JPH0315064B2 - - Google Patents

Info

Publication number
JPH0315064B2
JPH0315064B2 JP16399185A JP16399185A JPH0315064B2 JP H0315064 B2 JPH0315064 B2 JP H0315064B2 JP 16399185 A JP16399185 A JP 16399185A JP 16399185 A JP16399185 A JP 16399185A JP H0315064 B2 JPH0315064 B2 JP H0315064B2
Authority
JP
Japan
Prior art keywords
chamber
filter
way valve
partition wall
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16399185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228576A (ja
Inventor
Masakazu Fujimoto
Osayuki Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP16399185A priority Critical patent/JPS6228576A/ja
Publication of JPS6228576A publication Critical patent/JPS6228576A/ja
Publication of JPH0315064B2 publication Critical patent/JPH0315064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP16399185A 1985-07-26 1985-07-26 四方弁 Granted JPS6228576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16399185A JPS6228576A (ja) 1985-07-26 1985-07-26 四方弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16399185A JPS6228576A (ja) 1985-07-26 1985-07-26 四方弁

Publications (2)

Publication Number Publication Date
JPS6228576A JPS6228576A (ja) 1987-02-06
JPH0315064B2 true JPH0315064B2 (h) 1991-02-28

Family

ID=15784681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16399185A Granted JPS6228576A (ja) 1985-07-26 1985-07-26 四方弁

Country Status (1)

Country Link
JP (1) JPS6228576A (h)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076647A (en) 1997-09-29 2000-06-20 Interroll Holding Ag Stub shaft conveyor roller

Also Published As

Publication number Publication date
JPS6228576A (ja) 1987-02-06

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