evaporate it, and then use the pressure created by the volume change of the bubbles formed to push ink droplets out of the orifice. A bubble jet method was developed. Since this method can apply existing technology related to thermal heads, it is expected to be a method that can easily obtain a high-performance inkjet printer head.

As such a bubble jet type inkjet printer head, there are devices disclosed in Japanese Patent Publication No. 63-59911 and Japanese Patent Publication No. 63-59914. As illustrated in FIGS. 12 and 13, this inkjet printer head 1 has a groove cover 2 with continuous long grooves on its lower surface fixed on a flat substrate 3, and orifices 4 formed in an array. A supply chamber cover 5 having long grooves formed in the array direction is attached to the rear of the groove cover 2 to form a supply chamber 6 communicating with each of the orifices 4. Here, a supply pipe 7 connected to an ink tank (not shown) is attached to the supply chamber 6, and a heating resistor 8 is installed at a common electrode 9 for each orifice 4 on the upper surface of the substrate 3.
and an individual electrode IO. Note that these members 8 to 10 are formed to have substantially the same structure as an existing thermal head.

In this inkjet printer head l, with such a configuration, each orifice 4 is filled with ink 11 supplied from the ink tank via the supply pipe 7 via the supply chamber 6. Therefore, the heating resistor 8 is selectively driven to generate heat by the electric power supplied from each electrode 9° 10, so that bubbles are generated in the ink 11 in the predetermined orifice 4, and ink droplets (both not shown) are ejected. be done. Note that the generation and disappearance of such bubbles takes place in a microscopic time of about μs, and as the pressure of the ink 11 rapidly rises and falls within this microscopic time, the ink 11 ejected from the tip of the orifice 4 becomes an ink droplet. and fly.

However, in the above-mentioned inkjet printer head,
Since the orifice 4 has a straight tube shape, the pressure change of the ink 11 acts in the front-rear direction, resulting in low pressure efficiency.

Therefore, as devices that have solved this problem, there are devices disclosed in Japanese Patent Publication No. 63-6356, Japanese Patent Publication No. 63-6357, and Japanese Patent Publication No. 63-6358. For example, in the inkjet printer head 12 disclosed in Japanese Patent Publication No. 63-6356, as illustrated in FIG. 14 and FIG. By attaching it to the heating resistor 8, a passage 14 is formed which is bent at a substantially right angle, and an orifice plate 16 in which an orifice 15 is formed for each passage 14 is attached to the upper surface of the passage member 13. There is.

In this configuration, the inkjet printer head 12 has a shape in which the flow path 14 is bent at a substantially right angle at the heating resistor 8, so that the pressure change of the ink 11 that occurs when bubbles are generated and disappears is suppressed by ink droplets. The pressure efficiency is improved by working well in the direction of injection. Note that in the illustrated drawing, ink droplets are ejected upward.

However, since pressure changes of the ink 11 are still conducted into the supply chamber 6, mutual interference tends to occur between the orifices 4 communicated via the supply chamber 6, and image quality tends to deteriorate.

Therefore, as illustrated in FIG. 16, the above-mentioned publication discloses that by forming a convex portion 17 in the long groove of the groove cover 2 forming the flow path 14, the pressure is transmitted from the heating resistor 8 to the supply chamber 6. RAD 1 to inkjet printers designed to reduce changes
8 is also disclosed.

However, it is actually difficult to form the above-mentioned convex portion 17 in the flow path 14, which is formed in the order of tens of micrometers, and the productivity of the device is extremely reduced, making it impractical. Not.

In the inkjet printer head 12.18 in which the flow path 14 is bent as described above, the direction of pressure change and the direction of flow during continuous ejection are asymmetrical with respect to the axis of the orifice 15. The flight direction of the ejected ink droplets is bent.

As a countermeasure to this problem, it has been proposed to displace the relative position of the heating means with respect to the orifice, but the optimal value of this displacement varies depending on factors such as changes in temperature and changes in ink viscosity due to aging. Therefore, it is difficult to perform accurate fluid analysis, so it is not practical.

Furthermore, the inkjet printer head 19 disclosed in Japanese Patent Application Laid-Open No. 58-8659 and the
In the inkjet printer head 20 disclosed in Japanese Patent No. 7261, as illustrated in FIGS. 17 and 18, an orifice plate 22 is disposed on a partition wall 21 that surrounds a heating resistor 8 formed on a substrate 3. An apparatus is disclosed in which a plurality of flow passages 24 are formed for - orifices 23.

However, these inkjet printer heads 19.2
Similarly to the above-mentioned apparatus, the apparatus 0 also has the problem that the direction in which the ink droplets are ejected is bent.

Problems to be Solved by the Invention As described above, in the conventional bubble jet type inkjet printer heads 12, 18, 19, 20, the direction of action or feel of pressure change with respect to the axis of the orifice 15, 23 is the flow path 14. Due to the arrangement of .degree.24, etc., the ink droplets become asymmetrical and the flying direction of the ink droplets is bent.

An example of a device that solved this problem is the Japanese Unexamined Patent Application Publication No. 48-
There is an inkjet printer head 25 disclosed in Japanese Patent No. 9622. As illustrated in FIG. 19, the above-mentioned publication uses a metal diaphragm 27 to which a piezo element 26 is attached as a mechanism for ejecting ink droplets, but this is combined with a heating coil (not shown).
It is also presented and exchanged with.

This inkjet printer head 25 has a concave portion substantially centered on the orifice 28 formed on the rear surface of the orifice plate 29, and this orifice plate 29 is fixed to the front surface of the base material 30, so that the concave portion is formed in the entire circumferential direction with respect to the orifice 28. A liquid chamber 31 that is open is formed. Then, the base material 3
A pressure chamber 32 is formed by attaching the piezo element 26 to the recess formed on the rear surface of the substrate 0 via the metal diaphragm 27, and this pressure chamber 32 and the liquid chamber 31 are connected to the base material. They communicate with each other through a communication hole 33 formed in the interior of the body 30 . Further, the liquid chamber 31 is provided in the base material 30.
A supply path 34 is formed which communicates with the supply path 34 , and a conduction pipe 35 connected to the supply path 34 is connected to a liquid tank 36 .

In this configuration, the inkjet printer head 25 electrically drives the piezo element 26 to remove the ink 1 in the pressure chamber 32 from the metal diaphragm 27.
1 is applied to the liquid chamber 31 through the communication hole 33.
Ink droplets are ejected from the orifice 28. At this time, in this inkjet printer head 25, the liquid chamber 31 is open in the entire circumferential direction with respect to the axis of the orifice 28, so the direction of action and feel of the pressure change in this part is symmetrical, so the ink droplets are It will fly in the axial direction of the orifice 28.

By attaching a heating coil in place of the piezo element 26 and metal diaphragm 27 of the inkjet printer head 25 described above, a bubble jet type inkjet printer head (not shown) in which the flight direction of ink droplets matches the axis of the orifice 28 However, in the structure described above, the pressure chamber 32 is connected to the orifice 2.
8, the fluid resistance is large and the pressure efficiency is low, making it difficult to realize a practical device. However, as illustrated in FIG. 20, as a practical product, an inkjet printer head 37 equipped with a plurality of orifices 28 is required, but in this case, the distance between the orifices 28 is Since the diameters of the piezo element 26 and the heating coil are large, the communication hole 39 formed in the base material 38 needs to have a bent shape, which further reduces the pressure efficiency and is not practical.

Means for Solving the Problems The invention as set forth in claim 1 continuously forms heat generating means in an array on the surface of a substrate, and forms a pressure chamber layer on the substrate having a partition wall surrounding each heat generating means. A supply path layer forming an ink supply path communicating with the chamber is formed on the pressure chamber layer, and an orifice layer having orifices formed at positions corresponding to the heating means and the pressure chamber, respectively, is formed on the supply path layer.

The invention according to claim 2 provides a first plate having a pressure chamber layer formed on the surface of the substrate, a second plate having a supply channel layer formed on the back surface of the orifice layer, and the first plate and the second plate are provided. The plates are integrally joined.

The invention according to claim 3 is characterized in that an ink storage chamber is provided between the partition walls surrounding the heat generating means of the pressure chamber layer.The invention according to claim 4 is characterized in that the supply path layer and the orifice layer are integrally formed.

The invention as set forth in claim 1 is characterized in that heat generating means are continuously formed in an array on the surface of a substrate, a pressure chamber layer having a partition wall surrounding each heat generating means is formed on the substrate, and an ink supply communicating with each pressure chamber is provided. By forming a supply channel layer forming a channel on the pressure chamber layer, and forming an orifice layer on the supply channel layer in which orifices are successively formed in an array at positions corresponding to the heating means and the pressure chambers, respectively, Since the functional parts formed in each layer have a simple shape and are located close to each other, pressure efficiency is good, and orifices etc. can be arranged with high density.

Furthermore, as in the invention as claimed in claim 2, a first plate is provided with a pressure chamber layer formed on the surface of the substrate, a second plate is provided with a supply channel layer formed on the back surface of the orifice layer, and the first plate is provided with a pressure chamber layer formed on the surface of the substrate. The plate and the second plate may be integrally joined, or an ink storage chamber may be formed between the partition walls surrounding the heat generating means of the pressure chamber layer as in the invention as claimed in claim 3, or as in the invention as claimed in claim 4. By integrally forming the supply channel layer and the orifice layer, the structure can be simplified and the productivity of the device can be improved.

Embodiment An embodiment of the invention recited in claims 1, 2 and 3 will be explained based on FIGS. 1 to 6. First, as illustrated in FIG. 3, the main structure of the inkjet printer head 40 of this embodiment includes a substrate 41, a pressure chamber layer 42, and a supply channel layer 4.
3 and an orifice plate 44, which is an orifice layer, are sequentially laminated. As illustrated in FIGS. 1 and 2, orifices 45 continuously formed in an array on this orifice plate 44 and heating resistors 46, which are heat generating means, formed on the surface of the substrate 41, respectively. The pressure chamber 48 is located coaxially and is symmetrical with respect to the axis of the orifice 45 due to the pressure chamber layer 42 in which a rectangular annular partition wall 47 is formed with the heating resistor 46 as the approximate center.
The ink supply path 49 is formed by the supply path layer 43, which is open at the portion facing the pressure chamber 48, and is open in the entire circumferential direction with respect to the axis of the orifice. Note that in this inkjet printer head 40,
An ink storage chamber 50 is formed between the partition walls 47 of the pressure chamber layer 42, and an ink supply hole 51 communicating with the ink storage chamber 50 is formed in the substrate 41.

Next, the structure of each part of the inkjet printer head 40 having the above structure will be described in detail below along with the manufacturing method. First, as illustrated in FIG. 5, the substrate 41 is thermally oxidized to form a heat storage layer 52 made of Sin with a thickness of 2 (μm) on the surface. Next, add TaA on top of this.
By sputtering Q and patterning it by etching, a 0.4 (μm) thick resistance layer 53 which will become the heating resistor 46 is formed, and in the same way, a common layer 53 made of 0.5 (μm) thick AQ is formed. Electrodes 54 and individual electrodes 55 are formed.

Then, on top of these, a thickness of 0.3 (
First protective film 5 made of silicon nitride (μm)
6, and then sputtering to a thickness of 0.2 (
A second protective film 57 made of Ta with a thickness of μm) is laminated.

The shape of the heating resistor 46 formed as described above is, for example, a square of 60 x 60 (μm). Furthermore, in the following description, the substrate 41 means a substrate on which the above-mentioned members 52 to 57 are formed.

Then, the pressure chamber layer 42 is formed on the substrate 41 on which the heating resistor 46 and the like are formed as described above. As illustrated in FIG. 6(a), this pressure chamber layer 42 is made by coating uncured photosensitive polyimide 58 on the substrate 41 to a thickness of 30 mm.
(μm) and semi-cured (dry).
), the pressure chamber 48 and the ink storage chamber 50 are provided by patterning this by photolithography to form the partition wall 47 and the outer frame 59. Therefore, the substrate 41 is
The ink supply hole 51 is formed by laser processing. For example, the shape of the pressure chamber 48 formed as described above is 70 x 70 with the heating resistor 46 in the center.
(μm) square, and the width of the partition wall 47 is 30 (μm).
It has become.

Here, the pressure chamber layer 4 is formed on the substrate 41 as described above.
The structure of the second plate 61 formed by the supply channel layer 43 and the orifice plate 44 and joined to the first plate 60 will be described below. do.

First, as illustrated in FIG. 6(C), the SUS substrate 62
Attach a mask 63 with a predetermined pattern on top and apply Ni to a thickness of 4.
An orifice plate 44 having the orifice 45 having a minimum diameter of 50 (μm) is formed by electroforming to a diameter of 0 (μm),
After peeling this off from the SUS substrate 62 and removing the mask 63, a 0.1 (μm) thick Au plating (
(not shown) to re-fix onto the SUS substrate 62. Then, as illustrated in FIG. 6(d), uncured photosensitive polyimide 64 is placed on the orifice plate 44.
is applied to a thickness of lO (μm), and as illustrated in FIG. 6(e), this is processed in the same manner as the pressure chamber layer 42 described above to form the ink supply path 49 centered on the orifice 45. Form. The orifice plate 44 on which the supply path layer 43 is integrally formed in this way is attached to the SUS substrate 62.
The second plate 61 is formed by removing it from above and cutting it into a predetermined shape.

Then, as illustrated in FIGS. 6(f) and (g), the first and second plates 60 and 61 manufactured as described above are placed so that the axes of the orifice 45 and the heating resistor 46 are aligned. The pressure chamber layer 42 and the supply channel layer 43 made of photosensitive polyimide are cured (cured) by being bonded in this state and heated under pressure.
44 are fixed, and the production of the inkjet printer head 40 is completed. In this inkjet printer head 40, the ink supply path 49 formed between the partition wall 47 of the pressure chamber 48 and the back surface of the orifice plate 44 corresponds to the thickness of the supply path layer 43, so here Then, the width of the opening in the entire circumferential direction on the partition wall 47 is 10 (μm).
It is formed in the shape of a slit.

Note that when actually joining the first and second plates 60 and 61, it is expected that it will be difficult to align the axes of the orifice 45, the heating resistor 46, etc. For the sample material, two reference patterns (not shown) are printed on the substrate 41 to form reference holes (not shown) corresponding to the other three layers 42 to 44, and the reference holes are formed from the reference holes. By performing the work while checking the pattern, the inkjet printer head 40 could be manufactured.

Furthermore, when manufacturing devices using thin film technology as described above, productivity is usually improved by manufacturing multiple devices simultaneously on a large substrate, but with the inkjet printer head 40 described above, The productivity is improved by cutting the first and second plates 60.61 installed after joining them, and the accuracy is improved by cutting the first and second plates 60.61 individually and then joining them. It is possible to improve.

In this configuration, the inkjet printer head 40 has a drive circuit (not shown) connected to each electrode 54, 55, and an ink tank (both not shown) connected to the ink supply hole 51 through a communication pipe or the like. , as illustrated in FIG. 1, are arranged opposite to a printing paper 65 that moves relatively in the sub-scanning direction. Therefore, in this inkjet printer head 40, electric power is applied from each electrode 54, 55 to the heating resistor 4.
When the ink 6 generates heat, the ink 11 in contact with it evaporates and bubbles 66 are generated. At this time, the propagation direction of the pressure change in the ink 11 due to the generation of the bubbles 66 is the pressure chamber 48.
It is regulated by the flow direction and flows toward the orifice 45. Therefore, the power supply from the electrodes 54 and 55 is stopped in synchronization with the timing at which the ink 11 protrudes from the orifice 45, the temperature of the heating resistor 46 decreases, and the bubbles 66 contract.

Then, the ink 11 that had protruded from the orifice 45 due to the change in the pressure of the ink 11 caused by the contraction of the bubble 66
A part of the ink is cut off, and this becomes an ink droplet 11a and flies. Therefore, by selectively driving the heating resistor 46 to generate heat and causing the ink droplets 11a to fly from a predetermined orifice 45, an image can be formed on the surface of the printing paper 65 that moves relatively in the sub-scanning direction. Note that each pressure chamber 48 is supplied with ink 11 that is sequentially replenished from an ink supply hole 51 from an ink storage chamber 50 via an ink supply path 49.

In this inkjet printer head 40,
The shapes of the ink supply path 49 and the pressure chamber 48 and the heating resistor 4
Since the position of 6 is symmetrical with respect to the axis of the orifice 45, the direction of action and feel of the pressure change in this part is symmetrical, and the ink droplet 11a is symmetrical with respect to the axis of the orifice 45.
It will fly in the exact direction of. Furthermore, in the inkjet printer head 40 of this embodiment, each layer 41 to 4
The functional parts formed in 4 have a simple shape and are located coaxially and close to each other, so that the pressure efficiency is extremely good. Moreover, since the means for applying pressure to the ink 11 is the heating resistor 46, which can be easily formed into a small size, it is possible to arrange the orifices 45 etc. in a high density. For example, 52 orifices 45 can be arranged in four rows in a staggered arrangement. By forming 3
It was confirmed that a resolution of 20 (DPI) can be achieved.

Next, a first embodiment of the invention set forth in claim 4 will be described based on FIG. 7. First, in this inkjet printer head 67, the structure of the first plate 60 is similar to that of the above-mentioned inkjet printer head 40. Therefore, the structure and manufacturing method of the second plate 68 to be joined to the first plate will be explained below.

First, as illustrated in FIG. 7(a), the SOS board 62
A first mask 69 having a thickness of 2 (μm) is formed on the resist in a predetermined pattern, and as illustrated in FIG. 7(b),
An orifice layer 71 including an orifice 70 is formed by electroforming Ni to a thickness of 40 (μm) thereon. Here, the first mask 69 has a thickness of 40 (μm)
) When electroforming the Ni film, the minimum diameter of the orifice 70 is 5
The size is set to 0 (μm). Therefore, as illustrated in FIG. 7(C), a second mask 72 is formed with a resist having a thickness of 20 (μm) in a pattern corresponding to an ink supply path 73, which will be described later. As illustrated, a supply path layer 74 including the ink supply path 73 is formed by electroforming Ni to a thickness of 10 (μm) again.

Then, as illustrated in FIG. 7(e), the orifice layer 71 integrally formed with the supply path layer 74 is
The mask 69.72 is peeled off from the US substrate 62.
The second plate 68 is formed by removing it, performing Au plating (not shown) to a thickness of 0.1 (μm), and cutting it into a predetermined shape. Note that the second mask 72
It is sufficient that the thickness is thicker than the supply path layer 74 to be formed, and reliability is improved by applying Au plating in the final step.

Then, the second plate 68 manufactured in this way is made into the first plate 6 by using photosensitive polyimide or the like.
0, the inkjet printer head 67
is produced.

In this configuration, this inkjet printer head 67 is similar to the inkjet printer head 40 described above.
It works the same way. Here, in this inkjet printer head 67, the orifice layer 71 and the supply path layer 74 are integrally formed of the same material, so productivity can be improved by sharing manufacturing equipment for these. can.

Furthermore, a second embodiment of the invention set forth in claim 4 will be described based on FIGS. 8 and 9. In this inkjet printer head 75, the structure of the first plate 60 is similar to that of the above-mentioned inkjet printer head 40, etc., and the structure and manufacturing method of the second plate 76 are related.

First, as illustrated in FIG. 8(a), the thickness is 50 (μ
A first mask 78 with a predetermined pattern is formed on the Si material 77 of
As illustrated in FIG. 8(b), an ink supply path 79 is formed by etching to a depth of 10 (μm) from above. Therefore, as illustrated in FIG. 8(C), the Si material 7 with the first mask 78 removed is
A second mask 80 having a predetermined pattern is formed on the second mask 7, and as illustrated in FIG. 8(d), the orifice 81 is formed by etching again from above to penetrate.

Then, as illustrated in FIG. 8(e), by removing the second mask 80 after this etching, a second plate 76 in which the supply channel layer and the orifice layer are integrally molded is obtained. .

The shapes of the first and second masks 78, 80 are set so that when etching is performed from above to a predetermined depth, the ink supply passage 79 and orifice 81 of a desired shape are formed.

In such a configuration, this inkjet printer head 75 is similar to the inkjet printer head 40 described above.
．． It functions similarly to 67. Here, in this inkjet printer head 75, the second plate 76 is manufactured in which the orifice layer and the supply path layer are completely integrated, so productivity is extremely high.

Note that, as illustrated in FIG. 9, it is also possible to manufacture a second plate 85 in which a conical through hole that serves as an ink supply path 83 and an orifice 84 is formed in a second base material 82. , in this case, productivity will further improve. Note that the large diameter part of the conical through hole is the ink supply path 83.
Since the small diameter portion becomes the orifice 84, it is desirable to set the thickness of the base material 82, etching conditions, etc. so that these dimensions have desired values.

In addition, in the above-mentioned embodiment, the partition wall 47 forming the pressure chamber 48
Although the present invention is not limited to the above structure, for example, as illustrated in FIG. 10, a pressure chamber 87 is formed by a large annular partition wall 86. A pressure chamber layer 88 is also possible. Further, in the above embodiment, the ink supply passages 49, 73, 78, 83 were formed for each orifice 45, 70, 81, 84, but the present invention is not limited to the above structure. For example, as illustrated in FIG. 11, it is also possible to manufacture a supply channel layer 90 in which ink supply channels 89 commonly communicating with a predetermined number of orifices 45 are formed. Conversely, the ink storage chamber 50 does not need to be one, and may be divided into several parts. The ink replenishment hole 51 for replenishing the ink 11 to the ink storage chamber 50 and the like does not need to be formed in the substrate 40, and any hole that communicates with the ink storage chamber 51 will function. In addition, although various dimensions and materials were presented in each of the above-mentioned examples, these are designed in an optimal form taking into account the specifications of the device and the required performance, etc. For example, metal, glass, and resin are used. Each layer can be manufactured by etching, metal press working, electroforming, or resin molding. Furthermore, in the above embodiment, the shape of the pressure chamber and the ink supply path are symmetrical with respect to the axis of the orifice, so that the flight direction of the ink droplets coincides with the axis of the orifice. The invention is not limited to the above structure either.

Effects of the Invention The invention as set forth in claim 1 is such that heat generating means are continuously formed in an array on the surface of a substrate, and a pressure chamber layer having a partition wall surrounding each heat generating means is formed on the substrate, and communicates with each pressure chamber. A supply channel layer forming an ink supply channel is formed on the pressure chamber layer, and an orifice layer in which orifices are continuously formed in an array at positions corresponding to the heating means and the pressure chambers is formed on the supply channel layer. As a result, the functional parts formed in each layer have a simple shape and are located close to each other, resulting in good pressure efficiency, and it is possible to arrange orifices etc. with high density, making it possible to create high-performance bubbles with a simple structure. It is possible to manufacture a jet type inkjet printer head, and furthermore, as in the second aspect of the invention, a first plate having a pressure chamber layer formed on the surface of the substrate is provided, and a supply channel layer is formed on the back surface of the orifice layer. The first plate and the second plate may be integrally joined by providing a second plate formed with a By forming a storage chamber or integrally forming a supply channel layer and an orifice layer as in the invention according to claim 4,
This has the effect of simplifying the structure and improving the productivity of the device.

[Brief explanation of the drawing]

Fig. 1 is a longitudinal cross-sectional side view showing an embodiment of the invention according to claims 1 to 3, Fig. 2 is a plan view of each layer, Fig. 3 is an exploded perspective view, Fig. 4 is a perspective view, and Fig. 5 is an essential part. FIG. 6 is an explanatory diagram of the manufacturing process, FIG. 7 is an explanatory diagram of the manufacturing process showing the first embodiment of the invention as claimed in claim 4, and FIG. 8 is an explanatory diagram of the manufacturing process of the invention as claimed in claim 4. FIG. 9 is a longitudinal cross-sectional side view showing another embodiment, and FIGS. 1O and 11 are perspective views of essential parts showing other embodiments of the present invention. , FIG. 12 is a front view showing the first conventional example, FIG. 13 is a longitudinal side view, FIG. 14 is a longitudinal side view showing the second conventional example, FIG. 15 is an exploded perspective view, and FIG. 16 17 is an exploded perspective view showing the fourth conventional example, FIG. 18 is a perspective view showing the fifth conventional example, and FIGS. 19 and 20 are FIG. 6 is a longitudinal sectional side view showing a sixth conventional example. 40.67.75... Inkjet printer head, 41... Substrate, 42.88... Pressure chamber layer, 43°74... Supply path layer, 44.71... Orifice layer,
45.70, 81.84... orifice, 46...
Heat generating means, 47.86... Partition wall, 48.87... Pressure chamber, 49.73, 79, 83, 89... Ink supply path, 50... Ink storage chamber, 60... First plate, 61.68, 76.85...Second plate 1 7 (a) (b)'' (5 points)

Claims (1)

[Scope of Claims] 1. A substrate on which heat generating means are continuously formed in an array, a pressure chamber layer formed on the substrate and provided with partition walls surrounding each of the heat generating means, and a pressure chamber layer on the pressure chamber layer. a supply path layer that is formed to form an ink supply path that communicates with each of the pressure chambers;
An inkjet printer head comprising an orifice layer formed on the supply path layer and having orifices formed at positions corresponding to the heat generating means and the pressure chamber, respectively. 2. A first plate having a pressure chamber layer formed on the surface of the substrate is provided, a second plate having a supply channel layer formed on the back surface of the orifice layer is provided, and the first plate and the second plate are integrated. 2. The inkjet printer head according to claim 1, wherein the inkjet printer head is bonded to the inkjet printer head. 3. The ink jet printer head according to claim 1 or 2, wherein an ink storage chamber is formed between partition walls surrounding the heat generating means of the pressure chamber layer. 4. The inkjet printer head according to claim 1, wherein the supply path layer and the orifice layer are integrally formed.