JPH03151251A - Laminate type piezoelectric element - Google Patents

Laminate type piezoelectric element

Info

Publication number
JPH03151251A
JPH03151251A JP29067289A JP29067289A JPH03151251A JP H03151251 A JPH03151251 A JP H03151251A JP 29067289 A JP29067289 A JP 29067289A JP 29067289 A JP29067289 A JP 29067289A JP H03151251 A JPH03151251 A JP H03151251A
Authority
JP
Japan
Prior art keywords
layers
piezoelectric element
property
laminated
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29067289A
Other languages
Japanese (ja)
Inventor
Seiji Soda
曽田 誠治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP29067289A priority Critical patent/JPH03151251A/en
Publication of JPH03151251A publication Critical patent/JPH03151251A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a high electric insulation property combined with a moisture-proof property by a method wherein exterior surface of inner electrodes and outer electrodes is covered with two or more electric insulation layers which have different characteristics and are laid upon another. CONSTITUTION:A laminate type piezoelectric element 10 consists of piezoelectric materials 1... which are laminated in two or more layers, thin membrane inner electrodes 2... which are sandwiched between the piezoelectric materials 1..., and outer electrodes 3 which are arranged along the side walls of the piezoelectric materials 1... in order to connect the inner electrodes 2... to a power source, and the whole external surface of the laminated piezoelectric element is covered with an electric insulation coating film 4. The electric insulating coating film 4 consists of two or more electric insulating layers 4a and 4b having different characteristics, and is applied on the external surface of the inner electrodes 2... and the outer electrodes 3. The electric insulating layers 4a having high electric insulating property maintain the basic electric insulation property, and the electric insulation layers 4b having an excellent water-proof property maintain the electric insulation property in a high humidity atmosphere. As a result, a basic electric insulating property and an excellent moisture- proof property can be obtained.

Description

【発明の詳細な説明】 〔概要〕 インパクトドツトプリンタのインパクトドツトワイヤな
どを駆動ツー゛るために用いられる積層型圧電素子に関
し、 防湿性を含めrH高い電気絶縁性を得ることができる積
層型圧電素子を提供することを目的と12、複数層に積
層された圧電材料と、上記積層された圧電材料の各層間
に挾み込まれた薄膜状の内部電極と、」−記各内部電極
を電源に接続するために上記圧電材料の側壁に沿って配
置された外部電極とを有する積層型圧電素子において、
特性の異なる複数の電気絶縁層を重ね合わせて、」−配
向部電極と外部電極の表面をコーティングして構成する
[Detailed Description of the Invention] [Summary] Regarding a laminated piezoelectric element used to drive an impact dot wire of an impact dot printer, etc., a laminated piezoelectric element capable of obtaining high electrical insulation properties including moisture resistance. 12, a piezoelectric material laminated in multiple layers, a thin film-like internal electrode inserted between each layer of the laminated piezoelectric material, and each internal electrode as a power source. A multilayer piezoelectric element having an external electrode disposed along a sidewall of the piezoelectric material for connection,
It is constructed by overlapping a plurality of electrically insulating layers with different properties to coat the surfaces of the alignment part electrode and the external electrode.

〔産業上の利用分野〕[Industrial application field]

この発明は、インパクトドツトプリンタのインパクトド
ツトワイヤなどを駆動するために用いられる積層型圧電
素子に関する。
The present invention relates to a laminated piezoelectric element used to drive an impact dot wire or the like of an impact dot printer.

インバク1−ドツトプリンタのインパクトドツトワイヤ
(以下、単に「ワイヤ」という)は、電磁力を利用して
駆動されるものが一般的であるが、最近では、電界を加
えることによって歪みを生」る圧電素子を積層した積層
型圧電素子によって一イヤを駆動するものもよく用いら
れている。
Impact dot wires (hereinafter simply referred to as "wires") in impact dot printers are generally driven using electromagnetic force, but recently, piezoelectric wires that create distortion by applying an electric field have been introduced. Devices in which one ear is driven by a laminated piezoelectric element in which elements are laminated are also often used.

このような積層型圧電素子は、圧電素子を挟/で非常に
狭い間隔で配置された電極間に、高いη圧を印加するの
で、僅かな絶縁不良によってた慮どころに動作不良を起
こす。したがって、積層へ圧電素子にとって電気絶縁性
の確保が非常に重フな問題となっている。
In such a laminated piezoelectric element, a high η pressure is applied between electrodes that are arranged at very narrow intervals with the piezoelectric element in between, so a slight insulation failure can unexpectedly cause malfunction. Therefore, ensuring electrical insulation for laminated piezoelectric elements has become a very important issue.

〔従来の技術〕[Conventional technology]

従来の積層型圧電素子は、第4図に示されるJうに、複
数層に積層された圧電材料51・・・の各R間に薄膜状
の内部電極52・・・を挟み込んで、内部電極52を電
源に接続するために圧電材料5!・・の側壁に沿って外
部電極53を配置し、エボキう系又は高分子材料などか
らなる電気絶縁性のあ2電気絶縁層54を圧電素子の表
面にコーチインクして絶縁を行っていた。
In the conventional laminated piezoelectric element, as shown in FIG. Piezoelectric material to connect to the power source 5! An external electrode 53 is disposed along the side wall of the piezoelectric element, and an electrically insulating layer 54 made of an epoxy or polymeric material is coated on the surface of the piezoelectric element for insulation.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、電極52.53の表面に電気絶縁N54をコー
ティングする際には、コーティング時の空気の巻き込み
や、コーテイング材に含まれる稀釈剤の揮発などにより
、コーティングされた電気絶縁層54中に微細な気泡5
1や穴52が存在する場合が少なくない。
However, when coating the electrically insulating N54 on the surface of the electrodes 52 and 53, fine particles may be formed in the coated electrically insulating layer 54 due to air being entrained during coating and the diluent contained in the coating material evaporating. bubble 5
1 and holes 52 are often present.

このように電気絶縁層に気泡や穴が存在すると電気絶縁
性が低下し、特に、結露などによって容易にリークが生
じる。したがって、高湿度の環境下などでは絶縁不良が
発生し易く、動作不良トラブルを起こす原因となってい
た。
If bubbles or holes are present in the electrical insulating layer as described above, the electrical insulation properties will be lowered, and in particular, leakage will easily occur due to dew condensation or the like. Therefore, insulation failure is likely to occur in a high humidity environment, resulting in malfunctions.

この発明は、そのような従来の欠点を解消し、防湿性を
含めて高い電気絶縁性を得ることができる積層型圧電素
子を提供することを目的とする。
An object of the present invention is to provide a laminated piezoelectric element that can eliminate such conventional drawbacks and obtain high electrical insulation properties including moisture resistance.

【課題を解決するための手段〕[Means to solve the problem]

上記の目的を達成するため、本発明の積層型圧電素子は
、実施例を説明するための第1図に示されるように、複
数層に積層された圧電材料1・・・と、上記積層された
圧電材料1・−・の各層間に挾み込まれた薄膜状の内部
電極2・・・と、上記各内部電極2・・・を電源番ご接
続するために上記圧電材料l・・・の側壁に沿って配置
された外部電極3とを有する積層型圧電素子において、
特性の異なる複数の電気絶縁層4a、4bを重ね合わせ
て、上記内部電極2・・・と外部電極3の表面をコーテ
ィングしたことを特徴とする。
In order to achieve the above object, the laminated piezoelectric element of the present invention includes a piezoelectric material 1 laminated in a plurality of layers, and a piezoelectric material 1 laminated in a plurality of layers, as shown in FIG. The thin film internal electrodes 2 inserted between the layers of the piezoelectric materials 1 and the piezoelectric materials 1 are used to connect the internal electrodes 2 to a power source. In a laminated piezoelectric element having an external electrode 3 disposed along the side wall of the
It is characterized in that the surfaces of the internal electrodes 2 and external electrodes 3 are coated by overlapping a plurality of electrically insulating layers 4a and 4b with different characteristics.

〔作用〕[Effect]

内部電極2・・・と外部電極3の表面を覆う電気絶縁F
J4a、4bを、−層は絶縁性(耐圧)の高い材料を用
い、−層は吸水性の低い材料を用いるなど、異なる特性
を持つものを組み合わせることにより、高い電気絶縁性
と高い防湿性を兼備することができる。
Electrical insulation F covering the surfaces of internal electrodes 2... and external electrodes 3
By combining J4a and 4b with different characteristics, such as using a material with high insulation (voltage resistance) for the - layer and a material with low water absorption for the - layer, high electrical insulation and high moisture resistance can be achieved. Can be combined.

また、複数の電気絶縁層4a、4bを重ね合わせるので
、各電気絶縁層4a、4bに気泡や穴があっても、層ご
とに気泡や穴の位置がずれ、外表面と電極表面とが直接
連通する可能性などは著しく低下する。
Furthermore, since a plurality of electrically insulating layers 4a and 4b are overlapped, even if there are bubbles or holes in each electrically insulating layer 4a or 4b, the positions of the bubbles or holes are shifted from layer to layer, and the outer surface and the electrode surface are directly connected. The possibility of communication is significantly reduced.

〔実施例〕〔Example〕

図面を参照して実施例を説明する。 Examples will be described with reference to the drawings.

*2図は積層型圧電素子lOの外観を示している。圧電
材料l・・・は例えば厚さO,1mm程度の圧電セラミ
ックス製の薄板であり、同じ形状のものが例えば20枚
程度積層されている。そして各圧電材料l・・・の間に
は、例えば厚さ5μm程度の薄膜状の内部電極2・・・
がサンドイッチ拭に挟み込まれている。内部電極2・・
・は、例えば銀箔により形成されている。
*2 Figure shows the appearance of the laminated piezoelectric element IO. The piezoelectric material l... is, for example, a thin plate made of piezoelectric ceramic with a thickness of about 0.1 mm, and about 20 pieces of the same shape are laminated. And between each piezoelectric material l..., a thin film-like internal electrode 2... with a thickness of about 5 μm, for example.
is sandwiched between sandwich wipes. Internal electrode 2...
* is formed of silver foil, for example.

内部電極2・・・は、厚さ以外は圧電材料l・・−と同
形状に形成されており、各圧電材料l・・・を挟む2つ
の内部電極2・・・間に電圧を印加すれば、その間の圧
電材料!・・・に歪み(変形)が生じる。
The internal electrodes 2... are formed in the same shape as the piezoelectric materials l...- except for the thickness, and when a voltage is applied between the two internal electrodes 2... that sandwich each piezoelectric material l... Well, the piezoelectric material in between! Distortion (deformation) occurs in...

3.3は、内部電極2・・・を1つおきに接続する一対
の外部電極であり、例えば銀箔により形成されている。
Reference numeral 3.3 denotes a pair of external electrodes that connect every other internal electrode 2, and are made of, for example, silver foil.

一対の外部電極3.3は、圧電材料1・・・の側壁に沿
って、180度対称の位置に固着されている。そして、
一方の外部層S3は奇数番目の内部電極2・・・を1つ
のグループとして各々接続し、もう一方の外部電極3は
偶数番目の内部電極2・・・を1つのグループとして各
々接続している。
A pair of external electrodes 3.3 are fixed along the side walls of the piezoelectric material 1 at 180 degree symmetrical positions. and,
One external layer S3 connects the odd-numbered internal electrodes 2 as one group, and the other external electrode 3 connects the even-numbered internal electrodes 2 as one group. .

5・・・は、接続されてはいけない内部電極!・・・グ
ループと外部電極3.3との間を絶縁するめに、各内部
電極l・・・の表面を一つおきに絶縁シールする、ガラ
ス製の絶縁シール材である。
5... is an internal electrode that must not be connected! It is an insulating sealing material made of glass that insulates and seals every other surface of each internal electrode l... in order to insulate between the group and the external electrodes 3.3.

6.6は、各々異なる外部電極3,3に接続された電線
である。電線6,6は印字信号によって制御される駆動
回路を介して電源(図示せず)に接続されており、この
電線6.6から、例えば120ボルト程度の電圧が外部
電極3,3を介して内部電極2・・・に印加される。そ
れによって各圧電材料1・・・が歪んで、wJrIs型
圧電素子IOは全体として積層方向に伸縮する。
6.6 are electric wires connected to different external electrodes 3, 3, respectively. The electric wires 6.6 are connected to a power source (not shown) via a drive circuit controlled by the print signal, and a voltage of, for example, about 120 volts is applied from the electric wires 6.6 to the external electrodes 3, 3. It is applied to the internal electrodes 2... As a result, each piezoelectric material 1... is distorted, and the wJrIs type piezoelectric element IO as a whole expands and contracts in the stacking direction.

本発明の積層型圧電素子10は、このような積層構造の
側壁外面を、すべて電気絶縁層4でコーティングして被
覆している。しかし、第2図にはその図示は略示されて
おり、電気絶縁層4については、第1図を参照して後述
する。
In the laminated piezoelectric element 10 of the present invention, the outer surface of the side wall of such a laminated structure is entirely coated with an electrically insulating layer 4. However, the illustration thereof is omitted in FIG. 2, and the electrical insulating layer 4 will be described later with reference to FIG.

第3図は、積層型圧電素子lOの使用状態を略示したも
のであり、インパクトドツトプリンタの印字ヘッドに用
いられている。積層型圧電素子IOは一端側10aのみ
が、印字ヘッドに固定されており、他端側lObに、連
結部材(ビーム)12を介してワイヤ!3が連結されて
いる。したがって、電線6を通じて内部電極2−・・に
電圧を印加して積層型圧電素子10が伸縮することによ
って、ワイヤ13が駆動される。
FIG. 3 schematically shows how the laminated piezoelectric element 1O is used, and is used in a print head of an impact dot printer. Only one end side 10a of the laminated piezoelectric element IO is fixed to the print head, and a wire is connected to the other end side lOb via a connecting member (beam) 12! 3 are connected. Therefore, the wire 13 is driven by applying a voltage to the internal electrodes 2 through the electric wire 6 and causing the laminated piezoelectric element 10 to expand and contract.

第1図は、前述した電気絶縁層4の断面を示している。FIG. 1 shows a cross section of the electrically insulating layer 4 described above.

電気絶縁層4は、内部電極2・・・及び外部電極3が露
出しないようにそれらの外面に特性の異なる複数の電気
絶縁層4a、4bを重ね合わせてコーティングして、多
rfI電気絶縁層を形成したものである。
The electrically insulating layer 4 is formed by overlapping and coating a plurality of electrically insulating layers 4a and 4b with different characteristics on their outer surfaces so that the internal electrodes 2 and external electrodes 3 are not exposed, thereby forming a multi-rfI electrically insulating layer. It was formed.

第1図に示される実施例においては、内側の2層4aは
、柔軟で電極1こ対する密着性に優れた電気絶縁性(耐
圧)の高い電気絶縁層であり、例えばシリコン樹脂系の
電気絶縁材料が用いられる。
In the embodiment shown in FIG. 1, the inner two layers 4a are flexible electrical insulating layers with excellent adhesion to one electrode and high electrical insulating properties (voltage resistance), such as silicon resin electrical insulating layers. material is used.

これに対して、外側の2層4bは吸水性が低くて防水性
の優れた電気絶縁層であり、例えばシリコングリースな
どが用いられる。
On the other hand, the outer two layers 4b are electrical insulating layers with low water absorption and excellent waterproof properties, and are made of, for example, silicone grease.

このような組み合わせで電気絶縁層4を形成することに
よって、耐圧の高い一方の電気絶縁層4aで基本的な電
気絶縁性が確保され、防水性の優れたもう一方の電気絶
縁層4bで高湿度の環境中における電気絶縁性が確保さ
れる。
By forming the electrical insulating layer 4 in such a combination, one electrical insulating layer 4a with high withstand voltage can ensure basic electrical insulation, and the other electrical insulating layer 4b with excellent waterproofness can withstand high humidity. Electrical insulation is ensured in this environment.

ただし、電気絶縁層4はこのような組み合わせにのみ限
定されるものではなく、例えば剛性の高いエポキシ系の
フェスを用いるなど、有機、無機、複合材料等によって
種々の組み合わせをとることができる。
However, the electrical insulating layer 4 is not limited to such a combination, and can be made of various combinations of organic, inorganic, composite materials, etc., such as using a highly rigid epoxy board.

各電気絶縁層4a、4bの厚さは、層内から気泡が抜は
易くするためにlOμm以下程度がよく、気泡抜きをす
るために各層をコーティングする際に脱泡処理をしても
よい。
The thickness of each electrically insulating layer 4a, 4b is preferably approximately 10 μm or less in order to facilitate the removal of air bubbles from within the layer, and defoaming treatment may be performed when coating each layer to remove air bubbles.

本発明においては、電気絶縁層4は特性の異なる少なく
とも2層の電気絶縁層によって形成されていhlイ十L
1#(ト述の宙溢棚1の上う17M通のネオ料の部分も
複数層に分けてコーティングすることにより、気泡や穴
あきによる外表面と電極間の導通をより完全に防止する
ことができる。
In the present invention, the electrical insulating layer 4 is formed of at least two electrical insulating layers having different characteristics.
1# (By coating the 17M neo material on top of the above-mentioned floating shelf 1 in multiple layers, conduction between the outer surface and the electrode due to bubbles or holes can be more completely prevented. Can be done.

また、電気絶縁層のコーティングを行う前に電極に不導
体化処理を行っておけば、さらに絶縁性能が向上する。
Further, if the electrode is subjected to a nonconductor treatment before being coated with an electrically insulating layer, the insulation performance will be further improved.

銀電極を用いる場合には、硫化水素の雰囲気中に通すこ
とによって電極の表面に不導体である硫化銀を生成する
ことができる。
When using a silver electrode, silver sulfide, which is a nonconductor, can be generated on the surface of the electrode by passing it through an atmosphere of hydrogen sulfide.

〔発明の効果〕〔Effect of the invention〕

本発明の積層型圧電素子によれば、電気絶縁層を複数層
重ね合わせて電極の表面をコーティングしたので、電気
絶縁層中に気泡や穴があっても外表面と電極表面とが連
通せず、しかも電気絶縁層は特性の異なる複数の電気絶
縁層を重ね合わせてコーティングしたので、その特性を
選択して組み合わせることにより、基本的な高絶縁性と
優れた防湿性とを兼備して、高湿度の環境下においても
リークすることなく安定して動作することができ、六ら
に惠い珊械的強廖をあわせ持つようにすることもできる
等の優れた効果を有する。
According to the laminated piezoelectric element of the present invention, the surface of the electrode is coated by stacking multiple electrically insulating layers, so even if there are bubbles or holes in the electrically insulating layer, the outer surface and the electrode surface will not communicate with each other. Moreover, since the electrical insulation layer is coated with multiple electrical insulation layers with different properties, by selecting and combining their properties, it is possible to achieve both basic high insulation properties and excellent moisture resistance. It has excellent effects such as being able to operate stably without leaking even in a humid environment, and also having excellent mechanical strength.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は実施例の部分拡大断面図、 第2図は実施例の外観斜視図、 第3図は実施例の使用状態の側面図、 第4図は従来例の部分拡大断面図である。 図中、1・・・圧電材料、 2・−内部電極、 3・・・外部電極、 4・・・電気絶縁層。 第4図 FIG. 1 is a partially enlarged sectional view of the embodiment. Figure 2 is an external perspective view of the embodiment; Figure 3 is a side view of the example in use; FIG. 4 is a partially enlarged sectional view of a conventional example. In the figure, 1... piezoelectric material, 2.-internal electrode, 3...external electrode, 4... Electrical insulation layer. Figure 4

Claims (1)

【特許請求の範囲】  複数層に積層された圧電材料(1・・・)と、上記積
層された圧電材料(1・・・)の各層間に挟み込まれた
薄膜状の内部電極(2・・・)と、上記各内部電極(2
・・・)を電源に接続するために上記圧電材料(1・・
・)の側壁に沿って配置された外部電極(3)とを有す
る積層型圧電素子において、 特性の異なる複数の電気絶縁層(4a、4b)を重ね合
わせて、上記内部電極(2・・・)と外部電極(3)の
表面をコーティングしたことを 特徴とする積層型圧電素子。
[Scope of Claims] Piezoelectric materials (1...) laminated in a plurality of layers, and thin film-like internal electrodes (2...) sandwiched between each layer of the laminated piezoelectric materials (1...).・) and each of the above internal electrodes (2
The above piezoelectric material (1...) is used to connect the piezoelectric material (1...) to a power source.
In a laminated piezoelectric element having an external electrode (3) arranged along the side wall of the internal electrode (2... ) and an external electrode (3) are coated on the surface thereof.
JP29067289A 1989-11-08 1989-11-08 Laminate type piezoelectric element Pending JPH03151251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29067289A JPH03151251A (en) 1989-11-08 1989-11-08 Laminate type piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29067289A JPH03151251A (en) 1989-11-08 1989-11-08 Laminate type piezoelectric element

Publications (1)

Publication Number Publication Date
JPH03151251A true JPH03151251A (en) 1991-06-27

Family

ID=17759002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29067289A Pending JPH03151251A (en) 1989-11-08 1989-11-08 Laminate type piezoelectric element

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004061985A1 (en) * 2002-12-23 2004-07-22 Robert Bosch Gmbh Piezo actuator and a method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004061985A1 (en) * 2002-12-23 2004-07-22 Robert Bosch Gmbh Piezo actuator and a method for producing the same

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