JPH0313732U - - Google Patents

Info

Publication number

JPH0313732U

JPH0313732U JP7526789U JP7526789U JPH0313732U JP H0313732 U JPH0313732 U JP H0313732U JP 7526789 U JP7526789 U JP 7526789U JP 7526789 U JP7526789 U JP 7526789U JP H0313732 U JPH0313732 U JP H0313732U

Authority

JP

Japan

Prior art keywords

heat insulating

insulating ring

furnace tube

diffusion furnace

end hat

Prior art date

1989-06-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 4

Cited By (2)