JPH031426U - - Google Patents
Info
- Publication number
- JPH031426U JPH031426U JP6013889U JP6013889U JPH031426U JP H031426 U JPH031426 U JP H031426U JP 6013889 U JP6013889 U JP 6013889U JP 6013889 U JP6013889 U JP 6013889U JP H031426 U JPH031426 U JP H031426U
- Authority
- JP
- Japan
- Prior art keywords
- concave portion
- susceptor
- hole
- epitaxial growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6013889U JPH031426U (OSRAM) | 1989-05-23 | 1989-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6013889U JPH031426U (OSRAM) | 1989-05-23 | 1989-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031426U true JPH031426U (OSRAM) | 1991-01-09 |
Family
ID=31587238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6013889U Pending JPH031426U (OSRAM) | 1989-05-23 | 1989-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031426U (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031964U (ja) * | 1983-08-11 | 1985-03-04 | 不二越機械工業株式会社 | ウエハ−ポリッシング装置用重り構造 |
| JP2008529566A (ja) * | 2005-02-08 | 2008-08-07 | レキスポルト アーゲー | ポールグリップ |
| KR20210142337A (ko) * | 2020-05-18 | 2021-11-25 | 임춘옥 | 레이스웨이 조립체 |
-
1989
- 1989-05-23 JP JP6013889U patent/JPH031426U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031964U (ja) * | 1983-08-11 | 1985-03-04 | 不二越機械工業株式会社 | ウエハ−ポリッシング装置用重り構造 |
| JP2008529566A (ja) * | 2005-02-08 | 2008-08-07 | レキスポルト アーゲー | ポールグリップ |
| KR20210142337A (ko) * | 2020-05-18 | 2021-11-25 | 임춘옥 | 레이스웨이 조립체 |