JPH031530U - - Google Patents
Info
- Publication number
- JPH031530U JPH031530U JP6009989U JP6009989U JPH031530U JP H031530 U JPH031530 U JP H031530U JP 6009989 U JP6009989 U JP 6009989U JP 6009989 U JP6009989 U JP 6009989U JP H031530 U JPH031530 U JP H031530U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- heat treatment
- boat
- hanging
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6009989U JPH031530U (fi) | 1989-05-24 | 1989-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6009989U JPH031530U (fi) | 1989-05-24 | 1989-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031530U true JPH031530U (fi) | 1991-01-09 |
Family
ID=31587164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6009989U Pending JPH031530U (fi) | 1989-05-24 | 1989-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031530U (fi) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156730A (ja) * | 1984-12-27 | 1986-07-16 | Deisuko Saiyaa Japan:Kk | 半導体物品の縦型熱処理装置 |
-
1989
- 1989-05-24 JP JP6009989U patent/JPH031530U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156730A (ja) * | 1984-12-27 | 1986-07-16 | Deisuko Saiyaa Japan:Kk | 半導体物品の縦型熱処理装置 |
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