JPH031426U - - Google Patents

Info

Publication number
JPH031426U
JPH031426U JP6013889U JP6013889U JPH031426U JP H031426 U JPH031426 U JP H031426U JP 6013889 U JP6013889 U JP 6013889U JP 6013889 U JP6013889 U JP 6013889U JP H031426 U JPH031426 U JP H031426U
Authority
JP
Japan
Prior art keywords
concave portion
susceptor
hole
epitaxial growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6013889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6013889U priority Critical patent/JPH031426U/ja
Publication of JPH031426U publication Critical patent/JPH031426U/ja
Pending legal-status Critical Current

Links

JP6013889U 1989-05-23 1989-05-23 Pending JPH031426U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6013889U JPH031426U (enrdf_load_stackoverflow) 1989-05-23 1989-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6013889U JPH031426U (enrdf_load_stackoverflow) 1989-05-23 1989-05-23

Publications (1)

Publication Number Publication Date
JPH031426U true JPH031426U (enrdf_load_stackoverflow) 1991-01-09

Family

ID=31587238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6013889U Pending JPH031426U (enrdf_load_stackoverflow) 1989-05-23 1989-05-23

Country Status (1)

Country Link
JP (1) JPH031426U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031964U (ja) * 1983-08-11 1985-03-04 不二越機械工業株式会社 ウエハ−ポリッシング装置用重り構造
JP2008529566A (ja) * 2005-02-08 2008-08-07 レキスポルト アーゲー ポールグリップ
KR20210142337A (ko) * 2020-05-18 2021-11-25 임춘옥 레이스웨이 조립체

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031964U (ja) * 1983-08-11 1985-03-04 不二越機械工業株式会社 ウエハ−ポリッシング装置用重り構造
JP2008529566A (ja) * 2005-02-08 2008-08-07 レキスポルト アーゲー ポールグリップ
KR20210142337A (ko) * 2020-05-18 2021-11-25 임춘옥 레이스웨이 조립체

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