JPH0315128B2 - - Google Patents

Info

Publication number
JPH0315128B2
JPH0315128B2 JP26583284A JP26583284A JPH0315128B2 JP H0315128 B2 JPH0315128 B2 JP H0315128B2 JP 26583284 A JP26583284 A JP 26583284A JP 26583284 A JP26583284 A JP 26583284A JP H0315128 B2 JPH0315128 B2 JP H0315128B2
Authority
JP
Japan
Prior art keywords
optical
optical system
unit
light
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26583284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61142407A (ja
Inventor
Osamu Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP26583284A priority Critical patent/JPS61142407A/ja
Publication of JPS61142407A publication Critical patent/JPS61142407A/ja
Publication of JPH0315128B2 publication Critical patent/JPH0315128B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP26583284A 1984-12-17 1984-12-17 光学式変位測定装置 Granted JPS61142407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26583284A JPS61142407A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26583284A JPS61142407A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPS61142407A JPS61142407A (ja) 1986-06-30
JPH0315128B2 true JPH0315128B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-28

Family

ID=17422672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26583284A Granted JPS61142407A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPS61142407A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9482360B2 (en) 2013-07-15 2016-11-01 Parker-Hannifin Corporation Miniature high performance solenoid valve

Also Published As

Publication number Publication date
JPS61142407A (ja) 1986-06-30

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