JPH0313035B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a cleaner for chucks with mounting surfaces for workpieces, in particular for large rectangular mountings such as chucks placed on surface grinding machines. The present invention relates to a cleaner suitable for cleaning chucks having surfaces.

(Prior Art) In a surface grinder, a workpiece is attached to a workpiece mounting surface of a chuck, and is ground by a grindstone in this state. When the grinding operation is completed, the workpiece is removed from the chuck and a new workpiece is installed on the chuck for the next grinding operation.

Grinding waste generated by grinding the workpiece is
Deposits on the mounting surface of the chuck. The presence of grinding debris on the mounting surface will reduce the accuracy of the mounting of the next workpiece onto the chuck, thereby reducing the accuracy of the grinding. For this reason, grinding debris must be removed from the mounting surface before a new workpiece is placed on the mounting surface. Conventionally, this work has been performed by an operator sweeping the mounting surface with a rubber spatula.

However, if the removal work of the grinding debris is performed manually, there are problems such as the removal work is troublesome, tends to leave unswept residue, and requires a long time.

A device has been proposed that automatically removes machining debris from a machining table of a machine tool, a workpiece, etc. (Japanese Utility Model Publication No. 164984/1984). This known debris removal device attaches a brush roller-shaped debris removal tool to the spindle head of a machine tool, and rotates the debris removal tool around an axis extending in the horizontal direction, thereby removing debris on the outer peripheral surface of the debris removal tool. remove.

However, with this type of debris removal device, debris is simply swept away by rotating the debris removal tool.
It takes time to remove debris scattered over a wide area, and especially small debris such as grinding debris cannot be removed.

(Problems to be Solved) An object of the present invention is to provide a cleaner that can reliably and easily remove debris remaining on a wide mounting surface in a short time.

(Solution, operation, effect) A cleaner for a chuck having a rectangular attachment surface for attaching a workpiece according to the present invention has a support that is movable in parallel relative to the attachment surface in the longitudinal direction of the attachment surface. and a debris removing means extending in the longitudinal direction of the mounting surface and supported by the supporting means so as to be capable of reciprocating angular movement around an axis perpendicular to the mounting surface while in contact with the mounting surface. , a driving means for relatively moving the chuck and the supporting means in the longitudinal direction of the mounting surface and for imparting the reciprocating angular movement to the debris removing means.

The debris removing means is subjected to reciprocating angular motion a plurality of times while the chuck and the supporting means are reciprocated once in the longitudinal direction of the mounting surface.

While machining the workpiece attached to the mounting surface,
The debris removing means is moved to a position where it does not interfere with machining. When machining is complete, the workpiece is removed from the chuck. Next, the debris removing means is brought into contact with the mounting surface, and in this state, the supporting means and the chuck are relatively moved in the longitudinal direction of the mounting surface by the driving means, and the debris removing means is given reciprocating angular motion by the driving means. It will be done.

The debris removing means is moved back and forth in the width direction of the mounting surface while in contact with the mounting surface, and is also moved in the longitudinal direction of the mounting surface relative to the chuck, thereby cleaning the entire mounting surface in the longitudinal and width directions. Clean over a period of time. As a result, debris on the mounting surface is removed laterally in the width direction of the mounting surface, and in particular, small debris on the mounting surface is reliably removed by reciprocating the debris removal means multiple times in the width direction of the mounting surface. will be removed.

According to the present invention, the debris removing means is an elongated member extending in the longitudinal direction of the mounting surface, and the debris removing means is reciprocated relative to the chuck in the longitudinal direction of the mounting surface, and a plurality of debris removing means are moved in the width direction of the mounting surface. Since it is moved back and forth several times, debris remaining on the wide mounting surface can be reliably and easily removed in a short time, and even small debris on the mounting surface can be reliably removed.

(Example) Referring to FIGS. 1 and 2, the cleaner of the present invention is attached to chuck 1 of a surface grinder. The surface grinder itself is not shown.

In the illustrated example, the chuck 1 consists of an electromagnetic chuck. The mounting surface 1a of the chuck 1 for the workpiece is
When the chuck 1 is supplied with current, it is placed in an energized state, and when the current to the chuck 1 is cut off, it is placed in a de-energized state. For this reason, the workpiece is placed on the top surface of the chuck 1, that is, the mounting surface 1a, and
By supplying current to the chuck 1, a workpiece can be suctioned and fixed to the mounting surface 1a, and by cutting off the current to the chuck 1, the workpiece suctioned to the mounting surface 1a can be removed. In the illustrated example, the mounting surface 1a has a rectangular shape that is long in the left-right direction (vertical direction in FIG. 1).

Front side of chuck 1 (left side in Figure 1)
A guide 2 extending in the longitudinal direction of the mounting surface 1a is attached parallel to the mounting surface 1a. On the other hand, on the rear surface of the chuck 1 (the right side surface in FIG. 1), a square member 3 for tightening is attached parallel to the mounting surface 1a and extending in the longitudinal direction of the mounting surface 1a. The guide 2 and the square beam 3 each protrude to the right of the chuck 1 (downward in FIG. 1).

A slide seal guide plate 4 is arranged on the right side of the chuck 1 between the guide 2 and the square piece 3. A tightening rod 5 is arranged below the guide plate 4 (lower side in FIG. 2) so as to extend in the front-rear direction. A part of the guide plate 4 is sandwiched between the guide 2 and one end of the tightening rod 5, and another part of the guide plate 4 is sandwiched between the square timber 3 and the other end of the tightening rod 5. 2, tightening rod 5 and square timber 3
and a tightening rod 5 are fixed to the guide 2 and the square member 3 by tightening them with screws 6, respectively.

As shown in FIG. 2, the lower end 2a on the front side of the guide has a triangular cross-section, and the upper end 2b has a rectangular cross-section. A movable body 7 is fitted into the guide 2 so as to be movable in the longitudinal direction of the guide 2.

The movable body 7 has a fitting part 8 at its lower end, and the fitting part is slidably fitted to the guide 2 via intervening members 9 and 11. Thereby, the movable body 7 can move along the guide 2 parallel to the mounting surface 1a, that is, in the directions of arrows A and A' in FIG. A rack 12 is attached to the tip of the guide 2, which extends in the direction perpendicular to the plane of the paper in FIG. 2, similarly to the guide 2.

The upper part of the movable body 7 is connected to the guide 2 and the guide plate 4.
A support arm 13 extends above the guide plate 4 from the side of the guide 2 toward the center of the guide plate 4 in the width direction. A reversible motor 14 is attached to the base end of the support arm 13, that is, on the side of the guide 2, and a wiper motor 15 is attached to the tip.

The output shaft of the reversible motor 14 is connected to a gear 16 that meshes with the rack 12. Therefore, when the gear 16 is rotated by the rotation of the motor 14, the movable member 2 is linearly displaced by a value corresponding to the rotation angle of the gear 16.

The wiper motor 15 includes a crank mechanism disposed within a gearbox 15a, and its output shaft 15b performs reciprocating angular motion. A swinging arm, that is, a rotating arm 18, which fixes the debris removing means 17, is attached to the output shaft 15b. Rotating arm 18
When the output shaft 15b makes a reciprocating angular movement, the waste removing means 17 makes a swinging movement, that is, a reciprocating angular movement, between the guide 2 and the square timber 3, as shown in FIG.

As shown in FIG. 3, the debris removing means 17 includes a frame 19 having a concave cross-sectional shape and an appropriate length, and is fixed to the frame 19 within the frame 19 and protrudes downward from the frame 19. A slide seal 21 is provided. As shown in FIG. 3, the portion of the slide seal 21 that projects downward from the frame 19 is divided into two lower end portions, ie, edge portions 22 and 23, which extend outward from each other. both edges 22,
23 defines a depression 24 between them.

The slide seal 21 may be formed of one member, or, as in the example shown, two members 21a, each having one edge 22 or 23.
21b may be formed so as to overlap each other. In the illustrated state, the tips of the edges 22 and 23 of the slide seal 21 are in contact with the upper surface of the guide plate 4. A roller 30 is arranged on the support arm 13 to maintain an appropriate distance between the support arm 13 and the guide plate 4.

As shown in FIG. 1, the reversible motor 14 is operated under the control of a main drive control circuit 25. As shown in FIG. Signals from two microswitches 26 and 27 attached to the side surface of the movable body 7 are input to the active control circuit 25 .

The micro switch 26 is arranged so that its actuator comes into contact with a stopper 28 as the movable body 7 moves, and when the actuator comes into contact with the stopper 28, it outputs an inversion signal Sb.

On the other hand, the micro switch 27 is arranged so that its actuator comes into contact with the stopper 29 as the movable body 7 moves, and when the actuator comes into contact with the stopper 29, the stop signal So Or output the forward rotation signal Sf.

The wiper motor 15 is operated under the control of the auxiliary movement control circuit 31.

While the workpiece attracted to the chuck 1 is being ground, the movable body 7 is placed in the position shown in FIG. 1, that is, the position where the actuator of the microswitch 27 contacts the stopper 29 (standby position). In this standby position, the slide seal 21 of the debris removing means 17 is in contact with the upper surface of the guide plate 4, as shown in FIG.

The mounting surface 1 created after the grinding work is completed.
When removing the debris on a, a start signal Sin is supplied to the main action control circuit 25 and the auxiliary action control circuit 31.
As a result, the reversible motor 14 starts rotating forward, and the wiper motor 15 starts rotating.

When the reversible motor 14 is rotated forward, the movable body 7
The engagement between the gear 16 and the rack 12 causes it to move (forward movement) in the direction A in FIG. As a result, the debris removing means 17 is moved along the guide 2 while being angularly reciprocated around its output shaft 15b by the wiper motor 15 to clean the mounting surface 1a of the chuck 1. As a result, the slide seal 21 cleans the entire mounting surface 1a of the chuck 1 in its longitudinal direction L and width direction W.

When the actuator of the microswitch 26 comes into contact with the stopper 28 as the movable body 7 moves, the inversion signal Sb is supplied to the main drive control circuit 25. As a result, the reversible motor 14 begins to reverse rotation,
The movable body 7 starts moving in the direction A' (backward movement) in FIG. During the backward movement of the movable body 7, the debris removing means 17 continues its reciprocating angular movement, so that the chuck 1
Cleaning continues.

When the movable body 7 returns to the standby position, the forward rotation signal Sf is supplied to the main drive control circuit 25, so that the movable body 7
They will be sent back again to carry out the cleaning work for the second time. Grinding debris remaining on the mounting surface 1a will eventually be removed from the mounting surface 1a.
removed from

Such repeated cleaning work is performed by sending a stop signal to the control circuits 25 and 31 for forward and backward movements.
This will continue until Sfi is supplied. The number of repetitions of cleaning work can be determined using an automatic counter, etc., and a stop signal.
By adjusting the timing of generating Sfi,
Can be set to any value.

In the above embodiment, the cleaning work is started by supplying the start signal Sin to both the control circuits 25 and 31 for main movement and double movement, and the stop signal Sfi is supplied to both control circuits 25 and 31. This completes the cleaning work. These signals may be generated by key operations by the operator, or
If the surface grinding machine is of an automatic control type, it may be supplied from a central control unit that controls the operation of the grinding machine.

If the movable body 7, etc. is moved according to commands from the central control device of the surface grinder, chuck 1
The cleaning operation can be incorporated into a series of automatic grinding operations of a surface grinder, and automation of the grinding operation is achieved.

According to the above-described embodiment, the chuck cleaning operation is performed by key operation by the operator or as a step of the automatic grinding operation, so that the chuck cleaning operation is much simpler than the conventional manual cleaning operation. In addition, there is no uneven cleaning like manual cleaning, and the mounting surface 1a is wide.
can be easily and reliably cleaned in a short time.

4 to 6 show modifications of the movable body in the embodiment shown in FIGS. 1 and 2. FIG. FIG. 4 corresponds to a side view taken along the arrow direction in FIG. In FIGS. 4 to 6, the same members as those shown in FIGS. 1 to 3 are given the same reference numerals.

In FIG. 4, the movable body 37 to which the reversible motor 14 is attached slides in the directions of arrows B and B' along the guide 32 arranged on the front surface of the chuck 1 (on the near side in FIG. 4). It is possible. The movement of the guide 37 is achieved by the engagement between the gear 16 driven by the reversible motor 14 and the rack 12 attached to the guide 32.
This is the same as the embodiment shown in FIG.

The details of the meshing between the gear 16 and the rack 12 are shown in FIG. The gear 16 that meshes with the rack 12 is
A drive shaft 35 supported by a bearing 34 is attached to the side plate portion 33 of the movable body 37 .

FIG. 6 shows a state in which the movable body 37 and the guide 32 are connected. Shafts 36, 36' and 39, 39' (see FIG. 4 for 36, 39') projecting from the side plate 33 are supported at the upper and lower parts of the side plate 33, respectively.

Fixed rollers 38 and 38'(38' see FIG. 4) are mounted on the upper shafts 36 and 36', respectively.
is rotatably supported. On the other hand, the lower shafts 39 and 39' have movable arms 4, respectively.
1 and 41' (see FIG. 4 for 41') are swingably, ie, rotatably, but normally fixedly mounted.

Shafts 42 and 42' (see FIG. 4 for 42') are attached to the lower ends of the movable arms 41 and 41', respectively. The shafts 42 and 42' include
Movable rollers 43 and 43' (see FIG. 4 for 43') are rotatably supported, respectively.

The guide 32 is supported by the idler 32 so as to be movable along the guide 32 by being sandwiched between fixed rollers 38, 38' and movable rollers 43, 43'.

In the illustrated example, the movable arms 41, 41' are connected to the shaft 39,
By angular rotation or pivoting around 39', the spacing between the fixed rollers 38, 38' and the movable rollers 43, 43' for sandwiching the guide 32 can be adjusted. the result,
guide 32 and both rollers 38, 43 and 38',
43' can be freely adjusted. In particular, if a tension spring S is placed between the movable rollers 43 and 43', the clearance will be reduced by the spring S.
automatically adjusted.

FIGS. 7 and 8 show an embodiment in which the debris removing means 17 is moved manually by an operator. That is, in the embodiment shown in FIGS. 1 and 2, the debris removing means 17 is attached to the mounting surface 1a of the chuck 1.
In the embodiment shown in FIGS. 7 and 8, the debris removing means 17 is moved automatically by an operator's manual operation. Therefore, the embodiment shown in FIGS. 7 and 8 is suitable for use in a small and simple surface grinder.

In Figure 7, the front side (lower side in the figure) and rear side (upper side in the figure) of chuck 1.
A guide rail 52 is attached to each of the guide rails 52. Each guide rail 52 extends further to the right than the chuck 1. A guide plate 44 is attached to a portion of the guide rail 52 extending to the right from the chuck 1 with screws 45.

A traveling body, that is, a movable body 46 having a rectangular planar shape is arranged above the guide plate 44, and a shaft 47 is attached to each of the four corners of the movable body 46, hanging from the corresponding corner. There is.

As shown in FIG. 8, a pulley 48 is rotatably attached to the lower part of each shaft 47. Each pulley 48 is engaged with a convex portion 52a having a triangular cross-sectional shape of the guide rail 52.Thereby, the movable body 46 is held on the guide rail 52 so as to be able to run along the guide rail 52. There is.

A wiper motor 15 is attached to the upper surface of the movable body 46, and a swinging arm, that is, a rotating arm 18 is attached to an output shaft 15a of the wiper motor 15, and a frame 19 is provided at the tip of the rotating arm 18. A slide seal 21, which is the same as the slide seal shown in FIG. 3, is arranged within the frame 19. The lower end of the slide seal 21 is in contact with the upper surface of the guide plate 44 in the illustrated state.

A micro switch 49 is arranged in the power supply path to the wiper motor 15. The micro switch 49 cuts off the power supply path in a normal state, and when the actuator 51 is pushed in, it turns on and connects the power supply path. Micro switch 49
A rear end portion 53a of the lever 53 is arranged below the movable body and extends in the front-rear direction.

The lever 53 has a slightly rear end 53 from its center.
At the position on the a side, it is pivotally attached to a support shaft 54 protruding from the movable body 46, and has a grip portion 55 at the front end. The lever 53 can be rotated about the pivot point of the support shaft 54 by moving the grip portion 55 up and down as shown by arrow C in FIG. Grip portion 55 of lever 53
When the microswitch 49 is pushed down (the lever 53 is rotated counterclockwise in FIG. 8), the actuator 51 of the microswitch 49 is pushed in at the rear end 53a.

The rear end 53a of the lever 53 engages the actuator 51 when the lever 53 is rotated as described above.
Push in and lift the stop pin 56 at the same time. The lower end 56a of the stop pin 56 is formed in the shape of an inverted truncated cone, and the lower end, that is, the inverted conical part 56a is connected to the stop hole 56 formed in the guide plate 44.
7 can be fitted.

FIG. 8 shows a state in which the inverted conical portion 56a is fitted into the stop hole 57, and in this state the movable body 46 cannot travel. A compression spring 58 is arranged between the inverted conical portion 56a and the movable body 46,
As a result, the stop pin 56 is constantly pushed downward.

In the embodiment shown in FIGS. 7 and 8, while the grinding operation is being performed on the chuck 1, the movable body 46 is placed in the position shown (standby position).

When the grinding work is finished and the grinding debris on the mounting surface of the chuck 1 is to be removed, the grip portion 55 is first pushed down by the operator. As a result, the rear end portion 53a of the lever 53 is moved upward, so that the micro switch 49 is turned on, and at the same time, the conical portion 56a of the stop pin 56 is removed from the stop hole 57.

When the micro switch 49 is turned on, the wiper motor 15 starts to operate, thereby causing the rotary arm 18 and therefore the slide seal 21 to make reciprocating angular movements as indicated by arrow D in FIG.

When the stopper pin 56 and the stopper hole 57 are disengaged, the movable body 46 becomes movable. Therefore, the movable body 46 can be moved along the guide rail 52 by moving the arm of the operator who is pushing down the grip portion 55 in the left-right direction in FIG. As a result, the mounting surface of the chuck 1 is cleaned by the slide seal 21 over the entire width and length directions.

In the embodiment shown in FIGS. 9 and 10, the grinding machine includes a grinding wheel cover 59. In the embodiment shown in FIGS. A grindstone 61 for grinding a workpiece is arranged inside a grindstone cover 59,
It is also driven by the main shaft supported by the main shaft head 62 and rotates clockwise in FIG. The chuck 1 is moved to a predetermined position below the grindstone 61 during grinding.

As shown in FIG. 9, one plate portion of an L-shaped bracket 63 is fixed to the back surface of the grindstone cover 59. The other plate portion of the bracket 63 extends in front of the grindstone cover 59, and a bush 64 and a bracket 65 for a lifting motor are formed at the tip of the other plate portion.

As shown in FIG. 10, an outer shaft 67 having a rack 66 is disposed on the bush 64 so as to be movable in its axial direction, and at the upper end of the outer shaft 67 is a bracket 68 to which the wiper motor 15 is fixed downward.
is installed. Inside the outer shaft 67, there is an inner shaft 7 rotatably supported on the outer shaft 67 by a bearing.
2 is placed. The upper end of the inner shaft 72 is connected to the output shaft of the wiper motor 15 by a joint 73 inside the wiper motor bracket 68.

As shown in FIG. 9, a pinion 75 that engages with the rack 66 is attached to the output shaft of a lifting motor 74 attached to the lifting motor bracket 65.

When the lifting motor 74 is activated and the pinion 75 is rotated, the rack 66 is raised and lowered, and the outer shaft 67 is raised and lowered in accordance with the amount of elevation. As the outer shaft 67 moves up and down, the wiper motor 15 and the inner shaft 72 connected thereto are also moved up and down. The inner shaft 72 performs reciprocating angular rotation within a predetermined angular range when the wiper motor 15 is rotated.

As shown in FIG. 10, a rotating arm 18 extending parallel to the chuck 1 is fixed to the lower end of the inner shaft 72, and a fitting projecting upward from the frame 19 is attached to the tip of the rotating arm 18. 78 is pivotally connected by a pin 77.

The attachment position of the fixture 78 to the frame 19 is
It is to the right of the center of gravity of No. 9 (to the right in FIG. 10). Therefore, when the inner shaft 72 is raised and the rotating arm 18 is accordingly raised to the position shown by the dashed line in FIG. 10 (standby position),
The frame 19 is angularly rotated counterclockwise in FIG. 10 and stops with its right end in contact with the rotating arm 18.

A micro switch 79 is attached to the tip of the rotating arm 18 and is electrically connected to the wiper motor 15. Micro switch 79 is in frame 19
When the actuator 79a is in the standby position, the actuator 79a is separated from the frame 19. Frame 1
A slide seal 21 is attached to 9 as in each of the embodiments described above. When the inner shaft 72 and therefore the rotating arm 18 are lowered and the slide seal 21 comes into contact with the top surface of the chuck 1, that is, the mounting surface,
The frame 19 becomes horizontal as shown by the solid line in FIG. 10, and the actuator 79a of the microswitch 79 is thereby pushed in.

Bush 64 and lifting motor bracket 6
A micro switch 81 electrically connected to the lift motor 74 is attached to the front side of the lift motor 5 . The actuator of the micro switch 81 is activated when the rotating arm 18 is raised to the standby position.
It is pushed in by the projecting portion 18a of the rotating arm 18.

During grinding work, the frame 19 and slide seal 21
The debris removing means 17, which is provided with the following, is placed in a standby position. In this state, both the lifting motor 74 and the wiper motor 15 are stopped.

When the grinding operation is completed and a cleaning command signal is issued by the operator or from a central control device (not shown) that controls the operation of the entire grinding machine, the lifting motor 74 is activated to lower the outer shaft 67 and the inner shaft 72.

As the inner shaft 72 is lowered, the rotary arm 18 is lowered, and the debris removing means 17 is placed in the state shown by the solid line in FIG. 10. As a result, the micro switch 79
It turns on, the lifting motor 74 stops, and the wiper motor 15 starts operating. When the wiper motor 15 operates, the inner shaft 72 rotates reciprocatingly by a predetermined angle, and in response, the rotating arm 18 reciprocates angularly between the stop position E and the switching position F in FIG. The rotating arm 18 is kept stationary at position E during elevation.

While the debris removing means 17 makes a reciprocating angular movement while in contact with the mounting surface of the chuck 1, the chuck 1 is reciprocated in directions G and G' in the figure, which is an operation specific to a surface grinder. The reciprocating movement of the chuck 1 itself,
Due to the synergistic effect with the reciprocating angular movement of the debris removing means 17, the mounting surface of the chuck 1 is reliably cleaned in the same way as in each of the embodiments described above.

When the cleaning work is completed, the debris removing means 17 is returned to the stop position E, and the lifting motor 74 is activated again.
The debris removal means 17 is raised. When the rotating arm 18 that is raised together with the debris removing means 17 is raised to the standby position, the actuator of the micro switch 81 is pushed in by the overhang 18a of the rotating arm 18, so the lifting motor 74 is stopped and the debris is removed. Means 1
7 is held at the standby position.

Each of the micro switches 79 and 81 is a mechanical type that turns the contact ON and OFF by pressing the corresponding actuator, but instead of this, a non-contact distance detection sensor equipped with a light emitting element and a light receiving element is used. may also be used.

In each of the embodiments described above, the debris removing means 17 is attached to a predetermined shaft (the motor shaft 15b in the embodiment of FIG. 1, the motor shaft 15b in the embodiment of FIG. 7, and the inner shaft 72 in the embodiment of FIG. 9). Although an example has been given in which the debris removing means 17 performs a reciprocating rotational movement around the respective axes, the structure may be such that the debris removal means 17 simply performs a rotational movement around each of the axes mentioned above.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the cleaner of the present invention, FIG. 2 is a side view showing a part of the cleaner shown in FIG. 4 is a diagram showing a modification of the movable body in the cleaner shown in FIG. 1, FIG. 5 is a sectional view taken along the line - in FIG. 4, and FIG. 4 is a sectional view taken along the line - in FIG. 7, FIG. 7 is a plan view showing another embodiment of the cleaner, and FIG. 8 is a side view of the cleaner in FIG. 7.
FIG. 9 is a plan view showing still another embodiment of the cleaner, and FIG. 10 is a front view of the cleaner shown in FIG. 9. 1: Chack, 1a: Mounting surface, 17: Debris removal means, 7, 37, 46: Movable body (supporting means), 6
3: Bracket (supporting means).

Claims (1)

[Claims] 1 A cleaner for a chuck having a rectangular mounting surface for attaching a workpiece, comprising support means movable in parallel to the mounting surface relative to the mounting surface in the longitudinal direction of the mounting surface; a debris removing means extending to the mounting surface and supported by the supporting means so as to be movable reciprocatingly around an axis perpendicular to the mounting surface while contacting the mounting surface; the chuck and the supporting means; a second driving means for relatively moving the chuck and the support means in the longitudinal direction of the mounting surface and applying the reciprocating angular movement to the debris removing means, An automatic chuck cleaner that can be given multiple reciprocating angular movements during one reciprocating movement in the longitudinal direction of the chuck.