JPH03149739A - X-ray image tube and manufacture thereof - Google Patents
X-ray image tube and manufacture thereofInfo
- Publication number
- JPH03149739A JPH03149739A JP28800289A JP28800289A JPH03149739A JP H03149739 A JPH03149739 A JP H03149739A JP 28800289 A JP28800289 A JP 28800289A JP 28800289 A JP28800289 A JP 28800289A JP H03149739 A JPH03149739 A JP H03149739A
- Authority
- JP
- Japan
- Prior art keywords
- input window
- input
- ray image
- image tube
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000463 material Substances 0.000 claims abstract description 36
- 238000007740 vapor deposition Methods 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 13
- 230000000694 effects Effects 0.000 description 11
- 239000000758 substrate Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Abstract
Description
［発明の目的］
（産業上の利用分野）
この発明は、ＸＩＩイメージ管及びその製造方法に関す
る。
（従来の技術）
一般に、蛍光面を内蔵するＸ線イメージ管は、医療用を
主に工業用非破壊検査などＸＩＩ工業テレビを併用して
広範囲に応用されている。
この種のＸ線イメージ管は第２図に示すように構成され
、主としてＡＩなどの薄い金属からなる真空外囲器１の
入力側内部に、入力窓１ａに対向して入力面ｌが配設さ
れている。一方、真空外囲器１の出力側内部には、陽極
３が配設されると共に出力面迭が設けられ、更に真空外
囲器１内部の側壁に沿って集束電極５が配設されている
。
入力面Ｚは、球面状のＡｌからなる基板６の出力側（凹
面側）にＣｓｉｌの人力蛍光体層７が形成され、この人
力蛍光体層７上に更に光電面８が形成されている。又、
出方面迭は、基板９に出方蛍光体層１０を形成してなっ
ている。
そして動作時には、Ｘｌｌ（図示せず）が被写体（図示
せず）を遥遇する際、被写体のＸ線透過率によって変調
されて、人力蛍光体Ｎ７を励起する。
この人力蛍光体層７の励起光は、人力蛍光体層７の内面
に形成されている光電面８にエネルギーを与え、光電面
８より電子を放出させる。この電子は陽極３、集束電極
５で構成される電子レンズ作用により出力蛍光体層１０
上に加速・集束され、出力蛍光体層１０を発光させる。
このような過程で電子の増倍が行なわれ、入力蛍光体層
７で得られる光像より格段に明るい像が出力蛍光体層１
０上に得られる。
（発明が解決しようとする課題）
ところで、上記のようなＸ線イメージ管における入力窓
１ａの材質は、従来、ガラスが用いられていた。しかし
、 Ｘｌｌ！＝透過率の向上と散乱Ｘ線の減少のため、
最近では入力窓１ａの材質としてＡｌなどの薄い金属が
用いられるようになった。
ところが、最近のｘＩｌ診断技術の高度化に伴い、Ａｌ
製入力窓１ａから発生する散乱Ｘ線が無視出来なくなっ
ており、一層の改善が求められている。
この発明は、散乱Ｘ線を除去して、優れたコントラスト
と高い真空度を維持することが出来るＸ線イメージ管及
びその製造方法を提供することを■的とする。[Object of the Invention] (Industrial Application Field) The present invention relates to an XII image tube and a manufacturing method thereof. (Prior Art) In general, X-ray image tubes with a built-in phosphor screen are widely used for medical purposes, mainly for industrial non-destructive testing, in combination with XII industrial televisions. This type of X-ray image tube is constructed as shown in Fig. 2, and an input surface 1 is disposed inside the input side of a vacuum envelope 1 mainly made of a thin metal such as AI, facing an input window 1a. has been done. On the other hand, inside the output side of the vacuum envelope 1, an anode 3 is provided and an output surface is provided, and a focusing electrode 5 is further provided along the side wall inside the vacuum envelope 1. . On the input surface Z, a Csil human-generated phosphor layer 7 is formed on the output side (concave side) of a spherical Al substrate 6, and a photocathode 8 is further formed on this human-generated phosphor layer 7. or,
The output side is formed by forming an output phosphor layer 10 on a substrate 9. During operation, when Xll (not shown) looks at a subject (not shown), it is modulated by the X-ray transmittance of the subject and excites the human-powered phosphor N7. This excitation light of the human-generated phosphor layer 7 gives energy to the photocathode 8 formed on the inner surface of the human-generated phosphor layer 7, causing the photocathode 8 to emit electrons. These electrons are transferred to the output phosphor layer 10 by the action of an electron lens composed of an anode 3 and a focusing electrode 5.
The light is accelerated and focused upward, causing the output phosphor layer 10 to emit light. In this process, electrons are multiplied, and an image much brighter than the light image obtained in the input phosphor layer 7 is output from the output phosphor layer 1.
Obtained above 0. (Problems to be Solved by the Invention) By the way, glass has conventionally been used as the material for the input window 1a in the above-mentioned X-ray image tube. However, Xll! = Due to improved transmittance and reduced scattered X-rays,
Recently, thin metals such as Al have come to be used as the material for the input window 1a. However, with the recent advancement of xIl diagnostic technology, Al
Scattered X-rays generated from the manufactured input window 1a can no longer be ignored, and further improvements are required. An object of this invention is to provide an X-ray image tube that can remove scattered X-rays and maintain excellent contrast and a high degree of vacuum, and a method for manufacturing the same.
（課題を解決するための手段）
この発明は、真空外囲器の入力窓に対向して入力面が配
設されてなるＸ線イメージ管において、上記入力窓と上
記入力面との間に、入力窓の材質よりも原子番号の大き
い材質からなる蒸着層が設けられてなるＸ線イメージ管
である。
又、この発明は、真空外囲器の入力窓に対向して入力面
を配設したＸ線イメージ管の製造方法において、上記入
力面の周囲に配置した抵抗加熱構体に蒸着材料を取付け
、通電加熱により該蒸着材料を蒸発・飛散させ、上記入
力窓と上記入力面との間に、上記入力窓の材質よりも原
子番号の大きい材質からなる蒸着層を設けるＸ線イメー
ジ管の製造方法である。
（作 用）
この発明によれば、入力窓と入力面との間に、入力窓の
材質よりも原子番号の大きい材質からなる蒸着層が設け
られているので、散乱Ｘ線を吸収し、且つ管内ガスを吸
着することが出来る。
この結果、優れたコントラストと高い真空度を維持する
Ｘ線イメージ管が得られる。
（実施例）
以下、図面を参照して、この発明の一実施例に係るＸ線
イメージ管及びその製造方法を詳細に説明する。
この発明はＸ線イメージ管の入力窓及び入力面付近を改
良したもので、入力窓及び入力面付近についてのみ述べ
ることにする。
即ち、この発明によるＸ線イメージ管の入力窓及び入力
面付近は第１図に示すように構成され、従来例（第２図
）と同一箇所は同一符号を付すことにすると、真空外囲
器１内には、その一部を構成する入力窓１ａに対向して
、入力面ｌが真空気密保持用の金属リング１ｂ、ＩＣを
介し所定間隔をおいて配設されている。
この入力面２は、従来と同様に、球面状のＡｌからなる
基板６の出力側（凹面ＩＩ）にＣ８１の人力蛍光体層７
が形成され、この人力蛍光体層７上に更に充電面（省略
）が形成されてなっている。
更にこの発明では、入力窓１！１の内面に蒸着層１１が
形成され、又、入力面２の入力端の面即ち基板６の入力
端の面に蒸着層１１に対向して蒸着層１２が形成されて
いる。つまり、入力窓１ａと入力面２との間に、蒸着層
１１．１２が設けられている。
この場合、各蒸着層１１．１２は入力窓１ａの材質より
も原子番号の大きい材質からなっており、この実施例の
ように入力窓１ａの材質がＡＩの場合は、各蒸着層１１
．１２の材質は、例えばＴｉｌＭｎ、Ｃｒ、Ｆ ｅ ％
Ｎ ｔ １Ｃｕ ％ Ｂ ｒ、Ｚｒ。
Ａｇ、Ｃｄ、Ｓｎ、ＳｂＢａ％Ｃｓ％Ｉ、Ｐｔなどの単
体又は混合物である。
このような各蒸着層１１．１２の形成に当たっては、入
力面２の周囲に配置した少なくとも１つの抵抗加熱構体
１３に蒸着材料１４を取付け、通電加熱によりこの蒸着
材料１４を蒸発・飛散させ、入力窓１ａ内面と入力面Ｚ
の基板６にそれぞれ上記の材質からなる蒸着層１１．１
２を形成する。
この場合、複数の抵抗加熱構体１３を用いる時は、はぼ
等間隔に配設して均等に蒸着層が形成されるようにする
方が良い。
さて、動作時において入射Ｘ線は、入力窓１ａを通過す
る際に、散乱Ｘ線を発生する。この散乱Ｘ線は入射Ｘ線
よりＸ線エネルギが低い所に分布する。
しかし、この発明では前述のように入力窓１ａの材質よ
り大きい原子番号の材質を適切に選ぶことにより、Ｘａ
エネルギの低い方でＸ線吸収率を大きくすることが出来
る。このため、入力窓１ａで発生した散乱Ｘ線を除去す
る効果があり、コントラストの優れたＸ線画像を得るこ
とが可能である。
ところで、蒸着層１１，１２は、入力窓１ａを真空外囲
器本体に組込む前に形成することにより、同等の効果が
得られる。しかし、この場合、一旦空気に触れることに
よりガスを吸着してしまう。
そこで、この発明ではこれを防ぐために、Ｘ線イメージ
管の真空排気工程中、又は真空排気工程後の高い真空度
の状態で真空蒸着を行なわせることにより、ガス付着の
少ない状態の蒸着層１１．１２を作ることが出来る。
従って、その後、この蒸着層１１．１２は管内の放出ガ
スの吸着作用を有することにより、散乱Ｘ線の除去効果
とガス吸着作用即ちゲッタ効果を併せて有することが出
来る。
尚、蒸着層１１は、入力窓１ａの全面に亘って形成した
時が、最も効果が大きい。しかし、周辺部だけでも、周
辺の真空外囲器部からの散乱Ｘ線の除去効果が得られる
。又、遮蔽板を付けて中心部のみ重点的に蒸着した場合
には、入力窓１ａの中心部からの散乱Ｘ線を除去する効
果以外に、中心部のＸ線を減衰させる効果も有している
ため、シェーディングを補正する効果も併せ持たせるこ
とも可能である。
この発明のＸ線イメージ管は、上記以外の全体構造は従
来例（第２図）と同様構成ゆえ、詳細な説明を省略する
。
［発明の効果］
この発明によれば、入力窓と入力面との間に、入力窓の
材質よりも原子番号の大きい材質からなる蒸着層が設け
られているので、散乱Ｘ線を吸収し、且つ管内ガスを吸
着することが出来る。
この結果、優れたコントラストと高い真空度を維持する
Ｘ線イメージ管が得られる。(Means for Solving the Problems) The present invention provides an X-ray image tube in which an input surface is disposed opposite to an input window of a vacuum envelope, in which between the input window and the input surface, This is an X-ray image tube provided with a vapor deposited layer made of a material with a higher atomic number than the material of the input window. The present invention also provides a method for manufacturing an X-ray image tube in which an input surface is disposed opposite to an input window of a vacuum envelope, in which a vapor deposition material is attached to a resistance heating structure disposed around the input surface, and energization is performed. A method for manufacturing an X-ray image tube, in which the vapor deposition material is evaporated and scattered by heating, and a vapor deposition layer made of a material having a higher atomic number than the material of the input window is provided between the input window and the input surface. . (Function) According to this invention, since the vapor deposition layer made of a material having a higher atomic number than the material of the input window is provided between the input window and the input surface, it absorbs scattered X-rays and It can adsorb gas inside the pipe. The result is an X-ray image tube that maintains excellent contrast and a high degree of vacuum. (Example) Hereinafter, an X-ray image tube and a manufacturing method thereof according to an example of the present invention will be described in detail with reference to the drawings. This invention improves the input window and input surface area of an X-ray image tube, and only the input window and input surface area will be described. That is, the input window and the vicinity of the input surface of the X-ray image tube according to the present invention are constructed as shown in FIG. 1, and the same parts as in the conventional example (FIG. 2) are given the same symbols. 1, an input surface 1 is disposed at a predetermined interval through a vacuum-tight metal ring 1b and an IC, facing an input window 1a forming a part of the input window 1a. This input surface 2 has a C81 artificial phosphor layer 7 on the output side (concave surface II) of a spherical Al substrate 6, as in the conventional case.
is formed, and a charging surface (not shown) is further formed on this human-powered phosphor layer 7. Furthermore, in this invention, a vapor deposition layer 11 is formed on the inner surface of the input window 1!1, and a vapor deposition layer 12 is formed on the input end surface of the input surface 2, that is, the input end surface of the substrate 6, opposite to the vapor deposition layer 11. It is formed. That is, the vapor deposition layers 11 and 12 are provided between the input window 1a and the input surface 2. In this case, each vapor deposition layer 11, 12 is made of a material with a higher atomic number than the material of the input window 1a, and when the material of the input window 1a is AI as in this embodiment, each vapor deposition layer 11.
．． The material of No. 12 is, for example, TilMn, Cr, Fe%
N t 1Cu % B r, Zr. It is a single substance or a mixture of Ag, Cd, Sn, SbBa%Cs%I, Pt, etc. In forming each of the vapor deposition layers 11 and 12, a vapor deposition material 14 is attached to at least one resistance heating structure 13 arranged around the input surface 2, and the vapor deposition material 14 is evaporated and scattered by electrical heating. Inner surface of window 1a and input surface Z
A vapor deposited layer 11.1 made of the above-mentioned material is deposited on each of the substrates 6.
form 2. In this case, when using a plurality of resistance heating structures 13, it is better to arrange them at approximately equal intervals so that the vapor deposition layer is evenly formed. Now, during operation, incident X-rays generate scattered X-rays when passing through the input window 1a. The scattered X-rays are distributed in areas where the X-ray energy is lower than that of the incident X-rays. However, in this invention, as described above, by appropriately selecting a material with a larger atomic number than the material of the input window 1a, Xa
The X-ray absorption rate can be increased with lower energy. Therefore, there is an effect of removing scattered X-rays generated at the input window 1a, and it is possible to obtain an X-ray image with excellent contrast. By the way, the same effect can be obtained by forming the vapor deposition layers 11 and 12 before incorporating the input window 1a into the vacuum envelope body. However, in this case, gas is adsorbed once it comes into contact with air. Accordingly, in the present invention, in order to prevent this, vacuum deposition is performed at a high degree of vacuum during or after the vacuum evacuation process of the X-ray image tube, thereby reducing the amount of gas adhering to the vapor deposited layer 11. You can make 12. Therefore, after this, the vapor deposited layers 11, 12 have an effect of adsorbing the gas emitted within the tube, so that they can have both the effect of removing scattered X-rays and the effect of adsorbing gas, that is, the getter effect. Note that the vapor deposition layer 11 is most effective when formed over the entire surface of the input window 1a. However, the effect of removing scattered X-rays from the peripheral vacuum envelope portion can be obtained only in the peripheral portion. In addition, when a shielding plate is attached and the vapor deposition is focused only on the central part, in addition to the effect of removing scattered X-rays from the central part of the input window 1a, it also has the effect of attenuating the X-rays in the central part. Therefore, it is also possible to have the effect of correcting shading. The overall structure of the X-ray image tube of the present invention other than the above is similar to that of the conventional example (FIG. 2), and therefore detailed description thereof will be omitted. [Effects of the Invention] According to the present invention, since the vapor deposition layer made of a material having a higher atomic number than the material of the input window is provided between the input window and the input surface, it absorbs scattered X-rays, Moreover, it can adsorb gas inside the pipe. The result is an X-ray image tube that maintains excellent contrast and a high degree of vacuum.
第１図はこの発明の一実施例に係るＸ線イメージ管の要
部を示す断面図、第２図は従来のＸ線イメージ管の全体
を概略的に示す断面図である。
１・・・真空外囲器、１ａ・・・入力窓、ｌ・・一入力
面、１１、．１２・・−蒸着層、１３・・・抵抗加熱溝
体、１４・−・蒸着材料。
出願人代理人 弁理士 鈴江武彦
１ｂ ｌｃ １３抵抗加熱構体 １真空外
ｍｔｓ叉（／ ／
第１図FIG. 1 is a cross-sectional view showing essential parts of an X-ray image tube according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view schematically showing the entire conventional X-ray image tube. DESCRIPTION OF SYMBOLS 1... Vacuum envelope, 1a... Input window, l... One input surface, 11, . 12... Vapor deposition layer, 13... Resistance heating groove body, 14... Vapor deposition material. Applicant's representative Patent attorney Takehiko Suzue 1b lc 13 resistance heating structure 1 outside vacuum mts fork (/ / Fig. 1
Claims (2)
てなるＸ線イメージ管において、上記入力窓と上記入力
面との間に、上記入力窓の材質よりも原子番号の大きい
材質からなる蒸着層が設けられてなることを特徴とする
Ｘ線イメージ管。(1) In an X-ray image tube in which an input surface is disposed opposite to an input window of a vacuum envelope, there is a material between the input window and the input surface that has an atomic number higher than that of the material of the input window. An X-ray image tube characterized by being provided with a vapor deposited layer made of a large material.
Ｘ線イメージ管の製造方法において、上記入力面の周囲
に配置した抵抗加熱構体に蒸着材料を取付け、通電加熱
により該蒸着材料を蒸発・飛散させ、上記入力窓と上記
入力面との間に、上記入力窓の材質よりも原子番号の大
きい材質からなる蒸着層を設けることを特徴とするＸ線
イメージ管の製造方法。(2) In a method for manufacturing an X-ray image tube in which an input surface is disposed opposite to the input window of a vacuum envelope, a vapor deposition material is attached to a resistance heating structure disposed around the input surface, and the vapor deposition material is heated by electrical heating. A method for manufacturing an X-ray image tube, characterized in that a vapor deposition material is evaporated and scattered, and a vapor deposition layer made of a material having a higher atomic number than the material of the input window is provided between the input window and the input surface. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1288002A JPH0810584B2 (en) | 1989-11-07 | 1989-11-07 | X-ray image tube and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1288002A JPH0810584B2 (en) | 1989-11-07 | 1989-11-07 | X-ray image tube and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03149739A true JPH03149739A (en) | 1991-06-26 |
| JPH0810584B2 JPH0810584B2 (en) | 1996-01-31 |
Family
ID=17724537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1288002A Expired - Lifetime JPH0810584B2 (en) | 1989-11-07 | 1989-11-07 | X-ray image tube and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810584B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS576785A (en) * | 1980-06-17 | 1982-01-13 | Tokyo Electric Co Ltd | Driving device for ink ribbon of printer |
| JPH01166442A (en) * | 1987-11-24 | 1989-06-30 | Philips Gloeilampenfab:Nv | X-ray image intensifier |
-
1989
- 1989-11-07 JP JP1288002A patent/JPH0810584B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS576785A (en) * | 1980-06-17 | 1982-01-13 | Tokyo Electric Co Ltd | Driving device for ink ribbon of printer |
| JPH01166442A (en) * | 1987-11-24 | 1989-06-30 | Philips Gloeilampenfab:Nv | X-ray image intensifier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0810584B2 (en) | 1996-01-31 |
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