JPH03141130A - Production of silica glass lump - Google Patents
Production of silica glass lumpInfo
- Publication number
- JPH03141130A JPH03141130A JP28010989A JP28010989A JPH03141130A JP H03141130 A JPH03141130 A JP H03141130A JP 28010989 A JP28010989 A JP 28010989A JP 28010989 A JP28010989 A JP 28010989A JP H03141130 A JPH03141130 A JP H03141130A
- Authority
- JP
- Japan
- Prior art keywords
- silica glass
- quartz glass
- heating
- sized
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000002844 melting Methods 0.000 claims abstract description 11
- 230000008018 melting Effects 0.000 claims abstract description 11
- 238000010030 laminating Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 abstract description 17
- 239000011521 glass Substances 0.000 abstract description 7
- 238000007796 conventional method Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 239000011148 porous material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 239000007791 liquid phase Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 150000004703 alkoxides Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- -1 silicon Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/203—Uniting glass sheets
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明はＬＳＩ製造プロセス用ステッパー等に用いる紫
外線透過大型レンズの原料となる石英硝子塊の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing a quartz glass lump that is a raw material for a large ultraviolet-transparent lens used in a stepper for an LSI manufacturing process and the like.
［従来の技術］
従来、大型（１０ｃｍｘｌＯｃｍｘ５ｃｍ以上の大きさ
）の石英硝子塊は大別して、気相法、液相法及び溶融法
により製造されている。気相法は珪素などの水素化物、
ハロゲン化物あるいはアルコキシドを酸化あるいは還元
しながら堆積する方法であり、液相法は珪素などのアル
コキシドを用いて二酸化珪素のゲルを作製し焼結する方
法であり、溶融法は天然石英を粉砕して溶融し急冷する
方法である。[Prior Art] Conventionally, large quartz glass blocks (sizes of 10 cm x 1 O cm x 5 cm or more) have been roughly classified and manufactured by a vapor phase method, a liquid phase method, and a melting method. The gas phase method uses hydrides such as silicon,
This is a method in which a halide or alkoxide is deposited while being oxidized or reduced.The liquid phase method is a method in which a gel of silicon dioxide is created using an alkoxide such as silicon and sintered, and the fusion method is a method in which a gel of silicon dioxide is created using an alkoxide such as silicon and sintered. This method involves melting and rapidly cooling.
［発明が解決しようとする課題］ しかし、従来の技術では様々な問題点を有する。[Problem to be solved by the invention] However, the conventional techniques have various problems.
気相法では原料ガスが高価である。溶融法では天然石英
の純度に限界がある。液相法では大きな石英塊を作製す
る場合、ゲルを焼結する段階でひび割れを起こすことが
多い。そこで本発明は、薄い石英硝子板を積層して加熱
溶融することにより大型の無気泡石英硝子塊を作製する
ことを目的とするものである。In the gas phase method, the raw material gas is expensive. There is a limit to the purity of natural quartz in the melting method. When producing large quartz blocks using the liquid phase method, cracks often occur during the gel sintering stage. Therefore, an object of the present invention is to produce a large-sized bubble-free quartz glass block by laminating thin quartz glass plates and heating and melting them.
［課題を解決するための手段］
本発明の石英硝子塊の作製方法は、
予め製造しておいた石英硝子板を複数枚８を層し、加熱
により石英硝子に取り込まれる気体雰囲気中で加熱溶融
することを特徴とする。また加熱溶融中に加圧すること
を特徴とする。[Means for Solving the Problems] The method for producing a quartz glass block of the present invention includes layering a plurality of quartz glass plates 8 that have been manufactured in advance, and melting them by heating in a gas atmosphere that is incorporated into the quartz glass. It is characterized by It is also characterized by applying pressure during heating and melting.
［作用］
本発明の構成によれば、石英硝子板を積層して加熱溶融
して硝子塊にする際、各硝子板の間隙に存在する反応性
ガスが加熱及び加圧により硝子中に取り込まれ気泡は消
滅するのである。これにより、従来法では非常に困難で
あった気泡の存在しない大型石英硝子塊を容易に作製で
きるようになった。[Function] According to the configuration of the present invention, when quartz glass plates are stacked and heated and melted to form a glass lump, the reactive gas present in the gaps between each glass plate is taken into the glass by heating and pressurization. The bubbles disappear. As a result, it has become possible to easily produce large quartz glass blocks without bubbles, which was extremely difficult using conventional methods.
以下、実施例により本発明の詳細を示す。Hereinafter, the details of the present invention will be shown by examples.
［実施例１］
厚さ５ｍｍＸ縦１５ｃｍｘ横１５ｃｍの石英硝子板を１
０枚重ねてＳ ｉ Ｈａガス中で１７００°Ｃにて加熱
溶融した。硝子が溶融した時点で加圧（５気圧）して気
泡をつぶした。冷却後常圧に戻し研磨して４．５ｃｍｘ
１４．５ｃｍｘ１４．５ｃｍの無気泡石英硝子塊を得た
。[Example 1] One quartz glass plate 5 mm thick x 15 cm long x 15 cm wide
0 sheets were stacked and heated and melted at 1700°C in S i Ha gas. When the glass melted, pressure was applied (5 atm) to collapse the bubbles. After cooling, return to normal pressure and polish to 4.5cmx
A bubble-free quartz glass block of 14.5 cm x 14.5 cm was obtained.
［実施例２］
本実施例では加圧処理をしない場合について示す。厚さ
５ｍｍｘ縦１５ ｃｍｘ横１５ｃｍの石英硝子板を１０
枚重ねてＳ ｉ Ｈａガス中で１７００°Ｃにて加熱溶
融した。冷却後研磨して４．５ｃｍＸ１４．５ＣｍＸ１
４．５ｃｍの石英硝子塊を得た。[Example 2] In this example, a case will be described in which no pressure treatment is performed. 10 quartz glass plates 5 mm thick x 15 cm long x 15 cm wide
The sheets were stacked and heated and melted at 1700°C in S i Ha gas. After cooling, polish to 4.5cmX14.5CmX1
A quartz glass block of 4.5 cm was obtained.
わずかな気泡が残ったが加圧装置が必要ないので容易に
作製できる。A few air bubbles remained, but since no pressurizing device is required, it can be easily produced.
以上実施例を述べたが、用いた石英硝子板は気相法、液
相法あるいは溶融法いずれの方法で作製したものでもよ
い。加熱炉に充填するガスとしてはＳ ｉ Ｈａの他に
５ｉ２Ｈｓ、Ｂ ２ Ｈｓ、Ｇ ｅ Ｈ４等の水素化物
を利用できる。ハロゲン化物も利用できるが加熱炉がい
たみやすいので好ましくない。本発明は以上の実施例の
みならず、硝子中に層状に屈折率分布をつける方法とし
ても利用できる。Although the embodiments have been described above, the quartz glass plate used may be manufactured by any of the vapor phase method, liquid phase method, or melting method. In addition to S i Ha, hydrides such as 5i2Hs, B 2 Hs, and G e H4 can be used as the gas to fill the heating furnace. Halides can also be used, but are not preferred because they easily damage the heating furnace. The present invention can be used not only in the above embodiments but also as a method for creating a layered refractive index distribution in glass.
［発明の効果］
以上述べたように本発明によれば、薄い石英硝子板を積
層して反応ガス中で加熱溶融することにより大型の無気
泡石英硝子塊を作製することが可能となり安価な大型紫
外線透過レンズ材を供給することができるようになった
。[Effects of the Invention] As described above, according to the present invention, it is possible to produce a large, bubble-free quartz glass block by laminating thin quartz glass plates and heating and melting them in a reaction gas, thereby making it possible to produce a large, inexpensive quartz glass block. We are now able to supply ultraviolet-transparent lens materials.
以 上that's all
Claims (2)
より石英硝子に取り込まれる気体雰囲気中で加熱溶融す
ることを特徴とする石英硝子塊の製造方法。(1) A method for producing a large quartz glass block, which is characterized by laminating a plurality of quartz glass plates manufactured in advance and melting them by heating in a gas atmosphere that is introduced into the quartz glass by heating. How to make lumps.
項１記載の石英硝子塊の製造方法。(2) The method for producing a quartz glass lump according to claim 1, characterized in that pressurization is applied during the heating and melting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28010989A JPH03141130A (en) | 1989-10-27 | 1989-10-27 | Production of silica glass lump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28010989A JPH03141130A (en) | 1989-10-27 | 1989-10-27 | Production of silica glass lump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03141130A true JPH03141130A (en) | 1991-06-17 |
Family
ID=17620448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28010989A Pending JPH03141130A (en) | 1989-10-27 | 1989-10-27 | Production of silica glass lump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03141130A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006527162A (en) * | 2003-06-13 | 2006-11-30 | ジョー−ワン ハン、 | Ceramic bonding method: Reaction diffusion bonding |
| CH706648A1 (en) * | 2012-06-27 | 2013-12-31 | Engeler Ag Glaswelt | Three-dimensional molten glass body as a glass lamp body, comprises first glass wall having first side edge and second glass wall having second side edge, which are mutually arranged at an angle and are fused together |
-
1989
- 1989-10-27 JP JP28010989A patent/JPH03141130A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006527162A (en) * | 2003-06-13 | 2006-11-30 | ジョー−ワン ハン、 | Ceramic bonding method: Reaction diffusion bonding |
| CH706648A1 (en) * | 2012-06-27 | 2013-12-31 | Engeler Ag Glaswelt | Three-dimensional molten glass body as a glass lamp body, comprises first glass wall having first side edge and second glass wall having second side edge, which are mutually arranged at an angle and are fused together |
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