JPH0314956Y2 - - Google Patents
Info
- Publication number
- JPH0314956Y2 JPH0314956Y2 JP1984087524U JP8752484U JPH0314956Y2 JP H0314956 Y2 JPH0314956 Y2 JP H0314956Y2 JP 1984087524 U JP1984087524 U JP 1984087524U JP 8752484 U JP8752484 U JP 8752484U JP H0314956 Y2 JPH0314956 Y2 JP H0314956Y2
- Authority
- JP
- Japan
- Prior art keywords
- driving means
- electrode plate
- piezoelectric
- wall
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8752484U JPS612787U (ja) | 1984-06-12 | 1984-06-12 | 駆動用圧電装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8752484U JPS612787U (ja) | 1984-06-12 | 1984-06-12 | 駆動用圧電装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS612787U JPS612787U (ja) | 1986-01-09 |
| JPH0314956Y2 true JPH0314956Y2 (instruction) | 1991-04-02 |
Family
ID=30639821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8752484U Granted JPS612787U (ja) | 1984-06-12 | 1984-06-12 | 駆動用圧電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS612787U (instruction) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4689810B2 (ja) * | 2000-10-19 | 2011-05-25 | セイコーインスツル株式会社 | 圧電アクチュエータの製造方法、圧電アクチュエータ、電子機器および光情報通信機器 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138361U (ja) * | 1982-03-11 | 1983-09-17 | セイコーインスツルメンツ株式会社 | 位置合わせ装置 |
-
1984
- 1984-06-12 JP JP8752484U patent/JPS612787U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS612787U (ja) | 1986-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2200102B1 (de) | Antriebseinheit | |
| JP2839543B2 (ja) | 変位発生装置 | |
| JP4455329B2 (ja) | 電気機械モータの高精度制御 | |
| JP2722211B2 (ja) | 超音波駆動装置 | |
| JPH0314956Y2 (instruction) | ||
| JPH0318434B2 (instruction) | ||
| JPH0314955Y2 (instruction) | ||
| JPH036153Y2 (instruction) | ||
| JPS60148390A (ja) | 駆動用圧電装置 | |
| JPS6285682A (ja) | 圧電駆動機構 | |
| JPH0520633B2 (instruction) | ||
| JPH07249392A (ja) | チューブスキャナおよびこれを備えたアクチュエータ | |
| JPH06121552A (ja) | 圧電アクチュエータ | |
| JPH05252766A (ja) | 圧電アクチュエータ | |
| JPH02206376A (ja) | 静電形多次元アクチュエータ | |
| JPH05115185A (ja) | 圧電アクチユエータ | |
| JP2607560B2 (ja) | リニアアクチュエータ | |
| JPH06106029B2 (ja) | 超音波モータ | |
| JPS60255069A (ja) | 駆動用圧電装置 | |
| JPS60219972A (ja) | 積層型圧電素子を利用した微動装置 | |
| JPH10118874A (ja) | 微小距離駆動機構 | |
| JPS61183981A (ja) | 圧電体変位装置 | |
| JPH0591764A (ja) | 圧電アクチユエータ | |
| JPS611279A (ja) | 駆動用圧電装置 | |
| JPH0591766A (ja) | 圧電アクチユエータ |