JPH03139159A - Pulse motor - Google Patents

Abstract

PURPOSE:To enhance the thrust by utilizing the total area at the edge of each pole, faced with a scale, effectively for generation of thrust and arranging permanent magnets such that the magnetic force thereof functions stronger toward the gap between the scale and the pole. CONSTITUTION:When current is fed through coils 25A, 35B, 25A' and 35B', flux flows from a pole tooth 24a at the S pole side of a magnetic pole in a primary flux generating section 22 into an N pole side pole tooth 24b, contiguous to the S pole side pole tooth 24a through a permanent magnet 26, thence flows into the tooth section 21a of a secondary scale 21. Furthermore, the flux flows from another tooth section 21a in the secondary scale 21 into the S pole side pole tooth 24a at the primary flux generating section 22 thence flows into an N pole side pole tooth 24A', contiguous to the S pole side pole tooth 24a through the permanent magnet 26, and returns to the original pole thus forming a main flux loop. Consequently, the total area of the pole teeth 24A, 34B, 24A' and 34B', facing with the secondary scale 21, can be utilized effectively for generation of thrust.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a pulse motor suitable for use in FA (factory automation) equipment that requires relatively large thrust, such as industrial robots. It is something.

"Prior Art" As is well known, a linear pulse motor moves a slider or a secondary scale in steps based on pulse signals supplied to each coil of the slider, which is the primary magnetic flux generating section. Yes, the configuration of the magnetic circuit is the first
As shown in Figure 8(a). In this figure, ■ is a secondary scale made of a long plate-like magnetic material, and the upper surface thereof has teeth 1 a, 1 a, ... along the longitudinal direction (left-right direction in the drawing). They are formed at equal intervals. A slider 2 is placed on the upper surface of the scale 1 and supported so as to be movable in the longitudinal direction of the scale 1 by a support mechanism including a U-shaped roller (not shown).

The slider 2 includes U-shaped A-phase iron core 4 and B-phase iron core 5, coils 6a and 6b wound around A-phase magnetic pole 4a and human-phase magnetic pole 4b of A-phase iron core 4, and coils 6a and 6b wound around B-phase iron core 5, respectively. A coil 7 wound around the B-phase magnetic pole 5a and the N-phase magnetic pole 5b, respectively.
a and 7b, permanent magnets 8 and 9 attached to the top surfaces of iron cores 4 and 5 with the polarities shown in the figure, and a back plate 10 composed of a plate-shaped magnetic body attached to the top surfaces of permanent magnets 8 and 9. It consists of The pitch of the teeth 1a of the scale 1 (
Formation interval) Three pole teeth 14a, 14a at the same pitch as P
f4a is formed, and other magnetic [i4b.

Similarly, pole teeth 1.4b and 1 are provided on the lower end surfaces of 5a and 5b.
5a+5b are each formed. In addition, each magnetic ff15
b4b5a are sequentially shifted by P//I with respect to the magnetic pole 4a, so that each magnetic pole 4a, 4b, 5a,
5b have a positional relationship in which the phases are different from each other by 90 degrees. Furthermore, each pole tooth 14al 4b, I 5a.

A predetermined gap G is formed between the lower end surface of +5b and the upper end surface of the valley portion 1a.

And coils 6a, 6b,? By sequentially supplying predetermined pulse signals to coils 6a, 6b, and 7b,
The magnetic flux generated by the magnetic poles 4 a, 7 b and the magnetic flux generated by the permanent magnets 8 and 9 are connected to each magnetic pole 4 a, 4 b, 5 a,
At 5 b, the magnetic stability position of the slider 2 with respect to the scale I is sequentially moved by application ≦λ, and the slider 2 moves along the longitudinal direction of the scale 1. Here, the coils 6 a, 6 Supplying current to either the group b or one of the coils 7a and 7b.
The case where the slider 2 is driven by the conventional excitation method will be explained as an example.

■As shown in Figure 18(a), coils 6a and 6b
When a predetermined current is passed from the terminal 6C to the terminal 6d, the magnetic flux generated by the coil 6a and the magnetic flux generated by the permanent magnet 8 add to each other at the A-phase magnetic pole 4a, and cancel each other at the in-phase magnet ff14b. A main magnetic flux loop indicated by the dotted line φ1 is generated in the figure, and as a result, as shown in the figure, each pole tooth 14a of the A phase @ K 4 a and the tooth part 1 of the scale l
The position where a is vertically opposed is a magnetically stable position.

■As shown in FIG. 18(b), by passing a predetermined current through the coils 7a and 7b from terminal 7c to 7d,
A main magnetic flux loop is generated as shown by the dotted line φ in the figure, and as a result,
As shown in the figure, the position where each pole tooth 15b of @W5b and the tooth portion 1a are vertically opposed is a magnetically stable position.

■As shown in Figure 18(c), by passing a predetermined current through the coils 6a and 6b in the opposite direction to ■, the dotted line φ3
A main magnetic flux loop shown by is generated, and as a result, the position where each pole tooth 14b of the magnetic pole 4b and the tooth portion 1a vertically face each other becomes a magnetically stable position.

■As shown in Figure 18(d), coils 7a and 7b
By passing a predetermined current in the opposite direction to ■, a main magnetic flux loop is generated as indicated by the dotted line φ4 in the figure, and as a result, the magnetic pole 5
The position where each of the pole teeth 15a and the tooth portion 1a face each other vertically is a magnetically stable position.

By repeating pulse excitation in the order of the above excitation modes ■-■-■-■, the slider 2 moves stepwise in the left direction in the drawing, that is, in the direction from the magnetic pole 5b to 4a, and ■-〇-■- By repeating pulse excitation in the order of each excitation mode (2), the slider 2 moves stepwise in the right direction in the drawing, that is, in the direction from m K 4 a to 5 b.

The same applies to the case where the slider 2 is fixed and the scale 1 is moved.

``Problems to be Solved by the Invention'' By the way, linear pulse motors are generally used for driving carriages of printers in OA (office automation) equipment because they are capable of highly accurate 1π determination in oven loops. However, because large thrusts cannot be obtained, it has been difficult to apply them to FA equipment that requires relatively large thrusts, such as industrial robots. That is, in the linear pulse motor described above,
As shown in FIGS. 18(a) to 18(d), the magnetic flux generated by the coil 6a or 7a and the magnetic flux generated by the permanent magnet 8.9 in one human-phase magnetic pole 4a or B-phase magnetic pole 5a are added together, During the period when thrust is being generated, in the other human-phase magnetic pole 4b or 0-phase magnetic pole 5b, the magnetic flux generated by the coil 6b or 7b and the magnetic flux generated by the permanent magnet 8.9 cancel each other out, and thrust is generated. The structure is such that it does not. On the contrary, it seems that the incoming phase magnetic pole 41) is the 0 phase magnetic pole 5.
During the period when thrust is generated at b, A phase separation K 4 a
Alternatively, the B-phase magnetic pole 5a has a structure in which no thrust is generated.

Therefore, the thrust generation area that actually contributes to thrust generation is
This is only 50% of the total area of the thrust force, and expanding this thrust generating area has become an important issue when trying to improve thrust force. Furthermore, in the conventional linear pulse smoke, since the permanent magnets 8.9 are arranged at a location away from the gap G, a part of the magnetic flux generated by these permanent magnets 8.9 becomes leakage magnetic flux. There was also the problem that it was not effectively used for generating thrust.

This invention was made in view of the above-mentioned circumstances, and the total area of the end face of each magnetic pole facing the scale is effectively used for generating thrust, and the magnetic force of the permanent magnet increases as it approaches the gap between the scale and the scale. The purpose of the present invention is to provide a pulse motor that has a 114-piece construction to increase its thrust.

"Means for Solving the Problems" The present invention includes a secondary scale in which teeth are formed at equal intervals P along a specific direction, and a secondary scale that is supported movably in the specific direction with respect to the secondary scale. and a primary magnetic flux generating part, which sequentially applies magnetic flux to each gap formed between each magnetic pole around which a coil of the primary magnetic flux generating part is wound and each tooth part of the secondary scale. In a pulse motor that moves the primary magnetic flux generating section relative to the secondary scale by generating a , forming pole teeth and grooves alternately at a constant interval P/2 along the specific direction, and inserting and arranging permanent magnets into each groove so that the polarities of adjacent ones are opposite to each other, and ,
The width dimension of each of the groove portions and each of the permanent magnets along the specific direction is made larger as it approaches each end face.

1 Effect" According to the above configuration, when a current is passed through the coil wound around each magnetic pole, the primary side magnetic flux generating part is arranged from the pole tooth on the S pole side to the groove part of the @ pole, and the permanent magnet is After flowing into the adjacent pole teeth on the NW side, it flows into the teeth of the secondary scale, and then flows from another tooth of the secondary scale to the S pole side of the magnetic pole of the primary magnetic flux generating section. A main magnetic flux loop is formed that flows into the tooth, flows into the adjacent NW side pole tooth via the permanent magnet placed in the groove of the magnetic pole, and then returns to the original magnetic pole, so that the magnetic flux is opposite to the secondary scale. The total area of each magnetic pole can be effectively used for thrust generation, and the closer the magnetic force of each permanent magnet is to the gap with the scale, the thicker it becomes can be kept to a minimum.

"Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing the configuration of a magnetic circuit of a linear pulse motor according to a first embodiment of the present invention.

In this figure, reference numeral 21 denotes a fixed scale, and tooth portions 21a, 2Ia, .

On the other hand, 22 is a slider (primary side magnetic flux generation part), and scale 2 is moved by a support mechanism (not shown) such as a roller. It is supported so as to be movable in the longitudinal direction (direction of arrow M shown in the figure). The slider 22 is composed of an A-phase block 23 and a B-phase block 33, which are connected to each other in the positional relationship shown in the figure.

The A-phase block 23 includes a U-shaped iron core 24 having an A-phase magnetic pole 24A and an in-phase magnetic pole 248, each facing the tooth portion 21a of the scale 2I with a certain gap G therebetween, and each magnetic pole 24.
It consists of 25 coils 25A and 25 wound around A and 24A, respectively, and on each end face facing the scale 2■ to each magnetic pole 24A and 24, there are fixed intervals along the direction of arrow M. Pole teeth 24a and recesses M24b are alternately formed at P/2, and permanent magnets 26 are inserted in each N24b so that the polarities of adjacent ones are opposite to each other. In this case, the width dimension of each time MT 24 b and each permanent magnet 26 along the arrow M direction is equal to the scale 21
The permanent magnet 26 becomes larger as it approaches each end face facing the , and each permanent magnet 26 is formed into a trapezoidal shape (trapezoidal cross section) when viewed from the front.

Similarly, the B phase block 33 has a B phase separation [34B and a 0 phase magnetic pole
fi, a U-shaped iron core 34, each magnetic pole 34B,
34 Q, each end face of each magnetic pole 34B, 341m facing the scale 21 is provided with pole teeth at regular intervals P/2 along the direction of arrow M. 34a and grooves 34b are formed alternately, and permanent magnets 26 are inserted into each groove 34b so that the polarities of adjacent magnets 34a and 34b are opposite to each other. In this case, similarly to A coffin block 23, each time! The width dimension of M 34 b and each permanent magnet 26 along the direction of arrow M increases as it approaches each end face facing the scale 2I, and each permanent magnet 26 is formed to have a trapezoidal cross section.

The relative positional relationship of each magnetic pole of these A4 (T block 23 and B phase block 33 is as follows. In other words, when A phase @ pole 24A is taken as a reference, the 24 in-phase magnetic poles are (2P +
B phase magnetic pole 34 B (5P +
PI3) The distance L and the 13th phase M pole 34rF are located at a distance of (7P+3·PI3).

As a result, magnetic poles 34 A, 34 B, 24 people, 34 B
In this order, the phase relationship with each tooth 21a of the scale 2I is displaced by PI3 in the moving direction (arrow M direction), and for example, as shown in the figure, each pole tooth 2 of the A-phase magnetic pole 24A
4a and the first new part 2fa of the scale 21, each pole tooth 34a of the B-phase magnetic W34 [3 is in contact with the tooth part 21a.
Each pole tooth 24a of the human-phase magnetic pole 24 is displaced P/2 from the tooth portion 21a, and each pole tooth 3 of the B-phase magnetic pole 34 etc.
4a is about 3/4R from southern 21a.

In the above configuration, the A phase and human phase coil 25A.

The operation when the slider 22 is driven by a one-phase excitation method in which current is supplied to one of the set of coils 35B and 25 or the set of B-phase and n-phase coils 35B and 35B will be described with reference to FIG.

■In the state shown in Figure 2(a), when a predetermined current is passed through the A-phase and human-phase coils 25A and 258 in the direction from the X mark to the mark shown in the figure, the iron core 24 enters the phase. A magnetomotive force is generated by the coils 25A and 258 from the @ pole 24 toward the A-phase magnetic pole 24A, and as a result, as shown by φ in the figure,
It flows from the pole tooth 24a on the south pole side of one magnetic pole 24A of the iron core 24 to the adjacent ff1i24a on the north pole side via the permanent magnet 26, and from the pole tooth 24a flows into the tooth portion 2fa of the scale 21.
After that, it flows from the other tooth portion 21a to the S pole tooth 24a of the other magnetic pole 24, and flows into the adjacent N pole tooth 24a via the permanent magnet 2G, and the original magnetic pole 24Δ
A main flux loop is formed that returns to . As a result of this 5, each pole tooth 24a on the N pole side of the A-phase magnetic pole 24A faces the tooth portion 21a of the scale 21, and each pole tooth 24a on the S pole side of the 24 phase magnetic poles
The position where a faces the tooth portion 21a of the scale 21 is a magnetically stable position.

■As shown in Figure 2(b), the B-phase and n-phase coils 2513
．． 25r3, when a predetermined current is passed from the x mark in the figure to the direction of Teeth 34a
is opposite the tooth WI21 a of the scale 21, and the 0-phase magnetic pole 3
Each pole tooth 34b on the S pole side of 4B is wi? of the scale 21? !
The position facing S21a is a magnetically stable position.

■As shown in Fig. 2(c), the A phase and the input phase coil 25A,
When a predetermined current is passed through 25 people in the opposite direction to ■, a main magnetic flux loop shown as φ3 in the figure is generated, and as a result, the A-phase magnetic pole 24A
The position where each pole tooth 24a on the S pole side of the in-phase magnetic pole 24 faces the tooth portion 21a of the scale 21, and each pole tooth 24a on the N pole side of the in-phase magnetic pole 24 faces the tooth portion 21a of the scale 21 is magnetically stable. position.

■As shown in Figure 2(d), the B-phase and n-phase coils 25 B
, 25 When a predetermined current is passed through I3 in the opposite direction to ■, a main magnetic flux loop shown as φ is generated in the figure, and as a result, the 6-pole RA 34 a on the S pole side of the B-phase magnetic pole 34B is connected to the tooth of the scale 21. The position where each pole tooth 34a on the N pole side of the 0-phase magnetic pole 34111 faces the tooth portion 21a of the scale 21 is a magnetically stable position.

By repeating the pulse excitation in the order of the above excitation modes ■-■-■→■, the slider 22 moves to the left in the drawing, and the pulse excitation is repeated in the order of the excitation modes ■-■→■-■. As a result, the slider 22 moves to the right in the drawing.

Here, the reason why the permanent magnet 26 has a trapezoidal cross section is because
This is due to the following reasons.

FIG. 3 shows the magnetic flux path flowing through the B-phase block 33' and the scale 21 in the case where a plate-shaped permanent magnet 26' is simply provided, and FIG. The magnetic flux path flowing through the B-phase block 33 and the scale 21 in the case where the magnet 26 is provided is shown.

Note that these figures show the state in the process of transitioning from (a) to (b) in the figure when driving by the l-phase excitation method shown in FIG. 2.

As is clear from these FIGS. 3 and 4, when the plate-shaped permanent magnet 26' is simply provided, the part of the permanent magnet 26', especially near the gap G with the scale 21, is
A leakage magnetic flux φg is generated that leaks out without penetrating the pole, but if a permanent magnet 26 with a trapezoidal cross section is provided, the magnetic force of the permanent magnet 26 will be stronger as it approaches the gap G with the scale 2I. , all the magnetic flux penetrates from the S pole to the N pole of the permanent magnet 26, and as a result, leakage magnetic flux that does not contribute to thrust generation can be minimized.

Next, a linear pulse motor according to a second embodiment of the present invention will be described with reference to FIGS. 5 to 8.

In FIG. 5(A), 41 is a fixed scale, and the scale 41 has toothed portions 41a, 41a, .
are formed on both sides of the upper surface of the scale 4I, and tooth portions 41b, 41 are formed at intervals of pitch P along the longitudinal direction of the scale 4I.
b, . . . and tooth portions 41c, 41c, . . . are formed, respectively. In this case, the southern part 41a at the center and the teeth 41b and 41c at both sides are formed to be shifted by P/2 from each other.

On the other hand, 42 is a slider, which is supported by a support mechanism such as a roller so as to be movable in the longitudinal direction of the scale 41 (in the direction of arrow M). This slider 42 is composed of an A-phase block 43 and a B-phase block 53. These A-phase block 43 and B-phase block 53 are connected to each other, and their positional relationship is defined.

As shown in FIG. 3(B), the A-phase block 43 includes an A-phase magnetic pole 44 facing the toothed portions 41a, 41a, . . . in the center, and toothed portions 41b, 41b, .
4! In-phase magnetic poles 45 and 46 facing c, . . .
It is composed of an E-shaped iron core 47 having a
On the end face facing the 45.46 scale 41, pole teeth 44a to 4.4d, 45a to 45a are provided at intervals corresponding to the pitch P.
45d, 46a to 46d are formed, and 17fl of each pole tooth
Concave d-! Permanent magnets 26 each having a trapezoidal cross section are inserted into the magnets 26 so that the polarities of adjacent magnets are opposite to each other (see FIG. 4).

As a result, as shown in FIG. 4, the central A-phase magnetic pole 4
In the state where each of the pole teeth 44a and 44c of 4 are facing the tooth portion 41a, each of the pole teeth 45b (4, 6b) and 45d (46d) of the human phase magnetic pole 45 (4G) on both sides are 1 stroke part. 41
b (41c).

Similarly to the A-phase block 43, the B-phase block 53 has an E-shaped iron core 57 having a B-phase magnetic pole 54 in the center and 8-phase magnetic poles 55 and 56 on both sides, and is wound around the B-phase magnetic pole 54. It is composed of an n-phase coil 58, and each magnetic pole 5
On the end face facing the scale 41 of 4,55.56, pole teeth 54a to 54d, 55 are provided at intervals corresponding to the bits P.
a to 55d and 56a to 56d are formed, and permanent magnets 26 each having a trapezoidal cross section are inserted into the grooves between the respective pole teeth so that the polarities of adjacent ones are opposite to each other (see Fig. 4). It is located.

As a result, each of the pole teeth 54a to 5 of the central n-phase magnetic pole 54
4d and the tooth portion 4ta, and each pole tooth 55a to 55d (56a to 5) of the n-phase magnetic pole 55 (56) on both sides.
6d) and the tooth portion 41b (41c) as shown in FIG.

In the above configuration, when no current is supplied to the AKJ coil 48 and the B-phase coil 58, a magnetic flux loop around the scale 41 is formed only by the magnetic flux generated by the permanent magnet 26, as shown by the dotted line in FIG. , is stationary in this state.

Here, current is supplied to either the A-phase coil 48 or the B-phase coil 58! The operation when driving the slider 42 using the phase excitation method will be described with reference to FIG. 7.

■As shown in FIG. 7(a), when a predetermined current is passed through the A-phase coil 48 of the A-phase block 43 in the direction of the A magnetomotive force is generated by the A-phase coil 48 toward the human-phase magnetic pole 45 (46), and the magnetic flux accompanying this magnetomotive force and the magnetic flux generated by the permanent magnet 26 are applied to the pole teeth 44b, 44rl, and 45a (4
6a), 45c (46c) strengthen each other, and the magnetic pole 4
4a, 44c and 45b (4G b), 45 d (
4G (1) cancel each other out, and as a result, as shown by the dotted line φ1 in the figure, the A
The magnetic flux flowing into each pole tooth 44b, 44d of the phase magnetic pole 44 is
It is guided by the permanent magnet 26 and flows into the adjacent pole teeth 44a, 44c, and each pole tooth 45a (46a) of the in-phase magnetic pole 45 (46)
), 45 c (46 c) to tooth 4f of scale 41
A main magnetic flux loop is formed that flows into b (41c). As a result, the position where the pole teeth 44b, 44d and the first tooth portion 41a are opposed to each other, and the position where the pole teeth 45a (4, 6a), 45c (4 (ic) and the tooth portion 41b (41c) are opposed to each other) is magnetically It will be in a stable position.

■As shown in FIG. 7(b), when a predetermined current is passed through the B-phase coil 58 of the B-phase block 53 in the direction from the X mark shown in the figure to the * mark, the dotted line φ! A main magnetic flux shown by is generated, and as a result, the pole teeth 54b and 54d of the B phase M1 pole 54 and the tooth portion 4
1a and 11i tooth 55a of white magnetic pole 55 (56).
(56a) and the pole tooth 55c (56C) and the tooth portion 41b (
41c) is a magnetically stable position.

■As shown in FIG. 7(C), when a predetermined current is passed through the A-phase coil 48 in the opposite direction to ■, a main magnetic flux is generated as indicated by the dotted line φ3 in the figure, and as a result, each of the A-phase magnetic poles 44 Pole teeth 44a, 44
c and the tooth portion 4 ] a face each other, and each pole tooth 45 b (46b), 45 d (46 d) of the human phase magnetic pole 45.46 and the tooth portion 41
The position where b (41c) faces is a magnetically stable position.

■As shown in FIG. 7(d), when a predetermined current is passed through the B-phase coil 58 in the opposite direction to ■, a main magnetic flux is generated as indicated by the dotted line φ4 in the figure, and as a result, each of the n-phase magnetic poles 54 Pole teeth 54a, 54
c and tooth portion 4ta face each other, and each pole tooth 55b (56b), 55d (56d) of n-phase magnetic pole 55.56 and tooth portion 41b (
41c) is a magnetically stable position.

By repeating the pulse excitation in the order of the above excitation modes ■-■→■-■, the slider 42 moves to the right in the drawing, and the pulse excitation is repeated in the order of the excitation modes ■→■→■→■. , the slider 42 moves to the left in the drawing.

Here, both the A-phase coil 48 and the B-phase coil 58 are always connected to each other. In the case where the slider 42 is driven by the two-phase excitation force type that supplies the Ilt flow, as shown in FIGS. 8(a) to (d)
A predetermined current may be passed through the coils 48 and 58 in the direction from the X mark to the * mark shown in the figure in the order shown. In addition, Figure 6~
In FIG. 8, only the end portion of the permanent magnet 26 is illustrated in a simplified manner, but the actual shape of the permanent magnet 26 is trapezoidal in cross section as shown in FIG.

Next, referring to FIG. 9, a linear pulse motor according to a third embodiment of the present invention will be described.

In this third embodiment, an A-phase magnetic pole 24 not shown in FIG.
Four magnetic poles 64A, 64A, 6 corresponding to A, phase input @ pole 24, B phase @ pole 34B, and n-phase magnetic pole 3413, respectively.
4 B, Oyohi 64 nwo same-CVT 6-core 64, with coils 65A, 658, esB, e on each magnetic pole.
5 tl each. Then, the magnetic 1 on the A phase side = N
A permanent magnet 26 with a trapezoidal cross section inserted into the recess i% of the end face of 64 A and 64, and magnetic poles 64B and 6 with phase B open.
Permanent magnets 26 each having a trapezoidal cross section are inserted into a 41 m long concave groove, and are arranged so as to have opposite polarities.
As a result, the tooth portions 21a of the scale 21 can be arranged in one row.

Next, with reference to FIG. 10, a three-phase linear pulse motor, which is a fourth embodiment of the present invention, will be described. In this figure, a slider 82 supported movably in the longitudinal direction of the scale 21 (in the direction of arrow M shown in the figure) by a support mechanism such as a roller (not shown) has an AI (] magnetic pole 83A, a B phase separation 11i83B, Iron core 83 having C-phase magnetic pole 83C
and a coil 84 wound around each magnetic pole 83Δ to 83C.
It is composed of A to 84C. And each magnetic pole 83
A.

On the end face of 8.3I3, 83C facing the scale 21, pole teeth and grooves are formed at a constant interval of P/2, and in each groove, a permanent magnet 26 with a trapezoidal cross section is placed adjacent to each other. are inserted into each other so that they are in opposite directions. In this case, the magnetic pole 83A located on the negative side, the magnetic pole 83B located in the center, and the magnetic pole 83C located on the other side are sequentially displaced by P/3 in the longitudinal direction (M direction) of the scale 21. As a result, in a state where each pole tooth of the A-phase magnetic pole 83A faces the tooth 21a of the scale 21, each pole tooth of the B-phase magnetic pole 83B is displaced by P/3 from the tooth 21a, and the C-phase Each pole tooth of the magnetic pole 83C is 2.P from the tooth portion 21a.
/3 displacement.

In the above configuration, in the excitation sequence shown in FIG. 12, the A-phase coil 84A, the B-phase coil 84B, and the C
Supplying a pulse current whose polarity is reversed to the phase coil 84C,
The operation in so-called bipolar driving will be explained.

First, FIG. 13 shows each magnetic pole 83A to 83C of the slider 82.
FIG. 3 is a diagram showing a thrust vector generated between the scale 21 and each tooth portion 2ta of the scale 21. FIG. In this figure, A indicates a thrust vector that occurs when a drive current is supplied in the positive direction to the A-phase coil 84A, and A indicates a thrust vector that occurs when a drive current is supplied in a negative direction to the A-phase coil 84A. Similarly, B and C indicate thrust vectors generated when driving current is supplied in the positive direction to the B-phase coil 84B and C-phase coil 84C, respectively, and n and C indicate the thrust vectors generated in the negative direction to the B-phase coil 84B and C-phase coil 84C. The thrust vectors generated when a drive current is supplied to each are shown.

During the period indicated by ■ in FIG. 12, the drive current is supplied to the A-phase coil 84A in the positive direction, and the B-phase coil 84A
A drive current is supplied to the 4B and C phase coils 84C in the negative direction, and as shown in FIG. and the slider 82. After that, when driving current is supplied to each coil 84A to 84C in the order shown by ■-■-...→■, the slider 82
Each of the magnetic poles 83A to 83G and each tooth portion 2Ia of the scale 21
Figure 13 shows the thrust vector generated between ■−■−・
The magnetic stability point of the slider 82 with respect to the scale 21 changes in the order indicated by -■. Like this ■
−■−■−・・・−■ order of each excitation mode, or ■−
The slider 82 is moved by repeating pulse excitation in the order of excitation modes: ■-...-■→■.

Next, referring to FIG. 11, a three-phase linear pulse motor according to a fifth embodiment of the present invention will be described. This fifth
In the embodiment, an A-phase magnetic pole 83ASB not shown in FIG.
The three magnetic poles 93A and 93I3.93C corresponding to the ill magnetic pole 83B1 and the C-phase magnetic pole 83C are placed on the scale 9.
1 are arranged in parallel in the width direction to form an iron core 93, and coils 95A, 95B, and 95C are wound around each magnetic pole. And each magnetic pole 93A, 93B, 93C
The end face facing the scale 91 has a constant interval P/2.
Pole teeth and grooves are formed, and permanent magnets 26 having a trapezoidal cross section are inserted into each groove so that the polarities of adjacent ones are opposite to each other.

On the other hand, on the upper surface of the scale 91, there are three rows of teeth 91a, 91a at intervals of bits P along the long plane direction.

... 91b, 91b, ..., and 91c, 91c
,... are formed respectively. In this case, tooth part 9! a
, 91b.

91c are arranged to be shifted by P/3 from each other, so that each pole tooth of the A-phase magnetic pole 93A is aligned with the tooth portion 9 of the scale 91.
1a, each pole tooth of the B-phase magnetic pole 93B is displaced by P/3 from the tooth portion 91a, and the C-phase magnetic pole 93G is displaced by 2-P/3 from the tooth portion 91a. . In such a configuration, similarly to the fourth embodiment described above, the A-phase coil 9 is activated in the excitation sequence shown in FIG.
The slider 92 is moved by supplying pulse currents to the coil 4A, the B-phase coil 94B, and the C-phase coil 94C.

Next, a modification of the three-phase linear pulse motor according to the fourth and fifth embodiments described above will be described with reference to FIGS. 14 and 15.

First, in FIG. 14, the slider 102 supported so as to be movable in the longitudinal direction (direction of arrow M) of the scale 21 is
A phase magnetic pole 103A, C phase magnetic pole 103C, and B phase @ pole 1
03B, 103 in-phase magnetic poles, and C4'l[4rs10
3C,! :, fTh phase [pole t 03 I3 It is composed of an iron core 103 having a pole, and coils 104A-104 [() wound around each of these magnetic poles 103A to 103I3.
On the end face facing the scale 21, pole teeth and concave grooves are formed at a constant interval P/2, and in each concave groove, permanent stones 26 having a trapezoidal cross section are adjacent to each other, and the polarities of the two are in opposite directions. They are inserted and arranged in each so that the In this case, each magnetic pole 103A to 103B of iron core +03 has scale 2! They are arranged to be sequentially displaced by P/6 in the longitudinal direction (M direction).

In addition, in FIG. 15, the slider l 1.2 has an A phase separation Wl of 13A, an incoming magnetic pole of 113 people, and a B phase of 1+W1.
13B! :, I3 phase [pole 11311:, C phase magnetic pole 11
Iron core with 3G and C phase magnetic pole + 1.3c! ! 3
And each of these magnetic poles 113A~! It is composed of coils I14A to rzc, each wound around coil I13C.

And each i-pole 1. l3A-113C, scale 21
Pole teeth and concave grooves are formed at a constant interval of P/2 on the end face facing the , and each concave has a permanent magnet 26 having a trapezoidal cross section so that the polarities of adjacent ones are opposite to each other. It is inserted and placed in. In this case, the pair to the magnetic poles 113A and 113, the magnetic lf 13B tol I 3El) pair, O, J:,
Hiffl pole! 130 and +13 (m pair is scale 2I
They are arranged so as to be sequentially displaced by P/3 in the longitudinal direction (M direction).

In the configurations shown in FIGS. 14 and 15 as well, the sliders 102 and 112 move according to the same operating principle as in the fourth embodiment described above.

Next, the configuration when applied to a disk rotor type double-sided drive type pulse motor, which is a sixth embodiment of the present invention, will be described with reference to FIGS. 16(a) to 16(d). In these figures,! 50 is a housing, and 151 is a shaft rotatably supported by the housing 150 via bearings 152, 153. This shaft! A disc-shaped rotor [ 54 is fixed to the housing 150 by a key 155, and a rotor [54] is fixed to the housing 150.
Annular stators 156 and 157 are respectively attached to opposite surfaces of the rotor 154 with a predetermined gap therebetween. The rotor 154 includes an annular member 159 made of a non-magnetic material, and is supported by this member 159, and has toothed portions IG Ia, I 61a, - and recesses 7i116 lb, + 6 lb, radially and at equal intervals. , , and a disk-shaped magnetic member 161. In addition, the stator 156 has three [W24 A, 2
4 A, 34 B, 34 t'q + i) Iron core [65
and coils f 66a - 1, 66d wound around these @poles 165a = 165d, respectively, and tooth portions t61a are formed at intervals on the end face of each of the magnetic poles 165a to 165d facing the rotor 154. Pole teeth are formed radially and at equal intervals, and the grooves between each pole tooth are
Permanent magnets 162 each having a trapezoidal cross section are inserted so that the polarities of adjacent ones are opposite to each other.

Furthermore, the stator +57 is similarly configured. In the above configuration, the first embodiment described above (FIGS. 1 to 2)
The rotor 154 is rotationally driven and the shaft 151 rotates using the same operating principle.

Next, the structure when applied to an outer rotor type pulse motor, which is the seventh embodiment of the present invention, will be described in the seventeenth embodiment.
This will be explained with reference to the figures. In this figure, reference numeral 170 denotes a cylindrical outer rotor, and there are teeth 1 at equal intervals on the inner circumference.
It is constituted by a magnetic member 171 in which 71a and 171a are formed.

In addition, the stator 174 (and each magnetic pole 11 shown in FIG.
A-phase magnetic pole 1 having the same positional relationship as 03A-103 (
75A, B11111 magnetic pole 175B, C phase @ pole l75C
and, 8l1llff114175 people, [3 phase fft pole 1
75 I3. Iron core 175 in which C-phase magnetic pole 175C is formed
And these magnetic poles 175A~! It consists of a coil +76A-r71 each wound around a 75C, and each magnetic pole +
On the end face facing the rotor 170 of 75A-t7sc,
Pole teeth are formed at equal intervals corresponding to the formation interval of the tooth portions 171a, and grooves between each pole tooth have trapezoidal cross-sections so that the polarities of the interlocking teeth are opposite to each other. Permanent magnets 172 are each inserted and arranged. Such a stator 174 is fixed to a shaft 178. In the above configuration, the outer rotor 170 is rotated by the same operating principle as in the third embodiment (Fig. 1O) described above.
Ru.

Note that the present invention is not limited to the embodiments described above, and various modifications listed below are possible.

(2) The next slider may be provided with a sensor for detecting the relative movement m with respect to the secondary scale, and may be driven as a servo motor.

■In order to eliminate cogging or improve thrust waveform distortion, a skew structure may be used, or a slight skew (equivalent skew) within the same pole may be applied.

"Effects of the Invention" As explained above, according to the present invention, on each end face of each magnetic pole of the primary magnetic flux generating section facing the secondary scale,
Pole teeth and il+1 parts were formed alternately at regular intervals along a specific direction, and permanent magnets were inserted into each of these grooves so that the polarities of adjacent ones were opposite to each other, so that each magnetic pole When a current is applied to the wound coil, the current flows from the S-pole side pole tooth of the magnetic pole of the primary side magnetic flux generation section to the adjacent N-pole side pole tooth placed in the groove of the magnetic pole via the permanent magnet. The flow flows into the teeth of the secondary scale, and then flows from other teeth of the secondary scale to the S pole teeth of other magnetic poles, passing through the permanent magnets placed in the grooves of the magnetic poles adjacent to them. After flowing into the matching N-pole side pole teeth, a main magnetic flux loop is formed that returns to the original magnetic pole, making it possible to effectively use the total area of each magnetic pole facing the secondary scale for thrust generation. Furthermore, since the width dimension of each of the grooves and each of the permanent magnets along the specific direction is made larger as it approaches each end face, the magnetic force of each permanent magnet acts more strongly as it approaches the gap with the scale, As a result, leakage magnetic flux that does not contribute to thrust generation can be minimized, resulting in more than twice the thrust of conventional products.For example, FA equipment that requires relatively large thrust such as industrial robots This has the effect that it can also be applied to

[Brief explanation of the drawing]

FIG. 1 is a front view showing the configuration of a linear pulse motor according to a first embodiment of the present invention, and FIGS. 2(a) to (d) show the linear pulse motor according to the same embodiment when driven by a one-phase excitation method. FIG. 3 is a front view for explaining the operation; FIG. 3 is a diagram for explaining the magnetic flux path when a plate-shaped permanent magnet is simply provided; FIG. A diagram for explaining the magnetic flux path when a permanent magnet is provided, FIG. A perspective view showing the configuration of the A-phase block of the linear pulse motor, FIG. 6 is a diagram for explaining the magnetic flux path when the linear pulse motor is stationary, and FIGS.
(d) is a diagram for explaining the operation when the same linear pulse motor is driven by the one-phase excitation method, and Figure 8 (a)
-(d) are diagrams for explaining the operation when the same linear pulse motor is driven by the two-phase excitation method, and FIG. 9(a) is a front view showing the configuration of the linear pulse smoke according to the third embodiment of the present invention. FIG. 10 is a bottom view showing the configuration of the slider of the linear pulse motor, FIG. ) is a front view showing the configuration of a slider of a polyphase linear pulse motor according to a fifth embodiment of the present invention, FIG. ) is a plan view showing the scale configuration of the linear pulse smoke, FIG. 12 is a diagram for explaining the excitation sequence in the linear pulse motor according to the fourth and fifth embodiments of the present invention, and FIG.
Figure 3 is a diagram for explaining the thrust vector in each excitation mode of the same linear pulse motor, Figures 14 and 15.
The figure is a front view for explaining the configuration of a modified example of the fourth embodiment of the present invention, and FIG. 16 (A) is a partial sectional view showing the configuration of a disk rotor type pulse motor according to the sixth embodiment of the present invention. , Figure (b) is a partial front view showing the configuration of the stator side of the pulse motor, Figure (c) is a partial cross-sectional view showing the rotor configuration of the pulse motor, and Figure (d) is a partial front view of the pulse motor. FIG. 17 is a partial front view showing the structure of the rotor side; FIG. 17 is a front view showing the internal structure of the outer rotor type pulse smoke according to the seventh embodiment of the present invention; FIGS. 18(a) to (d)
1 is a diagram for explaining the configuration of a conventional linear pulse smoke magnetic circuit t1 and its operation. 21...Scale (secondary side scale), 21a
...Tooth portion, 22...Slider (primary side magnetic flux generation part), 2/
Ia, 34a...Pole tooth, 2/Ib, 34b...Concave groove (M\ section), 26.
...Permanent magnet, 24.34...Iron core, 24A...A phase magnetic pole, 25A...A phase coil, 248...phase entering magnetic pole , 25 people... Phase coil, 34B... B phase magnetic pole, 35B... N phase coil, 3n... Hue magnetic pole, 35 colors... ...N-phase coil.

Claims (2)

[Claims] (1) Consisting of a secondary scale in which teeth are formed at equal intervals P along a specific direction, and a primary magnetic flux generating part supported movably in the specific direction with respect to the secondary scale. , the primary side magnetic flux is generated by sequentially generating magnetic flux in each gap formed between each magnetic pole around which a coil of the primary side magnetic flux generating section is wound and each tooth part of the secondary side scale. In a pulse motor that moves a unit relative to a secondary scale, each end face of each magnetic pole of the primary magnetic flux generating unit facing the secondary scale is provided with a constant interval P along the specific direction.
/2, pole teeth and grooves are alternately formed, and permanent magnets are inserted and arranged in each groove so that the polarities of adjacent ones are opposite to each other, and each of the grooves and the permanent magnets is A pulse motor characterized in that the width along the specific direction increases as it approaches each end face. (2) The tooth portions are formed on both surfaces of the secondary scale, and a pair of primary magnetic flux generating portions are provided that face each tooth portion on both surfaces of the secondary scale, and these primary magnetic flux 2. The pulse motor according to claim 1, wherein the generators are connected to each other and supported so as to be movable relative to the secondary scale in the specific direction.