JP2001189499A - Laminating-type piezoelectric actuator and manufacturing method therefor - Google Patents

Laminating-type piezoelectric actuator and manufacturing method therefor

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Publication number
JP2001189499A
JP2001189499A JP37239699A JP37239699A JP2001189499A JP 2001189499 A JP2001189499 A JP 2001189499A JP 37239699 A JP37239699 A JP 37239699A JP 37239699 A JP37239699 A JP 37239699A JP 2001189499 A JP2001189499 A JP 2001189499A
Authority
JP
Japan
Prior art keywords
laminate
coating
piezoelectric actuator
end face
lower end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP37239699A
Other languages
Japanese (ja)
Inventor
Tomoyoshi Kato
Kenji Kumamoto
Susumu Matsuno
Yoko Otsuki
Takahiro Yamakawa
友好 加藤
洋子 大槻
孝宏 山川
晋 松野
憲二 熊本
Original Assignee
Taiheiyo Cement Corp
太平洋セメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiheiyo Cement Corp, 太平洋セメント株式会社 filed Critical Taiheiyo Cement Corp
Priority to JP37239699A priority Critical patent/JP2001189499A/en
Publication of JP2001189499A publication Critical patent/JP2001189499A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a laminating-type piezoelectric actuator that is superb in moisture resistance and is inexpensive and is not affected by shape restrictions and, can set the shape to an expected one. SOLUTION: This laminating-type piezoelectric actuator is provided with a laminate 1, where a piezoelectric layer 4 and an internal electrode layer 5 are laminated alternately, a first covering 2 that is provided in contact with the laminate, so that the laminate is covered excluding the upper and lower end faces of the laminate crossing the displacement direction of the laminate when a voltage is applied using the inner electrode layer 5, and a second covering 3 that is provided outside the first covering so that the entire surface of the laminate is covered. The thickness of a part corresponding to the upper and lower end faces of at least the laminate in the second covering is equal to or smaller than 50 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric actuator used as a driving means in various devices.

[0002]

A laminated piezoelectric actuator (hereinafter, simply referred to as a piezoelectric actuator) formed by alternately laminating piezoelectric layers and internal electrode layers has various features. It has the disadvantage of being vulnerable. That is, there is a problem that a failure easily occurs relatively early in an environment with high humidity.

[0003] In order to solve the above-mentioned drawbacks and reduce the possibility of failure, the piezoelectric actuator is often hermetically housed in a cylindrical metal case. With this method, moisture can be completely shut off, so that good moisture resistance can be obtained. However, when a metal case is used, the shape of the piezoelectric actuator is greatly restricted. That is, since the shape of the piezoelectric actuator is determined in consideration of the shape of the metal case, it is extremely limited. In addition to this, the metal case in which the piezoelectric actuator is housed has a special structure such as the presence of a diaphragm on the upper end surface, so that the manufacturing cost is high. Therefore, the products obtained using it are very expensive.

[0004] Incidentally, a moisture-proof technology that does not use a metal case has also been proposed. For example, Japanese Patent Application Laid-Open No. 2-94680
Japanese Patent Application Laid-Open Publication No. H11-157, discloses a laminate in which a metal foil is wound around a side surface of a laminate, and a metal cap is adhered to upper and lower end surfaces thereof. However, even when such a method is used, similarly to the case where the metal case is used, an increase in manufacturing cost mainly due to an increase in the number of components (particularly, metal caps) is unavoidable.

Therefore, an object of the present invention is to provide a laminated piezoelectric actuator which is excellent in moisture resistance and low in cost. Another object of the present invention is to provide a multilayer piezoelectric actuator that can be made to have a desired shape without being restricted by the shape.

[0006]

The object of the present invention is to provide a laminated body in which piezoelectric layers and internal electrode layers are alternately laminated, and a displacement of the laminated body when a voltage is applied using the internal electrode layers. A first coating provided in contact with the laminate so as to cover the laminate except for an upper end surface and a lower end surface of the laminate, which intersect with a direction; and the lamination outside the first coating. A second coating provided so as to cover all surfaces of the body, wherein at least portions of the second coating corresponding to the upper end face and the lower end face of the laminate have a thickness of 50 μm.
m or less.

The second film is made of resin, glass,
It can be composed of one material selected from the group consisting of ceramics and metal. Further, the second coating is preferably formed by a vapor deposition method. Another object of the present invention is to provide a method for manufacturing a multilayer piezoelectric actuator, comprising: forming a multilayer body in which piezoelectric layers and internal electrode layers are alternately stacked; A first film forming step of forming a first coating around the laminate so as to cover the laminate except for an upper end face and a lower end face of the laminate obtained in the laminate formation step; A second film forming step of forming a second film covering the entire surface of the multilayer body outside the first film by a vapor deposition method. Is solved.

That is, according to the present invention, as described above, the laminated body composed of the piezoelectric layer and the internal electrode layer is covered with the first film and the second film to constitute the laminated piezoelectric actuator. Therefore, the side surfaces of the laminate on which the electrodes are formed are protected from moisture by the first coating and the second coating. Further, since the second coating is provided so as to surround the entire laminate, the intrusion of moisture from corners (interfaces) where the side surfaces of the laminate and the upper and lower end surfaces intersect is reliably prevented, and as a result, The laminated piezoelectric actuator of the present invention exhibits excellent moisture resistance.

In addition, according to the present invention, the thickness of the second coating covering the upper and lower end surfaces (the surface from which displacement is taken out) of the laminate is set to 5 mm.
The thickness is set to 0 μm or less. Therefore, the lowering of the displacement accuracy due to the presence of the second coating on the upper and lower end surfaces of the laminate is as follows.
It can be completely ignored. Further, in the present invention, as described above, the first coating and the second coating obtain moisture resistance. In other words, a metal case or a metal cap that requires extremely high manufacturing costs (processing costs) is not used to ensure moisture resistance. Therefore, the manufacturing cost of the multilayer piezoelectric actuator of the present invention is low, and it can be provided at low cost.

In the present invention, the metal case which significantly restricts the shape of the laminated piezoelectric actuator (element) is not used for securing the moisture resistance, and the moisture resistance can be adapted to any shape as described above. The first coating and the second coating are provided. Therefore, the multilayer piezoelectric actuator of the present invention is not limited by the shape, and can have the desired shape.

Furthermore, when the vapor deposition method is used to form the second coating, the following effects are also obtained. That is, when film formation is performed using a vapor deposition method, as is well known, a film formation object is placed in a vacuum container for a certain period of time. For this reason, even if air bubbles are present in the first film previously formed on the surface of the object to be film-formed, that is, on the side surface of the laminated body, these air bubbles are quickly removed (degassed), and the first film is removed. Is more dense. Then, as a result, the smoothness of the first coating is improved, so that the adhesion state of the second coating is also very good.

The thickness of at least the portion corresponding to the upper end face and the lower end face of the laminate in the second coating is:
In particular, the thickness is preferably 5 to 10 μm. Incidentally, the upper limit of the thickness of the second coating is 50 μm as described above.
m, but the lower limit is not particularly defined. For example, the lower limit is about 1 μm. When the second coating is made of a resin, examples of the resin include a fluorine-based resin and a chlorine-based resin having particularly low moisture permeability.

The vapor deposition method includes, for example, a CVD method and a PVD method. However, it is most preferable to use the CVD method in consideration of the quality and productivity of the coating film. When the second coating is made of metal, plating can be used instead of vapor deposition.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A laminated piezoelectric actuator, which will be described below as an embodiment of the present invention, has a laminated body in which piezoelectric layers and internal electrode layers are alternately laminated, and a voltage using the internal electrode layers. A first coating provided in contact with the laminate, so as to cover the laminate except for the upper end face and the lower end face of the laminate, which intersects with the displacement direction of the laminate when applying
A second coating provided outside the first coating to cover all surfaces of the laminate,
The thickness of at least the portion corresponding to the upper end face and the lower end face of the laminate is not more than 50 μm. In the present embodiment, the second film is formed of a resin by a vapor deposition method.

Also, a method of manufacturing a laminated piezoelectric actuator, which will be described below as an embodiment of the present invention, is as follows.
A laminate forming step of forming a laminate in which the piezoelectric layers and the internal electrode layers are alternately laminated, and a laminate excluding the upper end face and the lower end face of the laminate obtained in the laminate forming step. A first film forming step of forming a first film around the laminate so as to cover the first film, and a second film covering all surfaces of the laminate outside the first film by a vapor deposition method. And a second film forming step.

Next, an embodiment of the present invention will be described more specifically with reference to FIGS. 1 is an external view of the multilayer piezoelectric actuator according to the present embodiment, FIG. 2 is a cross-sectional view of the multilayer piezoelectric actuator taken along line XX in FIG. 1, and FIGS. 3 (a) to 3 (d) are the same. It is a flowchart showing a manufacturing procedure of a lamination type piezoelectric actuator. However, in FIG. 2, for convenience, the thickness of each component is drawn larger than the actual thickness.

The laminated piezoelectric actuator according to the present embodiment (hereinafter referred to as the laminated piezoelectric actuator) has a rectangular parallelepiped shape as shown in FIG. And the displacement can be taken out from the upper and lower end surfaces. That is, when the piezoelectric actuator is operated by applying a voltage, it is vertically displaced in FIG. As can be seen from FIG. 2, the present laminated piezoelectric actuator has a laminated body 1, a first coating 2 provided in contact with the laminated body 1, and a first coating 2 on the outside of the first coating 2. A second coating 3 provided in contact with the first coating 2 is provided as a main component.

The laminate 1 generally comprises a piezoelectric layer 4 and internal electrode layers 5 (a negative electrode 5a and a positive electrode 5b) alternately laminated. This laminate 1
External electrodes 6a and 6b are formed on the side surfaces facing each other. The negative electrode 5a is connected to the external electrode 6a, and the positive electrode 5b is connected to the external electrode 6b in parallel. Further, lead wires 7a and 7b connected to a power supply device (not shown) are attached to the external electrodes 6a and 6b, respectively. Here, soldering is used for joining the external electrodes 6a and 6b and the lead wires 7a and 7b. In this embodiment, the lead wires 7a and 7b are connected to the center of the external electrodes 6a and 6b, but may be connected to other positions.

It is to be noted that how the laminate 1 is manufactured is already known, but an outline thereof will be described for reference. In manufacturing the laminate 1, first,
For example, a raw material sheet is manufactured using a piezoelectric material such as lead zirconate titanate as a main component. Next, an electrode paste that will eventually become the internal electrode layer 5 is applied to the surface. Thereafter, a predetermined number of the layers are laminated, pressed and fired at a predetermined temperature. Then, by forming the external electrodes 6a and 6b by printing on the side surfaces of the sintered body that has undergone the firing treatment, the laminate 1 is obtained.

Next, the first coating 2 provided in contact with the laminate 1 will be described.
The laminate 1 is covered except for the upper end surface and the lower end surface of the laminate 1. That is, the laminate 1
(Including the joints between the external electrodes 6a and 6b and the lead wires 7a and 7b) are continuously covered. Needless to say, the upper end surface and the lower end surface of the laminate 1 are surfaces that intersect with the displacement direction of the laminate 1 when applying a voltage using the internal electrode layer 5 (vertical direction in FIG. 2). .

In this embodiment, the first coating 2
Is made of a highly adhesive epoxy resin. More specifically, the first coating 2 made of this epoxy resin is formed using a very common powder coating method. The average thickness of the first coating 2 is 100 to 500 μm.
On the other hand, the second coating 3 provided outside the first coating 2 and in contact with the first coating 2 covers all surfaces (all side surfaces and upper and lower end surfaces) of the laminate 1. . In other words, the laminate 1 is completely wrapped by the continuous second coating 3 without any break.

In the present embodiment, the second coating 3 is made of polyvinylidene chloride resin. More specifically, the second coating 3 made of the polyvinylidene chloride resin
Is formed using a vapor deposition method (CVD method). However, the thickness of the second coating 3, particularly the thickness of the portion corresponding to the upper and lower end surfaces of the laminate 1 (indicated by d in FIG. 2) is 5 to 10 μm
m. On the other hand, the thickness of the portion corresponding to the side surface of the laminate 1 is also 5 to 10 μm, like the upper and lower end surfaces.

In the laminated piezoelectric actuator constructed as described above, when a voltage is applied using the external electrodes 6a and 6b, and thus using the negative electrode 5a and the positive electrode 5b, a piezoelectric strain is applied to each of the piezoelectric layers 4. Is induced. As a result, a displacement for driving the target object occurs in the present multilayer piezoelectric actuator. Next, a method for manufacturing the present multilayer piezoelectric actuator will be described with reference to FIG.

In manufacturing the laminated piezoelectric actuator, first, a laminated body 1 in which the piezoelectric layers 4 and the internal electrode layers 5 are alternately laminated is formed (laminated body forming step). That is, as described above, a predetermined number of raw material sheets having the electrode paste applied to the surface are laminated and pressed, and then fired. As a result, the above-mentioned laminate 1 is obtained (see FIG. 3A). Then, external electrodes 6a and 6b are formed on the laminate 1 thus obtained, and the lead wires 7a and 6b are further formed.
7b (see FIG. 3B).

After connection of the lead wires 7a and 7b is completed, a first coating 2 made of epoxy resin is formed around the laminate 1 so as to cover the laminate 1 except for the upper and lower end surfaces. [First film forming step: see FIG. 3C]. However, a powder coating method is used for the film formation here. After the first coating 2 is formed in this manner, the first coating 2
A second coating 3 covering all surfaces of the laminate 1 is formed by a vapor deposition method (CVD method) on the outside of the coating 2 of [2nd film forming step: see FIG. 3 (d)]. Thereby, the present multilayer piezoelectric actuator having the above-described structure is obtained.

In this embodiment, the laminate 1 is covered with the first coating 2 and the second coating 3 as described above. Therefore, the side surfaces of the laminate 1 on which the external electrodes 6a and 6b are formed are protected from moisture by the first coating 2 and the second coating 3. Further, the second coating 3 is a laminate 1
Since it is provided so as to enclose the whole, the intrusion of moisture from the corner (interface) where the side surface of the laminate 1 and the upper and lower end surfaces intersect is reliably prevented, and as a result, the present laminated piezoelectric actuator has excellent moisture resistance. Demonstrate the nature.

In addition, in the present embodiment, the thickness of the second coating 3 covering the upper and lower end surfaces of the laminate 1 is set to 50 μm or less. Therefore, a decrease in displacement accuracy due to the presence of the second coating 3 on the upper and lower end surfaces of the laminate 1 can be suppressed to a negligible extent. In addition, the laminated piezoelectric actuator does not require a metal case or a metal cap that requires extremely high cost (processing cost) to ensure moisture resistance. Therefore, the manufacturing cost is low, and it can be provided at low cost. Moreover, since the first coating 2 and the second coating 3 can correspond to any shape, the present multilayer piezoelectric actuator is not restricted by its shape, and can have the desired shape.

Further, in the present embodiment, since the vapor phase deposition method is used for forming the second film 3, even if bubbles exist in the first film 2, these bubbles are promptly removed (removed). As a result, the first coating 2 becomes more dense. That is, since the smoothness of the first coating 2 is increased,
The adhesion state of the second coating 3 is very good. Here, the embodiment of the present invention has been described by exemplifying a case where the second coating 3 is made of resin, but as another embodiment,
Metals (eg, aluminum, nickel,
Chromium). Further, as still another embodiment, there can be cited one in which the second coating 3 is made of glass or ceramics. However, when the second film 3 is made of metal, a plating process may be used instead of the vapor deposition method.

[0029]

EXAMPLES The laminated piezoelectric actuator according to the above embodiment was manufactured as follows. First, water, an organic binder, a dispersing agent, an antifoaming agent, and the like are added to a piezoelectric material powder containing lead zirconate titanate as a main component, and sufficiently mixed. After vacuum degassing, a raw material sheet having a predetermined thickness, for example, 100 μm, is produced from this mixture by a doctor blade method.

Next, on the surface of the raw material sheet thus obtained,
A film of an internal electrode paste, for example, an Ag / Pd paste is formed by screen printing. When such a process is applied to the raw material sheets, a predetermined number of them, for example, about 120 sheets are laminated. After pressing, the laminate is fired at a predetermined temperature, for example, 1100 ° C. When a sintered body (sintered laminated body) is thus obtained, it is processed into an elongated rectangular parallelepiped having predetermined dimensions, for example, 3 mm in length, 3 mm in width, and 10 mm in height. Further, external electrodes respectively corresponding to the negative electrode and the positive electrode alternately provided inside the sintered body are formed on the side surfaces of the sintered body (whereby the negative electrode and the positive electrode are connected in parallel, respectively). The laminate is obtained by performing the treatment.

Next, a lead wire is soldered to the thus obtained laminate, and the upper and lower end surfaces thereof are masked with a heat-resistant tape or the like. Thereafter, a first coating made of an epoxy resin is formed only on the side surfaces of the laminate using a powder coating method. Finally, a second coating made of polyvinylidene chloride is formed on the outside of the first coating by using a vapor deposition method (CVD method). Thereby, the laminated piezoelectric actuator according to the above embodiment is obtained.

Subsequently, a total of ten laminated piezoelectric actuators (hereinafter, referred to as the present embodiment) thus obtained were prepared as samples. Then, DC 150 V was applied in an environment of a temperature of 40 ° C. and a humidity of 90%, and the relationship between the test time (voltage application time) and the number of failures (damages) was examined. However, in this case, it is considered that a failure has occurred when the insulation resistance of each sample falls below 100 MΩ. The results of this test are as shown in the graph of FIG. A similar test was performed on a laminated piezoelectric actuator (hereinafter, referred to as a conventional example) having the same material but without the second coating, and the results are also shown in the graph of FIG. Also shown.

[Evaluation] As can be seen from the graph of FIG. 4, in the conventional example, a failure occurred in a test time of about 300 hr, and failure occurred in all the samples in a test time of 1000 hr. On the other hand, in this embodiment, the test time is 1000 hours.
Nothing broke down after reaching r. From this result, it can be seen that the multilayer piezoelectric actuator according to the present embodiment is very excellent in reliability.

[0034]

According to the present invention, it is possible to provide a laminated piezoelectric actuator having excellent moisture resistance and low cost. Further, the shape of the laminated piezoelectric actuator is not restricted by the shape, and the desired shape can be obtained.

[Brief description of the drawings]

FIG. 1 is an external view of a multilayer piezoelectric actuator according to an embodiment.

FIG. 2 is a sectional view of the multilayer piezoelectric actuator according to the embodiment, taken along line XX in FIG. 1;

FIGS. 3A to 3D are process diagrams showing a manufacturing procedure of the multilayer piezoelectric actuator according to the embodiment.

FIG. 4 is a graph showing a relationship between a test time and the number of failures.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laminated body 2 1st coating 3 2nd coating 4 Piezoelectric layer 5 Internal electrode layer 5a Negative electrode 5b Positive electrode 6a, 6b External electrode 7a, 7b Lead wire

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takahiro Yamakawa 1-2-23 Kiyosumi, Koto-ku, Tokyo Within Pacific Research Center Co., Ltd. (72) Inventor Susumu Matsuno 1568-4 Onumada Onumada, Togane-shi, Chiba (72) Inventor Yoko Otsuki 1-2-23 Kiyosumi, Koto-ku, Tokyo Pacific Center Research Center

Claims (4)

[Claims]
1. A laminated body in which piezoelectric layers and internal electrode layers are alternately laminated, and a displacement direction of the laminated body that intersects a displacement direction of the laminated body when a voltage is applied using the internal electrode layer. A first coating provided in contact with the laminate so as to cover the laminate except for an upper end face and a lower end face, and covering the entire face of the laminate outside the first coat. And a second coating provided, wherein a thickness of at least a portion corresponding to an upper end face and a lower end face of the laminate in the second coating is 50 μm or less. Actuator.
2. The multilayer mold according to claim 1, wherein the second coating is made of one material selected from the group consisting of resin, glass, ceramics, and metal. Piezo actuator.
3. The multilayer piezoelectric actuator according to claim 1, wherein the second coating is formed by a vapor deposition method.
4. The method for manufacturing a multilayer piezoelectric actuator according to claim 1, wherein a multilayer body is formed by alternately stacking piezoelectric layers and internal electrode layers. Forming a first coating around the laminate so as to cover the laminate except for an upper end face and a lower end face of the laminate obtained in the laminate formation step; A film forming step;
A second film-forming step of forming a second film covering all surfaces of the laminate by a vapor deposition method on the outside of the film of (i).
JP37239699A 1999-12-28 1999-12-28 Laminating-type piezoelectric actuator and manufacturing method therefor Pending JP2001189499A (en)

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Country Status (1)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617766B1 (en) * 1999-06-19 2003-09-09 Robert Bosch Gmbh Piezoelectric actuator
JP2005086110A (en) * 2003-09-10 2005-03-31 Denso Corp Laminated piezoelectric element
JP2008004764A (en) * 2006-06-22 2008-01-10 Fujitsu Ltd Piezoelectric actuator and its manufacturing method, and magnetic disk unit
US7358646B2 (en) 2001-12-10 2008-04-15 Denso Corporation Piezoelectric actuator
JP2008098655A (en) * 2007-11-09 2008-04-24 Japan Science & Technology Agency Laminated piezoelectric element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239783A (en) * 1991-01-23 1992-08-27 Nec Corp Electrostrictive effect device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239783A (en) * 1991-01-23 1992-08-27 Nec Corp Electrostrictive effect device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617766B1 (en) * 1999-06-19 2003-09-09 Robert Bosch Gmbh Piezoelectric actuator
US7358646B2 (en) 2001-12-10 2008-04-15 Denso Corporation Piezoelectric actuator
JP2005086110A (en) * 2003-09-10 2005-03-31 Denso Corp Laminated piezoelectric element
JP2008004764A (en) * 2006-06-22 2008-01-10 Fujitsu Ltd Piezoelectric actuator and its manufacturing method, and magnetic disk unit
JP2008098655A (en) * 2007-11-09 2008-04-24 Japan Science & Technology Agency Laminated piezoelectric element

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